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公开(公告)号：US11498335B2
公开(公告)日：2022-11-15
申请号：US17107683
申请日：2020-11-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini , Mauro Cattaneo , Andrea Nomellini
Abstract: A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.
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公开(公告)号：US11242242B2
公开(公告)日：2022-02-08
申请号：US16422504
申请日：2019-05-24
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico Giusti , Simon Dodd
Abstract: A microfluidic MEMS device is formed by a plurality of ejection cells each having a fluid chamber; an actuator chamber; a membrane having a first surface facing the actuator chamber and a second surface facing the fluid chamber; a piezoelectric actuator on the first surface of the membrane; and a passivation layer on the piezoelectric actuator. The membrane has an elongated area defining a longitudinal direction and a transverse direction. The passivation layer has a plurality of holes. The holes extend throughout the thickness of the passivation layer and, in a plan view, have an elongated shape with a greater dimension parallel to the longitudinal direction of the membrane and a smaller dimension parallel to the transverse direction.
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公开(公告)号：US11214061B2
公开(公告)日：2022-01-04
申请号：US16885908
申请日：2020-05-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Cattaneo , Carlo Luigi Prelini
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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公开(公告)号：US10974508B2
公开(公告)日：2021-04-13
申请号：US16392007
申请日：2019-04-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini
Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.
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公开(公告)号：US10703102B2
公开(公告)日：2020-07-07
申请号：US16030630
申请日：2018-07-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Cattaneo , Carlo Luigi Prelini
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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Patent Agency Ranking
公开(公告)号：US10683200B2
公开(公告)日：2020-06-16
申请号：US16050924
申请日：2018-07-31
Applicant: STMicroelectronics S.r.l.
Inventor： Dario Paci , Domenico Giusti , Irene Martini
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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公开(公告)号：US20200156929A1
公开(公告)日：2020-05-21
申请号：US16752321
申请日：2020-01-24
Applicant: STMicroelectronics S.R.L.
Inventor： Dario Paci , Domenico Giusti , Irene Martini
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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公开(公告)号：US10310253B2
公开(公告)日：2019-06-04
申请号：US15594287
申请日：2017-05-12
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Domenico Giusti , Sonia Constantini
Abstract: A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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公开(公告)号：US10232615B2
公开(公告)日：2019-03-19
申请号：US15726169
申请日：2017-10-05
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Pasetti
Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.
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公开(公告)号：US20190039880A1
公开(公告)日：2019-02-07
申请号：US16050924
申请日：2018-07-31
Applicant: STMicroelectronics S.r.l.
Inventor： Dario Paci , Domenico Giusti , Irene Martini
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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