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公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译： 提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。 在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。 在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。 矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。 因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。
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公开(公告)号：US07685874B2
公开(公告)日：2010-03-30
申请号：US11779128
申请日：2007-07-17
IPC分类号： G01F1/68
CPC分类号： G01F1/6842 , G01F1/6845
摘要： A thermal type flow sensor includes a base portion provided along the direction of a fluid flowing through a main passage, and a sensor element mounted on the base portion and having an exothermic resistor formed on a substrate for detecting the fluid flow rate. The base portion has a rectangular recessed portion in which the sensor element is fixed so that the surface of the detecting portion of the sensor element is positioned lower than an upper edge of the recessed portion. A wall portion of the measuring passage facing the sensor element is constricted. The exothermic resistor is disposed along the fluid passage and spaced away from the upstream side upper edge of the recessed portion and cannot be substantially affected by a fluid flow disturbance due to a step portion formed between the upper edge of the recessed portion and the detecting portion surface.
摘要翻译： 热式流量传感器包括沿着流过主通道的流体的方向设置的基部，以及安装在基部上的传感器元件，并且具有形成在基板上的用于检测流体流速的放热电阻。 基部具有矩形凹部，传感器元件固定在该矩形凹部中，使得传感器元件的检测部分的表面位于比凹部的上边缘低的位置。 面向传感器元件的测量通道的壁部分被收缩。 放热电阻器沿着流体通道设置并且与凹部的上游侧上边缘隔开间隔开，并且不能由于在凹部的上边缘和检测部分之间形成的台阶部分而受到流体流动干扰的显着影响 表面。
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公开(公告)号：US07437927B2
公开(公告)日：2008-10-21
申请号：US11835981
申请日：2007-08-08
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： The invention provides a thermal type flow meter which has a high reliability and a low cost. In a thermal type flow meter provided with a flow rate detecting element in which at least a heat generating resistor and a lead electrode are formed on a surface of a tabular substrate, and a support body in which a concave portion accommodating the flow rate detecting element is formed on a surface, and in which the flow rate detecting element is firmly fixed and accommodated by an adhesive agent in a back surface of the tabular substrate and a part of a bottom surface of the concave portion, an approximately straight discharge groove which is deeper than a bottom surface of the concave portion and passes through both end surfaces in upward and downward sides of the concave portion is formed from the upstream side of the support body concave portion to the downstream side, between the cavity of the tabular substrate and the back surface region of the tabular substrate in which the lead electrode is formed. Accordingly, it is possible to achieve the thermal type flow meter which has the high reliability and the low cost.
摘要翻译： 本发明提供一种具有高可靠性和低成本的热式流量计。 在具有流量检测元件的热式流量计中，至少在片状基板的表面上形成有发热电阻体和引线电极，在支承体中容纳流量检测元件的凹部 形成在表面上，其中流量检测元件通过粘合剂牢固地固定并容纳在平板状基板的背面和凹部的底面的一部分中，大致直线的排出槽是 比凹部的底面深，并且穿过凹部的上下两侧的两个端面，从支撑体凹部的上游侧到下游侧，在平板状基板的空腔和 形成引线电极的平板状基板的背面区域。 因此，可以实现具有高可靠性和低成本的热式流量计。
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公开(公告)号：US07269999B2
公开(公告)日：2007-09-18
申请号：US10560896
申请日：2006-03-05
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/696
摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.
摘要翻译： 提供流量测量精度优异的热气流计。 气流计具有流量测量元件，其包括形成在第一基底构件上的热电阻器和温度补偿电阻器。 具有驱动电路和信号处理器的气流计的第二基座容纳在保持流量测量元件的壳体中。 流量测量元件设置在空气通道中。 在用于在热气流计的两点测量温度的两个温度传感器中，分别在流量测量元件的第一基底上设置第一温度传感器，并且在壳体内部设置第二温度传感器。 信号处理器具有基于流量测量元件的输出信号和第一和第二传感器的各个输出信号来计算气流速率，空气温度和空气通道壁面温度的功能。
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公开(公告)号：US20080016959A1
公开(公告)日：2008-01-24
申请号：US11779128
申请日：2007-07-17
CPC分类号： G01F1/6842 , G01F1/6845
摘要： A thermal type flow sensor includes a base portion provided along the direction of a fluid flowing through a main passage, and a sensor element mounted on the base portion and having an exothermic resistor formed on a substrate for detecting the fluid flow rate. The base portion has a rectangular recessed portion in which the sensor element fixed so that the surface of the detecting portion of the sensor element is positioned lower than an upper edge of the recessed portion. A wall portion of the measuring passage facing the sensor element is constricted. The exothermic resistor is disposed along the fluid passage and spaced away from the upstream side upper edge of the recessed portion and cannot be substantially affected by a fluid flow disturbance due to a step portion formed between the upper edge of the recessed portion and the detecting portion surface.
摘要翻译： 热式流量传感器包括沿着流过主通道的流体的方向设置的基部，以及安装在基部上的传感器元件，并且具有形成在基板上的用于检测流体流速的放热电阻。 基部具有矩形凹部，传感器元件被固定成使得传感器元件的检测部分的表面位于比凹部的上边缘低的位置。 面向传感器元件的测量通道的壁部分被收缩。 放热电阻器沿着流体通道设置并且与凹部的上游侧上边缘隔开间隔开，并且不能由于在凹部的上边缘和检测部分之间形成的台阶部分而受到流体流动干扰的显着影响 表面。
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公开(公告)号：US20050120789A1
公开(公告)日：2005-06-09
申请号：US10921206
申请日：2004-08-19
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/699 , G01K7/20
摘要： A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A heating resistor, a thermoresistance, a group of the resistors, and an amplifier constitute a bridge circuit, and leading terminals of the group of resistors are connected to one of input terminals of an amplifier for amplifying an error voltage through MOS transistors. The heating temperature of the heating resistor can be changed by selecting one of the MOS transistors and turning it on.
摘要翻译： 加热电阻式流量测量装置能够根据环境温度调节加热电阻器的加热温度，并进行初始调整。 加热电阻器，热电阻器，一组电阻器和放大器构成桥式电路，并且该组电阻器的引线端子连接到放大器的一个输入端子，用于通过MOS晶体管放大误差电压。 可以通过选择一个MOS晶体管并将其加热来改变加热电阻器的加热温度。
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67.发明授权Measuring element for a mass air flow sensor and mass air flow sensor using the measuring element 失效使用测量元件的质量空气流量传感器和质量空气流量传感器的测量元件
公开(公告)号：US5708205A
公开(公告)日：1998-01-13
申请号：US649177
申请日：1996-05-17
摘要： A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.
摘要翻译： 形成在用于测量物流的流量的基板上的质量空气流量传感器的测量元件包括一对加热的薄膜电阻，该薄膜并列在物流的流动方向上，形成在薄膜加热的电阻器形成部分 在衬底上，形成在薄膜环境温度感测电阻器上形成在衬底上的一部分薄膜的一对非加热环境温度感测电阻器，以及形成在支撑部分处的多个薄膜电极端子， 基板被支撑，除了加热的电阻器薄膜形成部分和薄膜环境温度感测电阻器形成部分之外的部分，用于从加热的电阻器和非加热的环境温度感测电阻器中取出电信号，其中薄膜被加热 电阻器形成部分和薄膜环境温度感测电阻器形成部分彼此相互偏移并且在之前和之后布置 并且沿垂直于流动方向的方向左右移动并布置，使得一对加热电阻器和一对未加热的电阻器在观察方向上不彼此叠置平行 并且支撑部分被分配在形成有多个薄膜电极端子的基板的一端侧。
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68.发明授权公开(公告)号：US08779337B2
公开(公告)日：2014-07-15
申请号：US13542426
申请日：2012-07-05
IPC分类号： B23K10/00
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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公开(公告)号：US08217320B2
公开(公告)日：2012-07-10
申请号：US11627111
申请日：2007-01-25
IPC分类号： H05B1/02
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
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公开(公告)号：US20100170335A1
公开(公告)日：2010-07-08
申请号：US12724399
申请日：2010-03-15
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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