摘要:
When a coating film is formed on a substrate, the inplane uniformity of the thickness of the coating film is enhanced to improve through put. Above the substrate, there are provided main and auxiliary nozzles separately movable, and monitoring means for monitoring the state of the surface of the substrate to detect the occurrence of an uncoated region on the surface of the substrate. On the basis of previously prepared coating data, a coating liquid is spirally applied on the substrate by the main nozzle. Then, if the monitoring means detects the occurrence of the uncoated region in a coated region in which the coating liquid has been applied by the main nozzle, a control part detects whether it is required to supply the coating liquid to the uncoated region. If it is required, the coating liquid is supplied to the uncoated region by the auxiliary nozzle. On the other hand, the portion of occurrence of the uncoated region has been grasped by the control part. If the uncoated region is continuously detected at the same place with respect to two substrates, it is determined that the setting of coating data is erroneous, and this is modified.
摘要:
An Escherichia coli mutant strain deficient in dihydrodipicolinate synthase or dihydrodipicolinate reductase is transformed with a chromosomal gene library of Bacillus methanolicus, and a transformant strain which can grow on a minimal medium is selected. Recombinant DNA which codes for dihydrodipicolinate synthase or dihydrodipicolinate reductase (named dapB) is obtained from the transformant.
摘要:
In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.
摘要:
An airbag includes a first panel adjacent to an occupant and a second panel opposite to the occupant; the airbag being capable of deploying above a vehicle occupant's head. The first and second panels are joined together. The airbag includes, between the first panel and the second panel, a main chamber for deploying above the head of the occupant with gas supplied from an inflator; and subchambers for deploying so as to bend the head of the occupant forward with the gas from the inflator.
摘要:
A plurality of primer sets are designed based on a region where conservation at the amino acid level is observed among various microorganisms for known gene sequences corresponding to a gene coding for an enzyme of the L-amino acid biosynthetic pathway derived from Corynebacterium thermoaminogenes, preferably an enzyme that functions at a higher temperature compared with that of Corynebacterium glutamicum. PCR is performed by using the primers and chromosomal DNA of Corynebacterium thermoaminogenes as a template. The primers with which an amplification fragment has been obtained are used as primers for screening to select a clone containing a target DNA fragment from a plasmid library of chromosomal DNA of Corynebacterium thermoaminogenes.
摘要:
A plurality of primer sets are designed based on a region where conservation at the amino acid level is observed among various microorganisms for known gene sequences corresponding to a gene coding for an enzyme of the L-amino acid biosynthetic pathway derived from Corynebacterium thermoaminogenes, preferably an enzyme that functions at a higher temperature compared with that of Corynebacterium glutamicum. PCR is performed by using the primers and chromosomal DNA of Corynebacterium thermoaminogenes as a template. The primers with which an amplification fragment has been obtained are used as primers for screening to select a clone containing a target DNA fragment from a plasmid library of chromosomal DNA of Corynebacterium thermoaminogenes.
摘要:
In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.
摘要:
In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After the substrate is loaded in an airtight container, a pressure is reduced from atmospheric pressure to a pressure slightly higher than the vapor pressure of a solvent, for example. Then, the solvent actively evaporates from the coating liquid. Here, evacuation is performed initially based on a first flow rate set value Q1, and thereafter, it is performed based on a second flow rate set value larger than Q1. Rounding of the surface in the peripheral portion is corrected by evacuation based on Q1, and more active evaporation of a solvent component is attained by switching to Q2.
摘要:
A steering device includes a cover device adapted to be disposed on a steering wheel, a guiding device adapted to be disposed in the steering wheel for guiding the cover device to move parallel to an axial direction of the steering wheel, and a horn switch attached to the cover device for switching a horn when the cover device moves in the axial direction. The guiding device includes arms having first ends and second ends respectively. The first ends are joined together and supported such that the arms freely rotate together around the first ends in the axial direction, and the second ends extend in directions away from each other and being connected to the cover device. An airbag device can be attached to the steering device as an airbag system.
摘要:
A horn switch gear includes a backward moving body, a stationary body, a biasing member, and a pair of contact members. The backward moving body, which is configured to move backward, faces the stationary body. The biasing member, which is interposed between the backward moving body and the stationary body, biases the backward moving body in a restoring direction. The contact members, which are brought into or out of contact with each other by a forward or backward movement of the backward moving body, are moved together with the backward moving body. The stationary body includes an interposition which is interposed between the contact members for separating the contact members while the backward moving body is in a restored position, and which moves away from between the contact members to bring the contact members into contact with each other while the backward moving body is in a backward position.