HIGH ACCURACY BATTERY-OPERATED MEMS MASS FLOW METER
    1.
    发明申请
    HIGH ACCURACY BATTERY-OPERATED MEMS MASS FLOW METER 有权
    高精度电池操作的MEMS质量流量计

    公开(公告)号:US20120024054A1

    公开(公告)日:2012-02-02

    申请号:US12847881

    申请日:2010-07-30

    IPC分类号: G01F1/692

    CPC分类号: G01F1/6845

    摘要: With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.

    摘要翻译: 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加,新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计,其与传统的可变区域流量计成本兼容,同时提供所有数字数据处理,包括累积流量测量,用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电,可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口,便于网络和远程管理。

    High accuracy battery-operated MEMS mass flow meter
    2.
    发明授权
    High accuracy battery-operated MEMS mass flow meter 有权
    高精度电池操作的MEMS质量流量计

    公开(公告)号:US08342018B2

    公开(公告)日:2013-01-01

    申请号:US12847881

    申请日:2010-07-30

    IPC分类号: G01F1/20

    CPC分类号: G01F1/6845

    摘要: With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.

    摘要翻译: 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加,新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计,其与传统的可变区域流量计成本兼容,同时提供所有数字数据处理,包括累积流量测量,用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电,可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口,便于网络和远程管理。

    Integrated micromachining air flow path clog sensor
    3.
    发明授权
    Integrated micromachining air flow path clog sensor 有权
    集成微加工空气流路堵塞传感器

    公开(公告)号:US08336392B2

    公开(公告)日:2012-12-25

    申请号:US12787268

    申请日:2010-05-25

    IPC分类号: G01F1/56

    CPC分类号: G01F1/6845

    摘要: Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.

    摘要翻译: 如今,诸如液晶投影仪,电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统,以减少过热引起的电子设备损坏的风险。 本发明公开了一种与空气流量传感器集成的装置,作为气流堵塞检测的报警装置。 气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法,该方法受到响应缓慢和实时状况识别不良。 本发明将通过间接地监测周围温度来直接监测气流的优点,以防止气流通道堵塞。

    Integrated Micromachining Air Flow Path Clog Sensor
    4.
    发明申请
    Integrated Micromachining Air Flow Path Clog Sensor 有权
    集成微加工空气流路堵塞传感器

    公开(公告)号:US20120011940A1

    公开(公告)日:2012-01-19

    申请号:US12787268

    申请日:2010-05-25

    IPC分类号: G01F1/56

    CPC分类号: G01F1/6845

    摘要: Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.

    摘要翻译: 如今,诸如液晶投影仪,电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统,以减少过热引起的电子设备损坏的风险。 本发明公开了一种与空气流量传感器集成的装置,作为气流堵塞检测的报警装置。 气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法,该方法受到响应缓慢和实时状况识别不良。 本发明将通过间接地监测周围温度来直接监测气流的优点,以防止气流通道堵塞。

    MEMS utility meters with exchangeable metrology unit
    5.
    发明授权
    MEMS utility meters with exchangeable metrology unit 有权
    具有可更换计量单元的MEMS功率表

    公开(公告)号:US08994552B2

    公开(公告)日:2015-03-31

    申请号:US13662520

    申请日:2012-10-28

    IPC分类号: G01F5/00 G08C15/06 H04Q9/00

    摘要: An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.

    摘要翻译: 在本发明中公开了一种使用微机械(即微机电MEMS机电系统)硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气体计量器。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中,而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务,并可在维修,维护或维修期间进行现场交换,而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断,这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络,并提供用于数据传输和安全的内部多个存储。

    MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT
    6.
    发明申请
    MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT 有权
    具有可交换计量单位的MEMS实用程序

    公开(公告)号:US20140118161A1

    公开(公告)日:2014-05-01

    申请号:US13662520

    申请日:2012-10-28

    IPC分类号: G01F5/00 G08C15/06

    摘要: An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.

    摘要翻译: 在本发明中公开了一种使用微机械(即微机电MEMS机电系统)硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中,而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务,并可在维修,维护或维修期间进行现场交换,而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断,这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络,并提供用于数据传输和安全的内部多个存储。

    Digital regulated gas dispensing apparatus with a MEMS mass flow meter

    公开(公告)号:US10240723B2

    公开(公告)日:2019-03-26

    申请号:US15609518

    申请日:2017-05-31

    摘要: The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

    Micromachined pressure sensor and method of making the same

    公开(公告)号:US10209156B2

    公开(公告)日:2019-02-19

    申请号:US15380035

    申请日:2016-12-15

    IPC分类号: G01L9/00

    摘要: The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

    Vortex flow meter with micromachined sensing elements

    公开(公告)号:US10066976B2

    公开(公告)日:2018-09-04

    申请号:US15177208

    申请日:2016-06-08

    IPC分类号: G01F1/32 G01F1/684

    摘要: The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.