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51.发明授权Substrate processing method, program, computer-readable recording medium, and substrate processing system 有权基板处理方法，程序，计算机可读记录介质和基板处理系统公开(公告)号：US07901149B2
公开(公告)日：2011-03-08
申请号：US12307936
申请日：2007-07-19
CPC分类号： H01L21/0274 , G03F7/2022 , G03F7/38 , H01L21/3086 , H01L21/3088 , H01L21/67748
摘要： A substrate on which a resist film has been formed is transferred to an aligner and subjected to exposure processing. The substrate is then subjected to post-exposure baking in a second processing system. The substrate is then transferred again to the aligner and subjected to exposure processing. The substrate for which exposure processing for the second time has been finished is transferred to a first processing system and again subjected to post-exposure baking. The time periods from the ends of the exposure processing to the starts of the post-exposure baking for the first time and the second time are controlled to be equal. In pattern forming processing in which exposure processing is performed a plurality of times between the resist film forming processing and the developing treatment, a pattern with a desired dimension can be finally formed.
摘要翻译： 其上形成有抗蚀剂膜的基板被转印到对准器并进行曝光处理。 然后在第二处理系统中对基板进行曝光后烘烤。 然后将衬底再次转移到对准器并进行曝光处理。 第二次曝光处理已完成的基板被转印到第一处理系统，并再次进行曝光后烘烤。 从曝光处理结束到第一次和第二次的曝光后烘烤开始的时间段被控制为相等。 在抗蚀剂膜形成处理和显影处理之间进行多次曝光处理的图案形成处理中，可以最终形成具有期望尺寸的图案。
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52.发明申请Color display substrate, color filter substrate, color luminescent substrate, manufacturing method of color display substrate, electro-optical apparatus, electronic device, film-forming method, film-forming apparatus, and display motherboard 审中-公开彩色显示基板，滤色器基板，彩色发光基板，彩色显示基板的制造方法，电光装置，电子装置，成膜方法，成膜装置，显示主板公开(公告)号：US20080131603A1
公开(公告)日：2008-06-05
申请号：US11979212
申请日：2007-10-31
CPC分类号： G02F1/133514 , G02F1/133516 , H01L27/3211 , H01L27/322 , H01L27/3295 , H01L51/5284
摘要： The invention provides a color display substrate having plural color display elements arranged in a matrix pattern, and a manufacturing method to efficiently obtain a color filter substrate and color luminescent substrate, for example. A manufacturing method of a color display substrate includes the step of forming plural color dots by selectively ejecting liquid droplets from nozzles in accordance with input data. The plural color dots constitute plural pixels, which constitute plural color filter elements arranged in a matrix pattern. The plural color dots have a first dot pitch in a direction perpendicular to a first base line. Each of the plural color dots is formed to lie at a distance of at least substantially an integral multiple of the first dot pitch from the first base line.
摘要翻译： 本发明提供一种彩色显示基板，具有以矩阵图案排列的多个彩色显示元件，以及例如有效地获得滤色器基板和彩色发光基板的制造方法。 彩色显示基板的制造方法包括根据输入数据从喷嘴选择性地喷射液滴而形成多个彩色点的步骤。 多个彩色点构成多个像素，其构成以矩阵图案排列的多个滤色器元件。 多个彩色点在垂直于第一基线的方向上具有第一点间距。 多个彩色点中的每一个被形成为距离第一基线至少基本上是第一点间距的整数倍的距离。
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公开(公告)号：US20060250077A1
公开(公告)日：2006-11-09
申请号：US11484694
申请日：2006-07-12
CPC分类号： H01L51/0005 , B41J2/145 , B41J2202/09 , B41J2202/20
摘要： In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
摘要翻译： 在用于制造滤色器1的喷墨装置中，具有多个喷嘴27的喷墨头22以线性方式设置。 滤芯元件从多个喷嘴27喷射到母板12四次，以形成预定厚度的过滤元件3。 通过这样做，可以防止多个滤光元件3的厚度差异，并平滑地均匀化透光性。 因此，在喷射装置中，可以以更低成本和更有效地以更常见的方式形成滤色器。 此外，可以提供一种可以使电光学构件的电光特性，液晶装置的显色特性和EL表面的照明特性等因素均衡的喷射装置。
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公开(公告)号：USD514618S1
公开(公告)日：2006-02-07
申请号：US29177390
申请日：2003-03-11
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公开(公告)号：US06991315B2
公开(公告)日：2006-01-31
申请号：US10301569
申请日：2002-11-22
申请人： Shinichi Nakamura , Yoshiaki Yamada
发明人： Shinichi Nakamura , Yoshiaki Yamada
CPC分类号： H05B33/10
摘要： In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptic characteristics of the electrooptic members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
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公开(公告)号：US06959502B2
公开(公告)日：2005-11-01
申请号：US10715347
申请日：2003-11-17
申请人： Shinichi Nakamura , Yoshiaki Yamada
发明人： Shinichi Nakamura , Yoshiaki Yamada
CPC分类号： G02B5/201
摘要： A drying furnace contains therein hot plates which are disposed in a plurality of stages in a vertical direction, on each of which is seated a platelike workpiece. A gateway for the workpiece is disposed on a front side of the drying furnace and is normally left open to face the plurality of stages of hot plates. A chamber casing is disposed on a rear side of the drying furnace. An exhaust chamber is defined in the chamber casing and has a flow dividing plate which has formed therein a plurality of ventilation holes each facing a gap between the plurality of stages of hot plates. The exhaust chamber is forcibly exhausted by an exhaust blower.
摘要翻译： 干燥炉中装有热板，它们沿垂直方向设置成多个阶段，每个阶段都安置在板状工件上。 工件的通道设置在干燥炉的前侧，通常保持打开以面对多个阶段的热板。 室外壳设置在干燥炉的后侧。 排气室被限定在腔室中，并且具有分流板，该分流板在其中形成有多个通气孔，每个通风孔面对多个热板之间的间隙。 排气室被排气鼓风机强制排空。
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57.发明申请Member to be recognized for alignment; head unit and electronic device provided therewith; method of manufacturing LCD, organic EL device, electron emission device, PDP device, electrophoretic display device, color filter, and organic EL; method of forming spacer, metallic wire, lens, resist, and light diffusion member, each of said methods using said head unit 有权会员被认可为对齐; 头单元和电子设备; 制造LCD，有机EL器件，电子发射器件，PDP器件，电泳显示器件，滤色器和有机EL的方法; 形成间隔物，金属线，透镜，抗蚀剂和光漫射构件的方法，每种所述方法使用所述头单元公开(公告)号：US20050231555A1
公开(公告)日：2005-10-20
申请号：US11150104
申请日：2005-06-13
申请人： Shinichi Nakamura , Yoshiaki Yamada
发明人： Shinichi Nakamura , Yoshiaki Yamada
IPC分类号： B41J2/01 , B41J25/304 , B41J25/34 , G02B3/00 , G02B5/02 , G02B5/20 , G02F1/1335 , H01J9/227 , H01L23/544 , H01L51/00 , H01L51/40 , B41J2/14 , B41J2/16
CPC分类号： H01L23/544 , H01L51/0005 , H01L2223/54473 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A member to be recognized for alignment is disposed in an object to be set in position and having formed therein a mark for image-wise recognition. The member is made up of a member main body formed substantially in a columnar shape and having a mirror-finished front end surface. The mark is formed into a depressed shape in substantially central part of the front end surface of the member main body.
摘要翻译： 要被识别用于对准的构件被布置在待设置的对象中并且在其中形成有用于图像识别的标记。 该构件由基本上形成为柱状的构件主体构成，具有镜面前端面。 标记在构件主体的前端面的大致中央部形成为凹陷状。
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58.发明授权Inputting device and electronic instrument using this inputting device and inputting method thereof 失效使用该输入装置的输入装置和电子仪器及其输入方法公开(公告)号：US06922185B2
公开(公告)日：2005-07-26
申请号：US10202874
申请日：2002-07-26
CPC分类号： G06F3/0338 , H01H25/002 , H01H2025/004
摘要： An inputting device, an electronic instrument using this inputting device, and an inputting method thereof, in which displacement of an operating section in the direction slanting for the X or the Y direction is detected and the movement of a moving object such as a cursor on a display can be controlled easily and precisely, are provided. The operating section is displaced about in the horizontal direction and the vertical direction for a plane being almost parallel to the surface of a cabinet. In case that orthogonal coordinates having the X axis and the Y axis are set on the plane being almost parallel to the surface of the cabinet, horizontal direction sensors detect the displacement of the operating section in the direction slanting for the X or Y direction, in addition to in the X or Y direction. The cursor moves on the display based on the displacement of the operating section about in the horizontal direction. Information being selected by the cursor on the display is decided by the displacement of the operating section about in the vertical direction.
摘要翻译： 使用该输入装置的输入装置，电子仪器及其输入方法，其中检测到在X或Y方向上倾斜的方向上的操作部分的位移和诸如光标的移动物体的移动 可以容易且准确地控制显示。 操作部分在水平方向和垂直方向上位移大致平行于机柜表面。 在具有X轴和Y轴的正交坐标被设置在几乎平行于机柜表面的平面上的情况下，水平方向传感器检测操作部分在X或Y方向的倾斜方向上的位移， 除了在X或Y方向。 基于操作部分在水平方向上的位移，光标在显示器上移动。 由显示器上的光标选择的信息由操作部分在垂直方向上的位移决定。
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公开(公告)号：US06866356B2
公开(公告)日：2005-03-15
申请号：US10379579
申请日：2003-03-06
申请人： Hidenori Usuda , Yoshiaki Yamada
发明人： Hidenori Usuda , Yoshiaki Yamada
IPC分类号： B41J2/01 , B05C5/00 , B41J2/045 , B41J2/055 , G02B5/20 , G02F1/13 , G02F1/1335 , G02F1/1343 , H01L51/50 , H05B33/10 , B41J29/38
CPC分类号： B41J2/04541 , B41J2/04573 , B41J2/04581 , B41J2/04588 , B41J2/04593
摘要： The present invention provides a head drive unit capable of discharging a required amount of viscous body from a head having a pressure generating element, such as a piezoelectric element, and a method of the same, a droplet discharge unit having the head drive unit, a head drive program, and a device manufacturing method having a process of discharging the viscous body by the method as one of manufacturing processes. In the invention, a driving signal is a signal to be applied to a pressure generating element, such as a piezoelectric element, provided to a head and is generated in synchronization with a clock signal. The driving signal has a period to vary the voltage and a period to hold the voltage. The present invention can vary the rate of change in the voltage of the driving signal per unit time by setting a voltage variation during the period and the number of clocks of the clock signal held in the period as appropriate depending on the rate of deformation of the pressure generating element per unit time.
摘要翻译： 本发明提供一种头驱动单元，其能够从具有诸如压电元件的压力产生元件的头部排出所需量的粘性体及其方法，具有头驱动单元的液滴喷射单元， 头驱动程序，以及具有通过作为制造过程之一的方法将粘性体排出的过程的装置制造方法。 在本发明中，驱动信号是施加到诸如压电元件的压力产生元件提供给头部并且与时钟信号同步产生的信号。 驱动信号具有改变电压和保持电压的周期的周期。 本发明可以通过在该周期内设定电压变化以及在该周期内保持的时钟信号的时钟数根据该变化的速率来改变每单位时间的驱动信号的电压变化率 压力发生元件每单位时间。
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60.发明授权Ohmic contact plug having an improved crack free TiN barrier metal in a contact hole and method of forming the same 失效在接触孔中具有改进的无裂纹TiN阻挡金属的欧姆接触塞及其形成方法公开(公告)号：US06787913B2
公开(公告)日：2004-09-07
申请号：US09974808
申请日：2001-10-12
申请人： Yoshiaki Yamada , Takashi Yokoyama
发明人： Yoshiaki Yamada , Takashi Yokoyama
IPC分类号： H01L2348
CPC分类号： H01L21/76849 , C23C14/0641 , C23C14/541 , H01L21/2855 , H01L21/28568 , H01L21/76838 , H01L21/76843 , H01L21/7685 , H01L21/76855 , H01L21/76856 , H01L21/76864 , H01L21/76877
摘要： A sputtering method of depositing a titanium nitride film on a titanium film in contact with a silicon at a bottom of a contact hole is provided, wherein the sputtering method is carried out at a temperature of the silicon region of not less than 450° C., so that the titanium nitride film has a compressive stress of not higher than 5×109 dyne/cm2 whereby the titanium film has such a high stability as preventing any crack upon changing the compressive stress to a tensile stress by a heat treatment.
摘要翻译： 提供了在接触孔底部与硅接触的钛膜上沉积氮化钛膜的溅射方法，其中溅射方法在硅区域的温度不低于450℃下进行。 ，使得氮化钛膜具有不高于5×10 9达因/ cm 2的压缩应力，由此钛膜具有如下稳定性：当通过热量将压缩应力改变为拉伸应力时，可以防止任何裂纹 治疗。
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