METHODS AND SYSTEMS FOR PRODUCTION OF DOPED CARBON NANOMATERIALS

    公开(公告)号:US20230078544A1

    公开(公告)日:2023-03-16

    申请号:US18053257

    申请日:2022-11-07

    申请人: C2CNT LLC

    发明人: Stuart LICHT

    摘要: A system and process for producing doped carbon nanomaterials is disclosed. A carbonate electrolyte including a doping component is provided during the electrolysis between an anode and a cathode immersed in carbonate electrolyte contained in a cell. The carbonate electrolyte is heated to a molten state. An electrical current is applied to the anode, and cathode, to the molten carbonate electrolyte disposed between the anode and cathode. A morphology element maximizes carbon nanotubes, versus graphene versus carbon nano-onion versus hollow carbon nano-sphere nanomaterial product. The resulting carbon nanomaterial growth is collected from the cathode of the cell.

    METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES

    公开(公告)号:US20230026114A1

    公开(公告)日:2023-01-26

    申请号:US17692561

    申请日:2022-03-11

    IPC分类号: H01L21/027 C01B32/16 G03F1/64

    摘要: Methods for preparing a nanotube membrane for use in a pellicle membrane using dry printing are disclosed. Nanotube fibers are produced in a reaction vessel and dry sprayed onto a filter to form the nanotube membrane. The thickness of the nanotube membrane can be controlled by moving the reaction vessel and the filter relative to each other, or by further processing to reduce the thickness of the layer deposited onto the filter. This method reduces the number of process steps, reducing overall production time, and can also be used to produce larger membranes. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.

    Stretchable film structure and method of making the same

    公开(公告)号:US11319210B2

    公开(公告)日:2022-05-03

    申请号:US16379287

    申请日:2019-04-09

    IPC分类号: B32B9/00 C01B32/16 B82Y30/00

    摘要: A method of making a stretchable film structure is provided. An elastic substrate is pre-stretched in a first direction and a second direction to obtain a pre-stretched elastic substrate. A carbon nanotube film structure is laid on a surface of the pre-stretched elastic substrate. The carbon nanotube film structure comprises a plurality of super-aligned carbon nanotube films stacked with each other. The pre-stretching the elastic substrate is removed and a plurality of wrinkles is formed on a surface of the carbon nanotube film structure to form the stretchable film structure. The present disclosure also relates to the stretchable film structure obtained by the above method.