公开(公告)号：US06833652B2

公开(公告)日：2004-12-21

申请号：US09938871

申请日：2001-08-24

申请人： John H. Jerman

发明人： John H. Jerman

IPC分类号： H02N100

CPC分类号： H02N1/008

摘要： A micromechanical device comprising a substrate, a movable member overlying the substrate, first and second microactuators carried by the substrate and a coupling assembly for connecting the first and second microactuators to the movable member. The first microactuator moves the movable member in a first substantially linear direction and the second microactuator moves the movable member in a second substantially linear direction substantially perpendicular to the first direction. The coupling assembly includes a first linkage coupled to the first microactuator and a second linkage coupled to the second microactuator. Each of the first and second linkage has a pivot for permitting the respective linkage to pivot when moving the movable member.

摘要翻译： 一种微机械装置，包括衬底，覆盖衬底的可移动构件，由衬底承载的第一和第二微致动器以及用于将第一和第二微致动器连接到可动构件的联接组件。 第一微致动器沿第一基本上线性的方向移动可动件，而第二微致动器沿大致垂直于第一方向的第二大致直线方向移动可动件。 耦合组件包括耦合到第一微致动器的第一连杆和耦合到第二微致动器的第二连杆。 第一连杆机构和第二连杆机构中的每一个具有枢轴，用于允许相应的连杆机构在移动可移动部件时枢转。

公开(公告)号：US06788641B2

公开(公告)日：2004-09-07

申请号：US09911552

申请日：2001-07-23

申请人： Karl A. Belser ,  John H. Jerman

发明人： Karl A. Belser ,  John H. Jerman

IPC分类号： G11B724

CPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/596 ,  G11B5/59677 ,  G11B5/82 ,  G11B5/84 ,  G11B11/1055 ,  G11B11/10554 ,  G11B11/10578 ,  G11B11/1058 ,  G11B11/10582 ,  G11B11/10584 ,  G11B21/106 ,  G11B23/0021 ,  G11B23/0057 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/0021

摘要： Fabrication of an MO disc, the formation of a master pattern of servo and track information, and the subsequent transfer of that pattern to a series of pits and grooves on a substrate. On top of that substrate, at least one sacrificial layer is provided atop a relatively hard layer. The recording stack may be provided with both silicon nitride and silicon dioxide top layers, with the silicon dioxide layer acting as a sacrificial layer to ensure that the hard layer, of silicon nitride, remains at the end of the process. A layer of aluminum or aluminum alloy may be deposited, with the aluminum plugs filling the grooves and pits (created by the embossed servo information) to a level higher than any of the adjacent layers of silicon dioxide, silicon nitride, or similar dielectric layer. Since the polishing rate of aluminum can be far faster than that of the silicon dioxide, then the aluminum can be etched or otherwise removed down to a level equal to or slightly below a planar surface with the silicon dioxide, with the silicon dioxide layer allowing for some small level of over polishing. The silicon nitride layer is protected completely; the silicon dioxide layer partially remains and is partially removed; and the aluminum metal which fills the grooves and pits would rise only to a level substantially equal the very flat top surface of the silicon dioxide.

摘要翻译： 制造MO盘，形成伺服和跟踪信息的主模式，以及随后将该图案转移到衬底上的一系列凹坑和凹槽。 在该基板的顶部，在相对硬的层之上提供至少一个牺牲层。 记录堆叠可以设置有氮化硅和二氧化硅顶层，其中二氧化硅层用作牺牲层，以确保氮化硅的硬层保持在工艺结束。 可以沉积一层铝或铝合金，其中铝塞将填充凹槽和凹坑（由压花伺服信息产生）提升到高于任何相邻二氧化硅，氮化硅或类似介电层的层。 由于铝的抛光速度可以比二氧化硅的抛光速度快得多，所以可以利用二氧化硅蚀刻或以其它方式将铝去除到等于或略低于平面的水平，其中二氧化硅层允许 一些小水平的抛光。 氮化硅层被完全保护; 二氧化硅层部分残留并被部分去除; 并且填充凹槽和凹坑的铝金属将仅升高到基本上等于二氧化硅的非常平坦的顶表面的水平。

公开(公告)号：US06759734B2

公开(公告)日：2004-07-06

申请号：US10100371

申请日：2002-03-14

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： H01L2302

CPC分类号： B81B3/0086 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81C2201/0178

摘要： The present invention provides a miniature device that comprises a grounded layer, an insulative layer overlying the grounded layer and a conductive layer overlying the insulative layer wherein the insulative spacing between the conductive and grounded layers is increased so as to inhibit electrical shorting between the conductive layer and grounded layers. A method of making miniature devices is also provided.

摘要翻译： 本发明提供一种微型器件，其包括接地层，覆盖接地层的绝缘层和覆盖绝缘层的导电层，其中导电层和接地层之间的绝缘间距增加，以便抑制导电层之间的电短路 和接地层。 还提供了制造微型装置的方法。

公开(公告)号：US06657360B2

公开(公告)日：2003-12-02

申请号：US09911548

申请日：2001-07-24

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： H02N100

CPC分类号： G02B6/3512 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G11B7/08564 ,  G11B11/10563 ,  H02N1/008

摘要： A rotary electrostatic microactuator that includes a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. First and second spaced-apart springs and a plurality of comb drive assemblies are included. Each of the comb drive assemblies has a first comb drive member mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers. Each of the first and second springs has a first end portion secured to the substrate and a second end portion secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.

摘要翻译： 一种旋转静电微致动器，其包括基本上平面的基板和覆盖所述基板的可旋转构件，用于围绕垂直于所述平面基板延伸的旋转轴线旋转。 包括第一和第二间隔开的弹簧和多个梳子驱动组件。 每个梳状驱动组件具有安装在基底上的第一梳状驱动构件和第二梳状驱动构件。 第一和第二梳状驱动构件中的每一个设置有弓形梳状驱动指状物。 第一和第二弹簧中的每一个具有固定到基板的第一端部和固定到至少一个第二梳状驱动构件的第二端部，用于将第二梳状驱动构件和可旋转构件悬挂在基板上。 第二梳状驱动构件可以在第一位置和第二梳状驱动构件的梳状驱动构件基本上完全相互交叉的第一位置和第二位置之间沿着旋转轴线行进的方向移动，在第二位置，梳状驱动指 的第一和第二梳状驱动构件基本上完全相互交错。

公开(公告)号：US06625101B1

公开(公告)日：2003-09-23

申请号：US09343611

申请日：1999-06-30

申请人： John H. Jerman ,  John D. Grade ,  Albert L. Tervalon

发明人： John H. Jerman ,  John D. Grade ,  Albert L. Tervalon

IPC分类号： G11B700

CPC分类号： G11B7/122 ,  G11B7/22 ,  G11B11/1058

摘要： An apparatus for finely adjusting an optical component is described. The apparatus may include an optic component, a substrate, and an adjuster. The adjuster may include a platform coupled to the optic component, and a linkage of notched springs coupled to both the platform and the substrate. The linkage of notched springs provides for motion of the platform relative to the substrate along primarily one axis. The apparatus may be used in a data storage system to adjust the position of the optic component in order to focus light propagated through the optic component.

摘要翻译： 描述了用于精细调节光学部件的装置。 该装置可以包括光学部件，基板和调节器。 调节器可以包括耦合到光学部件的平台以及耦合到平台和基板两者的凹口弹簧的连接。 缺口弹簧的连接提供平台相对于衬底沿主要一个轴线的运动。 该装置可以用在数据存储系统中以调节光学部件的位置，以便聚焦通过光学部件传播的光。

公开(公告)号：US06473553B1

公开(公告)日：2002-10-29

申请号：US09505341

申请日：2000-02-16

申请人： John H. Jerman ,  John D. Grade

发明人： John H. Jerman ,  John D. Grade

IPC分类号： G02B600

CPC分类号： G11B7/122 ,  G02B6/3656 ,  G02B6/3692 ,  G02B6/3893 ,  G02B6/42 ,  G02B6/4219 ,  G11B7/22 ,  G11B11/1058

摘要： An apparatus is provided for holding micron-sized objects, such as optical components, along with a method for making such an apparatus. The apparatus includes a mounting block having openings, such as cavities and recesses, for holding the micron-sized objects therein. The mounting block further includes one or more resilient members having a base mounted on the mounting block. The resilient members further include an engaging surface configured to engage a micro-machined object within a cavity or recess of the mounting block. When the object is engaged, the resilient member applies pressure to the object to secure it against a surface of the mounting block or against another resilient member. The object is held within the opening of the mounting block and can be moved within the opening to allow proper placement and subsequent adjustment of the object.

摘要翻译： 提供了用于保持诸如光学部件的微米尺寸物体的装置以及用于制造这种装置的方法。 该装置包括具有用于将微米尺寸的物体保持在其中的开口的诸如空腔和凹槽的安装块。 安装块还包括具有安装在安装块上的基座的一个或多个弹性构件。 弹性构件还包括接合表面，其被构造成与安装块的空腔或凹部内的微加工物体接合。 当物体接合时，弹性构件对物体施加压力以将其固定在安装块的表面上或者抵靠另一弹性构件。 物体被保持在安装块的开口内并且可以在开口内移动以允许物体的适当放置和随后的调节。

公开(公告)号：US06384510B1

公开(公告)日：2002-05-07

申请号：US09547698

申请日：2000-04-12

申请人： John D. Grade ,  John H. Jerman

发明人： John D. Grade ,  John H. Jerman

IPC分类号： H02N100

CPC分类号： G02B6/357 ,  G02B6/3514 ,  G02B6/3548 ,  G02B6/3584 ,  G11B7/08564 ,  G11B11/10563 ,  H02N1/008

摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having a first comb member mounted on the substrate and a second comb member overlying the substrate. The first comb member has a plurality of first comb fingers. The second comb member has a plurality of second comb fingers. The second comb member is movable between a first position in which each second comb finger is not substantially fully interdigitated with an adjacent pair of first comb fingers and a second position in which each such second comb finger is substantially fully interdigitated with such adjacent pair of first comb fingers. Each of the second comb fingers is offset relative to the midpoint between the adjacent pair of first comb fingers when in the first position and is substantially centered on such midpoint when in the second position.

摘要翻译： 一种静电微致动器，其包括基底和至少一个梳状驱动组件，其具有安装在所述基底上的第一梳状部件和覆盖所述基底的第二梳状部件。 第一梳构件具有多个第一梳指。 第二梳构件具有多个第二梳指。 第二梳状构件可在第一位置和第二位置之间移动，在第一位置，每个第二梳状指状体与相邻的一对第一梳状指状件基本上完全相互交错，并且第二位置，其中每个这样的第二梳状指状件与这种相邻的第一梳状指状体基本上完全相互交叉 梳手指 当处于第一位置时，第二梳齿中的每一个相对于相邻的一对第一梳齿之间的中点偏移，并且当处于第二位置时基本上位于该中点上。

公开(公告)号：US6134207A

公开(公告)日：2000-10-17

申请号：US135236

申请日：1998-08-17

申请人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake ,  Kurt E. Petersen

发明人： John H. Jerman ,  John D. Grade ,  Joseph D. Drake ,  Kurt E. Petersen

IPC分类号： G02B6/35 ,  G02B6/42 ,  G02B26/08 ,  G11B7/0037 ,  G11B7/085 ,  G11B7/12 ,  G11B7/135 ,  G11B11/105 ,  H02N1/00 ,  G11B7/00

CPC分类号： H02N1/008 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0866 ,  G02B6/4216 ,  G11B11/10543 ,  G11B7/122 ,  G11B7/1362 ,  G11B7/1384 ,  G02B6/3514 ,  G02B6/357 ,  G02B6/3584 ,  G11B11/10554 ,  G11B11/10563 ,  G11B11/1058 ,  G11B7/0037 ,  G11B7/08564

摘要： An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

摘要翻译： 一种用于激光束的光学微动开关，其沿着包括具有适于接收激光束的入口端口和多个出口端口的主体的路径延伸。 耦合到由身体携带的多个微型马达的多个反射镜。 微型电动机选择性地将反射镜从第一位置移出激光束的路径到达激光束的路径的第二位置，以将激光束引导到出口端口之一。 每个微型马达都具有至少一个静电驱动梳驱动组件，用于将相应的反射镜移动到第一和第二位置之一。 控制器电耦合到微型马达，用于向微型马达提供控制信号。

公开(公告)号：US6081499A

公开(公告)日：2000-06-27

申请号：US191835

申请日：1998-11-13

申请人： Jill D. Berger ,  John F. Heanue ,  Jerry E. Hurst, Jr. ,  John H. Jerman ,  Jeffrey P. Wilde

发明人： Jill D. Berger ,  John F. Heanue ,  Jerry E. Hurst, Jr. ,  John H. Jerman ,  Jeffrey P. Wilde

IPC分类号： G11B7/12 ,  G11B7/135 ,  G11B7/22 ,  G11B11/105 ,  G11B13/04

CPC分类号： G11B7/1362 ,  G11B11/1058 ,  G11B7/122 ,  G11B7/1372 ,  G11B7/1384 ,  G11B11/10543 ,  G11B7/22

摘要： A magneto-optical (MO) data storage system has a flying optical head supported over a MO storage medium, the flying head having channels or grooves formed therein and optical elements disposed within the grooves for directing an incident light beam to the storage medium and for receiving a reflected light beam from the storage medium. The flying head may comprise a two-piece assembly comprising a slider body which flies over the surface of the storage medium, and a separate optics mounting block formed to receive the optical elements and to be supported on the flying head. Preferably, the slider body is L-shaped and provides an angled surface for receiving a micro-machined mirror aligned with optical elements on the optics mounting block and controllable for deflecting the light beam to and from the storage medium.

摘要翻译： 磁光（MO）数据存储系统具有支撑在MO存储介质上的飞行光学头，所述飞头具有形成在其中的通道或凹槽，并且设置在凹槽内的光学元件用于将入射光束引导到存储介质， 接收来自存储介质的反射光束。 飞头可以包括两件式组件，其包括在存储介质的表面上飞行的滑块体，以及形成为容纳光学元件并被支撑在飞头上的单独的光学安装块。 优选地，滑块体是L形的并且提供成角度的表面，用于接收与光学器件安装块上的光学元件对准的微加工镜，并且可控制该光束与存储介质的偏转。

公开(公告)号：US06076256A

公开(公告)日：2000-06-20

申请号：US191516

申请日：1998-11-13

申请人： Joseph D. Drake ,  John H. Jerman ,  John D. Grade ,  Kathy J. Jackson

发明人： Joseph D. Drake ,  John H. Jerman ,  John D. Grade ,  Kathy J. Jackson

IPC分类号： G02B26/08 ,  G11B7/085 ,  G11B7/09 ,  G11B7/12 ,  G11B7/135 ,  G11B7/22 ,  G11B11/105 ,  H01R43/00

CPC分类号： B82Y30/00 ,  G02B26/0816 ,  G02B26/0866 ,  G11B11/10543 ,  G11B11/1058 ,  G11B7/08564 ,  G11B7/122 ,  G11B7/1362 ,  G11B7/22 ,  G11B11/10554 ,  G11B7/0901 ,  Y10T29/49117 ,  Y10T29/49789 ,  Y10T29/49796

摘要： A method for manufacturing a magneto-optical data storage system. The method includes the steps of providing a support surface and rotatably mounting a magneto-optical disk having a planar storage surface with a plurality of concentrically disposed data tracks onto the support surface. A proximal extremity of an arm is pivotably mounted on the support surface so that a distal extremity of the arm pivots between first and second positions relative to the storage surface. An optical light emitter and receiver emitting a laser beam is carried by the distal extremity of the arm. A flying magneto-optical head is mounted on the distal extremity of the arm. A mirror assembly is attached to the head. The mirror of the mirror assembly can be rocked between first and second positions for reflecting the laser beam between the optical light emitter and receiver and the storage surface of the magneto-optical disk so as to permit the optical recording and/or reading of information on the storage surface.

摘要翻译： 一种制造磁光数据存储系统的方法。 该方法包括以下步骤：提供支撑表面并将具有平面存储表面的磁光盘可旋转地安装到具有多个同心设置的数据轨迹到支撑表面上。 臂的近端被可枢转地安装在支撑表面上，使得臂的远端相对于存储表面在第一和第二位置之间枢转。 发射激光束的光发射器和接收器由臂的远端承载。 飞行磁光头安装在臂的远端上。 镜组件附接到头部。 反射镜组件的反射镜可以在第一和第二位置之间摆动，用于将光束发射器和接收器之间的激光束与磁光盘的存储表面反射，以便允许光学记录和/或读取信息 存储表面。