公开(公告)号：US20050122515A1

公开(公告)日：2005-06-09

申请号：US10732436

申请日：2003-12-09

申请人： Peter Borden ,  Edward Budiarto

发明人： Peter Borden ,  Edward Budiarto

IPC分类号： G01J4/00 ,  G01N21/55 ,  G01N21/95 ,  G01R31/28 ,  G01R31/308

CPC分类号： G01N21/9501 ,  G01N21/55 ,  G01R31/2884 ,  G01R31/308

摘要： A semiconductor wafer having two regions of different dopant concentration profiles is evaluated by performing two (or more) measurements in the two regions, and comparing measurements from the two regions to obtain a reflectivity change measure indicative of a difference in reflectivity between the two regions. Analyzing the reflectivity change measure yields one or more properties of one of the regions if corresponding properties of the other region are known. For example, if one of the two regions is doped and the other region is undoped (e.g. source/drain and channel regions of a transistor), then a change in reflectivity between the two regions can yield one or more of the following properties in the doped region: (1) doping concentration, (2) junction or profile depth, and (3) abruptness (i.e. slope) of a profile of dopant concentration at the junction. In some embodiments, the just-described measurements in the two regions are performed by use of only one beam of electromagnetic radiation. In several such embodiments, as reflectivity is a function of wavelength of an incident beam, three sets of measurements are made using laser beams of three different wavelengths, to obtain three reflectivity change measures (one at each wavelength). Next, the three reflectivity change measures are used to solve for each of three properties of the doped region, namely junction depth, doping concentration, and profile abruptness.

摘要翻译： 具有不同掺杂剂浓度分布的两个区域的半导体晶片通过在两个区域中执行两个（或多个）测量并且比较来自两个区域的测量值来获得指示两个区域之间的反射率差的反射率变化量度来评估。 如果其他区域的相应属性是已知的，则分析反射率变化测量产生一个区域的一个或多个属性。 例如，如果两个区域中的一个是掺杂的，另一个区域是未掺杂的（例如晶体管的源极/漏极和沟道区），则两个区域之间的反射率的变化可以产生一个或多个以下性质 掺杂区域：（1）掺杂浓度，（2）结或分布深度，以及（3）在该结处掺杂剂浓度分布的突然性（即斜率）。 在一些实施例中，通过仅使用一个电磁辐射束来执行两个区域中刚刚描述的测量。 在几个这样的实施例中，由于反射率是入射光束的波长的函数，所以使用三种不同波长的激光束进行三组测量，以获得三个反射率变化测量（每个波长一个）。 接下来，使用三个反射率变化测量来求解掺杂区域的三个特性中的每一个，即结深度，掺杂浓度和轮廓突然性。

公开(公告)号：US5132548A

公开(公告)日：1992-07-21

申请号：US582718

申请日：1990-09-14

申请人： Peter Borden ,  Mark Nokes ,  Maurits Kain ,  James Stolz

发明人： Peter Borden ,  Mark Nokes ,  Maurits Kain ,  James Stolz

IPC分类号： G01N15/02 ,  G01N21/53

CPC分类号： G01N21/53 ,  G01N15/0205

摘要： A particle sensor which employs the principle that a particle passing through an intense laser beam will scatter light to a photodetector which then generates a measurable signal is provided. The particle sensor uses prisms and a cylindrical lens to compress the laser beam to make it very thin along the axis of particle motion but very wide in the plane perpendicular to particle motion, thereby simultaneously providing high beam intensity for enhanced sensitivity and a large detection area. The optical components of the sensor are mounted on separate sections which allows the optical components to be separately aligned and changed so that the sensor may be easily adapted to various applications.

摘要翻译： 提供了一种粒子传感器，其采用通过强激光束的粒子将光散射到然后产生可测量信号的光电检测器的原理。 粒子传感器使用棱镜和柱面透镜来压缩激光束，使其沿着粒子运动的轴线非常薄，但垂直于粒子运动的平面非常宽，从而同时提供高光束强度，增强灵敏度和大的检测面积 。 传感器的光学部件安装在分开的部分上，这允许光学部件被单独对准和改变，使得传感器可以容易地适应于各种应用。

公开(公告)号：US4804853A

公开(公告)日：1989-02-14

申请号：US41795

申请日：1987-04-23

申请人： Peter Borden ,  Laszlo Szalai ,  Jon Munson

发明人： Peter Borden ,  Laszlo Szalai ,  Jon Munson

IPC分类号： G01N15/02 ,  G01N21/53

CPC分类号： G01N15/0205 ,  G01N2021/4707 ,  G01N21/53

摘要： A compact particle flux monitor is formed with an enclosure through which a laser beam is directed by a lens. An aperture in the enclosure allows free particles which are to be detected to pass through a sensing area at a limiting acceptance angle thereby providing an indication of direction of particle flow. Photodiodes mounted at the sensing area detect the particles, including relatively small particles, by means of the high intensity beam portion at the region of the focal point of the light beam. The response region along the diverging beam is relatively long so that the response as a function of particle size is above background noise level.

摘要翻译： 紧凑的粒子通量监视器形成有外壳，激光束通过该外壳由透镜引导。 外壳中的孔允许被检测的游离颗粒以限制的接受角度通过感测区域，从而提供颗粒流动方向的指示。 安装在感测区域的光电二极管通过在光束焦点的区域处的高强度光束部分来检测包括相对小的颗粒的颗粒。 沿着发散光束的响应区域相对较长，使得作为粒子尺寸的函数的响应高于背景噪声水平。

公开(公告)号：US4739177A

公开(公告)日：1988-04-19

申请号：US907776

申请日：1986-09-16

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： G01N15/02 ,  G01N21/51 ,  G01N21/53 ,  G01N15/06 ,  G01N15/07 ,  G01N21/49

CPC分类号： G01N21/53 ,  G01N2015/0238 ,  G01N2021/516

摘要： A particle detector includes a laser, a beam shaping lens, and a pair of mirrors which reflect the shaped laser beam back and forth between the mirrors a selected number of times in order to create a sheet of light or light net between the mirrors. The path of the beam is terminated by a beam stop which contains a photodiode to monitor beam intensity and thereby system alignment. Light scattered by a particle falling through the sheet of light is gathered and transmitted to a photodiode. A peak detector provides a measure of the peak intensity of light scattered by such a particle to a microprocessor, which counts the number of particles falling through the light net in a selected time interval. The microprocessor also uses the peak intensity to estimate the size of the particle.

摘要翻译： 粒子检测器包括激光器，光束整形透镜和一对反射镜，其在反射镜之间来回反射成形激光束选定的次数，以便在反射镜之间产生一张光或光网。 光束的路径由包含用于监测光束强度并由此进行系统对准的光电二极管的光束停止端接。 被落在薄片上的颗粒散射的光被聚集并传输到光电二极管。 峰值检测器提供了这样的颗粒散射到微处理器的光的峰值强度的量度，该微处理器对在选定时间间隔内通过光网落下的颗粒数进行计数。 微处理器还使用峰值强度来估计粒子的大小。