公开(公告)号：US5095752A

公开(公告)日：1992-03-17

申请号：US429546

申请日：1989-10-31

申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84

CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.

公开(公告)号：US4025868A

公开(公告)日：1977-05-24

申请号：US564921

申请日：1975-04-03

申请人： Masayuki Miki ,  Nobukai Miyakawa

发明人： Masayuki Miki ,  Nobukai Miyakawa

IPC分类号： G01P3/489 ,  G01R15/00 ,  G01R23/02

CPC分类号： G01R15/005 ,  G01R23/02

摘要： The proposed device serves to convert the input frequencies into corresponding digital values. In the pulse counting means for counting the pulses from a reference oscillator during each period of the input signal to be processed, the frequency of the reference oscillator is varied in a predetermined manner. It is therefore possible to appropriately change the output digital values in accordance with the change in the input frequency, the change in the output digital value being the set characteristic of each of predetermined ranges of frequencies.

摘要翻译： 所提出的装置用于将输入频率转换成相应的数字值。 在用于在要处理的输入信号的每个周期期间对来自参考振荡器的脉冲进行计数的脉冲计数装置中，参考振荡器的频率以预定的方式变化。 因此，可以根据输入频率的变化来适当地改变输出数字值，输出数字值的变化是每个预定频率范围的设定特性。