公开(公告)号：US20080094081A1

公开(公告)日：2008-04-24

申请号：US11875655

申请日：2007-10-19

申请人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

发明人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

IPC分类号： G01R31/302

CPC分类号： G09G3/006 ,  G02F2001/136254

摘要： A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.

摘要翻译： 系统执行平面介质的连续全线性扫描。 该系统部分地包括卡盘以及至少第一，第二和第三门架。 在测试期间卡盘适于支撑平面介质。 第一机架包括至少一个线性阵列的非接触式传感器，它们跨过平坦介质的宽度并且适于在平坦介质的整个长度上移动。 第二和第三门架中的每一个包括跨越平坦介质的宽度的探头，并且每个都适于将电信号施加到平坦介质。 每个探针头还适于在第一台架运动期间以及在连续施加测试信号的同时沿着基本上垂直于平坦介质的表面的方向移动。

公开(公告)号：US07543867B2

公开(公告)日：2009-06-09

申请号：US11389556

申请日：2006-03-23

申请人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

发明人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

IPC分类号： B66C1/02

CPC分类号： B65G49/061 ,  B65G49/065 ,  B65G2249/045 ,  Y10T279/11

摘要： A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad. The vacuum gripper also includes a first air bearing surrounding the portion of the shaft proximal to the vacuum pad, a second air bearing surrounding the portion of the shaft distal to the vacuum pad, and an air source in fluid communication with the first air bearing and the second air bearing. The vacuum gripper further includes an exhaust port, a valve in fluid communication with the exhaust port, and a first flow restrictor in fluid communication with the valve.

摘要翻译： 用于基板定位操作的真空夹具包括适于与基板接触的真空垫和连接到真空垫的轴。 该轴的特征在于轴的靠近真空垫的一部分处的第一直径和远离真空垫的轴的一部分处的第二直径。 真空夹具还包括围绕靠近真空垫的轴的部分的第一空气轴承，围绕真空垫远端的轴的部分的第二空气轴承，以及与第一空气轴承流体连通的空气源和 第二个空气轴承。 真空夹具还包括排气口，与排气口流体连通的阀，以及与阀流体连通的第一限流器。

公开(公告)号：US07468611B2

公开(公告)日：2008-12-23

申请号：US11875655

申请日：2007-10-19

申请人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

发明人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

IPC分类号： G01R31/00 ,  G01R31/02

CPC分类号： G09G3/006 ,  G02F2001/136254

摘要： A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.

摘要翻译： 系统执行平面介质的连续全线性扫描。 该系统部分地包括卡盘以及至少第一，第二和第三门架。 在测试期间卡盘适于支撑平面介质。 第一机架包括至少一个线性阵列的非接触式传感器，它们跨过平坦介质的宽度并且适于在平坦介质的整个长度上移动。 第二和第三门架中的每一个包括跨越平坦介质的宽度的探头，并且每个都适于将电信号施加到平坦介质。 每个探针头还适于在第一台架运动期间以及在连续施加测试信号的同时沿着基本上垂直于平坦介质的表面的方向移动。

公开(公告)号：US09103876B2

公开(公告)日：2015-08-11

申请号：US13521034

申请日：2011-01-07

申请人： Kent Nguyen ,  Kaushal Gangakhedkar ,  David Baldwin ,  Nile Light ,  Steve Aochi ,  Yan Wang ,  Atila Ersahin ,  Hai Tran ,  Thomas H. Bailey ,  Kiran Jitendra ,  Alan Cable ,  Dave Smiley ,  Thomas E. Wishard

发明人： Kent Nguyen ,  Kaushal Gangakhedkar ,  David Baldwin ,  Nile Light ,  Steve Aochi ,  Yan Wang ,  Atila Ersahin ,  Hai Tran ,  Thomas H. Bailey ,  Kiran Jitendra ,  Alan Cable ,  Dave Smiley ,  Thomas E. Wishard

IPC分类号： G01R31/28

CPC分类号： G01R31/2893

摘要： A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.

摘要翻译： 用于便于检查被测设备的探针系统。 系统集成了一个存储架; 探针龙门架组件; 探针组件，被配置为使被测设备电气匹配; 以及用于从存储架拾取探针组件并将探针组件传送到探棒台架的机器人系统。 机器人系统还能够从探针台架上挑取探头组件，并将探头组件传送到存储架。 探针组件包括用于将探针组件附接到探针台架或存储架的夹紧组件。 探针组件可以包括接头销的阵列，其被配置为当探针组件安装在探针杆架架组件上时与被测器件上的导电焊盘配合。

公开(公告)号：US20120319713A1

公开(公告)日：2012-12-20

申请号：US13521034

申请日：2011-01-07

申请人： Kent Nguyen ,  Kaushal Gangakhedkar ,  David Baldwin ,  Nile Light ,  Steve Aochi ,  Yan Wang ,  Atila Ersahin ,  Hai Tran ,  Thomas H. Bailey ,  Kiran Jitendra ,  Alan Cable ,  Dave Smiley ,  Thomas E. Wishard

发明人： Kent Nguyen ,  Kaushal Gangakhedkar ,  David Baldwin ,  Nile Light ,  Steve Aochi ,  Yan Wang ,  Atila Ersahin ,  Hai Tran ,  Thomas H. Bailey ,  Kiran Jitendra ,  Alan Cable ,  Dave Smiley ,  Thomas E. Wishard

IPC分类号： G01R31/20 ,  G01K1/00 ,  G01J1/00

CPC分类号： G01R31/2893

摘要： A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.

摘要翻译： 用于便于检查被测设备的探针系统。 系统集成了一个存储架; 探针龙门架组件; 探针组件，被配置为使被测设备电气匹配; 以及用于从存储架拾取探针组件并将探针组件传送到探棒台架的机器人系统。 机器人系统还能够从探针台架上挑取探头组件，并将探头组件传送到存储架。 探针组件包括用于将探针组件附接到探针台架或存储架的夹紧组件。 探针组件可以包括接头销的阵列，其被配置为当探针组件安装在探针杆架架组件上时与被测器件上的导电焊盘配合。

公开(公告)号：US20080014075A1

公开(公告)日：2008-01-17

申请号：US11389556

申请日：2006-03-23

申请人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

发明人： Digby Pun ,  Kent Nguyen ,  Robert Barnett

IPC分类号： B65H1/00

CPC分类号： B65G49/061 ,  B65G49/065 ,  B65G2249/045 ,  Y10T279/11

摘要： A method of manipulating a substrate comprising gripping a lower surface of the substrate with a master vacuum gripper mounted on a first motorized stage. The master vacuum gripper is adapted to rotate about a Z-axis. The method also includes gripping the lower surface of the substrate with a slave vacuum gripper mounted on a second motorized stage. The slave vacuum gripper is also adapted to rotate about the Z-axis. The method further includes actuating the second motorized stage in a first direction, thereby causing the slave vacuum gripper to move laterally in both the first direction and a second direction and the master vacuum gripper to rotate about the Z-axis.

摘要翻译： 一种操纵基材的方法，包括用安装在第一电动载物台上的主真空夹具夹紧基材的下表面。 主真空吸嘴适于围绕Z轴旋转。 该方法还包括用安装在第二电动平台上的从动真空夹具夹持基板的下表面。 从属真空夹具也适于围绕Z轴旋转。 该方法还包括在第一方向上致动第二电动平台，从而使从属真空夹具在第一方向和第二方向上横向移动，并且主真空夹具围绕Z轴旋转。