公开(公告)号：US07558683B2

公开(公告)日：2009-07-07

申请号：US11976015

申请日：2007-10-19

申请人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

发明人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC分类号： G01B5/28 ,  G06F19/00

CPC分类号： H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

摘要： Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

公开(公告)号：US20080304055A1

公开(公告)日：2008-12-11

申请号：US12109548

申请日：2008-04-25

申请人： Yoshimasa OSHIMA ,  Toshiyuki Nakao ,  Shigeru Matsui

发明人： Yoshimasa OSHIMA ,  Toshiyuki Nakao ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N2021/4716

摘要： A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective detection signals to prevent an error failing to detect an anisotropic defect.

摘要翻译： 表面缺陷检查装置被构造成添加多方向检测的散射光的检测信号以检测微小的缺陷，并且分别处理各个检测信号以防止错误检测各向异性缺陷。

公开(公告)号：US20080002194A1

公开(公告)日：2008-01-03

申请号：US11819712

申请日：2007-06-28

申请人： Shigeru Matsui

发明人： Shigeru Matsui

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94

摘要： In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.

摘要翻译： 在常规污染物颗粒/缺陷检查方法中，如果照明光束的照度被保持在不对样品造成热损伤的预定上限值以下，则检测灵敏度和检查速度与 彼此难以提高检测灵敏度和检测速度之一而不牺牲另一方或同时改善两者。 本发明提供了一种改进的光学检查方法和改进的光学检查装置，其中使用脉冲激光器作为光源，并且激光束通量被分割成多个激光束，其被给予不同的时间延迟以形成 多个照明点。 通过使用每个照明点的发光开始定时信号来隔离并检测来自每个照明点的散射光信号。

公开(公告)号：US07305314B2

公开(公告)日：2007-12-04

申请号：US11302145

申请日：2005-12-14

申请人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

发明人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC分类号： G06F19/00

CPC分类号： H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

摘要： Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

摘要翻译： 基于检查装置检测到的多个缺陷的位置坐标和属性，选择由观察装置容易检测到的缺陷。 利用这些选择的缺陷作为指标，观察装置检测并观察缺陷。 此外，创建用于表示两个装置之间的缺陷位置坐标中的相关关系的坐标变换公式，观察装置转换缺陷位置坐标以观察缺陷。

公开(公告)号：US20070170063A1

公开(公告)日：2007-07-26

申请号：US11654683

申请日：2007-01-18

申请人： Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

发明人： Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

IPC分类号： G01N27/00

CPC分类号： G01N27/44721

摘要： An object of the present invention is to provide a capillary electrophoresis apparatus in which simultaneity can be ensured between sensitivity and data acquisition to decrease a pull-up signal while spectral data acquisition is eliminated in each capillary exchange. The invention relates to a capillary electrophoresis apparatus characterized in that a multi-bandpass filter is provided in an optical detection system. In one aspect of the invention, a signal detection area of a two-dimensional detector is divided into plural regions corresponding to wavelength transmission regions of the multi-bandpass filter. An integrated value of the fluorescence spectrum signal is determined in the region including a fluorescence spectrum peak of an analysis sample in the plural regions. The analysis is performed with the integrated value.

摘要翻译： 本发明的目的是提供一种毛细管电泳装置，其中在每个毛细管交换中消除光谱数据采集时，可以在灵敏度和数据采集之间确保同时性，以减小上拉信号。 本发明涉及一种毛细管电泳装置，其特征在于在光学检测系统中提供多带通滤波器。 在本发明的一个方面，二维检测器的信号检测区域被分成与多带通滤波器的波长透射区域对应的多个区域。 在包括多个区域中的分析样品的荧光光谱峰的区域中确定荧光光谱信号的积分值。 分析用积分值进行。

公开(公告)号：US06256092B1

公开(公告)日：2001-07-03

申请号：US09198093

申请日：1998-11-23

申请人： Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Yoshitaka Kodama ,  Hitoshi Komuro ,  Kazuo Takeda

发明人： Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Yoshitaka Kodama ,  Hitoshi Komuro ,  Kazuo Takeda

IPC分类号： G01N2188

CPC分类号： G01N21/9505 ,  G01N21/9501

摘要： A defect inspection apparatus for detecting defects existing on a surface of a semiconductor sample and/or inside the sample based on light information from the sample obtained by irradiating a light beam onto the sample is provided, which comprises a detecting means for detecting positions in the depth direction where the defects exist and distribution of the defects based on the light information; a setting means for setting a position in the depth direction where defects exist; and a means for displaying the distribution of the defects obtained by the detecting means, the displaying means displaying the distribution of the defects corresponding to the position in the depth direction set by the setting means.

摘要翻译： 一种缺陷检查装置，用于根据来自通过将光束照射在样品上的样品的光信息，检测存在于半导体样品表面和/或样品内部的缺陷，该检测装置包括检测装置， 存在缺陷的深度方向和基于光信息的缺陷分布; 用于设置存在缺陷的深度方向上的位置的设定装置; 以及用于显示由检测装置获得的缺陷的分布的装置，显示装置显示与由设置装置设置的深度方向上的位置相对应的缺陷的分布。

公开(公告)号：US5892581A

公开(公告)日：1999-04-06

申请号：US936242

申请日：1997-09-24

申请人： Toshihiko Sakaide ,  Masahito Ito ,  Yoshio Fujii ,  Shigeru Matsui

发明人： Toshihiko Sakaide ,  Masahito Ito ,  Yoshio Fujii ,  Shigeru Matsui

IPC分类号： G01N21/27 ,  G01N30/74 ,  G01N21/33

CPC分类号： G01N21/274 ,  G01N30/74

摘要： In order to suppress base line drift due to change in a light source and to start analysis with a short waiting time so as to improve quantitative accuracy of analysis, a detected signal in a measurement wavelength and a detected signal in a reference wavelength are measured at each of arbitrary light intensity points by varying light intensity of a light source, and the corresponding relationship between the wavelengths is stored. An incident light intensity of the measurement wavelength is estimated from a detected signal in the reference wavelength based on the stored data.

摘要翻译： 为了抑制由于光源的变化引起的基线漂移并且以等待时间短的开始分析，以提高分析的定量精度，测量测量波长中的检测信号和参考波长的检测信号在 通过改变光源的光强度的任意光强度点中的每一个，并且存储波长之间的对应关系。 基于存储的数据，从参考波长的检测信号估计测量波长的入射光强度。

公开(公告)号：US4733188A

公开(公告)日：1988-03-22

申请号：US850113

申请日：1986-04-10

申请人： Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno

发明人： Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno

IPC分类号： A61B10/00 ,  A61B5/055 ,  G01R33/48 ,  G01R33/561 ,  G01R33/20

CPC分类号： G01R33/5615 ,  G01R33/5616

摘要： In imaging methods represented by the echo-planar method, i.e., in a method including a step of measuring the spin echos while applying a fixed gradient magnetic field to an object and applying a gradient field G.sub.Y periodically inverted in sense to the object and a step of obtaining the spin distribution image in the spatial domain by applying two-dimensional Fourier transform to the measured data, measurement is repeated a plurality of times while altering the phase of the applied waveform of G.sub.X, and the spin density image is derived by applying two-dimensional Fourier transform to a plurality of sets of data groups thus obtained.

摘要翻译： 在由回波平面方法表示的成像方法中，即在包括测量自旋回波的步骤的方法中，同时向对象施加固定的梯度磁场，并且向对象施加周期性反转的渐变场GY，并且步骤 通过对测量数据应用二维傅里叶变换获得空间域中的自旋分布图像，在改变GX的施加波形的相位的同时重复测量多次，并且通过应用两个方法导出自旋密度图像 维数傅里叶变换到由此获得的多组数据组。

公开(公告)号：US4727325A

公开(公告)日：1988-02-23

申请号：US919767

申请日：1986-10-16

申请人： Shigeru Matsui ,  Kensuke Sekihara ,  Hideki Kohno

发明人： Shigeru Matsui ,  Kensuke Sekihara ,  Hideki Kohno

IPC分类号： G01R33/54 ,  G01R33/561 ,  G01R33/20

CPC分类号： G01R33/54 ,  G01R33/5615 ,  G01R33/5616

摘要： An NMR imaging method using a rotating field gradient is disclosed in which transverse magnetization is prepared in a portion of an object to be inspected, by the 90.degree.-180.degree. RF pulse excitation, a rotating field gradient is generated to perform a sampling operation for an output signal in a state that the position of signal in a phase space is revolved, the intensity or rotational speed of the rotating field gradient is varied stepwise or continuously to obtain data arranged on concentric circles or a spiral in the phase space, and the data thus obtained undergoes Fourier transformation in each of a plurality of radial directions or two-dimensional Fourier transformation, to form an image of spin distribution.

摘要翻译： 公开了使用旋转磁场梯度的NMR成像方法，其中通过90°-180°RF脉冲激励在待测物体的一部分中制备横向磁化，产生旋转场梯度以执行采样操作 在相位空间中的信号的位置旋转的状态下的输出信号，旋转场梯度的强度或旋转速度逐步或连续地变化，以获得布置在相空间中的同心圆或螺旋上的数据，并且 由此获得的数据在多个径向方向或二维傅里叶变换中进行傅里叶变换，以形成自旋分布的图像。

公开(公告)号：US4716369A

公开(公告)日：1987-12-29

申请号：US746663

申请日：1985-06-20

申请人： Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno ,  Etsuji Yamamoto ,  Hidemi Shiono

发明人： Kensuke Sekihara ,  Shigeru Matsui ,  Hideki Kohno ,  Etsuji Yamamoto ,  Hidemi Shiono

IPC分类号： G01R33/485 ,  G01R33/561 ,  G01R33/20

CPC分类号： G01R33/485 ,  G01R33/5615 ,  G01R33/5616

摘要： The present invention is an imaging method using three-dimensional NMR to which an echo-planar method is applied. After excitation of nuclear spins, the gradient magnetic field Gx for phase-encoding is applied and there is repeated a sequence of measuring and obtaining an echo train of spin-echoes with a constant gradient magnetic field Gx and a periodically-inverted gradient magnetic field Gy, as varying the amount of encoding, so as to obtain the three-dimensional imaging by the Fourier-conversion. Moreover, after the selective excitation of spins within an X-Y surface, a 180.degree. radio frequency pulse is applied. As varying the time difference .tau..sub..epsilon. between the interval from the excitation until the application of the 180.degree. radio frequency pulse and the interval from the application thereof until a peak of a first echo of an echo train, three-dimensional imaging is carried out with a chemical shift axis as one axis by repeating the sequence and accomplishing Fourier-conversion with .tau..sub..epsilon. as a numerical variable.

摘要翻译： 本发明是使用采用回波平面法的三维NMR的成像方法。 在激励核自旋之后，施加用于相位编码的梯度磁场Gx，并且重复测量并获得具有恒定梯度磁场Gx和周期性反转梯度磁场Gy的自旋回波回波序列的序列 ，因为改变编码量，从而通过傅里叶变换获得三维成像。 此外，在X-Y表面中的自旋选择性激发之后，施加180°射频脉冲。 随着从激励到施加180°射频脉冲的间隔与从应用到应用的间隔直到回波列的第一回波的峰值之间的时间差τεε改变，三维成像是 化学位移轴作为一个轴，通过重复该序列，并以tauε作为数值变量进行傅里叶变换。