Coating film forming method and system

    公开(公告)号:US07488505B2

    公开(公告)日:2009-02-10

    申请号:US10885577

    申请日:2004-07-08

    IPC分类号: B05D3/12

    摘要: When a coating film is formed on a substrate, the inplane uniformity of the thickness of the coating film is enhanced to improve through put. Above the substrate, there are provided main and auxiliary nozzles separately movable, and monitoring means for monitoring the state of the surface of the substrate to detect the occurrence of an uncoated region on the surface of the substrate. On the basis of previously prepared coating data, a coating liquid is spirally applied on the substrate by the main nozzle. Then, if the monitoring means detects the occurrence of the uncoated region in a coated region in which the coating liquid has been applied by the main nozzle, a control part detects whether it is required to supply the coating liquid to the uncoated region. If it is required, the coating liquid is supplied to the uncoated region by the auxiliary nozzle. On the other hand, the portion of occurrence of the uncoated region has been grasped by the control part. If the uncoated region is continuously detected at the same place with respect to two substrates, it is determined that the setting of coating data is erroneous, and this is modified.

    Apparatus and method for drying under reduced pressure, and coating film forming apparatus
    63.
    发明授权
    Apparatus and method for drying under reduced pressure, and coating film forming apparatus 失效
    减压干燥装置及方法,以及涂膜成膜装置

    公开(公告)号:US07205025B2

    公开(公告)日:2007-04-17

    申请号:US11212725

    申请日:2005-08-29

    IPC分类号: B05D3/00

    摘要: In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.

    摘要翻译: 在减压下涂布抗蚀剂等涂布液的干燥中,不管干燥时间长短如何,周边部分的涂膜容易失去良好的形状,难以设定合适的排气流量。 在将基板装载到气密容器中之后,例如将压力从大气压降至略高于溶剂蒸气压的压力。 然后,溶剂从涂布液中主动蒸发。 这里,首先基于第一流量设定值Q 1进行排气,之后,基于大于Q 1的第二流量设定值进行排气。 通过基于Q 1的排气来校正周边部分的表面的四舍五入,并且通过切换到Q 2来获得更有效的溶剂成分的蒸发。

    Airbag and airbag system
    64.
    发明申请
    Airbag and airbag system 失效
    安全气囊和气囊系统

    公开(公告)号:US20070080522A1

    公开(公告)日:2007-04-12

    申请号:US11522463

    申请日:2006-09-18

    IPC分类号: B60R21/207 B60R21/20

    摘要: An airbag includes a first panel adjacent to an occupant and a second panel opposite to the occupant; the airbag being capable of deploying above a vehicle occupant's head. The first and second panels are joined together. The airbag includes, between the first panel and the second panel, a main chamber for deploying above the head of the occupant with gas supplied from an inflator; and subchambers for deploying so as to bend the head of the occupant forward with the gas from the inflator.

    摘要翻译: 安全气囊包括与乘员相邻的第一面板和与乘员相对的第二面板; 安全气囊能够部署在车辆乘客头部上方。 第一和第二面板连接在一起。 所述安全气囊包括在所述第一面板和所述第二面板之间的主室,用于利用从充气机供应的气体在所述乘客的头部上方展开; 以及用于部署的子仓,以便使来自充气机的气体向前弯曲乘员的头部。

    Apparatus and method for drying under reduced pressure, and coating film forming apparatus
    67.
    发明申请
    Apparatus and method for drying under reduced pressure, and coating film forming apparatus 失效
    减压干燥装置及方法,以及涂膜成膜装置

    公开(公告)号:US20060003105A1

    公开(公告)日:2006-01-05

    申请号:US11212725

    申请日:2005-08-29

    IPC分类号: B05D3/02

    摘要: In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.

    摘要翻译: 在减压下涂布抗蚀剂等涂布液的干燥中,不管干燥时间长短如何,周边部分的涂膜容易失去良好的形状,难以设定合适的排气流量。 在将基板装载到气密容器中之后,例如将压力从大气压降至略高于溶剂蒸气压的压力。 然后,溶剂从涂布液中主动蒸发。 这里,首先基于第一流量设定值Q 1进行排气,之后,基于大于Q 1的第二流量设定值进行排气。 通过基于Q 1的排气来校正周边部分的表面的四舍五入,并且通过切换到Q 2来获得更有效的溶剂成分的蒸发。

    Apparatus and method for drying under reduced pressure, and coating film forming apparatus
    68.
    发明授权
    Apparatus and method for drying under reduced pressure, and coating film forming apparatus 失效
    减压干燥装置及方法,以及涂膜成膜装置

    公开(公告)号:US06966949B2

    公开(公告)日:2005-11-22

    申请号:US10615800

    申请日:2003-07-10

    摘要: In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.

    摘要翻译: 在减压下涂布抗蚀剂等涂布液的干燥中,不管干燥时间长短如何,周边部分的涂膜容易失去良好的形状,难以设定合适的排气流量。 在将基板装载到气密容器中之后,例如将压力从大气压降至略高于溶剂蒸气压的压力。 然后,溶剂从涂布液中主动蒸发。 这里,首先基于第一流量设定值Q 1进行排气,之后,基于大于Q 1的第二流量设定值进行排气。 通过基于Q 1的排气来校正周边部分的表面的四舍五入,并且通过切换到Q 2来获得更有效的溶剂成分的蒸发。

    Steering device and airbag system
    69.
    发明申请
    Steering device and airbag system 审中-公开
    转向装置和气囊系统

    公开(公告)号:US20050151354A1

    公开(公告)日:2005-07-14

    申请号:US11032040

    申请日:2005-01-11

    申请人: Shinichi Sugimoto

    发明人: Shinichi Sugimoto

    CPC分类号: B60R21/2037 B60Q5/003

    摘要: A steering device includes a cover device adapted to be disposed on a steering wheel, a guiding device adapted to be disposed in the steering wheel for guiding the cover device to move parallel to an axial direction of the steering wheel, and a horn switch attached to the cover device for switching a horn when the cover device moves in the axial direction. The guiding device includes arms having first ends and second ends respectively. The first ends are joined together and supported such that the arms freely rotate together around the first ends in the axial direction, and the second ends extend in directions away from each other and being connected to the cover device. An airbag device can be attached to the steering device as an airbag system.

    摘要翻译: 转向装置包括适于设置在方向盘上的盖装置,适于设置在方向盘中的引导装置,用于引导盖装置平行于方向盘的轴向移动;以及喇叭开关, 所述盖装置用于当所述盖装置沿轴向移动时切换喇叭。 引导装置包括分别具有第一端和第二端的臂。 第一端连接在一起并支撑,使得臂在轴向方向上围绕第一端自由旋转,并且第二端沿彼此远离的方向延伸并连接到盖装置。 安全气囊装置可以作为气囊系统附接到转向装置。

    Horn switch gear and airbag system
    70.
    发明授权
    Horn switch gear and airbag system 失效
    喇叭开关齿轮和气囊系统

    公开(公告)号:US06881911B2

    公开(公告)日:2005-04-19

    申请号:US10798645

    申请日:2004-03-12

    申请人: Shinichi Sugimoto

    发明人: Shinichi Sugimoto

    摘要: A horn switch gear includes a backward moving body, a stationary body, a biasing member, and a pair of contact members. The backward moving body, which is configured to move backward, faces the stationary body. The biasing member, which is interposed between the backward moving body and the stationary body, biases the backward moving body in a restoring direction. The contact members, which are brought into or out of contact with each other by a forward or backward movement of the backward moving body, are moved together with the backward moving body. The stationary body includes an interposition which is interposed between the contact members for separating the contact members while the backward moving body is in a restored position, and which moves away from between the contact members to bring the contact members into contact with each other while the backward moving body is in a backward position.

    摘要翻译: 喇叭开关装置包括向后移动体,静止体,偏置构件和一对接触构件。 被配置为向后移动的向后移动体面向静止体。 夹在后向移动体和静止体之间的偏压构件沿着恢复方向偏置反向移动体。 通过向后移动体的向前或向后运动而彼此接触或接触的接触构件与后向移动体一起移动。 固定体包括插入在用于分离接触构件的接触构件之间的插入件,而后移动体处于恢复位置,并且它们远离接触构件之间移动以使接触构件彼此接触,同时 向后移动体处于向后位置。