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    PATTERN TREATMENT METHODS
    61.
    发明申请
    PATTERN TREATMENT METHODS 有权
    模式处理方法

    公开(公告)号：US20160357109A1

    公开(公告)日：2016-12-08

    申请号：US15172228

    申请日：2016-06-03

    Applicant: Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC

    Inventor： Vipul Jain ,  Mingqi Li ,  Huaxing Zhou ,  Jong Keun Park ,  Phillip D. Hustad ,  Jin Wuk Sung

    IPC: G03F7/40 ,  G03F7/38 ,  G03F7/32 ,  G03F7/20

    CPC classification number: G03F7/165 ,  C08F293/00 ,  C09D153/00 ,  G03F7/002 ,  G03F7/0397 ,  G03F7/168 ,  G03F7/20 ,  G03F7/325 ,  G03F7/40 ,  G03F7/405 ,  H01L21/0274

    Abstract: Pattern treatment methods comprise: (a) providing a semiconductor substrate comprising a patterned feature on a surface thereof; (b) applying a pattern treatment composition to the patterned feature, wherein the pattern treatment composition comprises a block copolymer and a solvent, wherein the block copolymer comprises a first block and a second block, wherein the first block comprises a unit formed from a first monomer comprising an ethylenically unsaturated polymerizable group and a hydrogen acceptor group, wherein the hydrogen acceptor group is a nitrogen-containing group, and the second block comprises a unit formed from a second monomer comprising an ethylenically unsaturated polymerizable group and an aromatic group, provided that the second monomer is not styrene; and (c) rinsing residual pattern treatment composition from the substrate, leaving a portion of the block copolymer bonded to the patterned feature. The methods find particular applicability in the manufacture of semiconductor devices for providing high resolution patterns.

    Abstract translation: 图案处理方法包括：（a）在其表面上提供包括图案化特征的半导体衬底; （b）将图案处理组合物施加到所述图案化特征，其中所述图案处理组合物包含嵌段共聚物和溶剂，其中所述嵌段共聚物包含第一嵌段和第二嵌段，其中所述第一嵌段包含由第一嵌段 包含烯键式不饱和可聚合基团和氢受体基团的单体，其中所述氢受体基团是含氮基团，并且所述第二嵌段包含由包含烯属不饱和可聚合基团和芳族基团的第二单体形成的单元，条件是 第二单体不是苯乙烯; 和（c）从基材漂洗残余图案处理组合物，使一部分嵌段共聚物结合到图案化特征。 该方法在用于提供高分辨率图案的半导体器件的制造中具有特别的适用性。

    COPOLYMER FORMULATION FOR DIRECTED SELF ASSEMBLY, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME
    63.
    发明申请
    COPOLYMER FORMULATION FOR DIRECTED SELF ASSEMBLY, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME 审中-公开
    用于方向自组装的共聚物配方，其制造方法和包含其的制品

    公开(公告)号：US20160186002A1

    公开(公告)日：2016-06-30

    申请号：US14944469

    申请日：2015-11-18

    Applicant: Rohm and Haas Electronic Materials LLC ,  Dow Global Technologies LLC

    Inventor： Phillip D. Hustad ,  Jieqian Zhang ,  Peter Trefonas, III

    IPC: C09D153/00 ,  C09D133/12

    CPC classification number: C08L53/00 ,  B81C2201/0149 ,  C08L33/12

    Abstract: Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer comprising a polymer wherein the surface tension of the polymer with the first polymer and the surface tension of the polymer with the second polymer are both lower than the surface tension between the first polymer and second polymer; where the additive polymer comprises a reactive functional moiety that forms a bond or a complex or a coordinate with the substrate upon being disposed on the substrate; where the reactive functional moiety is unreacted when it is a part of the composition; and a solvent.

    Abstract translation: 本文公开了包含嵌段共聚物的组合物; 其中所述嵌段共聚物包含第一聚合物和第二聚合物; 其中嵌段共聚物的第一聚合物和第二聚合物彼此不同，并且嵌段共聚物形成相分离结构; 包含聚合物的添加剂聚合物，其中聚合物与第一聚合物的表面张力和聚合物与第二聚合物的表面张力都低于第一聚合物和第二聚合物之间的表面张力; 其中所述添加剂聚合物包含在被布置在所述基材上时与所述基材形成键或复合物或坐标的反应性官能部分; 其中反应性官能部分当其为组合物的一部分时未反应; 和溶剂。

    Processes of controlling molecular weight distribution in ethylene/α-olefin compositions
    64.
    发明授权
    Processes of controlling molecular weight distribution in ethylene/α-olefin compositions 有权
    控制乙烯/α-烯烃组合物中分子量分布的方法

    公开(公告)号：US08969495B2

    公开(公告)日：2015-03-03

    申请号：US13744689

    申请日：2013-01-18

    Applicant: Dow Global Technologies LLC

    Inventor： Phillip D. Hustad ,  Roger L. Kuhlman ,  Robert D. J. Froese ,  Timothy T. Wenzel ,  Joseph N. Coalter, III

    IPC: C08F210/16 ,  C08F4/642 ,  C08F4/76 ,  C08F10/00 ,  C08F4/659

    CPC classification number: C08F4/76 ,  C08F4/65908 ,  C08F10/00 ,  C08F210/16 ,  C08F2400/02 ,  C08F2/38 ,  C08F2/00 ,  C08F4/64144 ,  C08F210/14 ,  C08F2500/12 ,  C08F2500/04 ,  C08F4/64079 ,  C08F4/64041

    Abstract: The present invention relates to compositions and processes of making ethylene/α-olefins. More particularly, the invention relates to processes of producing ethylene/α-olefin compositions having a controlled molecular weight distribution. The molecular weight distribution is controlled, for example, by controlling the relative monomer concentrations during contact with a pre-catalyst and/or using a catalyst comprising a catalytic amount of a molecule having the structure: wherein M=group 2-8 metal, preferably group 4 as a neutral or charged moiety; Y=any substituent including fused rings; L=any ligating group, especially a pyridyl or pyridylamide; X=alkyl, aryl, substituted alkyl, H or hydride, halide, or other anionic moiety; y=an integer from 0 to the complete valence of M; R=alkyl, aryl, haloalkyl, haloaryl, hydrogen, etc; x=1-6, especially 2; Dashed line=optional bond, especially a weak bond; and X and (CR2)x may be tethered or part of a ring.

    Abstract translation: 本发明涉及制备乙烯/α-烯烃的组合物和方法。 更具体地说，本发明涉及生产具有受控分子量分布的乙烯/α-烯烃组合物的方法。 分子量分布例如通过控制与预催化剂接触期间的相对单体浓度和/或使用包含催化量的具有以下结构的分子的催化剂进行控制：其中M = 2-8金属，优选 组4作为中性或带电部分; Y =任何取代基，包括稠环; L =任何连接基团，特别是吡啶基或吡啶基酰胺; X =烷基，芳基，取代的烷基，H或氢化物，卤化物或其它阴离子部分; y =从0到完全化合价的整数; R =烷基，芳基，卤代烷基，卤代芳基，氢等; x = 1-6，特别是2; 虚线=可选债券，特别是弱债券; X和（CR2）x可以是连接的或环的一部分。

    MULTIFUNCTIONAL CHAIN SHUTTLING AGENTS
    68.
    发明申请
    MULTIFUNCTIONAL CHAIN SHUTTLING AGENTS 有权
    多功能链式开关代理

    公开(公告)号：US20130072377A1

    公开(公告)日：2013-03-21

    申请号：US13667129

    申请日：2012-11-02

    Applicant: Dow Global Technologies LLC

    Inventor： Thomas P. Clark ,  Nahrain E. Kamber ,  Sara B. Klamo ,  Phillip D. Hustad ,  David R. Wilson

    IPC: C08F4/52

    CPC classification number: C08F2/38 ,  C08F10/00 ,  C08F10/14 ,  H01M2/1653 ,  H01M10/0525 ,  H01M10/4235 ,  C08F4/64113

    Abstract: The invention generally relates to chain shuttling agents (CSAs), a process of preparing the CSAs, a composition comprising a CSA and a catalyst, a process of preparing the composition, a processes of preparing polyolefins, end functional polyolefins, and telechelic polyolefins with the composition, and the polyolefins, end functional polyolefins, and telechelic polyolefins prepared by the processes.

    Abstract translation: 本发明通常涉及链穿梭剂（CSA），制备CSA的方法，包含CSA和催化剂的组合物，制备组合物的方法，制备聚烯烃，末端官能聚烯烃和遥爪聚烯烃的方法，其中 组合物，以及通过该方法制备的聚烯烃，末端官能聚烯烃和遥爪聚烯烃。

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