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公开(公告)号：US20090161130A1
公开(公告)日：2009-06-25
申请号：US12333627
申请日：2008-12-12
申请人： Hidehisa Mabuchi , Tsuyoshi Shibata
发明人： Hidehisa Mabuchi , Tsuyoshi Shibata
IPC分类号： G06F15/00
CPC分类号： G06F15/00 , B41J19/142 , B41J29/02 , B41J29/393
摘要： There is provided an ink jet printing apparatus in which unevenness that may occur at the edges of printing areas can be reduced also for various printing media including unspecified printing media. In the ink jet printing apparatus which uses a print head for ejecting ink and performs printing by scanning a predetermined area on a printing medium with the print head multiple times, the multiple times of scan including a forward scan and a backward scan, the apparatus comprising: a control unit that cases the print head to print patterns each of which is printed through multiple times of scan of the print head and has different portions in a time interval between the multiple times of scan, with different printing ratios for the multiple times of scan; and a setting unit that sets the printing ratios based on the test patterns.
摘要翻译： 提供了一种喷墨打印设备，其中，对于包括未指定的打印介质的各种打印介质，可以减少在打印区域的边缘处可能发生的不均匀性。 在使用用于喷墨的打印头并通过在打印头上多次扫描打印介质上的预定区域进行打印的喷墨打印设备中，包括正扫描和反向扫描的多次扫描包括 ：控制单元，其将打印头设置为打印通过打印头的多次扫描打印的图案，并且在多次扫描之间的时间间隔中具有不同的部分，具有不同的打印倍数 扫描 以及设置单元，其基于测试图案来设置打印率。
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公开(公告)号：US07517052B2
公开(公告)日：2009-04-14
申请号：US11007384
申请日：2004-12-08
申请人： Satoshi Wada , Makoto Akahira , Tsuyoshi Shibata , Hiromitsu Yamaguchi , Yoshitomo Marumoto , Ryoki Jahana , Yasunori Fujimoto , Takashi Ochiai , Eri Goto
发明人： Satoshi Wada , Makoto Akahira , Tsuyoshi Shibata , Hiromitsu Yamaguchi , Yoshitomo Marumoto , Ryoki Jahana , Yasunori Fujimoto , Takashi Ochiai , Eri Goto
CPC分类号： B41J2/155 , B41J2202/20
摘要： A spliced ink-jet head including head chips, each of which is capable of discharging inks of two or more colors, and which are spliced in a staggered manner which restrains the occurrence of splice streaks, white streaks caused by deflection at ends or uneven colors attributable to different landing orders of ink droplets in spliced portions of different colors when one-pass recording is carried out. The head chips is arranged such that, in a relationship between two adjoining head chips, at least one discharge port of one head chip and one discharge port of the other head chip for the same color tone ink in end portions overlap on a line in a recording material feeding direction, while discharge ports for different color tone inks do not overlap.
摘要翻译： 一种拼接式喷墨头，其包括头部芯片，每个头部芯片能够排出两种或更多种颜色的油墨，并且以交错方式拼接，这限制了拼接条纹的出现，由端部偏转引起的白色条纹或不均匀的颜色 归因于执行单遍记录时不同颜色的拼接部分中墨滴的不同着陆顺序。 头芯片被布置成使得在两个邻接的头部芯片之间的关系中，一个头部芯片的至少一个排出口和另一个头部芯片的一个排出口用于在端部中的相同色调墨水在一条线上重叠 记录材料供给方向，而不同色调油墨的排出口不重叠。
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63.发明申请Baking apparatus, substrate heat treatment method and semiconductor device manufacturing method for using baking apparatus, pattern forming method and semiconductor device manufacturing method for using pattern forming method 审中-公开烘烤装置，基板热处理方法和使用烘烤装置的半导体装置制造方法，图案形成方法和使用图案形成方法的半导体装置制造方法公开(公告)号：US20080096142A1
公开(公告)日：2008-04-24
申请号：US11907352
申请日：2007-10-11
申请人： Tsuyoshi Shibata , Yuuji Kobayashi
发明人： Tsuyoshi Shibata , Yuuji Kobayashi
IPC分类号： G03F7/40
CPC分类号： H01L21/67259 , G03F7/40 , H01L21/67253
摘要： A baking apparatus according to one embodiment of the invention includes a hotplate which performs heat treatment to a substrate placed on the hotplate, a base which has at least three support pins passing through through-holes made in the hotplate and supporting the substrate on the hotplate from a backside of the substrate and is vertically movably placed, and a plurality of sensors which are provided at a tip portion of each support pin respectively and sense contact with the substrate. A pattern forming method according to one embodiment of the invention includes forming an antireflection film and a resist film on a substrate to be processed and forming a resist pattern by performing pattern exposing. onto the resist film, baking, and development process (S01 to S06) measuring a dimension of a predetermined monitor pattern after the formation of the resist pattern (S07), and controlling a heat treatment condition of the resist pattern to deform the resist pattern on the basis of information obtained by measurement of the monitor pattern so that the resist pattern becomes the desired dimension (S08-S13).
摘要翻译： 根据本发明的一个实施例的烘烤装置包括对放置在加热板上的基底进行热处理的加热板，底座具有至少三个支撑销穿过在加热板中制成的通孔并将基板支撑在加热板上 从基板的背面向上方移动地配置多个传感器，分别设置在各支撑销的前端部，并与基板进行感应接触。 根据本发明的一个实施例的图案形成方法包括在待处理的基板上形成抗反射膜和抗蚀剂膜，并通过进行图案曝光形成抗蚀剂图案。 在形成抗蚀剂图案之后测量预定的监测图案的尺寸的抗蚀剂膜，烘烤和显影处理（S 01至S 06）（S 07），并且控制抗蚀剂图案的热处理条件使其变形 基于通过测量监视器图案获得的信息，使得抗蚀剂图案变为期望的尺寸（S 08 -S 13）。
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公开(公告)号：US07327503B2
公开(公告)日：2008-02-05
申请号：US10281967
申请日：2002-10-29
CPC分类号： B41J2/0451 , B41J2/04558 , B41J2/0458 , B41J2/16579 , B41J2/2146 , B41J29/393
摘要： A method of preventing image degradation due to nonejecting nozzles of a recording head is provided for an inkjet recording apparatus for recording images by ejecting ink from plural nozzles disposed in the recording head. The method according to the present invention includes the steps of measuring and recording a pattern for checking an ejection state of the head, determining a nonejecting nozzle from the pattern, obtaining density distribution for each nozzle, and determining a complementary table for every nozzle from the density distribution in the nonejecting nozzle portion for performing different-color complementing.
摘要翻译： 提供了一种用于防止由于记录头的喷嘴引起的图像劣化的方法用于通过从设置在记录头中的多个喷嘴喷射墨水来记录图像的喷墨记录装置。 根据本发明的方法包括以下步骤：测量和记录用于检查头部的喷射状态的图案，从图案确定不喷射喷嘴，获得每个喷嘴的密度分布，以及从每个喷嘴确定每个喷嘴的互补表 用于进行不同颜色的补充的非注射喷嘴部分的密度分布。
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公开(公告)号：US07296868B2
公开(公告)日：2007-11-20
申请号：US11443032
申请日：2006-05-31
CPC分类号： B41J2/2132
摘要： In an ink jet printing apparatus in which satellites are produced, it is an object to minimize image impairments caused by the satellites in a variety of print modes. To this end, index patterns are prepared which have different sizes for different print modes. This enables satellites to land at print positions of main dots in other pixels in any of the print modes that have different distances between main dots and satellites. It is therefore possible to minimize image impairments caused by the satellites and to output a crisp image.
摘要翻译： 在制造卫星的喷墨打印设备中，其目的是使各种打印模式中的卫星造成的图像损伤最小化。 为此，准备了针对不同打印模式具有不同尺寸的索引图案。 这使得卫星能够在主要点和卫星之间具有不同距离的任何打印模式中的其他像素中的主要点的打印位置落地。 因此，可以使由卫星引起的图像损伤最小化并输出清晰的图像。
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66.发明申请HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND COMPUTER READABLE STORAGE MEDIUM 失效热处理设备，热处理方法和计算机可读存储介质公开(公告)号：US20070181557A1
公开(公告)日：2007-08-09
申请号：US11626666
申请日：2007-01-24
申请人： Takahisa OTSUKA , Tsuyoshi Shibata
发明人： Takahisa OTSUKA , Tsuyoshi Shibata
CPC分类号： H01L21/67109 , H01L21/67173 , H01L21/67207 , H01L21/67748 , H01L21/68771
摘要： In the present invention, a plurality of heat treatment units are arranged side by side in a linear form and a substrate transfer mechanism for transferring the substrate between the heat treatment units is provided in a heat treatment apparatus. The substrate is sequentially heat-treated in the arrangement order, whereby one heat treatment as a whole is dividedly and successively performed in the plurality of heat treatment units. This allows substrates to be heat-treated along the same route and uniforms the thermal history among the substrates. At the time when heat-treating a plurality of substrates the present invention causes less variation in thermal history among the substrates as compared to the case of parallel heat treatments.
摘要翻译： 在本发明中，多个热处理单元并列配置为线状，并且在热处理装置中设置有用于将基板转印到热处理单元之间的基板输送机构。 基板按照排列顺序进行依次热处理，由此在多个热处理单元中，一个热处理作为整体分开依次进行。 这使得基板沿着相同的路线被热处理并使基板之间的热历史均匀化。 当热处理多个基板时，与平行热处理的情况相比，本发明在基板之间的热历史变化较小。
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67.发明授权公开(公告)号：US07201462B2
公开(公告)日：2007-04-10
申请号：US10622479
申请日：2003-07-21
IPC分类号： B41J29/393 , B41J29/38 , B41J2/205
CPC分类号： B41J2/2139 , H04N1/4015
摘要： An ink jet printing apparatus, which can prevent unwanted visible bands or stripes from appearing in a printed image, performs a nozzle information generation step for generating nozzle information representing an ejection characteristic of each nozzle, according to a landing state on a print medium of an ink droplet ejected from each nozzle of the print head; an estimation step for estimating, based on the generated nozzle information and the print data, an effect that the ink droplet ejected from each nozzle has on the image to be formed; a correction information generation step for generating correction information to correct an ink ejection condition of each nozzle according to a result of estimation by the estimation step; and a control step for controlling a driving of the nozzles according to the correction information.
摘要翻译： 可以防止不必要的可见条带出现在打印图像中的喷墨打印装置根据印刷介质上的着陆状态执行喷嘴信息生成步骤，用于产生表示每个喷嘴的喷射特性的喷嘴信息 墨滴从打印头的每个喷嘴喷出; 用于基于所生成的喷嘴信息和打印数据来估计从每个喷嘴喷射的墨滴对要形成的图像的影响的估计步骤; 校正信息生成步骤，用于根据估计步骤的估计结果产生校正信息以校正每个喷嘴的喷墨条件; 以及控制步骤，用于根据校正信息来控制喷嘴的驱动。
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公开(公告)号：US20060274098A1
公开(公告)日：2006-12-07
申请号：US11443032
申请日：2006-05-31
IPC分类号： B41J2/205
CPC分类号： B41J2/2132
摘要： In an ink jet printing apparatus in which satellites are produced, it is an object to minimize image impairments caused by the satellites in a variety of print modes. To this end, index patterns are prepared which have different sizes for different print modes. This enables satellites to land at print positions of main dots in other pixels in any of the print modes that have different distances between main dots and satellites. It is therefore possible to minimize image impairments caused by the satellites and to output a crisp image.
摘要翻译： 在制造卫星的喷墨打印设备中，其目的是使各种打印模式中的卫星造成的图像损伤最小化。 为此，准备了针对不同打印模式具有不同尺寸的索引图案。 这使得卫星能够在主要点和卫星之间具有不同距离的任何打印模式中的其他像素中的主要点的打印位置落地。 因此，可以使由卫星引起的图像损伤最小化并输出清晰的图像。
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公开(公告)号：US20060110687A1
公开(公告)日：2006-05-25
申请号：US11266197
申请日：2005-11-04
申请人： Kenji Kawano , Tsuyoshi Shibata , Kei Hayasaki
发明人： Kenji Kawano , Tsuyoshi Shibata , Kei Hayasaki
CPC分类号： G03F7/38 , G03F7/2004 , G03F7/2006 , G03F7/2008 , G03F7/3021 , G03F7/70425 , G03F7/70558 , G03F7/70783
摘要： A pattern forming method is disclosed, which comprises forming a photo resist film on a substrate, irradiating the photo resist film with an energy ray to form a desired latent image pattern, placing the substrate on a spacer provided on a hot plate, heating the photo resist film by using the hot plate, and developing the photo resist film to form a photo resist pattern, wherein an amount of irradiation of the energy ray is set such that the amount of irradiation of the energy ray in an exposure region in which a distance between a back surface of the substrate and an upper surface of the hot plate is long is larger than the amount of irradiation of the energy ray in an exposure region in which a distance between the back surface of the substrate and the upper surface of the hot plate is short.
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70.发明申请公开(公告)号：US20060007420A1
公开(公告)日：2006-01-12
申请号：US11174722
申请日：2005-07-06
申请人： Shinichi Ito , Tsuyoshi Shibata
发明人： Shinichi Ito , Tsuyoshi Shibata
IPC分类号： G03B27/42
CPC分类号： G03F7/70991 , G03F7/70341 , G03F7/70858 , G03F7/70916 , G03F7/70925
摘要： A lithography apparatus includes a resist processing apparatus to perform a process of applying a resist on a substrate, a process of heating a resist film on the substrate, and a process of developing the resist film on the substrate, an immersion exposure apparatus including a projection optical system which projects an image of a pattern on a photomask onto the resist film and configured to perform exposure through liquid located on an optical path between the projection optical system and resist film, a transporting apparatus connected to the resist processing and immersion exposure apparatuses to perform transportation of the substrate between the resist processing and immersion exposure apparatuses, and a temperature/humidity control apparatus configured to control at least one of temperature and humidity in at least one of the resist processing and transporting apparatuses based on temperature and humidity or the in humidity the immersion exposure apparatus.
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