公开(公告)号：US07455172B2

公开(公告)日：2008-11-25

申请号：US11495052

申请日：2006-07-28

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC分类号： B65G17/20

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

公开(公告)号：US20080187419A1

公开(公告)日：2008-08-07

申请号：US12099780

申请日：2008-04-08

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amit Puri

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amit Puri

IPC分类号： H01L21/67

CPC分类号： H01L21/67769 ,  H01L21/67253 ,  H01L21/67276

摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。 第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。 提供了许多其他方面。

公开(公告)号：US07293642B2

公开(公告)日：2007-11-13

申请号：US11476994

申请日：2006-06-27

申请人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

摘要翻译： 根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。 第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。 该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。 还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

公开(公告)号：US20070144439A1

公开(公告)日：2007-06-28

申请号：US11530297

申请日：2006-09-08

申请人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T. Weaver ,  Helen R. Armer

发明人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T. Weaver ,  Helen R. Armer

IPC分类号： B65H1/00 ,  C23F1/00 ,  H01L21/306 ,  C23C16/00

CPC分类号： G03F7/70991 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67745

摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.

摘要翻译： 本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片 处理历史（或晶圆历史），减少占地面积。 在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案 感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

公开(公告)号：US07234584B2

公开(公告)日：2007-06-26

申请号：US10650310

申请日：2003-08-28

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67276 ,  H01L21/67769 ,  H01L21/67778

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07230702B2

公开(公告)日：2007-06-12

申请号：US10987950

申请日：2004-11-12

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amitabh Puri

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amitabh Puri

IPC分类号： G01B11/00 ,  H01L21/677 ,  B65B21/02

CPC分类号： H01L21/67775 ,  H01L21/67769

摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.

摘要翻译： 衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件， 基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。 可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。 用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。 端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。 基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。

公开(公告)号：US07077264B2

公开(公告)日：2006-07-18

申请号：US10764982

申请日：2004-01-26

申请人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

公开(公告)号：US07074000B2

公开(公告)日：2006-07-11

申请号：US10335225

申请日：2002-12-31

申请人： Eric A. Englhardt

发明人： Eric A. Englhardt

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A controller is coupled to the docking mechanism and the door opener and is programmed to cause the pod to move from the docked position to the undocked position, and then to cause the pod to move back to the docked position so that it can be determined whether the pod door is properly closed prior to completing the removal of the pod from the pod loading station.

摘要翻译： 荚果装载站包括适于在对接位置和离开位置之间移动荚的对接机构和适于从荚打开和打开荚门的开门器。 控制器耦合到对接机构和开门器，并且被编程为使得容器从对接的位置移动到脱离的位置，然后使该盒子移回到对接的位置，从而可以确定是否 在完成从荚装载站移除吊舱之前，荚门正确关闭。

公开(公告)号：US06955197B2

公开(公告)日：2005-10-18

申请号：US10650311

申请日：2003-08-28

申请人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65B1/04 ,  B65H1/00 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67353 ,  H01L21/67373 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。 隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。 隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。 提供了许多其他方面。