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公开(公告)号:US20240393624A1
公开(公告)日:2024-11-28
申请号:US18200643
申请日:2023-05-23
Applicant: GlobalFoundries U.S. Inc.
Inventor: Brian McGowan , Ping-Chuan Wang , Michal Rakowski , Sujith Chandran , Yusheng Bian
IPC: G02F1/01
Abstract: Structures for a thermo-optic phase shifter and methods of forming a thermo-optic phase shifter. The structure comprises an interconnect structure including a dielectric layer, a waveguide core on the dielectric layer, and a heater on the dielectric layer. The heater includes a resistive heating element positioned adjacent to the waveguide core.
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公开(公告)号:US20240288631A1
公开(公告)日:2024-08-29
申请号:US18115046
申请日:2023-02-28
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Kevin Dezfulian , Kenneth Giewont , Karen Nummy
IPC: G02B6/12
CPC classification number: G02B6/12004 , G02B2006/12061 , G02B6/136
Abstract: Structures for a waveguide escalator and methods of forming such structures. A structure comprises a first waveguide core, and a back-end-of-line stack including a first dielectric layer, a second dielectric layer on the first dielectric layer, an opening in the second dielectric layer, a second waveguide core including a section that overlaps with a section of the first waveguide core, and a plurality of third waveguide cores disposed between the section of the first waveguide core and the section of the second waveguide core. The plurality of third waveguide cores are positioned inside the opening in the second dielectric layer, the first dielectric layer comprises a first material with a first refractive index, and the second dielectric layer comprises a second material with a second refractive index different from the first refractive index.
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公开(公告)号:US20240241314A1
公开(公告)日:2024-07-18
申请号:US18096607
申请日:2023-01-13
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/125 , G02B6/124 , G02B2006/12147
Abstract: Structures for a directional coupler and methods of forming a structure for a directional coupler. The structure comprises a first waveguide core including a first plurality of segments, and a second waveguide core including a second plurality of segments disposed adjacent to the first plurality of segments in a coupling region. The structure further comprises a first cladding layer comprising a first material that has a first refractive index, and a second cladding layer comprising a second material that has a second refractive index different from the first refractive index. The first cladding layer adjoins a first sidewall of each of the first plurality of segments and a first sidewall of each of the second plurality of segments, and the second cladding layer adjoins a second sidewall of each of the first plurality of segments and a second sidewall of each of the second plurality of segments.
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公开(公告)号:US20240219636A1
公开(公告)日:2024-07-04
申请号:US18093039
申请日:2023-01-04
Applicant: GlobalFoundries U.S. Inc.
Inventor: Bartlomiej Jan Pawlak , Oscar D. Restrepo , Koushik Ramachandran , Yusheng Bian , Eduardo Cruz Silva
CPC classification number: G02B6/1228 , G02B6/13 , G02B2006/12121
Abstract: Structures including an edge coupler and methods of forming such structures. The structure comprises a dielectric layer on a semiconductor substrate. The dielectric layer includes a cavity and an edge defining a boundary of the cavity. The structure further comprises an edge coupler including a waveguide core. The waveguide core includes a portion that extends past the edge of the dielectric layer and overhangs the cavity. The structure further comprises a heater positioned adjacent to the portion of the waveguide core. The heater is spaced by a gap from the portion of the waveguide core.
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公开(公告)号:US20240168199A1
公开(公告)日:2024-05-23
申请号:US17991160
申请日:2022-11-21
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B1/002 , G02B6/1228 , G02B6/125 , G02B6/13
Abstract: Structures for an optical component, such as a polarization splitter rotator, and methods of forming such structures. The structure comprises a waveguide core positioned in a vertical direction over a substrate, and a metamaterial structure positioned in a lateral direction adjacent to the waveguide core. The metamaterial structure including a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps.
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公开(公告)号:US11971572B2
公开(公告)日:2024-04-30
申请号:US17674905
申请日:2022-02-18
Applicant: GlobalFoundries U.S. Inc.
Inventor: Shesh Mani Pandey , Yusheng Bian , Francis O. Afzal
CPC classification number: G02B6/0288 , G02B6/036
Abstract: Disclosed is an optical waveguide including a waveguide core and waveguide cladding surrounding the waveguide core. The waveguide cladding includes at least one stack of cladding material layers positioned laterally adjacent to a sidewall of the waveguide core such that each cladding material layer in the stack abuts the sidewall of the waveguide core. Each of the cladding material layers in the stack has a smaller refractive index than the waveguide core and at least two of the cladding material layers in the stack have different refractive indices, thereby tailoring field confinement and reshaping the optical mode. Different embodiments include different numbers of cladding material layers in the stack, different stacking orders of the cladding material layers, different waveguide core types, symmetric or asymmetric cladding structures on opposite sides of the waveguide core, etc. Also disclosed is a method of forming the optical waveguide.
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公开(公告)号:US20240094465A1
公开(公告)日:2024-03-21
申请号:US17932868
申请日:2022-09-16
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Mark D. Levy , Siva P. Adusumilli , Karen A. Nummy , Zhuojie Wu , Ramsey Hazbun
CPC classification number: G02B6/1228 , G02B6/13
Abstract: The disclosure relates to a PIC structure including a photonic component on a semiconductor substrate. Each of a plurality of optical guard elements are composed of a light absorbing material and are in proximity to the photonic component. The optical guard elements may mimic an outer periphery of at least a portion of the photonic component. The optical guard elements may include at least one of: a germanium body positioned at least partially in a silicon element, a silicon body having a high dopant concentration, and a polysilicon body having a high dopant concentration over the silicon body.
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公开(公告)号:US20240061173A1
公开(公告)日:2024-02-22
申请号:US18384921
申请日:2023-10-30
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Hemant Dixit , Theodore Letavic
CPC classification number: G02B6/122 , G02B6/13 , G02B2006/12061
Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes an optical component having a waveguide core, and multiple features positioned adjacent to the waveguide core. The waveguide core contains a first material having a first thermal conductivity, and the features contain a second material having a second thermal conductivity that is greater than the first thermal conductivity.
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公开(公告)号:US20240027684A1
公开(公告)日:2024-01-25
申请号:US17869065
申请日:2022-07-20
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/125 , G02B6/1228 , G02B6/136 , G02B2006/12061
Abstract: Structures for a waveguide crossing and methods of forming such structures. The structure comprises a first waveguide core including a first section, a second section, and a first longitudinal axis. The first section and the second section are aligned along the first longitudinal axis, the first section is terminated by a first end, the second section is terminated by a second end, and the first end of the first section is longitudinally spaced from the second end of the second section by a gap. The structure further comprises a second waveguide core having a second longitudinal axis angled relative to the first longitudinal axis. The second longitudinal axis of the second waveguide core crosses the first longitudinal axis of the first waveguide core within the gap.
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公开(公告)号:US20240012200A1
公开(公告)日:2024-01-11
申请号:US17861345
申请日:2022-07-11
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/124 , G02B6/1228 , G02B6/13 , G02B2006/12121
Abstract: Structures for a grating that may be deployed in edge coupler and methods of forming such structures. The structure comprises a waveguide core positioned on a substrate. The waveguide core includes a longitudinal axis and a grating having first and second segments positioned along the longitudinal axis in a spaced-apart arrangement. The first segment has a first sidewall sloped at a first angle relative to the longitudinal axis and a second sidewall oriented transverse to the longitudinal axis. The second segment has a first sidewall sloped at a second angle relative to the longitudinal axis and a second sidewall oriented transverse to the longitudinal axis. The first sidewall of the first segment positioned adjacent to the first sidewall of the second segment.
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