-
公开(公告)号：US20160345464A1
公开(公告)日：2016-11-24
申请号：US14715265
申请日：2015-05-18
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： H05K7/20
CPC分类号： G02F1/133385 , H05K7/20972
摘要： A display enclosure can include a passive cooling system that includes an exhaust channel and a number of fans. The configuration of the exhaust channel can cause airflow to ingress through one side of the display enclosure, circulate through the display enclosure, and then egress through the same side. The exhaust channel can be positioned around the outer edges of the display enclosure to form an insulative barrier to external heat (e.g., sunlight) while at the same time removing heat generated internally.
摘要翻译： 显示器壳体可以包括被动冷却系统，其包括排气通道和多个风扇。 排气通道的配置可能导致气流进入显示器外壳的一侧，循环通过显示器外壳，然后通过同一侧排出。 排气通道可以围绕显示器外壳的外边缘定位，以形成对外部热（例如太阳光）的绝缘屏障，同时去除内部产生的热量。
-
公开(公告)号：US08784622B2
公开(公告)日：2014-07-22
申请号：US12329447
申请日：2008-12-05
申请人： Michael S. Barnes , Terry Bluck
发明人： Michael S. Barnes , Terry Bluck
CPC分类号： G11B5/84 , G11B5/855 , H01J37/3438
摘要： A system is provided for etching patterned media disks. A movable non-contact electrode is utilized to perform sputter etch. The electrode moves to near contact distance to, but not contacting, the substrate so as to couple RF energy to the disk. The material to be etched may be metal, e.g., Co/Pt/Cr or similar metals. The substrate is held vertically in a carrier and both sides are etched serially. That is, one side is etched in one chamber and then in the next chamber the second side is etched. An isolation valve is disposed between the two chambers and the disk carrier moves the disks between the chambers. The carrier may be a linear drive carrier, using, e.g., magnetized wheels and linear motors.
摘要翻译： 提供用于蚀刻图案化介质盘的系统。 利用可移动非接触电极进行溅射蚀刻。 电极移动到与衬底接近但不接触的接触距离，以将RF能量耦合到盘。 待蚀刻的材料可以是金属，例如Co / Pt / Cr或类似的金属。 衬底垂直地保持在载体中，并且两侧被连续蚀刻。 也就是说，在一个室中蚀刻一面，然后在下一个室中蚀刻第二面。 隔离阀设置在两个腔室之间，圆盘托架使腔室间移动。 载体可以是线性驱动载体，使用例如磁化轮和线性马达。
-
63.发明申请公开(公告)号：US20140043302A1
公开(公告)日：2014-02-13
申请号：US13569498
申请日：2012-08-08
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G09G5/00
CPC分类号： G09G5/003 , G09G2380/14
摘要： The present invention extends to a manual switch system for selecting multimedia content from one or various source inputs to be provided to a digital display. The manual switch system of the present invention provides a compact, convenient, and simple to use solution for updating a digital display in many environments. In a particular example, the manual switch can be used within a fast food restaurant to quickly and easily update the menu such as when the restaurant switches from serving breakfast to lunch or dinner.
摘要翻译： 本发明延伸到用于从要提供给数字显示器的一个或多个源输入中选择多媒体内容的手动切换系统。 本发明的手动开关系统提供了在许多环境中更新数字显示器的紧凑，方便且易于使用的解决方案。 在一个特定的例子中，手动开关可以在快餐店内使用，以便快速方便地更新菜单，例如餐厅从供应早餐切换到午餐或晚餐时。
-
公开(公告)号：US08293066B2
公开(公告)日：2012-10-23
申请号：US12325993
申请日：2008-12-01
IPC分类号： C23F1/00 , H01L21/306 , H01L21/677 , C23C16/00 , C23C14/00
CPC分类号： H01L21/67745 , H01L21/67173 , H01L21/67184 , H01L21/67201
摘要： There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.
摘要翻译： 描述了与目前使用的系统相比，用于运输和处理包括晶片的基板以便以合理的成本有效地生产提高的生产量的装置和方法。 关键要素是沿着处理室的侧面使用传送室，用于通过装载锁定将基板输送到受控气氛中，然后沿着传送室作为到达处理室的方式，然后在受控气氛中进行处理 处理室。
-
公开(公告)号：US20120090992A1
公开(公告)日：2012-04-19
申请号：US13338182
申请日：2011-12-27
申请人： Kevin P. Fairbairn , Michael S. Barnes , Terry Bluck , Ren Xu , Charles Liu , Ralph Kerns
发明人： Kevin P. Fairbairn , Michael S. Barnes , Terry Bluck , Ren Xu , Charles Liu , Ralph Kerns
IPC分类号： C23C14/34
CPC分类号： G11B5/84 , G11B5/855 , H01J37/3438
摘要： A system is provided for etching patterned media disks for hard drive. The modular system may be tailored to perform specific processes sequences so that a patterned media disk is fabricated without removing the disk from vacuum environment. In some sequence the magnetic stack is etched while in other the etch is performed prior to forming the magnetic stack. In a further sequence ion implantation is used without etching steps. For etching a movable non-contact electrode is utilized to perform sputter etch. The cathode moves to near contact distance to, but not contacting, the substrate so as to couple RF energy to the disk. The substrate is held vertically in a carrier and both sides are etched serially. That is, one side is etched in one chamber and then in the next chamber the second side is etched.
摘要翻译： 提供了用于蚀刻用于硬盘驱动器的图案化介质盘的系统。 模块化系统可以被定制以执行特定的处理序列，使得图案化的介质盘被制造而不从真空环境中移除盘。 在一些顺序中，磁性堆叠被蚀刻，而另一些蚀刻则在形成磁性堆叠之前进行。 在另外的序列中，使用离子注入而没有蚀刻步骤。 为了蚀刻可移动的非接触电极用于进行溅射蚀刻。 阴极移动到与衬底接近但不接触的接近距离，以将RF能量耦合到盘。 衬底垂直地保持在载体中，并且两侧被连续蚀刻。 也就是说，在一个室中蚀刻一面，然后在下一个室中蚀刻第二面。
-
公开(公告)号：US08087380B2
公开(公告)日：2012-01-03
申请号：US12610187
申请日：2009-10-30
IPC分类号： C23C14/34
CPC分类号： H01L31/18 , H01L21/67167 , H01L21/67173 , H01L21/67196 , H01L21/67207 , H01L21/67742 , Y10S438/908
摘要： A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
摘要翻译： 多个室围绕传送室布置。 线性传送室可以包括支撑机械臂的直线轨迹。 机器人将基板运送到室和从室传送。 每个室包括多个蒸发器，每个蒸发器独立地被控制。 位于室中的每个基板由多个蒸发器涂覆，使得通过独立地控制每个蒸发器的操作，能够精确地控制各层的形成和各层的浓度梯度。
-
公开(公告)号：US20110158773A1
公开(公告)日：2011-06-30
申请号：US13042407
申请日：2011-03-07
IPC分类号： H01L21/677
CPC分类号： H01L21/67184 , H01L21/67173 , H01L21/67196 , H01L21/67201 , H01L21/67745
摘要： There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.
摘要翻译： 描述了与目前使用的系统相比，用于运输和处理包括晶片的基板以便以合理的成本有效地生产提高的生产量的装置和方法。 关键要素是沿着处理室的侧面使用传送室，用于通过装载锁定将基板输送到受控气氛中，然后沿着传送室作为到达处理室的方式，然后在受控气氛中进行处理 处理室。
-
公开(公告)号：US20110104847A1
公开(公告)日：2011-05-05
申请号：US12610187
申请日：2009-10-30
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , H01L21/67167 , H01L21/67173 , H01L21/67196 , H01L21/67207 , H01L21/67742 , Y10S438/908
摘要： A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
摘要翻译： 多个室围绕传送室布置。 线性传送室可以包括支撑机械臂的直线轨迹。 机器人将基板运送到室和从室传送。 每个室包括多个蒸发器，每个蒸发器独立地被控制。 位于室中的每个基板由多个蒸发器涂覆，使得通过独立地控制每个蒸发器的操作，能够精确地控制各层的形成和各层的浓度梯度。
-
公开(公告)号：US20100237042A1
公开(公告)日：2010-09-23
申请号：US12730147
申请日：2010-03-23
申请人： Houng T. Nguyen , Ren Xu , Michael S. Barnes
发明人： Houng T. Nguyen , Ren Xu , Michael S. Barnes
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A sequence of process steps having balanced process times are implemented in sequence of etch chambers coupled linearly and isolated one from the other, resulting in the optimization of island to trench ratio for a patterned media. A biased chemical etching using active etching gas is used to descum and trim the resist patterns. An inert gas sputter etch is performed on the magnetic layers, resulting in the patterned magnetic layer on the disk. A final step of stripping is then performed to remove the residual capping resist and carbon hard mask on top of un-etched magnetic islands. The effective magnetic material remaining on the disk surface can be optimized by adjusting the conditions of chemical etch and sputter etch conditions. Relevant process conditions that may be adjusted include: pressure, bias, time, and the type of gas in each step.
摘要翻译： 具有平衡处理时间的一系列工艺步骤以蚀刻室的顺序实现，该蚀刻室线性地并且彼此隔离，导致图案化介质的岛与沟槽比的优化。 使用有源蚀刻气体的偏压化学蚀刻来除去和修整抗蚀剂图案。 对磁性层进行惰性气体溅射蚀刻，得到盘上图案化的磁性层。 然后进行剥离的最后一步，以除去未蚀刻的磁岛顶部上的残余覆盖抗蚀剂和碳硬掩模。 可以通过调整化学蚀刻和溅射蚀刻条件的条件来优化残留在盘表面上的有效磁性材料。 可能调整的相关工艺条件包括：压力，偏压，时间和每一步中的气体类型。
-
公开(公告)号：US20090145881A1
公开(公告)日：2009-06-11
申请号：US12329447
申请日：2008-12-05
申请人： Michael S. Barnes , Terry Bluck
发明人： Michael S. Barnes , Terry Bluck
CPC分类号： G11B5/84 , G11B5/855 , H01J37/3438
摘要： A system is provided for etching patterned media disks. A movable non-contact electrode is utilized to perform sputter etch. The electrode moves to near contact distance to, but not contacting, the substrate so as to couple RF energy to the disk. The material to be etched may be metal, e.g., Co/Pt/Cr or similar metals. The substrate is held vertically in a carrier and both sides are etched serially. That is, one side is etched in one chamber and then in the next chamber the second side is etched. An isolation valve is disposed between the two chambers and the disk carrier moves the disks between the chambers. The carrier may be a linear drive carrier, using, e.g., magnetized wheels and linear motors.
摘要翻译： 提供了用于蚀刻图案化介质盘的系统。 利用可移动非接触电极进行溅射蚀刻。 电极移动到与衬底接近但不接触的接触距离，以将RF能量耦合到盘。 待蚀刻的材料可以是金属，例如Co / Pt / Cr或类似的金属。 衬底垂直地保持在载体中，并且两侧被连续蚀刻。 也就是说，在一个室中蚀刻一面，然后在下一个室中蚀刻第二面。 隔离阀设置在两个腔室之间，圆盘托架使腔室间移动。 载体可以是线性驱动载体，使用例如磁化轮和线性马达。
-
-
-
-
-
-
-
-
-
搜索结果
80 条记录 (耗时 0.036 秒)
