公开(公告)号：US06548214B2

公开(公告)日：2003-04-15

申请号：US09847329

申请日：2001-05-03

申请人： Noritsugu Yoshizawa ,  Masaki Yoshizawa ,  Shigeru Moriya

发明人： Noritsugu Yoshizawa ,  Masaki Yoshizawa ,  Shigeru Moriya

IPC分类号： G03C500

CPC分类号： G03F7/70483 ,  G03B27/32

摘要： A method of lithography capable of optimizing its process condition more simply and precisely based on a limited number of experiments is provided. A line edge roughness of a resist pattern is obtained as a characteristic value for evaluation. The resist pattern is formed in an orthogonal experiment based on an orthogonal table that includes significant factors, which define a process condition of its lithography. Reference level (benchmark) values are set for each factor in the orthogonal experiment, from which an appropriate reference level value which minimizes the edge roughness is selected as a process condition for proceeding with the lithography. By provision of the edge roughness criterion as the characteristic value which has satisfactory reproducibility, can reflect a change in the process condition very sensitively, and has a linear correlation with respect to the resolution, the influences of respective process conditions on the resolution can be reflected more precisely and with an improved reproducibility.

摘要翻译： 提供了一种能够基于有限数量的实验更简单且精确地优化其工艺条件的光刻方法。 获得抗蚀剂图案的线边缘粗糙度作为评价特性值。 基于正交表的正交实验形成抗蚀剂图案，该正交表包括明确的因素，其限定了其光刻的工艺条件。 对于正交实验中的每个因子设置参考水平（基准）值，从中选择最小化边缘粗糙度的适当参考水平值作为进行光刻的处理条件。 通过提供边缘粗糙度标准作为具有令人满意的重现性的特征值，可以非常敏感地反映工艺条件的变化，并且与分辨率具有线性相关性，可以反映各工艺条件对分辨率的影响 更准确地并且具有改进的再现性。

公开(公告)号：US06473162B1

公开(公告)日：2002-10-29

申请号：US09664448

申请日：2000-09-18

申请人： Yoshizawa Masaki ,  Shigeru Moriya

发明人： Yoshizawa Masaki ,  Shigeru Moriya

IPC分类号： G03B2752

CPC分类号： G03F7/70625 ,  G03F7/70641

摘要： The present invention relates to a method of computing a defocus amount in lithography and lithographic process using the method. A first step executes plural double-exposure operations each including a pattern exposure for forming a pattern of a predetermined line width and a full-area exposure over an area covering the pattern, employing different dosages employed in the full-area exposures for different double-exposure operations. A developing operation is performed. subsequent to the double-exposure, whereby a plurality of resist patterns are obtained. In a second step, the edge roughness and the line width are measured on each resist pattern. In a third step, a Gaussian function is fitted to the edge roughnesses and the line widths. The distribution width of the Gaussian curve is determined as the defocus amount of a pseudo-profile of the beam which indicates a change in lithographic factors that affect the accuracy of lithography.

摘要翻译： 本发明涉及使用该方法计算光刻和光刻处理中的散焦量的方法。 第一步执行多个双重曝光操作，每个曝光包括在覆盖图案的区域上形成预定线宽和全面曝光图案的图案曝光，采用在不同双面曝光的全区域曝光中采用的不同剂量， 曝光操作。 进行显影操作。 在双曝光之后，由此获得多个抗蚀剂图案。 在第二步骤中，在每个抗蚀剂图案上测量边缘粗糙度和线宽度。 在第三步中，高斯函数拟合到边缘粗糙度和线宽。 高斯曲线的分布宽度被确定为光束的伪轮廓的散焦量，其指示影响光刻精度的光刻因子的变化。

公开(公告)号：US5446802A

公开(公告)日：1995-08-29

申请号：US262392

申请日：1994-06-20

申请人： Kaoru Tada ,  Hideo Kumashiro ,  Hiroya Sugawa ,  Shigeru Moriya ,  Hiroshi Murakami

发明人： Kaoru Tada ,  Hideo Kumashiro ,  Hiroya Sugawa ,  Shigeru Moriya ,  Hiroshi Murakami

IPC分类号： G06T5/00 ,  H04N1/40 ,  G06K9/00

CPC分类号： G06T7/0081 ,  H04N1/40062 ,  G06T2207/10008 ,  G06T2207/30176

摘要： In an image processing apparatus, first peak density pixels of one dimension each having a peak density in one-dimension direction larger than a predetermined density are detected from image data located in a predetermined image area of a document image, and second peak density pixels of two dimensions each having peak densities in two-dimension directions larger than the predetermined density are detected from the image data. Further, there are counted a number of the detected first peak density pixels of one dimension and a number of the detected second peak density pixels of two dimensions, and then, it is judged whether or not the image data located in the predetermined image area are image data of a dot photograph image, a photograph image or a character image based on the counted numbers.

摘要翻译： 在图像处理装置中，从位于原稿图像的预定图像区域的图像数据中检测出具有大于预定浓度的一维方向上的峰值密度的一维的第一峰值密度像素，第二峰值密度像素 从图像数据中检测出具有大于预定浓度的二维方向的峰值密度的两个维度。 此外，对所检测到的一维的第一峰值密度数和检测到的二维的第二峰值密度像素的数量进行计数，然后判断位于预定图像区域中的图像数据是否为 基于所计数的点数的点照片图像，照片图像或字符图像的图像数据。

公开(公告)号：US5414522A

公开(公告)日：1995-05-09

申请号：US932248

申请日：1992-08-19

申请人： Shigeru Moriya

发明人： Shigeru Moriya

IPC分类号： H04N1/00 ,  H04N1/04 ,  H04N1/10 ,  H04N1/193 ,  H04N1/21

CPC分类号： H04N1/00708 ,  H04N1/00681 ,  H04N1/00737 ,  H04N1/0402 ,  H04N1/0405 ,  H04N1/1013 ,  H04N1/193

摘要： Image data of a plurality of lines in a document are read in the main scan direction and/or in the subscan direction, and the document size is determined on the basis of the image data of the plurality of lines. Thus, the erroneous detection of document size can be avoided. The document size is determined for example as an average of the document sizes detected for lines except the smallest and largest document sizes. When the same anomaly is observed twice, new lines are used to determine the document size. Further, an image reading apparatus reads image data of a line in a document in the main scan direction and in the subscan direction with a linear image sensor. When the document size is detected on the basis of the image data of a plurality of lines in the main scan direction, the document is scanned in the subscan direction at a fast read rate, while the document size is detected on the basis of the image data of a plurality of lines in the subscan direction, the document is scanned in the subscan direction at a low read rate.

摘要翻译： 在主扫描方向和/或副扫描方向上读取文档中的多行的图像数据，并且基于多条线的图像数据来确定原稿尺寸。 因此，可以避免文件尺寸的错误检测。 例如，文档大小被确定为除了最小和最大的文档大小之外的行检测到的文档大小的平均值。 当观察到相同的异常两次时，使用新行来确定文档大小。 此外，图像读取装置利用线性图像传感器在主扫描方向和副扫描方向上读取原稿中的行的图像数据。 当基于主扫描方向上的多条线的图像数据检测文档尺寸时，以快速读取速度在副扫描方向扫描原稿，同时基于图像检测文档尺寸 在副扫描方向上的多条线的数据，以低读取速率以副扫描方向扫描原稿。

公开(公告)号：US5327261A

公开(公告)日：1994-07-05

申请号：US516134

申请日：1990-04-27

申请人： Yoshihiko Hirota ,  Kunihiko Omura ,  Shigeru Moriya ,  Hiroya Sugawa ,  Katsuaki Tajima ,  Kaoru Tada

发明人： Yoshihiko Hirota ,  Kunihiko Omura ,  Shigeru Moriya ,  Hiroya Sugawa ,  Katsuaki Tajima ,  Kaoru Tada

IPC分类号： H04N1/00 ,  H04N1/387 ,  H04N1/40

CPC分类号： H04N1/0071 ,  H04N1/00681 ,  H04N1/00713 ,  H04N1/00734 ,  H04N1/00753 ,  H04N1/3875

摘要： An image reading apparatus includes an original placing platen formed of a rectangular transparent member on which an original is placed; a photoelectrical conversion device for reading an image of the original-placed on the transparent member; an original pressing plate having an original pressing surface for pressing the overall surface of the original placing platen, the original pressing surface having a first area formed at a portion opposing a first side of the transparent member and a second area formed at a portion opposing a second side crossing at a right angle to the first side of the transparent member. The first and second areas are determined as a predetermined color by the photoelectrical conversion device. The apparatus further includes a size detecting device for reading by the photoelectrical conversion device the original sandwiched between the first and second areas of the original pressing surface and the transparent member so as to detect the size of the original based on the result of reading.

摘要翻译： 图像读取装置包括：原件放置台，其由放置有原件的矩形透明构件形成; 用于读取原稿放置在透明构件上的图像的光电转换装置; 原始按压板具有用于按压原稿放置台板的整个表面的原始按压表面，原始按压表面具有形成在与透明构件的第一侧相对的部分处的第一区域和形成在与第一区域相对的部分处的第二区域 第二侧与透明构件的第一侧成直角交叉。 通过光电转换装置将第一和第二区域确定为预定的颜色。 该装置还包括：尺寸检测装置，用于通过光电转换装置读取夹在原按压表面的第一和第二区域之间的原件和透明构件，以便基于读取结果检测原件的尺寸。

公开(公告)号：US5109288A

公开(公告)日：1992-04-28

申请号：US480711

申请日：1990-02-15

申请人： Shigeru Moriya

发明人： Shigeru Moriya

IPC分类号： H04N1/047 ,  H04N1/10 ,  H04N1/193

CPC分类号： H04N1/0473 ,  H04N1/1017 ,  H04N1/193 ,  H04N2201/0471 ,  H04N2201/04755

摘要： An image reading apparatus includes a reading scanner for reading an image of an original while scanning the original, and a scanner sensor provided in an initial position for detecting the initial position of the scanner. The scanner starts scanning of the original from a scanning start position distant from the initial position in a predetermined direction, and the original is scanned in the predetermined direction from the scanning start position. When the scanner sensor detects the reading scanner after operation of the reading scanner, the operation of the scanner is stopped.

摘要翻译： 图像读取装置包括用于在扫描原稿时读取原稿的图像的读取扫描器和设置在用于检测扫描仪的初始位置的初始位置的扫描仪传感器。 扫描仪从预定方向从远离初始位置的扫描开始位置开始扫描原件，并且原稿从扫描开始位置沿预定方向扫描。 当扫描仪传感器在读取扫描仪操作后检测到读取扫描仪时，扫描仪的操作停止。

公开(公告)号：US5048114A

公开(公告)日：1991-09-10

申请号：US296798

申请日：1989-01-12

申请人： Shigeru Moriya

发明人： Shigeru Moriya

IPC分类号： H04N1/38 ,  H04N1/393 ,  H04N1/40

CPC分类号： H04N1/393 ,  H04N1/38 ,  H04N1/40

摘要： An image reading and processing apparatus in which an image-carrying medium is scanned along a predetermined path in a line-by-line manner and, during each cycle of line scanning, image data is produced from a line of pixels on the scanned image-carrying medium and is stored into image data memories for each line of pixels on the image-carrying medium while data-write and data-read address signals are generated by first and second address generators and are supplied independently of each other to the image data memories, the second address generator being operative to supply the data-read address signal to the image data memories at a timing regulated on the basis of a signal indicative of a magnification/reduction ratio at which an image on an image-carrying medium is to be reproduced, wherein there are further provided an attribute data storage memory having a plurality of memory spaces respectively corresponding to a plurality of scanning areas, each memory space storing attribute data designating the conditions in which the image is to be reproduced, the attribute data storage memory being responsive to an attribute data address signal for outputting the attribute data corresponding to the attribute data address signals, wherein the image data output from the image data memory is processed on the basis of the attribute data output from the attribute data storage memory, and either the data-read address or the data-write address signal is supplied to the attribute data storage memory as the attribute data address signal.

摘要翻译： 一种图像读取和处理装置，其中沿着预定路径逐行扫描图像传送介质，并且在行扫描的每个周期期间，从扫描图像上的像素行产生图像数据， 并且在数据写入和数据读取地址信号由第一和第二地址发生器产生时被存储到图像载体上的每一行像素的图像数据存储器中，并且彼此独立地被提供给图像数据存储器 ，第二地址发生器可操作以在基于指示图像载体上的图像的放大/缩小比率的信号被调节的定时处将数据读取地址信号提供给图像数据存储器 再现，其中还提供了具有分别对应于多个扫描区域的多个存储空间的属性数据存储存储器，每个存储器空间存储属性d 指定要再现图像的条件的属性数据存储存储器响应于属性数据地址信号输出对应于属性数据地址信号的属性数据，其中从图像数据存储器输出的图像数据是 基于从属性数据存储器输出的属性数据进行处理，并将数据读取地址或数据写入地址信号作为属性数据地址信号提供给属性数据存储存储器。

公开(公告)号：US4420173A

公开(公告)日：1983-12-13

申请号：US300104

申请日：1981-09-08

申请人： Shigeru Moriya ,  Akio Yosida ,  Yoshihiro Hayashi ,  Tatsushi Kubota ,  Mitsuaki Katsuno

发明人： Shigeru Moriya ,  Akio Yosida ,  Yoshihiro Hayashi ,  Tatsushi Kubota ,  Mitsuaki Katsuno

IPC分类号： B60R22/06 ,  B60R21/10

CPC分类号： B60R22/06

摘要： An automatic seatbelt system which has a flexible tape extending continuously along a vehicle body form a roof side portion through a center pillar to a door so as to move a shoulder webbing connected to the roof side portion and a lap webbing connected to the door at the same time by a single driving sprocket wheel in response to an occupant entering or leaving a vehicle. The tape has a plurality of openings along the longitudinal direction thereof and the sprocket wheel is meshed with the tape by the openings. The tape extends continuously between the vehicle body and vehicle door and has a stepped portion substantially extending in a vertical direction, for example, a direction which is aligned with the rotation center of door hinges so as to twist itself around the longitudinal center thereof during opening or closing the door. When the sprocket wheel rotates, both shoulder and lap seatbelt webbings are simultaneously moved through the tape toward either the front side of the vehicle to provide an enough space for the occupant to enter the vehicle, or the rear side of the vehicle to place the webbings over the occupant at a seat.

摘要翻译： 一种自动安全带系统，其具有沿着车体连续延伸的柔性带，通过中心支柱向门形成屋顶侧部分，以便移动连接到屋顶侧部分的肩带和连接到门的搭接带 通过单个驱动链轮同时响应乘员进入或离开车辆。 该带沿其长度方向具有多个开口，并且该链轮与该带通过该开口啮合。 该带在车身和车门之间连续延伸，并且具有大致沿垂直方向延伸的阶梯部分，例如与门铰链的旋转中心对齐的方向，以便在打开期间使其自身绕其纵向中心扭曲 或关闭门。 当链轮旋转时，肩部和膝部安全带网带同时通过带子朝向车辆的前侧移动，以便为乘客进入车辆或车辆的后侧提供足够的空间以将网带 乘坐在座位上。

公开(公告)号：US4345780A

公开(公告)日：1982-08-24

申请号：US148037

申请日：1980-05-08

申请人： Shigeru Moriya ,  Hisashi Ogawa ,  Mitsuaki Katsono

发明人： Shigeru Moriya ,  Hisashi Ogawa ,  Mitsuaki Katsono

IPC分类号： B60R22/04 ,  B60R21/02

CPC分类号： B60R22/04

摘要： When leaving a vehicle, an occupant turns forwardly in the vehicle a guide lever, through which extends a webbing, one end of which is engaged with a vehicle door and the other end of which is wound up into a retractor provided at the substantially central portion of the vehicle, to thereby enlarge a space formed between the webbing and a seat. This release lever is locked in a condition of being turned forwardly in the vehicle. However, the release lever is unlocked after the occupant enters the vehicle and before the vehicle enters the normal running condition, thereby enabling to bring the occupant into a suitable seatbelt fastened condition.

摘要翻译： 当离开车辆时，乘客在车辆中向前转动导引杆，通过该引导杆延伸织带，其一端与车门接合，另一端卷绕在设置在大致中央部分的牵开器 从而扩大了在织带和座椅之间形成的空间。 该释放杆被锁定在车辆中向前转动的状态。 然而，释放杆在乘客进入车辆之后并且在车辆进入正常行驶状态之前解锁，从而能够使乘客进入合适的安全带紧固状态。