METAL FILM PROTECTION DURING PRINTHEAD FABRICATION WITH MINIMUM NUMBER OF MEMS PROCESSING STEPS
    61.
    发明申请
    METAL FILM PROTECTION DURING PRINTHEAD FABRICATION WITH MINIMUM NUMBER OF MEMS PROCESSING STEPS 有权
    在具有最少数量的MEMS处理步骤的打印机制造过程中的金属膜保护

    公开(公告)号:US20090139961A1

    公开(公告)日:2009-06-04

    申请号:US11946840

    申请日:2007-11-29

    IPC分类号: G11B5/127

    摘要: A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) depositing a hydrophobic polymeric layer onto the nozzle surface; (c) depositing a protective metal film onto at least the polymeric layer; (d) depositing a sacrificial material onto the polymeric layer; (e) patterning the sacrificial material to define a plurality of nozzle opening regions; (f) defining a plurality of nozzle openings through the metal film, the polymeric layer and the nozzle plate; (g) subjecting the printhead to an oxidizing plasma; and (h) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face.

    摘要翻译: 一种制造具有疏水墨水喷射面的打印头的方法,所述方法包括以下步骤:(a)提供部分制造的打印头,其包括多个喷嘴室和具有相对亲水喷嘴表面的喷嘴板,喷嘴表面至少 部分地限定打印头的喷墨面; (b)在喷嘴表面上沉积疏水聚合物层; (c)在至少所述聚合物层上沉积保护性金属膜; (d)将牺牲材料沉积到聚合物层上; (e)图案化所述牺牲材料以限定多个喷嘴开口区域; (f)通过金属膜,聚合物层和喷嘴板限定多个喷嘴开口; (g)使打印头经受氧化等离子体; 和(h)去除保护金属膜,由此提供具有相对疏水的喷墨面的打印头。

    METHOD OF HYDROPHOBIZING AND PATTERNING FRONTSIDE SURFACE OF INTEGRATED CIRCUIT
    62.
    发明申请
    METHOD OF HYDROPHOBIZING AND PATTERNING FRONTSIDE SURFACE OF INTEGRATED CIRCUIT 有权
    集成电路的融合和图案融合方法

    公开(公告)号:US20110297643A1

    公开(公告)日:2011-12-08

    申请号:US13212028

    申请日:2011-08-17

    IPC分类号: H05K3/00

    摘要: A method of hydrophobizing a frontside surface of an integrated circuit. The method includes the steps of: (a) depositing a hydrophobic polymeric layer onto the frontside surface; (b) depositing a protective metal film onto the hydrophobic polymeric layer; (c) depositing a sacrificial material onto the metal film; (d) patterning the sacrificial material; (e) etching through the metal film, the hydrophobic polymeric layer and the frontside surface; (f) performing MEMS processing steps on a backside of the integrated circuit; (g) subjecting the integrated circuit to an oxidizing plasma, wherein the metal film protects the hydrophobic polymeric layer from the oxidizing plasma; and (h) removing the protective metal film to provide an integrated circuit having a relatively hydrophobic patterned frontside surface.

    摘要翻译: 一种使集成电路的前侧表面疏水化的方法。 该方法包括以下步骤:(a)将疏水性聚合物层沉积到前侧表面上; (b)在所述疏水性聚合物层上沉积保护性金属膜; (c)在金属膜上沉积牺牲材料; (d)图案化牺牲材料; (e)蚀刻通过金属膜,疏水性聚合物层和前侧表面; (f)在集成电路的背面执行MEMS处理步骤; (g)使集成电路经受氧化等离子体,其中金属膜保护疏水聚合物层免受氧化等离子体的影响; 和(h)去除保护金属膜以提供具有相对疏水的图案化前侧表面的集成电路。

    Microfluidic system comprising mechanically-actuated microfluidic pinch valve
    64.
    发明授权
    Microfluidic system comprising mechanically-actuated microfluidic pinch valve 失效
    微流体系统包括机械致动的微流体夹管阀

    公开(公告)号:US07887756B2

    公开(公告)日:2011-02-15

    申请号:US12142791

    申请日:2008-06-20

    IPC分类号: B01L99/00

    摘要: A microfluidic system. The system comprises: (A) a microfluidics platform comprising: a compliant body having a microfluidic channel defined therein; a valve sleeve defined by a section of the microfluidic channel, the valve sleeve having a membrane wall defining part of an outer surface of the body; and a compression member for pinching the membrane wall against an opposed wall of the valve sleeve; and (B) a MEMS integrated circuit bonded to the outer surface of the body, the MEMS integrated circuit comprising: a moveable finger engaged with the compression member, the finger being configured to urge the compression member between a closed position in which the membrane wall is sealingly pinched against the opposed wall, and an open position in which the membrane wall is disengaged from the opposed wall; a thermal bend actuator associated with the finger, the actuator configured for controlling movement of the finger; and control circuitry for controlling actuation of the actuator so as to control opening and closing of the valve sleeve.

    摘要翻译: 微流体系统。 该系统包括:(A)微流体平台,包括:具有限定在其中的微流体通道的柔顺体; 由所述微流体通道的一部分限定的阀套,所述阀套具有限定所述主体的外表面的一部分的膜壁; 以及压缩构件,其用于将所述膜壁压靠在所述阀套的相对的壁上; 和(B)结合到所述主体的外表面的MEMS集成电路,所述MEMS集成电路包括:与所述压缩构件接合的可移动的手指,所述手指构造成将所述压缩构件推压在闭合位置,在所述闭合位置, 密封地夹在相对的壁上,以及打开位置,其中膜壁与相对的壁分离; 与手指相关联的热弯曲致动器,致动器构造成用于控制手指的移动; 以及用于控制致动器的致动以控制阀套的打开和关闭的控制电路。

    Microfluidic System Comprising Microfluidic Pump, Mixer or Valve
    65.
    发明申请
    Microfluidic System Comprising Microfluidic Pump, Mixer or Valve 失效
    微流控系统包括微流量泵,混合器或阀门

    公开(公告)号:US20090317298A1

    公开(公告)日:2009-12-24

    申请号:US12142792

    申请日:2008-06-20

    IPC分类号: B01J19/00

    摘要: A microfluidic system. The system comprises: (A) a microfluidics platform comprising: a compliant body having a microfluidic channel defined therein; an elongate chamber defined by a section of the microfluidic channel, the chamber having a membrane wall defining part of an outer surface of the body; and a plurality of compression members spaced apart along the membrane wall, each compression member being configured for pinching a respective part of the membrane wall against an opposed wall of the chamber; and (B) a MEMS integrated circuit bonded to the outer surface of the body, the MEMS integrated circuit comprising: a plurality of moveable fingers, each finger engaged with a respective compression member, each finger being configured to urge the respective compression member between a closed position in which the respective part of the membrane wall is sealingly pinched against the opposed wall, and an open position in which the respective part of the membrane wall is disengaged from the opposed wall; a plurality of thermal bend actuators, each associated with a respective finger for controlling movement of the respective finger, and control circuitry for controlling actuation of the actuators.

    摘要翻译: 微流体系统。 该系统包括:(A)微流体平台,包括:具有限定在其中的微流体通道的柔顺体; 由所述微流体通道的一部分限定的细长室,所述室具有限定所述主体的外表面的一部分的膜壁; 以及沿所述膜壁间隔开的多个压缩构件,每个压缩构件构造成用于将所述膜壁的相应部分夹在所述腔室的相对壁上; 和(B)结合到所述主体的外表面的MEMS集成电路,所述MEMS集成电路包括:多个可移动的指状物,每个手指与相应的压缩构件接合,每个指状物构造成将相应的压缩构件在一个 闭合位置,其中膜壁的相应部分被密封地夹在相对的壁上,以及打开位置,其中膜壁的相应部分与相对的壁分离; 多个热弯曲致动器,每个热弯曲致动器各自与用于控制各个手指的运动的相应手指相关联,以及用于控制致动器的致动的控制电路。

    MICROCAPPING OF INKJET NOZZLES
    67.
    发明申请
    MICROCAPPING OF INKJET NOZZLES 审中-公开
    喷墨喷嘴的微型化

    公开(公告)号:US20090147042A1

    公开(公告)日:2009-06-11

    申请号:US12270854

    申请日:2008-11-14

    IPC分类号: B41J2/165

    CPC分类号: B41J2/1433 B41J2/16508

    摘要: An inkjet printer comprising: a printhead comprising a nozzle plate having a plurality of nozzle openings defined therein, said nozzle plate comprising a first relatively hydrophilic layer and a second relatively hydrophobic layer, said second layer defining an ink ejection face for said printhead; and a capper having a planar capping surface, said capper being moveable between a first position in which said capper is disengaged from said printhead and a second position in which said capping surface sealingly engages with said ink ejection face wherein, in said second position, a meniscus of ink contained in each nozzle opening is pinned at an interface between said first and second layers, such that a microwell is defined between said capping surface and said meniscus.

    摘要翻译: 一种喷墨打印机,包括:打印头,其包括具有限定在其中的多个喷嘴开口的喷嘴板,所述喷嘴板包括第一相对亲水层和第二相对疏水层,所述第二层限定用于所述打印头的喷墨面; 以及具有平面封盖表面的封盖器,所述封盖可在第一位置和第二位置之间移动,在第一位置,所述封盖器与所述打印头脱开,所述封盖表面密封地与所述喷墨面接合,其中在所述第二位置, 包含在每个喷嘴开口中的墨水的弯液面被钉在所述第一和第二层之间的界面处,使得在所述封盖表面和所述弯液面之间限定微孔。