公开(公告)号：US11177378B2

公开(公告)日：2021-11-16

申请号：US16895111

申请日：2020-06-08

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Jungwoo Joh ,  Naveen Tipirneni ,  Chang Soo Suh ,  Sameer Pendharkar

IPC: H01L29/778 ,  H01L21/265 ,  H01L21/266 ,  H01L21/308 ,  H01L29/06 ,  H01L29/08 ,  H01L29/20 ,  H01L29/417 ,  H01L29/66

Abstract: A High Electron Mobility Transistor (HEMT) includes an active layer on a substrate, and a Group IIIA-N barrier layer on the active layer. An isolation region is through the barrier layer to provide at least one isolated active area including the barrier layer on the active layer. A gate is over the barrier layer. A drain includes at least one drain finger including a fingertip having a drain contact extending into the barrier layer to contact to the active layer and a source having a source contact extending into the barrier layer to contact to the active layer. The source forms a loop that encircles the drain. The isolation region includes a portion positioned between the source and drain contact so that there is a conduction barrier in a length direction between the drain contact of the fingertip and the source.

公开(公告)号：US11152459B2

公开(公告)日：2021-10-19

申请号：US16735729

申请日：2020-01-07

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Marie Denison ,  Philip L. Hower ,  Sameer Pendharkar

IPC: H01L29/06 ,  H01L29/78 ,  H01L29/08 ,  H01L29/66 ,  H01L29/10 ,  H01L21/324 ,  H01L21/225 ,  H01L21/761 ,  A61B90/70 ,  H01L29/40 ,  H01L21/266 ,  H01L29/423 ,  A61J17/00

Abstract: An integrated circuit containing an extended drain MOS transistor which has a drift layer, an upper RESURF layer over and contacting an upper surface of the drift layer, and a buried drain extension below the drift layer which is electrically connected to the drift layer at the drain end and separated from the drift layer at the channel end. A lower RESURF layer may be formed between the drift layer and the buried drain extension at the channel end. Any of the upper RESURF layer, the drift layer, the lower RESURF layer and the buried drain extension may have a graded doping density from the drain end to the channel end. A process of forming an integrated circuit containing an extended drain MOS transistor which has the drift layer, the upper RESURF layer, and the buried drain extension.

公开(公告)号：US11067620B2

公开(公告)日：2021-07-20

申请号：US16400336

申请日：2019-05-01

Applicant: Texas Instruments Incorporated

Inventor： Dong Seup Lee ,  Jungwoo Joh ,  Pinghai Hao ,  Sameer Pendharkar

IPC: G01R31/26 ,  G01R27/26

Abstract: A method includes applying a DC stress condition to a transistor for a predetermined stress time, measuring an impedance of the transistor after the predetermined stress time, and repeating the application of the DC stress condition and the measurement of the impedance until the measured impedance exceeds an impedance threshold or a total stress time exceeds a time threshold, where the DC stress condition includes applying a non-zero drain voltage signal to a drain terminal of the transistor, applying a gate voltage signal to a gate terminal of the transistor, and applying a non-zero source current signal to a source terminal of the transistor.

公开(公告)号：US10964803B2

公开(公告)日：2021-03-30

申请号：US16194794

申请日：2018-11-19

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Dong Seup Lee ,  Jungwoo Joh ,  Pinghai Hao ,  Sameer Pendharkar

IPC: H01L29/778 ,  H01L29/08 ,  H01L29/66 ,  H01L29/20 ,  H01L29/06 ,  H01L29/10 ,  H01L21/265 ,  H01L29/417 ,  H01L29/423

Abstract: In some examples, a transistor comprises a gallium nitride (GaN) layer; a GaN-based alloy layer having a top side and disposed on the GaN layer, wherein source, drain, and gate contact structures are supported by the GaN layer; and a first doped region positioned in a drain access region and extending from the top side into the GaN layer.

公开(公告)号：US10535731B2

公开(公告)日：2020-01-14

申请号：US15955122

申请日：2018-04-17

Applicant: Texas Instruments Incorporated

Inventor： Marie Denison ,  Philip L. Hower ,  Sameer Pendharkar

IPC: H01L29/06 ,  H01L29/78 ,  H01L29/08 ,  H01L29/66 ,  H01L29/10 ,  H01L21/324 ,  H01L21/225 ,  H01L21/761 ,  H01L29/40 ,  H01L21/266 ,  H01L29/423

Abstract: An integrated circuit containing an extended drain MOS transistor which has a drift layer, an upper RESURF layer over and contacting an upper surface of the drift layer, and a buried drain extension below the drift layer which is electrically connected to the drift layer at the drain end and separated from the drift layer at the channel end. A lower RESURF layer may be formed between the drift layer and the buried drain extension at the channel end. Any of the upper RESURF layer, the drift layer, the lower RESURF layer and the buried drain extension may have a graded doping density from the drain end to the channel end. A process of forming an integrated circuit containing an extended drain MOS transistor which has the drift layer, the upper RESURF layer, and the buried drain extension.

公开(公告)号：US20190279976A1

公开(公告)日：2019-09-12

申请号：US16423754

申请日：2019-05-28

Applicant: Texas Instruments Incorporated

Inventor： Sunglyong Kim ,  David LaFonteese ,  Seetharaman Sridhar ,  Sameer Pendharkar

IPC: H01L27/02 ,  H01L29/06 ,  H01L29/78 ,  H01L29/10

Abstract: An electrostatic discharge (ESD) protection structure that provides snapback protections to one or more high voltage circuit components. The ESD protection structure can be integrated along a peripheral region of a high voltage circuit, such as a high side gate driver of a driver circuit. The ESD protection structure includes a bipolar transistor structure interfacing with a PN junction of a high voltage device, which is configured to discharge the ESD current during an ESD event. The bipolar transistor structure has a collector region overlapping the PN junction, a base region embedded with sufficient pinch resistance to launch the snapback protection, and an emitter region for discharging the ESD current.

公开(公告)号：US20190165168A1

公开(公告)日：2019-05-30

申请号：US16264848

申请日：2019-02-01

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Sameer Pendharkar ,  Ming-yeh Chuang

IPC: H01L29/78 ,  H01L29/423 ,  H01L29/06 ,  H01L29/66 ,  H01L29/40

Abstract: A power transistor is provided with at least one transistor finger that lies within a semiconductor material. The gate oxide is segmented into a set of segments with thick field oxide between each segment in order to reduce gate capacitance and thereby improve a resistance times gate charge figure of merit.

公开(公告)号：US20190123555A1

公开(公告)日：2019-04-25

申请号：US15790780

申请日：2017-10-23

Applicant: Texas Instruments Incorporated

Inventor： Sunglyong Kim ,  Seetharaman Sridhar ,  Sameer Pendharkar ,  David LaFonteese

IPC: H02H9/04 ,  H01L27/02 ,  H01L23/528

Abstract: An electrostatic discharge (ESD) protection structure that provides snapback protections to one or more high voltage circuit components. The ESD protection structure can be integrated along a peripheral region of a high voltage circuit, such as a high side gate driver of a driver circuit. The ESD protection structure includes a p-channel device and an n-channel device. The p-channel device includes an n-type barrier region circumscribing a p-type drain region with an n-type body region. The p-channel device may be positioned adjacent to the n-channel device and a high voltage junction diode.

公开(公告)号：US10263085B2

公开(公告)日：2019-04-16

申请号：US15415995

申请日：2017-01-26

Applicant: Texas Instruments Incorporated

Inventor： Hiroyuki Tomomatsu ,  Sameer Pendharkar ,  Hiroshi Yamasaki

IPC: H01L29/40 ,  H01L29/778 ,  H01L29/423 ,  H01L29/20

Abstract: A transistor device includes a field plate that extends from a source runner layer and/or a source contact layer. The field plate can be coplanar with and/or below a gate runner layer. The gate runner layer is routed away from a region directly above the gate metal layer by a gate bridge, such that the field plate can extend directly above the gate metal layer without being interfered by the gate runner layer. Coplanar with the source runner layer or the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. By vertically overlapping the metal gate layer and the field plate, the disclosed HEMT device may achieve significant size efficiency without additional routings.

公开(公告)号：US20190006514A1

公开(公告)日：2019-01-03

申请号：US16127281

申请日：2018-09-11

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Sameer Pendharkar ,  Guru Mathur

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/49 ,  H01L29/08 ,  H01L21/28 ,  H01L29/06 ,  H01L29/10 ,  H01L21/22 ,  H01L23/528 ,  H01L29/423

Abstract: An integrated circuit includes a power transistor having at least one transistor finger that lies within a semiconductor material substrate. Each transistor finger has a source region stripe and a substantially parallel drain region stripe. A gate structure lies between the source region stripe and the drain region stripe and has a plurality of fingers that extend over the source region stripe. Contacts are formed that connect to the fingers of the gate structure over thick oxide islands in the source region stripes. A conductive gate runner is connected to the contacts of the gate layer structure over the thick oxide islands in the source region stripe.