公开(公告)号：US08342018B2

公开(公告)日：2013-01-01

申请号：US12847881

申请日：2010-07-30

申请人： Liji Huang ,  Kai Peng ,  Changming Jiang ,  Wenhong Deng ,  Chih-Chang Chen

发明人： Liji Huang ,  Kai Peng ,  Changming Jiang ,  Wenhong Deng ,  Chih-Chang Chen

IPC分类号： G01F1/20

CPC分类号： G01F1/6845

摘要： With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.

摘要翻译： 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加，新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计，其与传统的可变区域流量计成本兼容，同时提供所有数字数据处理，包括累积流量测量，用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电，可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口，便于网络和远程管理。

公开(公告)号：US20110283811A1

公开(公告)日：2011-11-24

申请号：US12782521

申请日：2010-05-18

申请人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

发明人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

IPC分类号： G01F1/44

CPC分类号： G01F1/6845 ,  F41G1/40 ,  G01F1/692

摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.

摘要翻译： 在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。

公开(公告)号：US07908096B2

公开(公告)日：2011-03-15

申请号：US11864804

申请日：2007-09-28

申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

IPC分类号： G01F1/00

CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/698

摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.

摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。 该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路 用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。

公开(公告)号：US07878056B2

公开(公告)日：2011-02-01

申请号：US11960261

申请日：2007-12-19

申请人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang

发明人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6888 ,  G01F15/006

摘要： The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors have self-cleaning capability that is achieved via the modulation of the cavity of which the sensing elements locate on the top of the cavity that is made of a silicon nitride film; alternatively the sensing elements are fabricated on top of a binary silicon nitride/conductive polycrystalline silicon film under which is a porous silicon layer selective formed in a silicon substrate. Using polycrystalline silicon or the sensing elements as electrodes, an acoustic wave can be generated across the porous silicon layer which is also used for the thermal isolation of the sensing elements. The vibration or acoustic energy is effective to remove foreign materials deposited on top surface of the sensing elements that ensure the accuracy and enhance repeatability of the thermal mass flow sensing.

摘要翻译： 本发明通常涉及用于测量流动流体（气体/液体）的流量的微机电系统（MEMS）热质量流量传感器以及在单晶硅晶片上的制造方法。 所述质量流量传感器具有自清洁能力，其通过其感测元件位于由氮化硅膜制成的空腔顶部上的空腔的调制而实现; 或者，感测元件制造在二元氮化硅/导电多晶硅膜的顶部，在二元氮化硅/导电多晶硅膜的下方是选择性地形成在硅衬底中的多孔硅层。 使用多晶硅或感测元件作为电极，可以跨多孔硅层产生声波，其也用于感测元件的热隔离。 振动或声能有效地去除沉积在感测元件的顶表面上的异物，以确保精确度并增强热质量流量感测的重复性。

公开(公告)号：US07765679B2

公开(公告)日：2010-08-03

申请号：US11523436

申请日：2006-09-19

申请人： Yahong Yao ,  Chih-Chang Chen ,  Gafeng Wang ,  Liji Huang

发明人： Yahong Yao ,  Chih-Chang Chen ,  Gafeng Wang ,  Liji Huang

IPC分类号： H05B3/00

CPC分类号： G01F1/6845 ,  Y10T29/49082 ,  Y10T29/49083 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49155

摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.

摘要翻译： 通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。

公开(公告)号：US20090164163A1

公开(公告)日：2009-06-25

申请号：US11864804

申请日：2007-09-28

申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

IPC分类号： G01F25/00 ,  G01F1/69

CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/698

摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.

摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。 该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路 用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。

公开(公告)号：US20090016403A1

公开(公告)日：2009-01-15

申请号：US11774771

申请日：2007-07-09

申请人： Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang ,  Liji Huang

发明人： Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang ,  Liji Huang

IPC分类号： G01N25/00 ,  G01F1/68

CPC分类号： G01N25/20 ,  G01F1/6845 ,  G01F1/692

摘要： A device with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure gas or liquid concentration in a binary mixture formality is disclosed in the present invention. A process for fabricating the said MEMS silicon concentration sensor, which thereby can greatly reduce the sensor fabrication cost by a batch production, is revealed as well. This MEMS process can mass-produce the sensors on silicon substrate in the ways of small size, low power, and high reliability. In addition to the gas or liquid concentration measurement, the present invention further discloses that the said sensor can also readily measure gas or liquid mass flow rate while record the concentration data, which is not viable by other related working principle.

摘要翻译： 在本发明中公开了一种具有微加工（a.k.a. MEMS，Micro Electro Mechanical Systems）硅传感器的装置，用于测量二元混合物形式中的气体或液体浓度。 也可以揭示制造所述MEMS硅浓度传感器的方法，从而能够通过批量生产大大降低传感器制造成本。 该MEMS工艺可以以小尺寸，低功率和高可靠性的方式批量生产硅衬底上的传感器。 除了气体或液体浓度测量之外，本发明还公开了所述传感器还可以容易地测量气体或液体质量流量，同时记录其他相关工作原理不可行的浓度数据。

公开(公告)号：US20100115271A1

公开(公告)日：2010-05-06

申请号：US12468057

申请日：2009-05-19

申请人： Chih-Chang Chen ,  Sung-Chien Tang

发明人： Chih-Chang Chen ,  Sung-Chien Tang

IPC分类号： H04L9/00

CPC分类号： H04W12/02 ,  H04W12/04 ,  H04W48/16 ,  H04W76/10 ,  H04W84/12

摘要： A method for a access point device having first network identity information to automatically establish a security link with a peer access point device in a wireless communication system includes searching and receiving a beacon corresponding to the peer access point device by radio frequency scan, obtaining second network identity information corresponding to the peer access point device from the beacon, determining a primary-secondary relationship for the access point device and the peer access point device according to the first and second network identity information, generating or receiving security data according to the primary-secondary relationship, and then establishing the security link with the peer access point device according to the security data.

摘要翻译： 一种具有第一网络身份信息的接入点设备的方法，用于在无线通信系统中自动建立与对等接入点设备的安全链路，包括通过射频扫描来搜索和接收与对等接入点设备相对应的信标，获得第二网络 根据所述第一和第二网络身份信息确定所述接入点设备和所述对等接入点设备的主要 - 次要关系，根据所述第一和第二网络身份信息生成或接收安全数据， 次级关系，然后根据安全数据与对等接入点设备建立安全链路。

公开(公告)号：US20090110237A1

公开(公告)日：2009-04-30

申请号：US11966707

申请日：2007-12-28

申请人： Ko-Shyang Wang ,  Po-Lung Chen ,  Chih-Chang Chen

发明人： Ko-Shyang Wang ,  Po-Lung Chen ,  Chih-Chang Chen

IPC分类号： G06K9/00

CPC分类号： G06K9/00355 ,  G06F3/017

摘要： A method for positioning a non-structural object in a series of continuing images is disclosed, which comprises the steps of: establishing a pattern representing a target object while analyzing the pattern for obtaining positions relative to a representative feature of the pattern; picking up a series of continuing images including the target object for utilizing the brightness variations at the boundary defining the representative feature which are detected in the series of continuing images to calculate and thus obtain a predictive candidate position of the representative feature in an image picked up next to the series of continuing images; calculating the differences between the boundaries defining the representative feature at the predictive candidate position in the series of continuing images and also calculating the similarities between the pattern and those boundaries; and using the differences and the similarities to calculate and thus obtain the position of the representative feature in the image picked up next to the series of continuing images.

摘要翻译： 公开了一种用于将非结构对象定位在一系列连续图像中的方法，其包括以下步骤：在分析图案以获得相对于图案的代表特征的位置的同时，建立表示目标对象的图案; 拾取一系列持续图像，包括目标对象，用于利用在连续图像序列中检测到的代表性特征的边界处的亮度变化，以计算出所获取的图像中的代表特征的预测候选位置 在连续图像系列旁边; 计算定义连续图像序列中预测候选位置的代表特征的边界之间的差异，并计算图案与边界之间的相似度; 并且使用差异和相似度来计算并因此获得在一系列连续图像拾取的图像中的代表性特征的位置。

公开(公告)号：US07162095B2

公开(公告)日：2007-01-09

申请号：US10460362

申请日：2003-06-13

申请人： Oscal T. -C. Chen ,  Chih-Chang Chen ,  Horng-Shinn Wu

发明人： Oscal T. -C. Chen ,  Chih-Chang Chen ,  Horng-Shinn Wu

IPC分类号： G06K9/46 ,  G06K9/62

CPC分类号： H04N19/17 ,  H04N19/115 ,  H04N19/124 ,  H04N19/127 ,  H04N19/13 ,  H04N19/146 ,  H04N19/147 ,  H04N19/176 ,  H04N19/60 ,  H04N19/61 ,  H04N19/63 ,  H04N19/70

摘要： A method for automatically determining the region of interest from an image comprises the three steps of (a) analyzing content of the transformed coefficients of an image after a discrete signal transformation and partitioning an image into the interested region and background region that are based on p×p-pixel sub-blocks for performing classification; (b) locating the central point of the interested sub-blocks; and (c) integrating a plurality of the interested sub-blocks from said central point to the boundary of an image to generate a closed and continued region of interest by using a image processing technique with considering the bit-rate requirement.

摘要翻译： 一种用于从图像自动确定感兴趣区域的方法包括以下三个步骤：（a）分析离散信号变换之后的图像的变换系数的内容，并将图像分割成基于pxp的感兴趣区域和背景区域 用于执行分类的子像素块; （b）定位感兴趣的子块的中心点; 以及（c）通过使用考虑到比特率要求的图像处理技术，将多个感兴趣的子块从所述中心点整合到图像的边界以产生关闭和继续的感兴趣区域。