公开(公告)号：US20070218302A1

公开(公告)日：2007-09-20

申请号：US11688565

申请日：2007-03-20

申请人： Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

发明人： Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

IPC分类号： B32B15/04

CPC分类号： C23C4/02 ,  C23C4/18 ,  C23C28/042 ,  Y10T428/12

摘要： Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment.A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIa of the Periodic Table coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

摘要翻译： 改善设置在容器内部的部件和部件的电阻，例如用于在强腐蚀性环境中进行等离子体蚀刻处理的半导体处理装置。 用于半导体处理装置的陶瓷涂层构件包括由直接涂覆的元素周期表Ⅲa族元素的氧化物或金属或非金属基材表面上的底涂层和二次再结晶的多孔层 通过高能量的照射处理如电子束和激光束在多孔层上形成的氧化物层。

公开(公告)号：US20070017756A1

公开(公告)日：2007-01-25

申请号：US11484712

申请日：2006-07-12

申请人： Yuichi Takeo ,  Takahiro Ito ,  Junichi Takeuchi

发明人： Yuichi Takeo ,  Takahiro Ito ,  Junichi Takeuchi

IPC分类号： F16D65/38

CPC分类号： F16D65/0977 ,  F16D55/226 ,  F16D65/095

摘要： A disk brake has a mount and a pad. The pad has a guide portion and outer and inner push bearing portions on a disk rotor rotation outlet side. The mount has a support portion to support the guide portion movably in a rotor axial direction. The outer and inner push bearing portions are provided on each position outwardly or inwardly of the rotor rotation outlet side guide portion in the radial direction of the rotor, and project toward the mount in the radial direction of the rotor to abut against the mount. The outer push bearing portion has an abutment surface to abut against the mount on a tangent to an outer peripheral side in a central position of the outer peripheral side of a friction surface of the pad radially outwardly in the radial direction of the rotor, or in a position outwardly of the tangent.

摘要翻译： 盘式制动器具有安装座和衬垫。 垫片在盘形转子旋转出口侧具有引导部分和外部和内部推力轴承部分。 安装座具有支撑部分，用于在转子轴向方向上可移动地支撑引导部分。 外推力轴承部分和内推力轴承部分在转子的径向方向上设置在转子旋转出口侧引导部分的外侧或内侧的每个位置上，并且在转子的径向方向上朝安装件突出以抵靠安装件。 外推力轴承部分具有邻接表面，该邻接表面在转子的径向方向上径向向外的垫的摩擦表面的外周侧的中心位置处与外周侧相切地抵接安装件，或者在 切线外面的一个位置。

公开(公告)号：US06783863B2

公开(公告)日：2004-08-31

申请号：US09890251

申请日：2001-08-03

申请人： Yoshio Harada ,  Junichi Takeuchi ,  Tatsuya Hamaguchi ,  Nobuyuki Nagayama ,  Kouji Mitsuhashi

发明人： Yoshio Harada ,  Junichi Takeuchi ,  Tatsuya Hamaguchi ,  Nobuyuki Nagayama ,  Kouji Mitsuhashi

IPC分类号： H01L2100

CPC分类号： H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

摘要： It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

摘要翻译： 本发明提供一种等离子体处理容器的内部构件，该等离子体处理容器在含有卤素气体的环境下具有优异的耐化学腐蚀和等离子体侵蚀性，并且其制造方法是通过将基材的表面覆盖而形成的构件 由作为底涂层形成的金属涂层，在作为中间层的底涂层上形成的Al 2 O 3膜和在中间层上形成的作为顶涂层的Y 2 O 3喷涂层构成的多层复合层。

公开(公告)号：US06646482B2

公开(公告)日：2003-11-11

申请号：US09874737

申请日：2001-06-05

申请人： Junichi Takeuchi

发明人： Junichi Takeuchi

IPC分类号： H03B100

CPC分类号： H04L25/028 ,  H03K19/018528 ,  H04L25/0272 ,  H04L25/0274 ,  H04L25/0282

摘要： Disclosed is a variable drive current driver circuit, comprising: a pair of push-pull circuits for driving a load circuit complementarily; a first current source circuit for having a bias current flow into the pair of push-pull circuits; a second current source circuit for having the bias current flow out of the pair of push-pull circuits; and a control circuit for varying both the bias current flowed by the first current source circuit and the bias current flowed by the second current source circuit according to a control signal.

摘要翻译： 公开了一种可变驱动电流驱动电路，包括：一对用于互补地驱动负载电路的推挽电路; 用于使偏置电流流入所述一对推挽电路的第一电流源电路; 用于使所述偏置电流流出所述一对推挽电路的第二电流源电路; 以及控制电路，用于根据控制信号改变由第一电流源电路流过的偏置电流和由第二电流源电路流动的偏置电流。

公开(公告)号：US06236270B1

公开(公告)日：2001-05-22

申请号：US09460980

申请日：1999-12-15

申请人： Junichi Takeuchi

发明人： Junichi Takeuchi

IPC分类号： H03F345

CPC分类号： H03F3/45192 ,  H03F3/3023 ,  H03F2203/45301 ,  H03F2203/45398

摘要： The operational amplifier circuit of the present invention includes a first pair of NMOS which receives a first and a second input voltages to respective gate electrodes and has the source electrodes connected in common, a first pair of PMOS whose gate electrodes are connected in common and whose respective source electrodes are connected to respective drain electrodes of the first pair of NMOSs, a second pair of NMOSs whose gate electrodes are connected in common, whose respective source electrodes are connected to respective drain electrodes of the first PMOS, and whose drain electrodes are connected to a current mirror composed of a second pair of PMOS which is based on the first power supply voltage, and another PMOS whose gate electrode is connected to the drain electrode of one of the second pair of NMOS transistor, whose source electrode receives the first power supply voltage, and whose drain electrode is connected to a constant current source composed of another NMOS transistor whose one end is connected to the second power supply voltage.

摘要翻译： 本发明的运算放大器电路包括：第一对NMOS，其接收相应的栅电极的第一和第二输入电压，并且源电极共同连接;第一对PMOS，栅电极共同连接， 各个源电极连接到第一对NMOS的各个漏电极，第二对NMOS的栅极共同连接，其各个源电极连接到第一PMOS的各个漏电极，并且其漏电极连接 涉及由基于第一电源电压的第二对PMOS构成的电流镜，以及另一PMOS，其栅电极连接到第二对NMOS晶体管之一的漏电极，源电极接收第一电源 电源电压，并且其漏电极连接到由另一个NMOS跨接元件组成的恒流源 r的一端连接到第二电源电压。

公开(公告)号：US5909354A

公开(公告)日：1999-06-01

申请号：US694453

申请日：1996-08-12

申请人： Yoshio Harada ,  Junichi Takeuchi

发明人： Yoshio Harada ,  Junichi Takeuchi

IPC分类号： B23Q3/15 ,  C01G23/04 ,  C23C4/10 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/683 ,  H02N13/00

CPC分类号： B23Q3/15 ,  H01L21/6833 ,  Y10T279/23

摘要： An electrostatic chuck member includes a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al.sub.2 O.sub.3 TiO.sub.2 based spray-coated layer containing a Ti.sub.n O.sub.2n-1, where n=1-9, compound. The electrostatic chuck member has a large volume resistivity, a small scattering, and the quality is stable. A method for making the electrostatic chuck member includes subjecting a metal substrate to a blast treatment, spray-coating a metallic undercoat on a surface of the metal substrate, and spray-coating Al.sub.2 O.sub.3 TiO.sub.2 on to the metallic undercoat to form a Al.sub.2 O.sub.3 -TiO.sub.2 based layer in which at least a portion of the TiO.sub.2 is changed into Ti.sub.n O.sub.2, where n=1-9.

摘要翻译： 静电吸盘构件包括金属基底，金属喷涂层的底涂层和含有n = 1-9的化合物的TinO2n-1的Al2O3TiO2基喷涂层的顶涂层。 静电吸盘构件体积电阻率大，散射小，质量稳定。 制造静电卡盘的方法包括对金属基板进行喷砂处理，在金属基板的表面上喷涂金属底涂层，并将Al 2 O 3 TiO 2喷涂到金属底涂层上以形成Al 2 O 3 -TiO 2基 其中至少一部分TiO 2变成TinO 2，其中n = 1-9。

公开(公告)号：US5789077A

公开(公告)日：1998-08-04

申请号：US494695

申请日：1995-06-26

申请人： Syuhei Nakahama ,  Hisamichi Nagahara ,  Masamichi Kawasaki ,  Yoshio Harada ,  Junichi Takeuchi

发明人： Syuhei Nakahama ,  Hisamichi Nagahara ,  Masamichi Kawasaki ,  Yoshio Harada ,  Junichi Takeuchi

IPC分类号： C23C4/18 ,  C23C10/02 ,  C23C4/10

CPC分类号： C23C4/18 ,  C23C10/02 ,  Y10T428/265 ,  Y10T428/31678

摘要： Thermally sprayed coatings made from carbides of metals having greater carbon affinity than Cr in the presence of free carbon, or thermally sprayed coatings made from carbides of metals having smaller carbon affinity than Cr are heat treated in a chromium halide containing atmosphere which also contains hydrogen gas, whereby activated metallic Cr is precipitated in a fine particulate form, which is allowed to act on the thermally sprayed coatings, whereupon a Cr.sub.23 C.sub.6 -form carbide is created not only on the coating surface but also in its interior, particularly within pores, to form a modified layer, thereby compositing the thermally sprayed coatings.

摘要翻译： 在游离碳存在下，比碳含量更高的金属碳化物制成的热喷涂层，或者碳化碳比碳化合物碳化物碳化物热喷涂的涂层在含有氢氧化铬的气氛中进行热处理 ，由此活化的金属Cr以细颗粒形式沉淀，其被允许作用在热喷涂的涂层上，于是Cr23C6型碳化物不仅在涂层表面上而且在其内部，特别是在孔内形成，形成 改性层，从而合成热喷涂层。