Method of manufacturing an aluminum nitride powder
    51.
    发明授权
    Method of manufacturing an aluminum nitride powder 有权
    氮化铝粉末的制造方法

    公开(公告)号:US07763226B2

    公开(公告)日:2010-07-27

    申请号:US12463480

    申请日:2009-05-11

    IPC分类号: C01B21/072

    摘要: An aluminum nitride-based ceramic sintered body is provided, which is manufactured by sintering an aluminum nitride powder comprising aluminum nitride as a main component, carbon in an amount of 0.1 wt % or more to 1.0 wt % or less, and containing oxygen in an amount that is not greater than 0.7 wt %, wherein carbon and oxygen are dissolved in grains of the aluminum nitride powder. The a-axis length of the lattice constant of the aluminum nitride is in a range of 3.1120 Å or more to 3.1200 Å or less, and the a c-axis length of the lattice constant is in a range of 4.9810 Å or more to 4.9900 Å or less. The volume resistivity of the aluminum nitride-based ceramic sintered body at 500° C. is 109 Ω·cm or more.

    摘要翻译: 提供了一种氮化铝系陶瓷烧结体,其通过以包含氮化铝为主要成分的氮化铝粉末以0.1重量%以上至1.0重量%以下的量烧结而形成, 量不大于0.7重量%,其中碳和氧溶解在氮化铝粉末的颗粒中。 氮化铝的晶格常数的a轴长度在3.1120以上至3.1200以下的范围内,晶格常数的c轴长度在4.98以上至4.9900以上的范围内 Å或更少。 氮化铝系陶瓷烧结体在500℃下的体积电阻率为109Ω·cm·cm以上。

    FILM DEPOSITION APPARATUS AND METHOD
    52.
    发明申请
    FILM DEPOSITION APPARATUS AND METHOD 有权
    电影沉积装置和方法

    公开(公告)号:US20100015359A1

    公开(公告)日:2010-01-21

    申请号:US12521179

    申请日:2007-11-29

    IPC分类号: C23C16/46 C23C16/00 C23C16/52

    CPC分类号: H05B6/105 C23C16/46 H05B6/06

    摘要: A film deposition apparatus which comprises: a processing chamber having a space inside which serves as a vacuum space to which a film deposition gas is supplied; a substrate supporting unit which is disposed in the vacuum space and supports a substrate; a coil which inductively heats the substrate supporting unit to thereby form a film from the film deposition gas on the substrate and which has been divided into regions; and a coil control unit which controls the coil region by region.

    摘要翻译: 一种成膜装置,包括:处理室,其内部具有用作提供成膜气体的真空空间的空间; 基板支撑单元,其设置在真空空间中并支撑基板; 线圈,其感应加热所述基板支撑单元,从而从所述基板上的所述成膜气体形成膜,并且被划分为区域; 以及线圈控制单元,其逐个区域地控制线圈。

    Aluminum nitride materials and members used for the production of semiconductors
    53.
    发明授权
    Aluminum nitride materials and members used for the production of semiconductors 有权
    氮化铝材料和用于半导体生产的部件

    公开(公告)号:US06919287B2

    公开(公告)日:2005-07-19

    申请号:US10417962

    申请日:2003-04-17

    CPC分类号: C04B35/581

    摘要: An aluminum nitride material having a high thermal conductivity and reduced room temperature volume resistivity is provided. The aluminum nitride material has an interconnected intergranular phase that functions as an electrically conductive phase. The content of the conductive phase is not higher than 20 percent, calculated according to the following formula based on an X-ray diffraction profile: Content of the conductive phase (%)=(Integrated strength of the strongest peak of the conductive phase/Integrated strength of the strongest peak of aluminum nitride phase)×100. The aluminum nitride material has an electric current response index in a range of 0.9 to 1.1, defined according to the following formula: Electric current response index=(Electric current Aat 5 seconds after a voltage is applied/Electric current at 60 seconds after a voltage is applied).

    摘要翻译: 提供具有高导热性和降低室温体积电阻率的氮化铝材料。 氮化铝材料具有互相作用的导电相的晶间相。 导电相的含量不高于20%,基于X射线衍射曲线,根据下式计算:导电相的含量(%)=(导电相/集成电路的最强峰的集成强度 强度最强的氮化铝相峰)×100。 氮化铝材料的电流响应指数在0.9至1.1的范围内,根据下式定义:电流响应指数=(施加电压5秒后的电流/电压后60秒的电流 被申请;被应用)。

    Image reproducing apparatus and image reproducing method
    56.
    发明授权
    Image reproducing apparatus and image reproducing method 失效
    图像再现装置和图像再现方法

    公开(公告)号:US06798972B1

    公开(公告)日:2004-09-28

    申请号:US09534695

    申请日:2000-03-24

    IPC分类号: H04N591

    摘要: There is provided an image reproducing apparatus and an image reproducing method which allow reproducing speed to be shifted instantly when a change of the reproducing speed is requested in a multi-channel AV (Audio Visual) server. When a request to reproduce an image is made, the image reproducing apparatus reads image data of the part corresponding to the requested reproducing speed out of the HDDs to store in a temporary storage section. Then, an image output I/F reads the image data stored in the temporary storage section and structures a reproduced image by using the image data. In this case, a controller section controls a pattern in reading the divisional data by the image output I/F and structures a reproduced image by means of various reproducing speeds by this reading pattern.

    摘要翻译: 提供一种图像再现装置和图像再现方法,当在多声道AV(音频视觉)服务器中请求再现速度的改变时,允许再现速度立即移动。 当进行再现图像的请求时,图像再现装置从HDD中读出与所请求的再现速度对应的部分的图像数据,以存储在临时存储部分中。 然后,图像输出I / F读取存储在临时存储部分中的图像数据,并通过使用图像数据构造再现的图像。 在这种情况下,控制器部分通过图像输出I / F控制读取分割数据的图案,并且通过该读取模式利用各种再现速度构造再现图像。

    Video data reproducing device and video data reproducing method
    57.
    发明授权
    Video data reproducing device and video data reproducing method 失效
    视频数据再现装置和视频数据再现方法

    公开(公告)号:US06728472B1

    公开(公告)日:2004-04-27

    申请号:US09423175

    申请日:2000-01-18

    IPC分类号: H04N591

    摘要: In a video data reproducing apparatus adapted for reading out data including video data stored on plural non-linear accessible recording media by time slots allocated thereto to output those data, when the video data which has been read out from the recording medium is outputted to the external as n (n>1) times speed video data, a processing is carried out by a reproduction picture dividing section 11 such that when n is integer, output image 1 frame is divided by n, while when n is not integer, output image 1 frame is divided by m (m is integral part of n: n=m. . . . ), and such a processing is carried out by a reproduction image generating section 13 to allocate n frames or m frames of the video data which has been read out from the recording medium to the output image 1 frame divided by n or divided by m to generate reproduction image.

    摘要翻译: 在适于通过分配给多个非线性可访问记录介质的时隙读出包含存储在多个非线性可访问记录介质上的视频数据以输出这些数据的视频数据再现装置中,当从记录介质读出的视频数据被输出到 外部为n(n> 1)倍的速度视频数据时,由再生图像分割部11进行处理,使得当n为整数时,输出图像1的帧除以n,而当n不是整数时,输出图像 1帧被除以m(m是n:n = m ...的整数部分),并且这样的处理由再现图像生成部13执行,以分配n帧或m帧的视频数据, 从记录介质读出到输出图像1帧除以n或除以m,以产生再现图像。

    Data output device and data output method
    59.
    发明授权
    Data output device and data output method 失效
    数据输出设备和数据输出方式

    公开(公告)号:US06279055B1

    公开(公告)日:2001-08-21

    申请号:US09251115

    申请日:1999-02-16

    IPC分类号: G06F1300

    摘要: A data input/output means comprises memories, each having two banks for storing a volume of data good for predetermined cycled period in an own time slot allocated to it and a control means accesses a recording medium in an own time slot to read out a volume of data for the first predetermined cycle period and store it in the first bank of the date input/output means and also read out a volume of data for the next predetermined cycle period on the way of reading out said data for the first predetermined cycle period and store it in the second bank of said data input/output means before starting the data output from the first bank after the elapse of a predetermined period of time, the switching from said first bank to said second bank being so controlled as to take place at a predetermined timing.

    摘要翻译: 数据输入/输出装置包括存储器,每个存储器具有两个存储体,用于在分配给它的自己的时隙中存储对于预定循环周期有利的数据量,并且控制装置以自己的时隙访问记录介质以读出卷 的数据存储在第一预定周期周期中并将其存储在日期输入/输出装置的第一组中,并且在读出第一预定周期周期中的所述数据的途中读出下一预定周期周期的数据量 并且在经过预定时间段开始从第一组输出的数据之前将其存储在所述数据输入/输出装置的第二组中,从所述第一存储体到所述第二存储体的转换被控制为发生 在预定定时。

    Film deposition apparatus and method
    60.
    发明授权
    Film deposition apparatus and method 有权
    薄膜沉积装置及方法

    公开(公告)号:US08440270B2

    公开(公告)日:2013-05-14

    申请号:US12521179

    申请日:2007-11-29

    CPC分类号: H05B6/105 C23C16/46 H05B6/06

    摘要: A film deposition apparatus which comprises: a processing chamber having a space inside which serves as a vacuum space to which a film deposition gas is supplied; a substrate supporting unit which is disposed in the vacuum space and supports a substrate; a coil which inductively heats the substrate supporting unit to thereby form a film from the film deposition gas on the substrate and which has been divided into regions; and a coil control unit which controls the coil region by region.

    摘要翻译: 一种成膜装置,包括:处理室,其内部具有用作提供成膜气体的真空空间的空间; 基板支撑单元,其设置在真空空间中并支撑基板; 线圈,其感应加热所述基板支撑单元,从而从所述基板上的所述成膜气体形成膜,并且被划分为区域; 以及线圈控制单元,其逐个区域地控制线圈。