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    MONOLITHIC DUPLEXER
    1.
    发明申请
    MONOLITHIC DUPLEXER 有权
    单声道双工器

    公开(公告)号：US20100095497A1

    公开(公告)日：2010-04-22

    申请号：US12647188

    申请日：2009-12-24

    申请人： Yun-kwon PARK ,  In-sang SONG ,  Seok-chul YUN ,  Seog-woo HONG ,  Byeoung-ju HA ,  Dong-ha SHIM ,  Hae-seok PARK ,  Kuang-woo NAM ,  Duck-hwan KIM

    发明人： Yun-kwon PARK ,  In-sang SONG ,  Seok-chul YUN ,  Seog-woo HONG ,  Byeoung-ju HA ,  Dong-ha SHIM ,  Hae-seok PARK ,  Kuang-woo NAM ,  Duck-hwan KIM

    IPC分类号： H01L41/22

    CPC分类号： H03H3/02 ,  H03H9/0571 ,  H03H9/706 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/4902 ,  Y10T29/49155

    摘要： A subminiature, high-performance monolithic duplexer is disclosed. The monolithic duplexer includes a substrate, a transmitting-end filter formed in a first area on an upper surface of the substrate, a receiving-end filter formed in a second area on the upper surface of the substrate, a packaging substrate, bonded on an area on the upper surface of the substrate, for packaging the transmitting-end filter and the receiving-end filter in a sealed state, and a phase shifter, formed on one surface of the packaging substrate and connected to the transmitting-end filter and the receiving-end filter, respectively, for intercepting a signal inflow between the transmitting-end filter and the receiving-end filter.

    摘要翻译： 公开了一种超小型高性能单片双工器。 单片双工器包括基板，形成在基板的上表面上的第一区域中的透射端滤光器，形成在基板的上表面上的第二区域中的接收端滤光器，粘合在基板上的封装基板 在封装状态下将发送端滤波器和接收端滤波器封装在基板的上表面上的区域，以及形成在封装基板的一个表面上并与发送端滤波器连接的移相器 接收端滤波器分别用于截取发送端滤波器与接收端滤波器之间的信号流入。

    Coupled resonator filter and fabrication method thereof
    4.
    发明授权
    Coupled resonator filter and fabrication method thereof 有权
    耦合谐振滤波器及其制造方法

    公开(公告)号：US07548139B2

    公开(公告)日：2009-06-16

    申请号：US11455190

    申请日：2006-06-19

    申请人： Hao-seok Park ,  Joo-ho Lee ,  Byeoung-ju Ha ,  Seog-woo Hong ,  Hyung Choi ,  In-sang Song

    发明人： Hao-seok Park ,  Joo-ho Lee ,  Byeoung-ju Ha ,  Seog-woo Hong ,  Hyung Choi ,  In-sang Song

    IPC分类号： H03H9/17 ,  H03H9/00

    CPC分类号： H03H9/584 ,  H03H3/04 ,  H03H9/587 ,  H03H9/588

    摘要： A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.

    摘要翻译： 提供耦合谐振滤波器和制造耦合谐振滤波器的方法。 该方法包括：在基板的表面上依次堆叠第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极; 顺序地构图第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极，以暴露第一，第二和第三电极的区域; 形成分别连接到第一，第二和第三电极的暴露区域和第四电极的区域的多个连接电极; 并且蚀刻在第一电极下方的衬底的区域以形成气隙。

    MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH
    5.
    发明申请
    MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH 审中-公开
    微机电系统（MEMS）开关

    公开(公告)号：US20090114513A1

    公开(公告)日：2009-05-07

    申请号：US12102442

    申请日：2008-04-14

    申请人： Chul-soo Kim ,  Byeoung-ju Ha ,  In-sang Song ,  Duck-hwan Kim ,  Yun-kwon Park ,  Jea-shik Shin

    发明人： Chul-soo Kim ,  Byeoung-ju Ha ,  In-sang Song ,  Duck-hwan Kim ,  Yun-kwon Park ,  Jea-shik Shin

    IPC分类号： H01H57/00

    CPC分类号： H01H59/0009 ,  H01H2059/0027

    摘要： A Micro ElectroMechanical System (MEMS) switch is provided. The MEMS switch includes a ground, a moving unit moveable according to a driving signal, for connecting the input to the output or disconnecting the input from the output, and an electrode unit arranged in the configuration of a protrusion formed on a portion of the round, to induce a leakage signal generated between the input and the output to move toward the ground.

    摘要翻译： 提供微机电系统（MEMS）开关。 MEMS开关包括接地，可根据驱动信号移动的移动单元，用于将输入连接到输出或从输出端断开输入;以及电极单元，其布置成形成在圆的一部分上的突起的构造 以引起在输入和输出之间产生的泄漏信号朝向地面移动。

    Air-gap type FBAR, method for fabricating the same, and filter and duplexer using the same
    6.
    发明授权
    Air-gap type FBAR, method for fabricating the same, and filter and duplexer using the same 有权
    气隙型FBAR，其制造方法，以及使用该FBAR的过滤器和双工器

    公开(公告)号：US07253703B2

    公开(公告)日：2007-08-07

    申请号：US10959313

    申请日：2004-10-07

    申请人： In-sang Song ,  Yun-kwon Park ,  Byeoung-ju Ha ,  Jun-sik Hwang

    发明人： In-sang Song ,  Yun-kwon Park ,  Byeoung-ju Ha ,  Jun-sik Hwang

    IPC分类号： H03H9/54 ,  H03H9/70 ,  H03H9/10 ,  H03H9/15 ,  H03H3/02

    CPC分类号： H03H9/587 ,  H03H3/02 ,  H03H9/105 ,  H03H9/173 ,  Y10T29/42

    摘要： An air-gap type thin film bulk acoustic resonator (FBAR) and method for fabricating the same. Also disclosed are a filter and a duplexer employing the air-gap type FBAR. The air-gap type FBAR includes: a first substrate having a cavity part at a predetermined region on its upper surface; a dielectric film stacked on the upper part of the first substrate; a first air gap formed between the first substrate and the dielectric film; a stacked resonance part including a lower electrode/piezoelectric layer/upper electrode formed on the upper part of the dielectric film; a second substrate having a cavity part at a predetermined region on its lower surface and joined to the first substrate; and a second air gap formed between the stacked resonance part and the second substrate. A thin film of predetermined thickness made of a liquid crystal polymer (LCP) may be used as the dielectric film.

    摘要翻译： 气隙式薄膜体声波谐振器（FBAR）及其制造方法。 还公开了采用气隙型FBAR的过滤器和双工器。 气隙式FBAR包括：第一基板，其上表面上的预定区域具有空腔部分; 电介质膜，其堆叠在所述第一基板的上部; 在所述第一基板和所述电介质膜之间形成的第一气隙; 堆叠的共振部分，包括形成在电介质膜的上部的下电极/压电层/上电极; 第二基板，在其下表面上的预定区域具有空腔部分，并且与第一基板接合; 以及在所述层叠的共振部和所述第二基板之间形成的第二气隙。 可以使用由液晶聚合物（LCP）制成的预定厚度的薄膜作为电介质膜。

    Method of fine patterning a metal layer
    7.
    发明申请
    Method of fine patterning a metal layer 审中-公开
    精细图案化金属层的方法

    公开(公告)号：US20060172522A1

    公开(公告)日：2006-08-03

    申请号：US11298481

    申请日：2005-12-12

    申请人： Seog-woo Hong ,  Byeoung-ju Ha ,  Kyu-sik Kim

    发明人： Seog-woo Hong ,  Byeoung-ju Ha ,  Kyu-sik Kim

    IPC分类号： H01L21/44

    CPC分类号： H01L21/76838 ,  B81B2207/07 ,  B81C1/00539 ,  C25F3/02 ,  H01L21/32134 ,  H01L21/32139

    摘要： A method of fine patterning a metal layer which includes depositing a metal layer on a substrate; depositing, on the metal layer, a mask layer having a different degree of electrolytic dissociation than that of the metal layer; making a patterned substrate body; and dipping the substrate body into an electrolyte to thereby corrode the metal layer by an electric potential generated between the metal layer and the mask layer to obtain a desired pattern. The metal layer is a metal having a high degree of electrolytic dissociation for use as an anode, and the mask layer is a metal having a low degree of electrolytic dissociation for use as a cathode. Accordingly, the present invention can conduct fine patterning of a metal layer to a desired size.

    摘要翻译： 一种精细图案化金属层的方法，包括在基底上沉积金属层; 在金属层上沉积具有与金属层不同的电解离解程度的掩模层; 制作图形衬底体; 并且将基板体浸入电解质中，从而通过在金属层和掩模层之间产生的电位来腐蚀金属层，以获得所需的图案。 金属层是具有高电解离解度的金属，用作阳极，掩模层是用作阴极的电解离解程度低的金属。 因此，本发明可以将金属层的精细图案化到期望的尺寸。

    Microgyroscope with two resonant plates
    9.
    发明授权
    Microgyroscope with two resonant plates 失效
    具有两个谐振板的微镜

    公开(公告)号：US06467348B1

    公开(公告)日：2002-10-22

    申请号：US09702845

    申请日：2000-11-01

    申请人： Hoon Song ,  Seog-soon Baek ,  Hyun-cheol Kim ,  Byeoung Ju Ha ,  Yong-soo Oh

    发明人： Hoon Song ,  Seog-soon Baek ,  Hyun-cheol Kim ,  Byeoung Ju Ha ,  Yong-soo Oh

    IPC分类号： G01P904

    CPC分类号： G01C19/574

    摘要： A microgyroscope with two resonant plates is provided. The microgyroscope includes a substrate; first and second frames provided on the substrate to have a predetermined height, the first and second frames facing each other; a plurality of anchors supporting the first and second frames with respect to the substrate; first and second resonant plates provided between the first and second frames to be separated from each other by a predetermined distance; and a matching link unit connected to the first and second resonant plates so that it links the motion of one resonant plate to the motion of the other resonant plate such that the matching link unit is moved by the motion of one resonant plate in a first direction and then moves the other resonant plate in a second direction opposite to the first direction. In the microgyroscope, the difference between the resonance frequencies of the two resonant plates is removed by a self resonant matching structure implemented by the matching link, so that the range of an allowable process error is large, and the microgyroscope can be easily manufactured. Additionally, the reliability and the linearity of a resonance structure are improved. Since the driving beam and the sensing beam are separately designed, mode coupling can be prevented, thereby increasing the sensing sensibility.

    摘要翻译： 提供具有两个谐振板的微型陀螺仪。 微陀螺仪包括基底; 设置在基板上以具有预定高度的第一和第二框架，第一和第二框架彼此面对; 多个锚固件，其相对于所述基板支撑所述第一和第二框架; 设置在第一和第二框架之间的第一和第二谐振板彼此分开预定距离; 以及连接到第一和第二谐振板的匹配连接单元，使得它将一个谐振板的运动连接到另一个谐振板的运动，使得匹配连接单元通过一个谐振板在第一方向上的运动而移动 然后沿与第一方向相反的第二方向移动另一个谐振板。 在微陀螺仪中，通过由匹配链路实现的自谐振匹配结构去除两个谐振板的谐振频率之间的差异，使得允许的工艺误差的范围大，并且可以容易地制造微型陀螺仪。 此外，提高了谐振结构的可靠性和线性度。 由于驱动光束和感测光束是分开设计的，因此可以防止模式耦合，从而增加感测灵敏度。

    Method of manufacturing a monolithic duplexer
    10.
    发明授权
    Method of manufacturing a monolithic duplexer 有权
    制造单片双工器的方法

    公开(公告)号：US08720023B2

    公开(公告)日：2014-05-13

    申请号：US12647188

    申请日：2009-12-24

    申请人： Yun-kwon Park ,  In-sang Song ,  Seok-chul Yun ,  Seog-woo Hong ,  Byeoung-ju Ha ,  Dong-ha Shim ,  Hae-seok Park ,  Kuang-woo Nam ,  Duck-hwan Kim

    发明人： Yun-kwon Park ,  In-sang Song ,  Seok-chul Yun ,  Seog-woo Hong ,  Byeoung-ju Ha ,  Dong-ha Shim ,  Hae-seok Park ,  Kuang-woo Nam ,  Duck-hwan Kim

    IPC分类号： H03H9/15 ,  H03H3/007

    CPC分类号： H03H3/02 ,  H03H9/0571 ,  H03H9/706 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/4902 ,  Y10T29/49155

    摘要： A method for fabricating subminiature, high-performance monolithic duplexer is disclosed. The method comprises depositing and patterning a lower electrode on an upper surface of an insulation layer on a substrate, so as to expose a first part of the insulation layer; depositing a piezoelectric layer on an upper surface of the exposed insulation layer and the lower electrode; depositing a metal on the upper part of the piezoelectric layer and patterning the metal to form a resonance part and a trimming inductor, wherein the lower electrode electrically couples the resonance part and the trimming inductor; fabricating air gap type FBARs (film bulk acoustic resonances) by forming a cavity by etching the substrate under the resonance part; and bonding a packaging substrate on the substrate, the packaging substrate having a phase shifting part which substantially prevents inflow of signal between the air gap type FBARs.

    摘要翻译： 公开了一种用于制造超小型高性能单片双工器的方法。 该方法包括在基板上的绝缘层的上表面上沉积和图案化下电极，以暴露绝缘层的第一部分; 在暴露的绝缘层和下电极的上表面上沉积压电层; 在所述压电层的上部沉积金属并图案化所述金属以形成谐振部分和微调电感器，其中所述下部电极电耦合所述谐振部分和所述微调电感器; 通过在谐振部分下蚀刻衬底来形成空腔来制造气隙型FBAR（膜体声共振）; 以及将封装基板接合在所述基板上，所述封装基板具有基本上防止所述气隙型FBAR之间的信号流入的相移部。