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    High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
    4.
    发明授权
    High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing 有权
    高精度气体轴承分轴台，用于在加工过程中运输和约束大型平面柔性介质

    公开(公告)号：US07137309B2

    公开(公告)日：2006-11-21

    申请号：US11249039

    申请日：2005-10-11

    申请人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

    发明人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

    IPC分类号： G01B11/30 ,  G01B21/30 ,  B65G49/05 ,  H01L21/677

    CPC分类号： G02F1/136259 ,  B65G49/061 ,  B65G49/063 ,  B65G2249/04 ,  G01N21/896 ,  G01N21/95 ,  G01N2021/8867 ,  G01N2021/9513 ,  H01L21/67721

    摘要： A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.

    摘要翻译： 模块化分裂轴台用于检查和/或修理适用于LCD / TFT应用的大型平板玻璃介质。 低精度空气台部分可拆卸地安装到位于中心的高精度花岗岩检查/修理部分。 由真空接触器保持的玻璃介质通过气垫从上腹板空气台传送到中央检查/修理部分。 与多孔介质衬垫集成的真空喷嘴在检查或修理期间精确地控制柔性介质在中心部分上方的高度。 实施例包括在检查/修理期间介质静止或移动的结构。 当第二介质正在以流水线操作模式进行检查或修理时，可以装载/卸载第一介质。

    Method and apparatus for flat patterned media inspection
    5.
    发明授权
    Method and apparatus for flat patterned media inspection 有权
    平面图案介质检查的方法和装置

    公开(公告)号：US07386161B2

    公开(公告)日：2008-06-10

    申请号：US10688326

    申请日：2003-10-17

    申请人： Adam Weiss ,  Afsar Saranli

    发明人： Adam Weiss ,  Afsar Saranli

    IPC分类号： G06K9/00

    CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G06T7/001

    摘要： A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

    摘要翻译： 提供并行的低分辨率/高分辨率并行扫描系统和方法作为平面物体的检查系统的扫描过程的改进，例如在面板显示器中使用的大平板，由此较低分辨率缺陷检测有效地重叠并且并行更高分辨率 缺陷审查和分类阶段，自动定义和解决缺陷。 虽然本发明是用于光学检查扁平制品的表面以获得缺陷的更普遍的问题的有效解决方案，但是本发明特别适用于在沉积有用于形成LCD平板显示器的集成电路的大型玻璃板上检测图案缺陷。

    Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
    6.
    发明申请
    Inspection of TFT LCD panels using on-demand automated optical inspection sub-system 有权
    使用按需自动光学检测子系统检查TFT液晶面板

    公开(公告)号：US20050254045A1

    公开(公告)日：2005-11-17

    申请号：US10846457

    申请日：2004-05-14

    申请人： Adam Weiss ,  Afsar Saranli

    发明人： Adam Weiss ,  Afsar Saranli

    IPC分类号： G01N21/88 ,  G01N21/95

    CPC分类号： G01N21/95 ,  G01N2021/9513

    摘要： In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.

    摘要翻译： 在用于TFT-LCD面板的电气和电光检查的检查系统中，具有脉冲照明源的精细分辨率区域成像照相机，用于扫描该区域并且用短照明脉冲照射的区域的操作捕获图像并自动维持 不断扫描，以解决缺陷点。

    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
    7.
    发明授权
    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering 失效
    使用动态可编程光学空间滤波对大平面图案化介质进行高通量检测的方法和装置

    公开(公告)号：US07180084B2

    公开(公告)日：2007-02-20

    申请号：US11377080

    申请日：2006-03-15

    申请人： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    发明人： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    IPC分类号： G01N21/86 ,  G01N21/00 ,  H01J3/14

    CPC分类号： G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

    摘要： In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

    摘要翻译： 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

    Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
    9.
    发明授权
    Inspection of TFT LCD panels using on-demand automated optical inspection sub-system 有权
    使用按需自动光学检测子系统检查TFT液晶面板

    公开(公告)号：US07084970B2

    公开(公告)日：2006-08-01

    申请号：US10846457

    申请日：2004-05-14

    申请人： Adam Weiss ,  Afsar Saranli

    发明人： Adam Weiss ,  Afsar Saranli

    IPC分类号： G01N21/00

    CPC分类号： G01N21/95 ,  G01N2021/9513

    摘要： In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.

    摘要翻译： 在用于TFT-LCD面板的电气和电光检查的检查系统中，具有脉冲照明源的精细分辨率区域成像照相机，用于扫描该区域并且用短照明脉冲照射的区域的操作捕获图像并自动维持 不断扫描，以解决缺陷点。

    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
    10.
    发明授权
    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering 失效
    使用动态可编程光学空间滤波对大平面图案化介质进行高通量检测的方法和装置

    公开(公告)号：US07041998B2

    公开(公告)日：2006-05-09

    申请号：US10396760

    申请日：2003-03-24

    申请人： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    发明人： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    IPC分类号： G01N21/86 ,  G01N21/00

    CPC分类号： G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

    摘要： In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

    摘要翻译： 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。