公开(公告)号：US06884742B2

公开(公告)日：2005-04-26

申请号：US10306678

申请日：2002-11-26

申请人： Yuji Katsuda ,  Jun Yoshikawa

发明人： Yuji Katsuda ,  Jun Yoshikawa

IPC分类号： C04B35/581 ,  C04B35/645 ,  H01L21/02 ,  H01L21/31 ,  C04B35/582 ,  C04B35/5835

CPC分类号： C04B35/645 ,  C04B35/581 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3804 ,  C04B2235/3817 ,  C04B2235/3821 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/422 ,  C04B2235/761 ,  C04B2235/77 ,  C04B2235/78 ,  C04B2235/80 ,  C04B2235/85 ,  C04B2235/96 ,  C04B2235/9607

摘要： An aluminum nitride ceramic is provided, containing boron atoms in an amount of not lower than 1.0 weight percent and carbon atoms in an amount of not lower than 0.3 weight percent and having a volume resistivity at room temperature of not higher than 1×1012 Ω·cm. The aluminum ceramic comprises aluminum nitride and an intergranular phase mainly consisting of boron nitride constituting a conductive path. Such a ceramic may be obtained by holding a mixture containing at least aluminum nitride and boron carbide at a holding temperature in a range of 1400° C. to 1800° C. and then sintering the mixture at a maximum temperature that is higher than the holding temperature.

摘要翻译： 提供一种氮化铝陶瓷，其含有不低于1.0重量％的硼原子和不低于0.3重量％的量的碳原子，并且在室温下体积电阻率不高于1×10 12 Omega.cm。 铝陶瓷包括氮化铝和主要由构成导电路径的氮化硼组成的晶间相。 这种陶瓷可以通过在1400℃至1800℃的保持温度下保持至少含有氮化铝和碳化硼的混合物来获得，然后在高于保持温度的最高温度下烧结混合物 温度。

公开(公告)号：US06919287B2

公开(公告)日：2005-07-19

申请号：US10417962

申请日：2003-04-17

申请人： Naomi Teratani ,  Jun Yoshikawa ,  Yuji Katsuda

发明人： Naomi Teratani ,  Jun Yoshikawa ,  Yuji Katsuda

IPC分类号： C04B35/581 ,  H01L21/683 ,  C04B35/582

CPC分类号： C04B35/581

摘要： An aluminum nitride material having a high thermal conductivity and reduced room temperature volume resistivity is provided. The aluminum nitride material has an interconnected intergranular phase that functions as an electrically conductive phase. The content of the conductive phase is not higher than 20 percent, calculated according to the following formula based on an X-ray diffraction profile: Content of the conductive phase (%)=(Integrated strength of the strongest peak of the conductive phase/Integrated strength of the strongest peak of aluminum nitride phase)×100. The aluminum nitride material has an electric current response index in a range of 0.9 to 1.1, defined according to the following formula: Electric current response index=(Electric current Aat 5 seconds after a voltage is applied/Electric current at 60 seconds after a voltage is applied).

摘要翻译： 提供具有高导热性和降低室温体积电阻率的氮化铝材料。 氮化铝材料具有互相作用的导电相的晶间相。 导电相的含量不高于20％，基于X射线衍射曲线，根据下式计算：导电相的含量（％）=（导电相/集成电路的最强峰的集成强度 强度最强的氮化铝相峰）×100。 氮化铝材料的电流响应指数在0.9至1.1的范围内，根据下式定义：电流响应指数=（施加电压5秒后的电流/电压后60秒的电流 被申请;被应用）。

公开(公告)号：US06919286B2

公开(公告)日：2005-07-19

申请号：US10308221

申请日：2002-11-26

申请人： Jun Yoshikawa ,  Yuji Katsuda

发明人： Jun Yoshikawa ,  Yuji Katsuda

IPC分类号： C04B35/581 ,  C04B35/00 ,  C04B35/58 ,  C04B35/582 ,  C04B35/5835 ,  C04B35/645 ,  H01L21/00 ,  H01L21/02 ,  H01L21/68 ,  H01L21/683

CPC分类号： C04B35/581 ,  C04B35/64 ,  C04B35/645 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3804 ,  C04B2235/3821 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3895 ,  C04B2235/604 ,  C04B2235/661 ,  C04B2235/723 ,  C04B2235/761 ,  C04B2235/77 ,  C04B2235/80 ,  C04B2235/85 ,  C04B2235/96 ,  C04B2235/9607

摘要： An aluminum nitride ceramic is provided, including 0.5 to 10 weight percent of boron atoms and 0.1 to 2.5 weight percent of carbon atoms. The ceramic has a room temperature volume resistivity not lower than 1×1014Ω·cm, and a volume resistivity at 500° C. of not lower than 1×108Ω·cm. An a-axis lattice constant of the aluminum nitride in the ceramic is not shorter than 3.112 angstrom and a c-axis lattice constant of the aluminum nitride is not shorter than 4.980 angstrom.

摘要翻译： 提供了一种氮化铝陶瓷，其包括0.5-10重量％的硼原子和0.1-2.5重量％的碳原子。 陶瓷具有不低于1×10 4Ω·cm的室温体积电阻率，并且500℃下的体积电阻率不低于1×10 8Ω·cm。 陶瓷中氮化铝的a轴晶格常数不低于3.112埃，氮化铝的c轴晶格常数不低于4.980埃。

公开(公告)号：US06607836B2

公开(公告)日：2003-08-19

申请号：US09982484

申请日：2001-10-18

申请人： Yuji Katsuda ,  Jun Yoshikawa ,  Masaaki Masuda ,  Chikashi Ihara

发明人： Yuji Katsuda ,  Jun Yoshikawa ,  Masaaki Masuda ,  Chikashi Ihara

IPC分类号： C04B35581

CPC分类号： H01L21/6833 ,  C04B35/581 ,  Y10T428/24917

摘要： A material with a low volume resistivity at room temperature composed of an aluminum nitride sintered body is provided. The sintered body contains samarium in a converted content calculated as samarium oxide of not lower than 0.04 mole percent. The sintered body contains an aluminum nitride phase and a samarium-aluminum complex oxide phase. The samarium-aluminum complex oxide phase forms intergranular layers with a low resistivity along the intergranular phase between aluminum nitride grains.

摘要翻译： 提供由氮化铝烧结体构成的室温体积电阻率低的材料。 烧结体含有以不低于0.04摩尔％的氧化钐计算的转化含量的钐。 烧结体包含氮化铝相和钐铝复合氧化物相。 钐铝复合氧化物相沿着氮化铝晶粒之间的晶间相形成具有低电阻率的晶间层。

公开(公告)号：US09277637B2

公开(公告)日：2016-03-01

申请号：US13885708

申请日：2011-11-16

申请人： Toshihisa Nozawa ,  Caizhong Tian ,  Masaru Sasaki ,  Naoki Mihara ,  Naoki Matsumoto ,  Kazuki Moyama ,  Jun Yoshikawa

发明人： Toshihisa Nozawa ,  Caizhong Tian ,  Masaru Sasaki ,  Naoki Mihara ,  Naoki Matsumoto ,  Kazuki Moyama ,  Jun Yoshikawa

IPC分类号： H01L21/306 ,  H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32211 ,  H01J37/3244

摘要： An apparatus for plasma treatment contains a process vessel provided with a mounting table for mounting a substrate, a first gas supplying unit configured to supply a first gas into the process vessel, a first plasma generating unit configured to convert at least a part of the first gas to a first plasma, a second gas supplying unit configured to supply a second gas into the process vessel, and a second plasma generating unit configured to convert at least a part of the second gas to a second plasma. A height of ea an inlet of the second gas from the mounting table is lower than a height of an inlet of the first gas from the mounting table.

摘要翻译： 一种用于等离子体处理的装置，包括设置有用于安装基板的安装台的处理容器，构造成将第一气体供应到处理容器中的第一气体供给单元，第一等离子体产生单元，其被配置为将第一 第二气体供给单元，被配置为将第二气体供应到处理容器中;第二等离子体产生单元，被配置为将至少一部分第二气体转化为第二等离子体。 来自安装台的第二气体的入口的高度低于来自安装台的第一气体的入口的高度。

公开(公告)号：US08709662B2

公开(公告)日：2014-04-29

申请号：US13112029

申请日：2011-05-20

申请人： Ryuta Sugiura ,  Tsutomu Nanataki ,  Jun Yoshikawa

发明人： Ryuta Sugiura ,  Tsutomu Nanataki ,  Jun Yoshikawa

IPC分类号： H01M4/13 ,  H01M8/06 ,  H01L35/34 ,  H01M4/88

CPC分类号： H01M4/505 ,  C01G31/006 ,  C01G31/02 ,  C01P2002/50 ,  C01P2006/40 ,  H01M4/0471 ,  H01M4/1391 ,  H01M4/525 ,  H01M10/052 ,  H01M2004/021

摘要： The method for producing a cathode active material for a lithium secondary battery is characterized by including (1) a forming step of forming a sheet-form compact containing, as raw substances, a lithium compound serving as a first ingredient, a compound of a transition metal other than lithium serving as a second ingredient, and at least one of boron oxide and vanadium oxide serving as a third ingredient; and (2) a firing step of firing the compact at 700 to 1,300° C.

摘要翻译： 制造锂二次电池用正极活性物质的方法的特征在于，包括（1）形成作为原料的作为原料的作为第一成分的锂化合物，过渡化合物的片状成形体的成形工序 作为第二成分的锂以外的金属和作为第三成分的氧化硼和氧化钒中的至少一种; 和（2）在700〜1300℃下烧成该烧结体的烧成工序

公开(公告)号：USD697038S1

公开(公告)日：2014-01-07

申请号：US29416085

申请日：2012-03-19

申请人： Naoki Matsumoto ,  Jun Yoshikawa

设计人： Naoki Matsumoto ,  Jun Yoshikawa

公开(公告)号：US08444948B2

公开(公告)日：2013-05-21

申请号：US13204538

申请日：2011-08-05

申请人： Katsuki Ide ,  Tetsuya Mine ,  Jun Yoshikawa ,  Tsuyoshi Noma ,  Masao Kon ,  Kazutaka Kojo

发明人： Katsuki Ide ,  Tetsuya Mine ,  Jun Yoshikawa ,  Tsuyoshi Noma ,  Masao Kon ,  Kazutaka Kojo

IPC分类号： D01C5/00

CPC分类号： D01F9/133 ,  B82Y30/00 ,  B82Y40/00 ,  D01F9/127

摘要： According to one embodiment, there is provided a graphite nano-carbon fiber provided by using an apparatus having a reactor capable of keeping a reducing atmosphere inside thereof, a metal substrate arranged as a catalyst in the reactor, a heater heating the metal substrate, a pyrolysis gas source supplying pyrolysis gas obtained by thermally decomposing a wood material in a reducing atmosphere to the reactor, a scraper scraping carbon fibers produced on the metal substrate, a recovery container recovering the scraped carbon fibers, and an exhaust pump discharging exhaust gas from the reactor. The carbon fibers are linear carbon fibers with a diameter of 25 to 250 nm formed with layers of graphenes stacked in a longitudinal direction.

摘要翻译： 根据一个实施方案，提供一种石墨纳米碳纤维，其通过使用具有能够保持其内部还原气氛的反应器的装置，在反应器中作为催化剂排列的金属基材，加热金属基材的加热器， 通过将还原性气氛中的木质材料热分解成反应器得到的裂解气体的热解气体源，在该金属基材上产生的刮刀刮除碳纤维，回收上述刮削碳纤维的回收容器以及从上述排出废气排出废气的排气泵 反应堆。 碳纤维是直径为25至250nm的线性碳纤维，其沿长度方向堆叠形成有层叠的石墨烯。

公开(公告)号：US20100092666A1

公开(公告)日：2010-04-15

申请号：US12519933

申请日：2007-11-29

申请人： Eisuke Morisaki ,  Hirokatsu Kobayashi ,  Jun Yoshikawa ,  Ikuo Sawada ,  Tsunenobu Kimoto ,  Noriaki Kawamoto ,  Masatoshi Aketa

发明人： Eisuke Morisaki ,  Hirokatsu Kobayashi ,  Jun Yoshikawa ,  Ikuo Sawada ,  Tsunenobu Kimoto ,  Noriaki Kawamoto ,  Masatoshi Aketa

IPC分类号： C23C16/46 ,  C23C16/00

CPC分类号： C23C16/481 ,  C23C16/325 ,  C23C16/46 ,  C30B25/10 ,  C30B29/36 ,  H01L21/02378 ,  H01L21/02529 ,  H01L21/0262 ,  H01L21/67109 ,  H01L21/6719 ,  H01L21/67748 ,  H01L21/68764 ,  H01L21/68771 ,  H01L29/66068

摘要： A disclosed film deposition apparatus includes a process chamber inside which a reduced pressure space is maintained; a gas supplying portion that supplies a film deposition gas to the process chamber; a substrate holding portion that is made of a material including carbon as a primary constituent and holds a substrate in the process chamber; a coil that is arranged outside the process chamber and inductively heats the substrate holding portion; and a thermal insulation member that covers the substrate holding portion and is arranged to be separated from the process chamber, wherein the reduced pressure space is separated into a film deposition gas supplying space to which the film deposition gas is supplied and a thermal insulation space defined between the substrate holding portion and the process chamber, and wherein a cooling medium is supplied to the thermal insulation space.

摘要翻译： 所公开的膜沉积设备包括处理室，其内保持有减压空间; 气体供给部，其向所述处理室供给成膜气体; 基板保持部，其由以碳为主要成分的材料制成，并将基板保持在所述处理室中; 线圈，其布置在所述处理室的外部并感应加热所述基板保持部; 以及绝热构件，其覆盖所述基板保持部并被布置成与所述处理室分离，其中所述减压空间被分离成供给所述成膜气体的成膜气体供给空间和限定了所述隔热空间的成膜气体供给空间 在所述基板保持部和所述处理室之间，并且其中向所述绝热空间供给冷却介质。

公开(公告)号：US07553787B2

公开(公告)日：2009-06-30

申请号：US11612016

申请日：2006-12-18

申请人： Jun Yoshikawa ,  Yoshimasa Kobayashi ,  Naomi Teratani

发明人： Jun Yoshikawa ,  Yoshimasa Kobayashi ,  Naomi Teratani

IPC分类号： C04B35/581

CPC分类号： H01L21/6831 ,  C04B35/581 ,  C04B2235/3217 ,  C04B2235/3865 ,  C04B2235/723 ,  C04B2235/96

摘要： An aluminum nitride-based ceramic sintered body is provided, which is manufactured by sintering an aluminum nitride powder comprising aluminum nitride as a main component, carbon in an amount of 0.1 wt % or more to 1.0 wt % or less, and containing oxygen in an amount that is not greater than 0.7 wt %, wherein carbon and oxygen are dissolved in grains of the aluminum nitride powder. The a-axis length of the lattice constant of the aluminum nitride is in a range of 3.1120 Å or more to 3.1200 Å or less, and the a c-axis length of the lattice constant is in a range of 4.9810 Å or more to 4.9900 Å or less. The volume resistivity of the aluminum nitride-based ceramic sintered body at 500° C. is 109 Ω·cm or more.

摘要翻译： 提供了一种氮化铝系陶瓷烧结体，其通过以包含氮化铝为主要成分的氮化铝粉末以0.1重量％以上至1.0重量％以下的量烧结而形成， 量不大于0.7重量％，其中碳和氧溶解在氮化铝粉末的颗粒中。 氮化铝的晶格常数的a轴长度在3.1120以上至3.1200以下的范围内，晶格常数的c轴长度在4.98以上至4.9900以上的范围内 Å或更少。 在500℃下的氮化铝系陶瓷烧结体的体积电阻率为109Ω·cm以上。