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    METHOD OF FORMING PAD OF SEMICONDUCTOR DEVICE
    54.
    发明申请
    METHOD OF FORMING PAD OF SEMICONDUCTOR DEVICE 审中-公开
    形成半导体器件的方法

    公开(公告)号：US20070161222A1

    公开(公告)日：2007-07-12

    申请号：US11616734

    申请日：2006-12-27

    申请人： Tae Ho Kim

    发明人： Tae Ho Kim

    IPC分类号： H01L21/44

    CPC分类号： H01L24/05 ,  H01L24/03 ,  H01L2224/05093 ,  H01L2224/05094 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01082

    摘要： A method of manufacturing a pad of a semiconductor device. A method may include at least one of the following steps: sequentially depositing a metal layer and an interlayer dielectric layer over a semiconductor substrate; forming a plurality of via holes that expose a metal layer through an interlayer dielectric layer; depositing a second metal layer over an interlayer dielectric layer in order to fill via holes; etching back and/or polishing a second metal layer to form metal plugs in via holes; and/or depositing a top metal layer over metal plugs and an interlayer dielectric layer and changing a pattern in the top metal layer into an arbitrary shape to form a pad.

    摘要翻译： 一种制造半导体器件的焊盘的方法。 方法可以包括以下步骤中的至少一个：在半导体衬底上顺序地沉积金属层和层间电介质层; 形成使金属层通过层间绝缘层露出的多个通孔; 在层间电介质层上沉积第二金属层以便填充通孔; 蚀刻和/或抛光第二金属层以在通孔中形成金属塞; 和/或在金属插塞和层间电介质层上沉积顶部金属层，并且将顶部金属层中的图案改变为任意形状以形成衬垫。

    Compound for filling small gaps in a semiconductor device, composition including the compound, and method of fabricating a semiconductor capacitor
    57.
    发明授权
    Compound for filling small gaps in a semiconductor device, composition including the compound, and method of fabricating a semiconductor capacitor 有权
    用于填充半导体器件中的小间隙的化合物，包含该化合物的组合物以及制造半导体电容器的方法

    公开(公告)号：US08188576B2

    公开(公告)日：2012-05-29

    申请号：US13038608

    申请日：2011-03-02

    申请人： Sung Jae Lee ,  Hee Jae Kim ,  Tae Ho Kim ,  Sang Geun Yun ,  Chang Soo Woo

    发明人： Sung Jae Lee ,  Hee Jae Kim ,  Tae Ho Kim ,  Sang Geun Yun ,  Chang Soo Woo

    IPC分类号： H01L23/58

    CPC分类号： C08G77/04 ,  Y10T428/31663

    摘要： A compound for filling small gaps in a semiconductor device, a composition for filling small gaps in a semiconductor device, and a method of fabricating a semiconductor capacitor, the compound including hydrolysates prepared by hydrolysis, in the presence of an acid catalyst, of compounds represented by Formulae 1, 2, and 3: [RO]3Si—[CH2]nR′  (1) wherein, in Formula 1, n is an integer from 0 to about 10, and R and R′ are each independently a hydrogen atom, a C1-C12 alkyl group, or a C6-C20 aryl group; HOOC[CH2]nR2Si—O—SiR′2[CH2]nCOOH  (2) wherein, in Formula 2, each n is independently an integer from 0 to about 10, and R and R′ are each independently a C1-C12 alkyl group or a C6-C20 aryl group; and R3Si—O—X  (3) wherein, in Formula 3, X is R′ or SiR′3, and R and R′ are each independently a C1-C12 alkyl group or a C6-C20 aryl group, or a polycondensate prepared by polycondensation of the hydrolysates represented by Formulae 1, 2, and 3.

    摘要翻译： 一种用于填充半导体器件中的小间隙的化合物，用于填充半导体器件中的小间隙的组合物以及制造半导体电容器的方法，所述化合物包括通过水解制备的水解产物，在酸催化剂存在下，表示的化合物 通式1，2和3：[RO] 3Si- [CH 2] n R'（1）其中，在式1中，n为0至约10的整数，R和R'各自独立地为氢原子， C 1 -C 12烷基或C 6 -C 20芳基; HOOC [CH2] nR2Si-O-SiR'2 [CH2] nCOOH（2）其中，在式2中，每个n独立地为0至约10的整数，并且R和R'各自独立地为C 1 -C 12烷基 或C 6 -C 20芳基; 和R3Si-O-X（3）其中，在式3中，X为R'或SiR'3，R和R'各自独立地为C1-C12烷基或C6-C20芳基，或缩聚物 通过由式1,2和3表示的水解产物的缩聚。

    APPARATUS AND SYSTEM FOR INTEGRATEDLY MANAGING STATIC ANALYSIS TOOLS
    60.
    发明申请
    APPARATUS AND SYSTEM FOR INTEGRATEDLY MANAGING STATIC ANALYSIS TOOLS 审中-公开
    综合管理静态分析工具的装置和系统

    公开(公告)号：US20110154120A1

    公开(公告)日：2011-06-23

    申请号：US12969736

    申请日：2010-12-16

    申请人： Tae Ho Kim ,  Ik Soon Kim ,  Chae Deok Lim ,  Dong Sun Lim

    发明人： Tae Ho Kim ,  Ik Soon Kim ,  Chae Deok Lim ,  Dong Sun Lim

    IPC分类号： G06F11/27

    CPC分类号： G06F8/75

    摘要： An apparatus for integratedly managing static analysis tools includes: a tool configuration module receiving initial configuration information in an integrated configuration format for an analysis of static analysis tools from a user, converting the initial configuration information in the integrated configuration format into initial configuration information in an initial configuration format of the static analysis tools, and transmitting the same; a result output module receiving analysis results from the static analysis tools, converting the received analysis results into a common analysis result format, and outputting the same; an analysis configuration module receiving analysis configuration information from the user, converting the received analysis configuration information into analysis configuration information in an analysis configuration format of the static analysis tools, and transmitting the same; and an execution management module performing one or more of functions such as management of the analysis performing of the static analysis tools, management of the configuration of the static analysis tools themselves, and management of the verification rules of the static analysis tools.

    摘要翻译： 用于综合管理静态分析工具的装置包括：工具配置模块，以集成配置格式接收来自用户的静态分析工具的分析的初始配置信息，将集成配置格式的初始配置信息转换成初始配置信息， 初始配置格式的静态分析工具，并传输相同; 结果输出模块从静态分析工具接收分析结果，将接收到的分析结果转换为公共分析结果格式，并输出; 从用户接收分析配置信息的分析配置模块，以静态分析工具的分析配置格式将接收到的分析配置信息转换为分析配置信息，并发送该分析配置信息; 以及执行管理模块，其执行静态分析工具的分析管理，静态分析工具本身的配置的管理以及静态分析工具的验证规则的管理等一个或多个功能。