公开(公告)号：US07466161B2

公开(公告)日：2008-12-16

申请号：US11379413

申请日：2006-04-20

申请人： David W. Gardner ,  Andrew M. Hawryluk

发明人： David W. Gardner ,  Andrew M. Hawryluk

IPC分类号： G01R31/00

CPC分类号： G02F1/1309 ,  G09G3/006

摘要： Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.

摘要翻译： 传感器的线性阵列的每个传感器部分地包括感测电极和相关联的反馈电路。 感测电极适于接近其上形成有多个像素电极的平板，以便电容地测量像素电极的电压。 每个反馈电路适于经由反馈信号主动驱动其相关联的电极，以便将其相关电极的电压维持在基本上固定的偏压。 每个反馈电路可以包括具有耦合到感测电极的第一输入端和耦合以接收偏置电压的第二输入端的放大器。 放大电路的输出信号用于产生主动驱动感测电极的反馈信号。 偏置电压可能是地电位。

公开(公告)号：US20080239208A1

公开(公告)日：2008-10-02

申请号：US10593110

申请日：2005-04-07

申请人： Xianhai Chen

发明人： Xianhai Chen

IPC分类号： G02F1/1334 ,  G01R31/02 ,  C09K19/38

CPC分类号： G02F1/1309 ,  G02F1/1334 ,  G02F2001/136254

摘要： Embodiments of polymer dispersed liquid crystals (PDLCs) in accordance with the present invention comprise TL-series liquid crystal materials and a polymer matrix comprising polyacrylate resins having hydroxyl groups. These hydroxyl groups allow crosslinking by using isocyanate, improving mechanical properties and heat resistance. Typical ratios of liquid crystal to polymer range between about 50/50 to 70/30 (wt/wt). The PDLC materials exhibit enhanced sensitivity to driving voltages and higher transmission˜voltage (T-V) curve slope. In testing thin film transistors (TFTs), these PDLC materials can be used to compensate for an increased air gap accommodating flatness variation in the TFT substrate, and to reduce electrostatic forces between modulator and panel. Embodiments of PDLC materials in accordance with the present invention form solid films upon evaporation of the solvent. Homogeneity of embodiments of solvent-based PDLC formulations in accordance with the present invention allow for the use of many different coating methods, such as spin, doctor blade, and slot-die coatings.

摘要翻译： 根据本发明的聚合物分散液晶（PDLC）的实施方案包括TL系列液晶材料和包含具有羟基的聚丙烯酸酯树脂的聚合物基体。 这些羟基允许通过使用异氰酸酯进行交联，改善机械性能和耐热性。 液晶与聚合物的典型比例在约50/50至70/30（wt / wt）之间。 PDLC材料对驱动电压和更高的透射电压（T-V）曲线斜率具有增强的灵敏度。 在测试薄膜晶体管（TFT）时，这些PDLC材料可用于补偿TFT基板中容纳平坦度变化的增加的气隙，并减少调制器和面板之间的静电力。 根据本发明的PDLC材料的实施方案在溶剂蒸发时形成固体膜。 根据本发明的基于溶剂的PDLC制剂的实施方案的均匀性允许使用许多不同的涂布方法，例如旋涂，刮刀和狭缝模头涂层。

公开(公告)号：US20080014075A1

公开(公告)日：2008-01-17

申请号：US11389556

申请日：2006-03-23

申请人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

发明人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

IPC分类号： B65H1/00

CPC分类号： B65G49/061 ,  B65G49/065 ,  B65G2249/045 ,  Y10T279/11

摘要： A method of manipulating a substrate comprising gripping a lower surface of the substrate with a master vacuum gripper mounted on a first motorized stage. The master vacuum gripper is adapted to rotate about a Z-axis. The method also includes gripping the lower surface of the substrate with a slave vacuum gripper mounted on a second motorized stage. The slave vacuum gripper is also adapted to rotate about the Z-axis. The method further includes actuating the second motorized stage in a first direction, thereby causing the slave vacuum gripper to move laterally in both the first direction and a second direction and the master vacuum gripper to rotate about the Z-axis.

摘要翻译： 一种操纵基材的方法，包括用安装在第一电动载物台上的主真空夹具夹紧基材的下表面。 主真空吸嘴适于围绕Z轴旋转。 该方法还包括用安装在第二电动平台上的从动真空夹具夹持基板的下表面。 从属真空夹具也适于围绕Z轴旋转。 该方法还包括在第一方向上致动第二电动平台，从而使从属真空夹具在第一方向和第二方向上横向移动，并且主真空夹具围绕Z轴旋转。

公开(公告)号：US07308157B2

公开(公告)日：2007-12-11

申请号：US10771126

申请日：2004-02-02

申请人： Reza Safaee-Rad ,  Aleksander Crnatovic ,  Jeffrey Hawthorne ,  Branko Bukal ,  Ray Leerentveld

发明人： Reza Safaee-Rad ,  Aleksander Crnatovic ,  Jeffrey Hawthorne ,  Branko Bukal ,  Ray Leerentveld

IPC分类号： G06K9/32

CPC分类号： G06T7/0004 ,  G06T2207/30108 ,  H04N17/02 ,  H04N17/04

摘要： A method and apparatus for optically inspecting a display employs sub-pixel accuracy for each primary color to take into account angle of rotation. The method includes capturing images of a display with R×S sensors; determining sets of sensor coordinates mapping to a pixel, determining multiple misalignment angles between the pixel on the display and the R×S sensors, determining multiple x scaling ratios, determining multiple weighting factors associated with R×S sensors in response to the corresponding multiple misalignment angle and the corresponding multiple x and y scaling ratios, determining multiple luminance values for R×S sensors, determining multiple total luminance values in response to the weighting factors and the luminance values, forming scaled images including first and second luminance values, and inspecting the scaled image to identify potential defects of the pixel on the display.

摘要翻译： 用于光学检查显示器的方法和装置对于每个基色采用子像素精度以考虑旋转角度。 该方法包括用RxS传感器捕获显示器的图像; 确定映射到像素的传感器坐标的集合，确定显示器上的像素与RxS传感器之间的多个未对准角度，确定多个x缩放比率，响应于相应的多重不对准角度确定与RxS传感器相关联的多个加权因子 多个x和y缩放比率，确定RxS传感器的多个亮度值，响应于加权因子和亮度值确定多个总亮度值，形成包括第一和第二亮度值的缩放图像，以及检查缩放图像以识别潜在缺陷 的显示器上的像素。

公开(公告)号：US20060202103A1

公开(公告)日：2006-09-14

申请号：US11314960

申请日：2005-12-20

申请人： Adam Weiss

发明人： Adam Weiss

IPC分类号： G02B27/40 ,  G02B7/04 ,  G02B27/64

CPC分类号： G02B21/245 ,  G02B7/282 ,  G02B7/285

摘要： A tracking auto-focus system maintains a microscope pointed at a TFT array continuously in focus so as to eliminate the auto-focusing time that would otherwise be required. The tracking auto-focus system includes, in part, a microscope Z actuator, an auto-focus sensor, an analog-to-digital converter (ADC), a signal conditioner, a digital proportional integrating and differentiating (PID) controller, and a digital-to-analog converter. The actuator adjusts the distance between the microscope's objective lens and the target and includes, in part, an amplifier, a linear motor, and a linear encoder which provides positional feedback. The auto-focus sensor together with the ADC and signal conditioner continuously monitor and detect the distance between the microscope's objective lens and the target and supply the measured distance to the amplifier. The PID controller together with the DAC stabilizes the distance separating the microscope's objective lens and the target to maintain the best focus.

摘要翻译： 跟踪自动对焦系统将保持指向TFT阵列的显微镜连续聚焦，以消除否则将需要的自动对焦时间。 跟踪自动对焦系统部分地包括显微镜Z致动器，自动对焦传感器，模数转换器（ADC），信号调节器，数字比例积分和微分（PID）控制器，以及 数模转换器。 致动器调节显微镜物镜与目标之间的距离，部分包括放大器，线性电机和提供位置反馈的线性编码器。 自动对焦传感器与ADC和信号调节器一起连续监测和检测显微镜物镜与目标之间的距离，并将测量距离提供给放大器。 PID控制器与DAC一起稳定了分离显微镜物镜和目标的距离，以保持最佳对焦。

公开(公告)号：US07095883B2

公开(公告)日：2006-08-22

申请号：US10189274

申请日：2002-07-03

申请人： Reza Safaee-Rad ,  Aleksander Crnatovic ,  Jeffrey A. Hawthorne ,  Ray Leerentveld ,  William K. Pratt ,  Sunil S. Sawkar

发明人： Reza Safaee-Rad ,  Aleksander Crnatovic ,  Jeffrey A. Hawthorne ,  Ray Leerentveld ,  William K. Pratt ,  Sunil S. Sawkar

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G02F1/1309 ,  G06T7/001

摘要： A method for inspecting a display panel includes capturing images of a portion of a plurality of display panels having display elements with an image acquisition device having sensor elements, each image comprising an image of approximately a first number of display elements captured with approximately a second number of sensor elements, the first number different from the second number, each image including a Moiré artifact pattern, combining the images of the portion of the plurality of display panels to form a reference image including a Moiré artifact pattern reference, capturing a sample image of a portion of a sample display panel having display elements with the image acquisition device, the sample image comprising an image of approximately the first number of display elements on the sample display captured with approximately the second number of sensor elements, the sample image including a sample Moiré artifact pattern, combining the sample image with the reference image to inhibit the sample Moiré artifact pattern from the sample image, and to form a test image, determining defects in display elements in the portion of the sample display panel by inspecting the test image, and determining whether to reject the sample display panel in response to the defects in the display elements.

摘要翻译： 一种用于检查显示面板的方法包括用具有传感器元件的图像获取装置拍摄具有显示元件的多个显示面板的一部分的图像，每个图像包括以大约第二数量捕获的大约第一数量的显示元件的图像 的传感器元件，第一个数字不同于第二个数字，每个图像包括莫尔伪影图案，组合多个显示面板的该部分的图像以形成包括莫尔伪影图案参考的参考图像， 所述样本显示面板的具有所述图像获取装置的显示元件的部分，所述样本图像包括以大约第二数量的传感器元件捕获的样本显示器上的大约第一数量的显示元素的图像，所述样本图像包括样本 将样品图像与参考图像组合起来的莫尔人造物图案 从样本图像抑制样品莫尔人造物图案，并形成测试图像，通过检查测试图像来确定样品显示面板的部分中的显示元件的缺陷，以及响应于测试图像确定是否拒绝样品显示面板 显示元素的缺陷。

公开(公告)号：US20060096395A1

公开(公告)日：2006-05-11

申请号：US11249039

申请日：2005-10-11

申请人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

发明人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

IPC分类号： G01N19/00

CPC分类号： G02F1/136259 ,  B65G49/061 ,  B65G49/063 ,  B65G2249/04 ,  G01N21/896 ,  G01N21/95 ,  G01N2021/8867 ,  G01N2021/9513 ,  H01L21/67721

摘要： A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.

公开(公告)号：US20050254045A1

公开(公告)日：2005-11-17

申请号：US10846457

申请日：2004-05-14

申请人： Adam Weiss ,  Afsar Saranli

发明人： Adam Weiss ,  Afsar Saranli

IPC分类号： G01N21/88 ,  G01N21/95

CPC分类号： G01N21/95 ,  G01N2021/9513

摘要： In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.

摘要翻译： 在用于TFT-LCD面板的电气和电光检查的检查系统中，具有脉冲照明源的精细分辨率区域成像照相机，用于扫描该区域并且用短照明脉冲照射的区域的操作捕获图像并自动维持 不断扫描，以解决缺陷点。

公开(公告)号：US06933013B2

公开(公告)日：2005-08-23

申请号：US10685552

申请日：2003-10-14

申请人： Rajiv Pethe ,  Pramod Gupta ,  Xianhai Chen ,  Alexander Nagy

发明人： Rajiv Pethe ,  Pramod Gupta ,  Xianhai Chen ,  Alexander Nagy

IPC分类号： C23C14/02 ,  C25D2/00 ,  G02F1/1334 ,  G02F1/1335 ,  C23C14/06 ,  G02F1/061

CPC分类号： C23C14/024 ,  G02F1/1334 ,  G02F1/133516 ,  G02F1/133553 ,  G02F2001/133521

摘要： In order to allow application of any coating under a vacuum over a volatile gelatinous layer, such as polymer dispersed liquid crystal (PDLC) on an optical glass substrate with a transparent electrode, such as indium tin oxide (ITO) on its surface, a layer of an intermediate stress absorbing polymeric material is first applied to cover the volatile gelatinous layer to prevent evaporation and escape of volatiles, thereafter the coating is applied under a very high vacuum using for example a technique called Physical Vapor Deposition (PVD) or sputtering.

摘要翻译： 为了允许在具有透明电极的光学玻璃基板上的诸如聚合物分散液晶（PDLC）之类的挥发性凝胶层上的真空下涂覆任何涂层，例如其表面上的氧化铟锡（ITO），层 首先施加中等应力吸收聚合物材料以覆盖挥发性凝胶层以防止挥发物的蒸发和逸出，然后使用例如称为物理气相沉积（PVD）或溅射的技术在非常高的真空下施加涂层。

公开(公告)号：US5801824A

公开(公告)日：1998-09-01

申请号：US756305

申请日：1996-11-25

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N21/9501

摘要： A method and resulting system for directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to the SUS and for observing the scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements. Such arrangement results in simultaneous and significant throughput and sensitivity enhancement over existing art. The method can be enhanced further wherein the observing step is performed through suitable relative motion of the scattering image over the imaging plane to permit over sampling. Furthermore, the DMT is significantly simplified because imaging is utilized to electronically scan the wafer instead of using opto-mechanical scanning means. Imaging sensors with an aggregate 2000.times.2000 pixel resolution could image a 200 mm wafer to 100 microns pitch.

摘要翻译： 一种用于将来自源的大致准直照明与来自检查表面（SUS）的倾斜角度引导的方法和所得系统，以产生基本上垂直于SUS的散射非特定能量，并且用于观察多个分数窗中的一个分散窗中的散射非特定能量 通过多个聚焦元件观察SUS的图像。 这种布置导致与现有技术同时且显着的吞吐量和灵敏度增强。 该方法可以进一步增强，其中观察步骤通过在成像平面上的散射图像的适当的相对运动进行以允许过采样。 此外，DMT被显着简化，因为使用成像来电子扫描晶片，而不是使用光机械扫描装置。 具有聚合2000x2000像素分辨率的成像传感器可以将200 mm晶圆成像到100微米间距。