公开(公告)号：US20110284774A1

公开(公告)日：2011-11-24

申请号：US13192857

申请日：2011-07-28

申请人： Takanobu ISHIHARA ,  Youichi Sasaki ,  Kouji Kakizaki ,  Masahiro Inoue ,  Takayuki Yabu ,  Hideo Hoshino

发明人： Takanobu ISHIHARA ,  Youichi Sasaki ,  Kouji Kakizaki ,  Masahiro Inoue ,  Takayuki Yabu ,  Hideo Hoshino

IPC分类号： G21K5/00 ,  H05H1/24

CPC分类号： H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： A target output device may include: a main body for storing a target material; a nozzle unit, connected to the main body, for outputting the target material as a target; an electrode unit provided so as to face the nozzle unit; a voltage control unit that applies predetermined voltage between the electrode unit and the target material to generate electrostatic force therebetween for pulling out the target material through the nozzle unit; a pressure control unit that applies predetermined pressure to the target material; and an output control unit that causes the target to be outputted through the nozzle unit by controlling signal output timing of each of a first timing signal and a second timing signal, the first timing signal causing the voltage control unit to apply the predetermined voltage between the target material and the electrode unit at first timing, and the second timing signal causing the pressure control unit to apply the predetermined pressure to the target material at second timing.

摘要翻译： 目标输出装置可以包括：用于存储目标材料的主体; 喷嘴单元，连接到主体，用于输出目标材料作为目标; 设置成面向喷嘴单元的电极单元; 电压控制单元，其在所述电极单元和所述目标材料之间施加预定电压，以在其间产生静电力，以通过所述喷嘴单元拉出所述目标材料; 压力控制单元，其向所述目标材料施加预定压力; 以及输出控制单元，其通过控制第一定时信号和第二定时信号中的每一个的信号输出定时使所述目标通过所述喷嘴单元输出，所述第一定时信号使所述电压控制单元在所述第一定时信号和所述第二定时信号之间施加所述预定电压 目标材料和电极单元，以及第二定时信号，使得压力控制单元在第二定时将预定压力施加到目标材料。

公开(公告)号：US20080198891A1

公开(公告)日：2008-08-21

申请号：US12071048

申请日：2008-02-14

申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

IPC分类号： H01S3/03

CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/073 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325

摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.

摘要翻译： 一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块 并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电 ，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。

公开(公告)号：US07215695B2

公开(公告)日：2007-05-08

申请号：US10963694

申请日：2004-10-13

申请人： Kouji Kakizaki ,  Youichi Sasaki ,  Naoki Kataoka

发明人： Kouji Kakizaki ,  Youichi Sasaki ,  Naoki Kataoka

IPC分类号： H01S3/22

CPC分类号： H01S3/038 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/225

摘要： For the purpose of providing a discharge excitation type pulse laser apparatus capable of reducing disturbance of the discharge space caused by shock waves, the discharge excitation type pulse laser apparatus according to the present invention is designed for generating a pulsed main discharge by applying a high voltage between main electrodes (14, 15) including a cathode (15) and an anode (14) arranged in opposition to each other, and thereby exciting a laser gas in a discharge space (37) defined between the main electrodes to oscillate laser light (21), and characterized in that no reflector larger than a prescribed size is provided on a surface within a prescribed surface distance (LC) from the discharge space (37), and an insulating cathode insulating member (54) that is inclined such that the cathode (15) side end is highest is arranged on at least one of the upstream and downstream sides of the cathode (15) in close contact with the cathode (15).

摘要翻译： 为了提供能够减少由冲击波引起的放电空间的扰动的放电励磁型脉冲激光装置，本发明的放电励磁型脉冲激光装置被设计成通过施加高电压来产生脉冲主放电 在主电极（14,15）之间，包括阴极（15）和阳极（14），彼此相对布置，从而激励在主电极之间限定的放电空间（37）中的激光气体，以振荡激光（ 21），其特征在于，在距所述放电空间（37）的规定表面距离（LC）内的表面上设置不大于规定尺寸的反射器，以及绝缘阴极绝缘构件（54），其倾斜使得 在阴极（15）的上游侧和下游侧的至少一个上与阴极（15）紧密接触地设置阴极（15）侧端部最高。

公开(公告)号：US07782922B2

公开(公告)日：2010-08-24

申请号：US12071048

申请日：2008-02-14

申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/03

CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/073 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325

摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.

摘要翻译： 一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块 并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电 ，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。

公开(公告)号：US20060078028A1

公开(公告)日：2006-04-13

申请号：US10963694

申请日：2004-10-13

申请人： Kouji Kakizaki ,  Youichi Sasaki ,  Naoki Kataoka

发明人： Kouji Kakizaki ,  Youichi Sasaki ,  Naoki Kataoka

IPC分类号： H01S3/22

CPC分类号： H01S3/038 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/225

摘要： For the purpose of providing a discharge excitation type pulse laser apparatus capable of reducing disturbance of the discharge space caused by shock waves, the discharge excitation type pulse laser apparatus according to the present invention is designed for generating a pulsed main discharge by applying a high voltage between main electrodes (14, 15) including a cathode (15) and an anode (14) arranged in opposition to each other, and thereby exciting a laser gas in a discharge space (37) defined between the main electrodes to oscillate laser light (21), and characterized in that no reflector larger than a prescribed size is provided on a surface within a prescribed surface distance (LC) from the discharge space (37), and an insulating cathode insulating member (54) that is inclined such that the cathode (15) side end is highest is arranged on at least one of the upstream and downstream sides of the cathode (15) in close contact with the cathode (15).

摘要翻译： 为了提供能够减少由冲击波引起的放电空间的扰动的放电励磁型脉冲激光装置，本发明的放电励磁型脉冲激光装置被设计成通过施加高电压来产生脉冲主放电 在主电极（14,15）之间，包括阴极（15）和阳极（14），彼此相对布置，从而激励在主电极之间限定的放电空间（37）中的激光气体，以振荡激光（ 21），其特征在于，在距所述放电空间（37）的规定表面距离（LC）内的表面上设置不大于规定尺寸的反射器，以及绝缘阴极绝缘构件（54），其倾斜使得 在阴极（15）的上游侧和下游侧的至少一个上与阴极（15）紧密接触地设置阴极（15）侧端部最高。