摘要:
The present invention provides a method for miniaturizing a pattern without seriously increasing the production cost or impairing the production efficiency. This invention also provides a fine resist pattern and a resist substrate-treating solution used for forming the fine pattern. The pattern formation method comprises a treatment step. In the treatment step, a resist pattern after development is treated with a resist substrate-treating solution containing an amino group-containing, preferably, a tertiary polyamine-containing water-soluble polymer, so as to reduce the effective size of the resist pattern formed by the development. The present invention also relates to a resist pattern formed by that method, and further relates to a treating solution used in the method.
摘要:
A screen printing device configured to print a printing paste on a printed board, the printing paste being applied on a screen printing plate where openings corresponding to a pattern to be printed are formed, the screen printing device includes a first squeegee advanced and pressed downward so that the printing paste is pushed on the printed board corresponding to the openings of the screen printing plate; and a second squeegee situated in the vicinity of the rear of the first squeegee, the second squeegee being configured to provide pressure forward and downward, the pressure having properties different from properties of a pressure provided by the first squeegee, wherein a printing operation by the second squeegee is performed right after a printing operation by the first squeegee.
摘要:
There are provided: compound semiconductor particles that can display more excellent performance in functions peculiar to the compound semiconductor (e.g. luminosity and luminescence efficiency); and a production process for obtaining such compound semiconductor particles with economy, good productivity, and ease.Compound semiconductor particles, according to the present invention, are characterized by comprising body particles and a metal oxide, wherein the body particles have particle diameters of smaller than 1 μm and are covered with the metal oxide and include a compound semiconductor including an essential element combination of at least one element X selected from the group consisting of C, Si, Ge, Sn, Pb, N, P, As, Sb, S, Se, and Te and at least one metal element M that is not identical with the element X, and wherein the metal oxide is a metal oxide to which an acyloxyl group is bonded.
摘要:
The optimal design support system is to design a structure that outputs a desired load or displacement to a portion by using elastic deformation when a load or displacement is applied to a predetermined portion. More specifically, the optimal design support system comprises a structure creating part 11 that creates a structure FM as being an integrated structure of multiple mutually different types of elements by changing a material layout within a design domain D so as to minimize the difference between the output load or displacement and the desired load or displacement and to maximize the stiffness of the object globally, an initial shape setting part 12 that sets a feasible initial shape IS corresponding to the function of each element which forms the structure FM, and a shape changing part 13 that changes the initial shape IS so as to minimize the difference between the displacement, the load, a related stress or a related strain and a predetermined target value within a range where any parts of the initial shape IS deforms elastically.
摘要:
Disclosed herein is a digital broadcast receiver capable of performing synthesis on a commercial that a user desires. If the commercial satisfies the Jth condition, a synthesis unit reads image data assigned to the Jth condition from a storage unit. Further, if a sync signal has been detected, the synthesis unit synthesizes an image represented by the image data read from the storage unit with video represented by a video signal outputted from a decoder, and outputs the synthesized data.
摘要:
The present invention provides a method of suppressing ongoing acute allograft rejection. In one embodiment, the method comprises administering to a host experiencing ongoing acute allograft rejection an IL10 inhibitor and an IL2 inhibitor in amounts effective to rescue the allograft from ongoing acute rejection. In another embodiment, the method comprises administering to a host experiencing ongoing acute allograft rejection, which is due to insufficient immunosuppression by an IL2 inhibitor, an IL10 inhibitor in an amount effective to rescue the allograft from ongoing acute rejection.
摘要:
A coolant inlet and a coolant outlet are opened on an inner surface enclosing an inner space of a rotation object. The coolant inlet and the coolant outlet are located on a rotation axis and face each other. A main-stream which flows straightly along the rotation axis from the coolant inlet to the coolant outlet is generated in a central space of the inner space. Therefore, a resistance about the coolant stream is small. In addition, a sub-stream which circulates in a radial direction is generated in a peripheral space around the central space. By generating a contact between the main-stream and the sub-stream, it is possible to obtain high performance of cooling.
摘要:
A composition includes a copolymer of vinylimidazole with a water-soluble film-forming monomer other than vinylimidazole, and a fluorine-containing surfactant. A resist laminate is obtained by forming an anti-reflection coating on the surface of a photoresist film, which anti-refection coating is composed of a coating solution obtained by dissolving the composition in water. The composition for lithographic anti-reflection coating has balanced compatibility with conventional photoresist compositions. By using the composition, a semiconductor device can be efficiently produced without the clogging of waste fluids in a waste fluid pipe, even when the application of the photoresist composition and the formation of the anti-reflection coating are sequentially performed using one coater. This composition is also advantageous for saving space in a clean room.
摘要:
A method for forming a wiring structure on a semiconductor substrate, comprising the following steps: a step for forming a low dielectric constant dielectric film and an etching stopper, sequentially, on said semiconductor substrate; a step for forming a resist mask having a pattern for forming via-holes on the etching stopper film; a step for forming via-holes on the low dielectric constant dielectric film through said resist mask; a step for filling said via-holes with an embedding material and for heating the embedding material to harden; a step for maintaining the embedding material at a predetermined thickness on the bottoms of the via-holes by performing etching back on the embedding material being heated to be harden; a step for forming a resist mask having a pattern for forming trench holes on said etching stopper film; a step for forming the trench holes on said low dielectric film constant dielectric through said resist mask, while removing the embedding material remaining on the bottoms of said via-holes; and a step for embedding metal into said trench holes and said via-holes, wherein the embedding material mainly includes a thermo-bridge forming compound therein, thereby generating no bubbles even when said embedding material is being filled into gutters having a large aspect ratio thereof.
摘要:
There is described an apparatus for producing a single crystal ingot capable of stably manufacturing a single crystal ingot by means of the Czochralski method, without being affected by influence of variation in extension of wires or an offset in points clamped by a clamping member. The clamping member is engaged with an engagement step formed in a single crystal which is being pulled by the CZ method, and the single crystal is pulled. The single crystal ingot manufacturing apparatus is provided with a flexible mechanism for absorbing variation in extension of the wires, in intermediate portions of the wires. Variation in extension of the wires is eliminated by means of the flexible mechanism, thereby retaining the single crystal in an upright position. Further, a sacrifice member which deforms so as to conform to the circumference of the engagement step is interposed between the clamping member and the engagement step, thereby preventing occurrence of cracking or deformation in the single crystal.