公开(公告)号：US07069656B2

公开(公告)日：2006-07-04

申请号：US11102735

申请日：2005-04-11

申请人： Su-ho Shin ,  Seog-soon Baek ,  Yong-soo Oh ,  Seung-ju Shin

发明人： Su-ho Shin ,  Seog-soon Baek ,  Yong-soo Oh ,  Seung-ju Shin

IPC分类号： B21D53/00 ,  B41J2/05

CPC分类号： B41J2/1643 ,  B41J2/14032 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A monolithic ink-jet printhead includes a substrate having an ink chamber to be filled with ink to be ejected on a front surface, a manifold for supplying ink to the ink chamber on a rear surface, and an ink channel communicating between the ink chamber and the manifold, a barrier wall formed on the front surface of the substrate to a predetermined depth and defining at least a portion of the ink chamber in a width-wise direction, a nozzle plate including a plurality of material layers stacked on the substrate and having a nozzle penetrating the nozzle plate, so that ink ejected from the ink chamber is ejected through the nozzle, a heater formed between adjacent material layers and located above the ink chamber for heating ink to be supplied within the ink chamber; and a conductor for providing current across the heater being provided between adjacent material layers.

摘要翻译： 单片式喷墨打印头包括具有填充有要喷射在前表面上的油墨的油墨室的基板，用于向后表面上的油墨室供墨的歧管和在油墨室与油墨室之间连通的油墨通道 所述歧管是形成在所述基板的前表面上至预定深度并且沿宽度方向限定所述墨水室的至少一部分的阻挡壁;喷嘴板，包括堆叠在所述基板上的多个材料层，并且具有 穿过喷嘴板的喷嘴，使得从墨水室喷出的墨水通过喷嘴喷射，形成在相邻材料层之间并位于墨水室上方的加热器，用于加热供应到墨水室内的墨水; 以及用于在相邻材料层之间提供横跨加热器的电流的导体。

公开(公告)号：US07036913B2

公开(公告)日：2006-05-02

申请号：US10853643

申请日：2004-05-26

申请人： Min-soo Kim ,  Su-ho Shin ,  Yong-soo Oh ,  Hyung-taek Lim ,  Jong-woo Shin ,  Seog-soon Baek

发明人： Min-soo Kim ,  Su-ho Shin ,  Yong-soo Oh ,  Hyung-taek Lim ,  Jong-woo Shin ,  Seog-soon Baek

IPC分类号： B41J2/05

CPC分类号： B41J2/1412 ,  B41J2/14129 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437 ,  B41J2002/14387

摘要： In an ink-jet printhead and a method for manufacturing the same, the ink-jet printhead includes a substrate, an ink chamber to be filled with ink formed on a front surface of the substrate, a manifold for supplying ink to the ink chamber formed on a rear surface of the substrate, and an ink passage in flow communication with the ink chamber and the manifold formed parallel to the front surface of the substrate; a nozzle plate including a plurality of passivation layers formed of an insulating material on the front surface of the substrate, a heat dissipating layer formed of a metallic material, and a nozzle in flow communication with the ink chamber; and a heater and a conductor, the heater being positioned on the ink chamber and heating ink in the ink chamber, and the conductor for applying a current to the heater.

摘要翻译： 在喷墨打印头及其制造方法中，喷墨打印头包括基板，填充有形成在基板的前表面上的油墨的墨室，用于向形成的墨室供墨的歧管 在所述基板的后表面上形成有与所述墨水室和所述歧管流动连通的墨通道，所述歧管与所述基板的前表面平行; 喷嘴板，包括在所述基板的前表面上由绝缘材料形成的多个钝化层，由金属材料形成的散热层和与所述墨水室流动连通的喷嘴; 以及加热器和导体，所述加热器位于所述墨水室上并加热所述墨水室中的墨水，以及所述导体用于向所述加热器施加电流。

公开(公告)号：US06979076B2

公开(公告)日：2005-12-27

申请号：US10691588

申请日：2003-10-24

申请人： Seog-soon Baek ,  Yong-soo Oh ,  Keon Kuk ,  Ki-deok Bae ,  Seung-ju Shin ,  Su-ho Shin

发明人： Seog-soon Baek ,  Yong-soo Oh ,  Keon Kuk ,  Ki-deok Bae ,  Seung-ju Shin ,  Su-ho Shin

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  B41J2/235

CPC分类号： B41J2/14032 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2002/1437

摘要： An ink-jet printhead includes a substrate on which an ink chamber to be supplied with ink to be ejected is formed on a front surface of the substrate, a manifold for supplying ink to the ink chamber is formed on a rear surface of the substrate, and an ink passage in communication with the ink chamber and the manifold is formed parallel to the front surface of the substrate, a nozzle plate formed on the front surface of the substrate, a nozzle formed through the nozzle plate through which ink is ejected from the ink chamber, a heater formed on the nozzle plate, and an electrode electrically connected to the heater for applying current to the heater.

摘要翻译： 喷墨打印头包括基板，在该基板上形成有要喷射的墨水的墨室，该基板的前表面上形成有用于向墨室供墨的歧管， 与油墨室和歧管连通的油墨通道与基板的前表面平行地形成，形成在基板的前表面上的喷嘴板，通过喷嘴板形成的喷嘴，从喷嘴板喷出墨水 墨水室，形成在喷嘴板上的加热器，以及电连接到加热器的用于向加热器施加电流的电极。

公开(公告)号：US06598961B2

公开(公告)日：2003-07-29

申请号：US09995762

申请日：2001-11-29

申请人： Keon Kuk ,  Doo-jin Maeng ,  Yong-soo Oh

发明人： Keon Kuk ,  Doo-jin Maeng ,  Yong-soo Oh

IPC分类号： B41S205

CPC分类号： B41J2/055 ,  B41J2/14016

摘要： A bubble-jet type ink-jet printhead, includes a substrate, a nozzle plate, a wall, and a heater, wherein the heater is interposed between the substrate and the nozzle plate to divide an ink chamber into a main ink chamber and a secondary ink chamber, wherein a main bubble and a secondary bubble are generated. The printhead may further include an ink channel for introducing ink into the secondary ink chamber for supplying the ink to the main ink chamber. The printhead according to the present invention consumes less energy, prevents a backflow of ink, and operates at increased speed.

公开(公告)号：US06533399B2

公开(公告)日：2003-03-18

申请号：US09907456

申请日：2001-07-18

申请人： Chang-seung Lee ,  Kyoung-won Na ,  Sang-wook Lee ,  Hyun-cheol Kim ,  Yong-soo Oh

发明人： Chang-seung Lee ,  Kyoung-won Na ,  Sang-wook Lee ,  Hyun-cheol Kim ,  Yong-soo Oh

IPC分类号： B41J205

CPC分类号： B41J2/1629 ,  B41J2/055 ,  B41J2/1404 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1437

摘要： A bubble-jet type ink-jet printhead, and a manufacturing method thereof are provided, wherein, the printhead includes a substrate integrally having an ink supply manifold, an ink chamber, and an ink channel, a nozzle plate having a nozzle, a heater consisting of resistive heating elements, and an electrode for applying current to the heater. In particular, the ink chamber is formed in a substantially hemispherical shape on a surface of the substrate, a manifold is formed from its bottom side toward the ink chamber, and the ink channel linking the manifold and the ink chamber is formed at the bottom of the ink chamber. Thus, this simplifies the manufacturing process and facilitates high integration and high volume production. Furthermore, a doughnut-shaped bubble is formed to eject ink in the printhead, thereby preventing a back flow of ink as well as formation of satellite droplets that may degrade image resolution.

公开(公告)号：US06391673B1

公开(公告)日：2002-05-21

申请号：US09702849

申请日：2000-11-01

申请人： Byeoung Ju Ha ,  Seog-soon Baek ,  Hyun-cheol Kim ,  Hoon Song ,  Yong-soo Oh

发明人： Byeoung Ju Ha ,  Seog-soon Baek ,  Hyun-cheol Kim ,  Hoon Song ,  Yong-soo Oh

IPC分类号： H01L2100

CPC分类号： B81C1/00293 ,  G01C19/5769 ,  G01P1/02 ,  G01P15/0802

摘要： A method of fabricating a micro electromechanical system (MEMS) structure which can be vacuum-packaged at the wafer level is provided. The method includes the steps of forming a multilayered stack including a signal line on a first wafer; bonding a second wafer to the multilayered stack; polishing the first wafer to a predetermined thickness; forming a MEMS structure in a vacuum area of the first wafer and a pad outside the vacuum area, the MEMS structure and the pad being connected to the signal line; forming a structure in a third wafer to have space corresponding to the vacuum area of the MEMS structure; and bonding the third wafer to the polished surface of the first wafer in a vacuum state. For protection of the structure and maintaining a vacuum level required for operation, the fabricated structure is vacuum-packaged at the wafer level, thereby improving the yield of fabrication. In addition, since a special vacuum packaging process is not necessary, the fabrication can be simplified.

摘要翻译： 提供了一种制造可在晶片级真空封装的微机电系统（MEMS）结构的方法。 该方法包括以下步骤：在第一晶片上形成包括信号线的多层堆叠; 将第二晶片接合到所述多层堆叠; 将第一晶片抛光至预定厚度; 在第一晶片的真空区域中形成MEMS结构，在真空区域外形成垫，MEMS结构和焊盘连接到信号线; 在第三晶片中形成具有对应于MEMS结构的真空区域的空间的结构; 以及在真空状态下将所述第三晶片接合到所述第一晶片的抛光表面。 为了保护结构并保持操作所需的真空水平，制造的结构在晶片级被真空包装，从而提高了制造的产量。 此外，由于不需要特殊的真空包装处理，因此可以简化制造。

公开(公告)号：US07163278B2

公开(公告)日：2007-01-16

申请号：US10864390

申请日：2004-06-10

申请人： Yong-soo Lee ,  Yong-soo Oh ,  Keon Kuk ,  Ji-hyuk Lim ,  Dong-kee Sohn ,  Mun-cheol Choi

发明人： Yong-soo Lee ,  Yong-soo Oh ,  Keon Kuk ,  Ji-hyuk Lim ,  Dong-kee Sohn ,  Mun-cheol Choi

IPC分类号： B41J2/05

CPC分类号： B41J2/14137

摘要： An ink-jet printhead includes a substrate having an ink chamber and a manifold, a nozzle plate formed on the substrate, first and second heaters, first and second conductors, and first and second ink channels. The nozzle plate includes a plurality of passivation layers formed of an insulating material, a heat dissipation layer formed on the passivation layers and made of a thermally conductive material, and a nozzle passing through the nozzle plate and in flow communication with the ink chamber. The first and second heaters and conductors are interposed between adjacent passivation layers of the nozzle plate. The ink channels are interposed between the ink chamber and the manifold, for providing flow communication between the ink chamber and the manifold. The first and second heaters, conductors and ink channels are symmetric with respect to the nozzle.

摘要翻译： 喷墨打印头包括具有墨水室和歧管的基板，形成在基板上的喷嘴板，第一和第二加热器，第一和第二导体以及第一和第二墨水通道。 喷嘴板包括由绝缘材料形成的多个钝化层，形成在钝化层上并由导热材料制成的散热层和通过喷嘴板并与墨水室流动连通的喷嘴。 第一和第二加热器和导体介于喷嘴板的相邻钝化层之间。 油墨通道介于油墨室和歧管之间，用于提供油墨室和歧管之间的流动连通。 第一和第二加热器，导体和墨水通道相对于喷嘴是对称的。

公开(公告)号：US20060146102A1

公开(公告)日：2006-07-06

申请号：US11367375

申请日：2006-03-06

申请人： Min-soo Kim ,  Su-ho Shin ,  Yong-soo Oh ,  Hyung-taek Lim ,  Jong-woo Shin ,  Seog-soon Baek

发明人： Min-soo Kim ,  Su-ho Shin ,  Yong-soo Oh ,  Hyung-taek Lim ,  Jong-woo Shin ,  Seog-soon Baek

IPC分类号： B41J2/175

CPC分类号： B41J2/1412 ,  B41J2/14129 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437 ,  B41J2002/14387

摘要： In an ink-jet printhead and a method for manufacturing the same, the ink-jet printhead includes a substrate, an ink chamber to be filled with ink formed on a front surface of the substrate, a manifold for supplying ink to the ink chamber formed on a rear surface of the substrate, and an ink passage in flow communication with the ink chamber and the manifold formed parallel to the front surface of the substrate; a nozzle plate including a plurality of passivation layers formed of an insulating material on the front surface of the substrate, a heat dissipating layer formed of a metallic material, and a nozzle in flow communication with the ink chamber; and a heater and a conductor, the heater being positioned on the ink chamber and heating ink in the ink chamber, and the conductor for applying a current to the heater.

摘要翻译： 在喷墨打印头及其制造方法中，喷墨打印头包括基板，填充有形成在基板的前表面上的油墨的墨室，用于向形成的墨室供墨的歧管 在所述基板的后表面上形成有与所述墨水室和所述歧管流动连通的墨通道，所述歧管与所述基板的前表面平行; 喷嘴板，包括在所述基板的前表面上由绝缘材料形成的多个钝化层，由金属材料形成的散热层和与所述墨水室流动连通的喷嘴; 以及加热器和导体，所述加热器位于所述墨水室上并加热所述墨水室中的墨水，以及所述导体用于向所述加热器施加电流。

公开(公告)号：US07018017B2

公开(公告)日：2006-03-28

申请号：US10717662

申请日：2003-11-21

申请人： Hoon Song ,  Yong-soo Oh ,  Jun-hyub Park ,  Keon Kuk ,  Chang-seung Lee ,  Young-jae Kim ,  Ji-hyuk Lim

发明人： Hoon Song ,  Yong-soo Oh ,  Jun-hyub Park ,  Keon Kuk ,  Chang-seung Lee ,  Young-jae Kim ,  Ji-hyuk Lim

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1404 ,  B41J2/1412 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/1437 ,  B41J2002/14467 ,  Y10T29/49083 ,  Y10T29/49128 ,  Y10T29/49401

摘要： A monolithic ink-jet printhead includes a substrate having a lower ink chamber formed on an upper surface thereof, a manifold for supplying ink to the lower ink chamber formed on a bottom surface thereof, and an ink channel providing communication therebetween; a nozzle plate having a plurality of passivation layers and a metal layer sequentially stacked on the substrate, the nozzle plate having an upper ink chamber formed therein on a bottom surface of the metal layer, a nozzle in communication with the upper ink chamber formed on an upper surface of the metal layer, and a connection hole providing communication between the upper ink chamber and the lower ink chamber; a heater located between the upper ink chamber and the lower ink chamber for heating ink contained in the lower and upper ink chambers; and a conductor electrically connected to the heater to apply a current to the heater.

摘要翻译： 单片式喷墨打印头包括：在其上表面上形成有下墨室的基板，用于向形成在其底表面上的下墨室供墨的歧管和在其间提供连通的墨通道; 喷嘴板，其具有多个钝化层和顺序堆叠在所述基板上的金属层，所述喷嘴板在所述金属层的底面上形成有上部墨水室，与所述上部墨水室形成的喷嘴连通， 所述金属层的上表面和连接孔提供所述上墨室和所述下墨室之间的连通; 位于上墨室和下墨室之间的加热器，用于加热容纳在下墨室和上墨室中的墨; 以及电连接到加热器以将电流施加到加热器的导体。

公开(公告)号：US06984024B2

公开(公告)日：2006-01-10

申请号：US10682986

申请日：2003-10-14

申请人： Su-ho Shin ,  Seog-soon Baek ,  Yong-soo Oh ,  Seung-ju Shin

发明人： Su-ho Shin ,  Seog-soon Baek ,  Yong-soo Oh ,  Seung-ju Shin

IPC分类号： B41J2/05

CPC分类号： B41J2/1643 ,  B41J2/14032 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A monolithic ink-jet printhead includes a substrate having an ink chamber to be filled with ink to be ejected on a front surface, a manifold for supplying ink to the ink chamber on a rear surface, and an ink channel communicating between the ink chamber and the manifold, a barrier wall formed on the front surface of the substrate to a predetermined depth and defining at least a portion of the ink chamber in a width-wise direction, a nozzle plate including a plurality of material layers stacked on the substrate and having a nozzle penetrating the nozzle plate, so that ink ejected from the ink chamber is ejected through the nozzle, a heater formed between adjacent material layers and located above the ink chamber for heating ink to be supplied within the ink chamber; and a conductor for providing current across the heater being provided between adjacent material layers.

摘要翻译： 单片式喷墨打印头包括具有填充有要喷射在前表面上的油墨的油墨室的基板，用于向后表面上的油墨室供墨的歧管和在油墨室与油墨室之间连通的油墨通道 所述歧管是形成在所述基板的前表面上至预定深度并且沿宽度方向限定所述墨水室的至少一部分的阻挡壁;喷嘴板，包括堆叠在所述基板上的多个材料层，并且具有 穿过喷嘴板的喷嘴，使得从墨水室喷出的墨水通过喷嘴喷射，形成在相邻材料层之间并位于墨水室上方的加热器，用于加热供应到墨水室内的墨水; 以及用于在相邻材料层之间提供横跨加热器的电流的导体。