LIQUID METAL MEMS SWITCH
    53.
    发明申请

    公开(公告)号:US20200211798A1

    公开(公告)日:2020-07-02

    申请号:US16234243

    申请日:2018-12-27

    Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency the droplet can spread allowing at least two conductors to be coupled.

    Hermetically sealed package for mm-wave molecular spectroscopy cell

    公开(公告)号:US10364144B2

    公开(公告)日:2019-07-30

    申请号:US15815849

    申请日:2017-11-17

    Abstract: Disclosed examples provide gas cells and a method of fabricating a gas cell, including forming a cavity in a first substrate, forming a first conductive material on a sidewall of the cavity, forming a glass layer on the first conductive material, forming a second conductive material on a bottom side of a second substrate, etching the second conductive material to form apertures through the second conductive material, forming conductive coupling structures on a top side of the second substrate, and bonding a portion of the bottom side of the second substrate to a portion of the first side of the first substrate to seal the cavity.

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