公开(公告)号：US20130242294A1

公开(公告)日：2013-09-19

申请号：US13989835

申请日：2011-11-10

申请人： Atsushi Taniguchi ,  Taketo Ueno ,  Shunichi Matsumoto ,  Toshifumi Honda

发明人： Atsushi Taniguchi ,  Taketo Ueno ,  Shunichi Matsumoto ,  Toshifumi Honda

IPC分类号： G01N21/956

CPC分类号： G01N21/95623 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8477

摘要： To prevent overlooking of a defect due to reduction in a defect signal, a defect inspection device is configured such that: light is irradiated onto an object to be inspected on which a pattern is formed; reflected, diffracted, and scattered light generated from the object by the irradiation of the light is collected, such that a first optical image resulting from the light passed through a first spatial filter having a first shading pattern is received by a first detector, whereby a first image is obtained; the reflected, diffracted, and scattered light generated from the object is collected, such that a second optical image resulting from the light passed through a second spatial filter having a second shading pattern is received by a second detector, whereby a second image is obtained; and the first and second images thus obtained are processed integrally to detect a defect candidate(s).

摘要翻译： 为了防止由于缺陷信号的减少而忽视缺陷，缺陷检查装置被配置为使得光被照射到形成有图案的待检查对象上; 收集通过照射光从物体产生的反射，衍射和散射光，使得由通过具有第一阴影图案的第一空间滤光器的光产生的第一光学图像由第一检测器接收，由此 获得第一幅图像; 从物体产生的反射，衍射和散射光被收集，使得由通过具有第二阴影图案的第二空间滤光器的光产生的第二光学图像由第二检测器接收，由此获得第二图像; 并且由此获得的第一和第二图像被整体地处理以检测缺陷候选。

公开(公告)号：US20130114880A1

公开(公告)日：2013-05-09

申请号：US13702696

申请日：2011-05-27

申请人： Shunichi Matsumoto ,  Taketo Ueno ,  Atsushi Taniguchi

发明人： Shunichi Matsumoto ,  Taketo Ueno ,  Atsushi Taniguchi

IPC分类号： G01N21/95

CPC分类号： G01N21/9501 ,  G01B11/303 ,  G01N21/21 ,  G01N21/94 ,  G01N21/956

摘要： In inspecting a substrate having a transparent oxide film or a metal film formed on a surface thereof by using a dark field type inspection apparatus installing a laser light source, an illuminating beam having a high coherence causes variations in reflection strength due to multiple interferences within the transparent oxide film or an interference of scattered beams due to the surface roughness of the metal film occurs and which leads to degradation in the sensitivity of defect detection. The present invention solves the problem by providing a low-coherence but high-brightness illumination using a highly directive broadband light source, and a system in which the conventional laser light source is simultaneously employed to selectively use the light sources, thereby enabling a highly sensitive inspection according to the condition of a wafer.

摘要翻译： 在通过使用安装激光源的暗场型检查装置来检查其表面上具有透明氧化物膜或金属膜的基板时，具有高相干性的照明光束会引起由于内部的多个干涉引起的反射强度的变化 发生透明氧化膜或由于金属膜的表面粗糙度而引起的散射光的干扰，并且导致缺陷检测的灵敏度的劣化。 本发明通过使用高度指示性的宽带光源提供低相干但高亮度照明来解决该问题，并且其中同时采用常规激光光源来选择性地使用光源的系统，从而使得能够高度敏感 根据晶片的状况进行检查。

公开(公告)号：US20110281004A1

公开(公告)日：2011-11-17

申请号：US12944933

申请日：2010-11-12

申请人： Shunichi Matsumoto

发明人： Shunichi Matsumoto

IPC分类号： B65D85/00

CPC分类号： A23L3/04 ,  A23L5/13 ,  A23L7/196 ,  A23L7/1975 ,  B65B9/04 ,  B65B25/001 ,  B65B29/08 ,  B65B55/14 ,  B65B61/06

摘要： A manufacturing method of aseptic packaged food, including filling with food a connected container body 1 in which a plurality of containers are connected with each other; moving the connected container body 1 in the connecting direction of the container part 2 by pushing the connected container body 1 in a connecting direction of the container part 2; performing a predetermined food process to the connected container body 1; sealing the connected container body 1 using a sealing material; and making as a aseptic packaged food 1a by dividing the connected container body 1 into each container part 2.

摘要翻译： 一种无菌包装食品的制造方法，包括：将多个容器彼此连接的连接容器主体1与食品充填; 通过沿着容器部分2的连接方向推动连接的容器主体1，使连接的容器主体1沿容器部分2的连接方向移动; 对所连接的容器主体1执行预定的食品处理; 使用密封材料密封连接的容器主体1; 并通过将连接的容器主体1分成每个容器部分2来制造为无菌包装食品1a。

公开(公告)号：US20110208470A1

公开(公告)日：2011-08-25

申请号：US13067009

申请日：2011-05-02

申请人： Mamoru Yasuda ,  Shunichi Matsumoto ,  Takaya Higashino ,  Eiji Nabika ,  Hayato Takabatake ,  Takuma Ishibashi ,  Takuharu Mizoguchi

发明人： Mamoru Yasuda ,  Shunichi Matsumoto ,  Takaya Higashino ,  Eiji Nabika ,  Hayato Takabatake ,  Takuma Ishibashi ,  Takuharu Mizoguchi

IPC分类号： G06F19/00

CPC分类号： G06F11/3668 ,  G06F11/2273 ,  G06F11/263

摘要： An operation verifying apparatus of a first embodiment acquires a log indicating the content of a sequence of operations performed on a predetermined device, identifies corresponding functions from the log, and automatically generates a program based on the identified functions. Input data, which is to serve as an argument of each of these functions, is set. Execution sets as well as test scenarios are each structured by combining a program and input data. Then each execution set is continuously executed. As a result, an operation test using a test program is executed.

摘要翻译： 第一实施例的操作验证装置获取指示在预定设备上执行的操作序列的内容的日志，从日志中识别相应的功能，并且基于所识别的功能自动生成程序。 设置用作这些功能的参数的输入数据。 执行集以及测试场景各自通过组合程序和输入数据进行结构化。 然后连续执行每个执行集。 结果，执行使用测试程序的操作测试。

公开(公告)号：US20110081470A1

公开(公告)日：2011-04-07

申请号：US12853036

申请日：2010-08-09

申请人： Shunichi Matsumoto

发明人： Shunichi Matsumoto

IPC分类号： A23L3/16

CPC分类号： A23L3/185

摘要： Disclosed is a food sterilization method capable of heat-sterilizing foods uniformly by heating steam irrespectively with a shape of an apparatus. The food sterilization method includes introducing the food into the inside of the heat-sterilizing chamber through the opening of the opening and closing part; discharging the air in the inside of the heat-sterilizing chamber through the air discharging part, close contacting the sealing cover and the heat-sterilizing chamber by absorption force of the air to seal the inside of the heat-sterilizing chamber, and then reducing a pressure in the inside of the heat-sterilizing chamber; closing the air discharging part, supplying the steam from the steam supplying part to the inside of the heat-sterilizing chamber to close contact the sealing cover and the opening of the opening and closing part by a pressure of the steam and thereby seal the opening and closing part and the inside of the heat-sterilizing chamber, and then heat-sterilizing the food introduced into the inside of the heat-sterilizing chamber by the steam supplied from the steam supplying part and at the same time, discharging some of the steam in the inside of the heat-sterilizing chamber through the steam discharging part during the heat-sterilization; closing the steam supplying part, and discharging the steam in the inside of the heat-sterilizing chamber through the steam discharging part; and taking the food out of the heat-sterilizing chamber through the opening of the opening and closing part.

摘要翻译： 公开了一种能够通过加热蒸汽来均匀地对食品进行热灭菌的食品杀菌方法，而不管设备的形状如何。 食品灭菌方法包括通过打开和关闭部分的开口将食物引入到热灭菌室的内部; 通过排气部排出热灭菌室内部的空气，通过空气的吸收力使密封盖和加热消毒室紧密接触，密封热灭菌室的内部，然后减压 热灭菌室内部的压力; 关闭排气部，将蒸汽从蒸汽供给部供给到热灭菌室的内部，通过蒸汽的压力使密封盖与开闭部的开口紧密接触，从而密封开口 关闭部分和内部，然后通过从蒸汽供应部分供应的蒸汽将被引入到灭菌室内部的食品进行热灭菌，同时将一些蒸汽排出 在加热灭菌期间通过蒸汽排出部分的热消毒室的内部; 关闭蒸汽供给部，通过蒸汽排出部排出热灭菌室内部的蒸汽; 并通过打开和关闭部分的开口将食物从热灭菌室排出。

公开(公告)号：US20110020956A1

公开(公告)日：2011-01-27

申请号：US12823024

申请日：2010-06-24

申请人： Kana NEMOTO ,  Shunichi Matsumoto ,  Yasuhiro Yoshitake

发明人： Kana NEMOTO ,  Shunichi Matsumoto ,  Yasuhiro Yoshitake

IPC分类号： H01L21/66 ,  G01B11/24

CPC分类号： G01B11/24 ,  G01B2210/56 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of measuring a pattern shape of performing a shape measurement of a semiconductor pattern at a high accuracy even when a process margin is narrow with respect to miniaturization of a semiconductor device is provided. In the method of measuring a pattern shape, when a best-match calculated waveform cannot be selected, at least one parameter among shape parameters is set as a fixed value based on information obtained by another measurement apparatus that uses a measurement method independent to the pattern shape measurement, a matching of a library and a detected waveform is performed again, a best-match calculated waveform is selected, and shape information of an object pattern is obtained from the best-match calculated waveform.

摘要翻译： 提供了即使当相对于半导体器件的小型化而处理裕度窄时，也可以高精度地测量执行半导体图案的形状测量的图案形状的方法。 在测定图案形状的方法中，当不能选择最佳匹配的计算波形时，基于使用独立于图案的测量方法的另一测量装置获得的信息，将形状参数中的至少一个参数设置为固定值 形状测量，再次执行库和检测波形的匹配，选择最佳匹配计算波形，并根据最佳匹配计算波形获得目标图形的形状信息。

公开(公告)号：US07714955B2

公开(公告)日：2010-05-11

申请号：US12457182

申请日：2009-06-03

申请人： Masaki Tsubokura ,  Hiroshi Obata ,  Shunichi Matsumoto ,  Seigo Abo ,  Yuji Azuma

发明人： Masaki Tsubokura ,  Hiroshi Obata ,  Shunichi Matsumoto ,  Seigo Abo ,  Yuji Azuma

IPC分类号： G02F1/1335

CPC分类号： G02F1/133604 ,  G02F2001/133612

摘要： The present invention provides a liquid crystal display device which reduces the occurrence of a squeal. A liquid crystal display device includes a liquid crystal display panel and a backlight arranged on a back surface of the liquid crystal display panel, wherein the backlight includes a base, a plurality of rod-shaped light sources arranged between the liquid crystal display panel and the base, electrode fittings for supporting electrode portions of the respective rod-shaped light sources, connection portions allowing the plurality of electrode fittings to be connected thereto and extending in the direction orthogonal to the longitudinal direction of the rod-shaped light sources, pushing members for pushing the connection portions toward a base side, and friction sound reducing members arranged between the connection portions and the pushing members and/or between the connection portions and the base side.

摘要翻译： 本发明提供一种减少尖叫声的液晶显示装置。 液晶显示装置包括液晶显示面板和配置在液晶显示面板的背面的背光源，其中背光源包括基底，多个棒状光源配置在液晶显示面板和 用于支撑各个棒状光源的电极部分的电极配件，连接部分，允许多个电极配件连接到其上并在与杆状光源的纵向正交的方向上延伸;推动构件，用于 将连接部朝向基部侧推压，以及布置在连接部和推动部之间和/或连接部和基部侧之间的摩擦减振部件。

公开(公告)号：US20100088042A1

公开(公告)日：2010-04-08

申请号：US12630307

申请日：2009-12-03

申请人： Minori NOGUCHI ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Shunichi Matsumoto ,  Yukio Kembo ,  Ryouji Matsunaga ,  Keiji Sakai ,  Takanori Ninomiya ,  Tetsuyai Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yoshio Morishige ,  Shuichi Chikamatsu

发明人： Minori NOGUCHI ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Shunichi Matsumoto ,  Yukio Kembo ,  Ryouji Matsunaga ,  Keiji Sakai ,  Takanori Ninomiya ,  Tetsuyai Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yoshio Morishige ,  Shuichi Chikamatsu

IPC分类号： G01N21/88 ,  G06F19/00

CPC分类号： B82Y15/00 ,  G01N21/94 ,  G01N21/95623 ,  G01N21/95684 ,  G01N2021/8822 ,  G01R31/308 ,  H01J37/00 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L21/67253 ,  H01L21/67288 ,  H01L21/681 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the specimen, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks diffraction light resulting from patterns formed on the specimen, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the specimen, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.

摘要翻译： 用于检测试样缺陷的装置和方法包括：照射光学单元，其将聚焦在激光束上的激光倾斜投射在试样的表面上;照射单元，其安装试样并可移动的检测光学单元， 图像传感器，由从样本反射的光形成的光的图像，并且通过滤光器，该滤光器阻挡由形成在样本上的图案产生的衍射光;处理从检测光学单元的图像传感器输出的信号提取的信号处理器 样本的缺陷以及显示由信号处理器提取的缺陷的信息的显示单元。 过滤器可调。

公开(公告)号：US07692732B2

公开(公告)日：2010-04-06

申请号：US11672600

申请日：2007-02-08

申请人： Masaki Tsubokura ,  Hiroshi Obata ,  Shunichi Matsumoto ,  Tsuyoshi Suzuki

发明人： Masaki Tsubokura ,  Hiroshi Obata ,  Shunichi Matsumoto ,  Tsuyoshi Suzuki

IPC分类号： G02F1/1333

CPC分类号： G02F1/133308 ,  G02F2001/133311

摘要： The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.

摘要翻译： 本发明防止在液晶显示面板中连接到显示面板的下侧的印刷电路板的腐蚀。 在包括显示面板和支撑显示面板的显示屏的外周部的框架构件的显示装置中，吸水构件以相对的方式粘附在框架构件的面向显示面板的表面 。

公开(公告)号：US20090002695A1

公开(公告)日：2009-01-01

申请号：US12141955

申请日：2008-06-19

申请人： Keiya SAITO ,  Yasuhiro Yoshitake ,  Shunichi Matsumoto ,  Hidetoshi Nishiyama

发明人： Keiya SAITO ,  Yasuhiro Yoshitake ,  Shunichi Matsumoto ,  Hidetoshi Nishiyama

IPC分类号： G01N21/88 ,  G01N23/00

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8861 ,  G02B21/0032 ,  G02B21/0072

摘要： The present invention provides an apparatus and a method for reviewing a defect with high throughput by detecting the defect to be reviewed with high sensitivity, comprising: an optical microscope; a correction means; and a scanning electron microscope which reviews the defect existed on the sample; wherein the optical microscope has: an optical height detection system which optically detects a vertical position of an upper surface of the sample placed on the stage; an illumination optical system which illuminates the defect with light; an image detection optical system which converges and detects reflected light or scattered light generated from the defect illuminated by the illumination optical system to obtain an image signal; and a focus adjusting means which adjusts a focus position of the optical microscope based on the vertical position of the upper surface of the sample, which is detected by the optical height detection system.

摘要翻译： 本发明提供一种通过以高灵敏度检测待检查的缺陷来检查具有高通量的缺陷的装置和方法，包括：光学显微镜; 修正手段; 和扫描电子显微镜检查样品上存在的缺陷; 其中所述光学显微镜具有：光学高度检测系统，其光学地检测放置在所述台上的样品的上表面的垂直位置; 用光照亮缺陷的照明光学系统; 会聚和检测由照明光学系统照射的缺陷产生的反射光或散射光以获得图像信号的图像检测光学系统; 以及焦点调节装置，其基于由光学高度检测系统检测到的样品的上表面的垂直位置来调节光学显微镜的焦点位置。