公开(公告)号：US07539340B2

公开(公告)日：2009-05-26

申请号：US10830456

申请日：2004-04-23

申请人： Nobuo Kochi ,  Yasuko Tsuruga

发明人： Nobuo Kochi ,  Yasuko Tsuruga

IPC分类号： G06K9/00

CPC分类号： H01J37/28 ,  G01B15/04 ,  G06K9/209 ,  G06K2209/19 ,  G06T7/593 ,  H01J37/265 ,  H01J2237/2611

摘要： A three-dimensional coordinate measuring apparatus has a first and second incident angle adjusting sections for adjusting the attitude of the object in the directions of first and second neutral axes, respectively, to adjust the incident angle of the beam projected on the object from an imaging optical system relative to the object so that first and second stereoscopic images of the object can be formed, a matching process section for searching for corresponding points corresponding to measurement points in first and second search directions generally perpendicular to the first and second neutral axes, respectively, in the first and second stereoscopic images, and a shape measuring section for obtaining three-dimensional coordinate data of the object based on the relation between the measurement points and the corresponding points in the first and second stereoscopic images.

摘要翻译： 三维坐标测量装置具有第一和第二入射角调节部分，用于分别调节物体在第一和第二中立轴线方向上的姿态，以调整投射在物体上的光束的入射角度与成像 光学系统相对于物体，从而可以形成物体的第一和第二立体图像;匹配处理部分，用于分别搜索与第一和第二中立轴线大致垂直的第一和第二搜索方向上的测量点对应的点 以及形状测量部分，用于基于第一和第二立体图像中的测量点和对应点之间的关系来获得对象的三维坐标数据。

公开(公告)号：US20080204654A1

公开(公告)日：2008-08-28

申请号：US10594318

申请日：2005-03-24

申请人： Tsutomu Kigawa ,  Kazuo Kitamura ,  Nobuo Kochi ,  Takahiro Watanabe ,  Yoshimasa Ogawa

发明人： Tsutomu Kigawa ,  Kazuo Kitamura ,  Nobuo Kochi ,  Takahiro Watanabe ,  Yoshimasa Ogawa

IPC分类号： G02C13/00 ,  G01M11/02

CPC分类号： G01M11/0214 ,  B24B9/146 ,  B24B13/005 ,  B24B49/12 ,  G01M11/0207

摘要： An automatic suction device for an eyeglass lens and a method for determining suction jig installation position, capable of recognizing that a frame exchange lens holder is being installed on a placement table, making transition to installation work of a frame exchange mode, and avoiding an erroneous contact between the frame exchange frame and a lens holding frame. The kind of holding means placed on the placement table is determined from an image of the inside of an opening (141), which image is taken by a CCD camera (105), and the installation position of a suction jig (121) at an eyeglass lens (L) placed on a frame exchange lens holder (300) is obtained.

摘要翻译： 一种用于眼镜镜片的自动抽吸装置和一种用于确定抽吸夹具安装位置的方法，其能够识别出将框架更换镜架保持器安装在放置台上，转变为框架更换模式的安装工作，并避免错误 框架更换框架与透镜保持架之间的接触。 放置在放置台上的保持装置的种类根据由CCD照相机（105）拍摄的开口（141）的内部的图像和吸入夹具（121）的安装位置 获得放置在框架更换镜架（300）上的眼镜镜片（L）。

公开(公告)号：US07349580B2

公开(公告)日：2008-03-25

申请号：US10858468

申请日：2004-06-02

申请人： Takayuki Noma ,  Hitoshi Otani ,  Nobuo Kochi

发明人： Takayuki Noma ,  Hitoshi Otani ,  Nobuo Kochi

IPC分类号： G06K9/40 ,  G03B17/00 ,  G02B13/16 ,  H04N5/225

CPC分类号： G01C25/00 ,  G01C11/02

摘要： A calibrating apparatus for a zoom lens comprising: a first image-acquiring section 60 for acquiring a first image-for-calibration by photographing an area, in which reference marks for calibration are positioned, with a photographic device-to-be-calibrated 19 whose focal length is set to a first focal length; a second image-acquiring section 62 for acquiring a second image-for-calibration by photographing the area, in which the reference marks for calibration are positioned, with the photographic device-to-be-calibrated 19 whose focal length is set to a second focal length; a correction coefficient calculating section 64 for calculating a calibration correction coefficient for the first and second focal lengths, with the use of the photographed reference marks in the first and second image-for-calibrations: and a reference mark inferring section 66 for inferring a positional relationship of the photographed reference marks for calibration in the second image-for-calibration, with the use of the photographed reference marks for calibration in the first image-for-calibration.

摘要翻译： 一种用于变焦透镜的校准装置，包括：第一图像获取部分60，用于通过拍摄用于校准的参考标记的区域，用待校准的照相装置19获取第一图像校准图像 其焦距被设定为第一焦距; 第二图像获取部分62，用于通过拍摄其中用于校准的参考标记的区域来定位其焦距被设置为第二个的要被校准的照相装置19的第二图像校准 焦距; 校正系数计算部64，用于通过使用第一和第二图像校准中的拍摄参考标记来计算第一焦距和第二焦距的校准系数;以及参考标记推断部分66，用于推断位置 在第二图像校准中使用所拍摄的参考标记进行校准的用于校准的拍摄参考标记的关系。

公开(公告)号：US07151258B2

公开(公告)日：2006-12-19

申请号：US10897434

申请日：2004-07-23

申请人： Nobuo Kochi ,  Hirotami Koike ,  Yasuko Tsuruga ,  Shinichi Okada

发明人： Nobuo Kochi ,  Hirotami Koike ,  Yasuko Tsuruga ,  Shinichi Okada

IPC分类号： H01J37/28

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2611

摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.

摘要翻译： 提供能够以高精度执行样品的三维测量的电子束系统，而与样品的倾斜角度和高度无关。 电子束系统具有校正因子存储部分32，用于存储相对于用于通过样本倾斜部分5倾斜样本的平面的参考倾斜角的校正因子，用于获得近似坐标测量部分28的近似坐标测量部分28 基于与来自电子束检测部分4的立体图像相对应的输出的样本的形状或近似坐标值，用于根据由样本倾斜部分5产生的倾斜角校正立体图像的图像校正部分30 使用存储在校正因子存储部分32中的校正因子在近似坐标测量部分28中获得的样本的形状或坐标值，以及精确坐标测量部分34，用于获得样本的形状或坐标值，其比 基于所获得的校正立体图像在近似坐标测量部分28中获得的那些 在图像校正部30中。

公开(公告)号：US07067808B2

公开(公告)日：2006-06-27

申请号：US10962752

申请日：2004-10-13

申请人： Nobuo Kochi ,  Hiroyuki Aoki

发明人： Nobuo Kochi ,  Hiroyuki Aoki

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  G01B15/00 ,  G06T7/593 ,  G06T7/85 ,  H01J37/28 ,  H01J2237/2611 ,  H01J2237/2814 ,  H01J2237/2826

摘要： This invention provides an electron beam measuring device capable of performing three-dimensional image measurement of a sample with high precision, irrespective of the tilt angle and height of the sample, by adjusting an electron optical system of a scanning charged-particle beam device so as to be suitable for image measurement. The electron beam measuring device includes a measuring section 20 adapted to tilt a reference template held by a sample holder 3 and an irradiated electron beam 7 relative to each other by means of a sample tilting section 5, to find the shape or coordinate values of the reference template based on a stereo image photographed by an electron beam detecting section 4, a calibration data preparing section 30 for comparing the measuring results at the measuring section 20 with known reference data to prepare calibration data for a stereo image photographed by the electron beam measuring device, and a calibration section 40 for performing a calibration based on the calibration data so as to reduce aberration in an image of the sample detected by the electron beam detecting section 4. Based on the stereo image calibrated by the calibration section 40, the shape or coordinate values of the sample 9 are found.

摘要翻译： 本发明提供一种电子束测量装置，其能够通过调整扫描带电粒子束装置的电子光学系统，而与样品的倾斜角和高度无关地以高精度执行样品的三维图像测量，从而 适合图像测量。 电子束测量装置包括测量部分20，该测量部分20借助于样本倾斜部分5相对于彼此倾斜由样本保持器3保持的参考模板和照射的电子束7，以便找到该样本的形状或坐标值 基于由电子束检测部分4拍摄的立体图像的参考模板，用于将测量部分20的测量结果与已知参考数据进行比较的校准数据准备部分30，以准备通过电子束测量拍摄的立体图像的校准数据 装置和用于基于校准数据执行校准的校准部分40，以便减少由电子束检测部分4检测的样本的图像的像差。 基于由校准部40校准的立体图像，找到样品9的形状或坐标值。

公开(公告)号：US07016528B2

公开(公告)日：2006-03-21

申请号：US10194285

申请日：2002-07-15

申请人： Hitoshi Otani ,  Nobuo Kochi

发明人： Hitoshi Otani ,  Nobuo Kochi

IPC分类号： G06K9/00

CPC分类号： G01C21/005 ,  G06T7/593 ,  G06T2207/10012 ,  H04N13/239 ,  H04N2013/0081

摘要： An image measuring apparatus includes an approximate position measuring portion for approximately obtaining, from a pair of images of a subject for measurement in different directions, positional information of the subject for measurement in each of the images. A data setting portion, having one image of the pair of images set as a reference image and the other image as a searched image, sets up, in accordance with the positional information obtained in the approximate position measuring portion, reference data blocks in the reference image and sets up searched areas in the searched image and searched data blocks in the searched area. A correspondence determining portion obtains correspondence between the searched data block set up in the searched area and the reference data block. The data setting portion, in accordance with the positional information obtained in the approximate position measuring portion, performs at least either setting up of the reference data blocks in the reference image or setting up of the searched areas and setting up of the searched data blocks in the searched image.

摘要翻译： 图像测量装置包括近似位置测量部分，用于从用于在不同方向测量的被摄体的一对图像大致获得用于每个图像中的测量对象的位置信息。 具有设置为参考图像的一对图像的一个图像和作为搜索图像的另一图像的数据设置部分根据在近似位置测量部分中获得的位置信息建立参考中的参考数据块 在搜索到的图像中建立搜索区域并搜索搜索区域中的数据块。 对应确定部分获得在搜索区域中建立的搜索数据块与参考数据块之间的对应关系。 数据设定部分根据在近似位置测量部分中获得的位置信息，至少执行参考图像中的参考数据块的设置或所搜索的区域的设置以及搜索到的数据块的设置 搜索到的图像。

公开(公告)号：US20050061972A1

公开(公告)日：2005-03-24

申请号：US10897434

申请日：2004-07-23

申请人： Nobuo Kochi ,  Hirotami Koike ,  Yasuko Tsuruga ,  Shinichi Okada

发明人： Nobuo Kochi ,  Hirotami Koike ,  Yasuko Tsuruga ,  Shinichi Okada

IPC分类号： H01J37/28 ,  G01N23/00

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2611

摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.

摘要翻译： 提供能够以高精度执行样品的三维测量的电子束系统，而与样品的倾斜角度和高度无关。 电子束系统具有校正因子存储部分32，用于存储相对于用于通过样本倾斜部分5倾斜样本的平面的参考倾斜角的校正因子，用于获得近似坐标测量部分28的近似坐标测量部分28 基于与来自电子束检测部分4的立体图像相对应的输出的样本的形状或近似坐标值，用于根据由样本倾斜部分5产生的倾斜角校正立体图像的图像校正部分30 使用存储在校正因子存储部分32中的校正因子在近似坐标测量部分28中获得的样本的形状或坐标值，以及精确坐标测量部分34，用于获得样本的形状或坐标值，其比 在近似坐标测量部分28中基于经校正的立体图像获得的那些 图像校正部30。

公开(公告)号：US20050040332A1

公开(公告)日：2005-02-24

申请号：US10950638

申请日：2004-09-28

申请人： Nobuo Kochi ,  Hirotami Koike

发明人： Nobuo Kochi ,  Hirotami Koike

IPC分类号： H01J37/26 ,  G21K7/00

CPC分类号： H01J37/26 ,  H01J2237/2611

摘要： An electron beam device according to the present invention is made up of an electron beam source for emitting an electron beam, an electron optical system for irradiating the electron beam onto a specimen, a specimen holder for holding the specimen, a specimen tilting section for producing relative tilt angles between the specimen holder and the electron beam, an electron beam detecting section for detecting electron beam emitted from the specimen, and a data correcting section for correcting the three-dimensional detection data to have specified relationship under the condition of a relative tilt angle between the specimen holder and the electron beam.

摘要翻译： 根据本发明的电子束装置由用于发射电子束的电子束源，用于将电子束照射到试样上的电子光学系统，用于保持试样的试样保持器，用于产生 检体保持体与电子束之间的相对倾斜角度，用于检测从样本发射的电子束的电子束检测部分，以及用于在相对倾斜的条件下校正三维检测数据以具有特定关系的数据校正部分 样品架和电子束之间的角度。

公开(公告)号：US06810142B2

公开(公告)日：2004-10-26

申请号：US09887268

申请日：2001-06-25

申请人： Nobuo Kochi ,  Hitoshi Otani

发明人： Nobuo Kochi ,  Hitoshi Otani

IPC分类号： G06K900

CPC分类号： G01C11/06 ,  G06T7/97 ,  G06T2207/10012 ,  H04N13/239 ,  H04N2013/0081

摘要： A stereo image measuring device capable of facilitating determination as to the correctness of the result of stereo image corresponding point measurement is disclosed. The stereo image measuring device comprises: a first display unit including a normal monitor; a second display unit including a stereo-monitor enabling stereoscopic viewing; a mark formation unit for displaying a mouse cursor; an instruction unit for instructing X, Y and Z directions; a corresponding area search unit for searching a corresponding area with respect to a reference area; a corresponding area position verification unit for verifying the coincidence of the searched area with the position of the reference area; a corresponding area deciding unit for deciding the searched corresponding area as a corresponding area; a storage unit for storing the verification result of the corresponding area position verification unit, the reference area, the corresponding area, and the decided corresponding area decided by the corresponding area deciding unit; a decided corresponding area correction unit for correcting the decided corresponding area; an image storage unit for storing a digitized stereo image; and a display memory for displaying an image. The instruction unit includes a planar direction instruction unit for instructing the planar (X, Y) direction of the reference area by a mouse, and a Z direction instruction unit for instructing a depth (Z) direction during three-dimensional measurement.

摘要翻译： 公开了能够有助于确定立体图像对应点测量结果的正确性的立体图像测量装置。 立体图像测量装置包括：第一显示单元，包括正常监视器; 第二显示单元，包括能立体观看的立体监视器; 用于显示鼠标光标的标记形成单元; 用于指示X，Y和Z方向的指令单元; 对应区域搜索单元，用于搜索相对于参考区域的对应区域; 相应的区域位置验证单元，用于验证搜索区域与参考区域的位置的一致性; 对应区域决定单元，用于将搜索到的相应区域确定为对应区域; 存储单元，用于存储相应区域位置验证单元的验证结果，参考区域，对应区域以及由相应区域确定单元确定的所确定的对应区域; 确定的对应区域校正单元，用于校正所决定的对应区域; 用于存储数字化立体图像的图像存储单元; 以及用于显示图像的显示存储器。 指示单元包括用于通过鼠标指示参考区域的平面（X，Y）方向的平面方向指令单元和用于在三维测量期间指示深度（Z）方向的Z方向指令单元。

公开(公告)号：US06442292B1

公开(公告)日：2002-08-27

申请号：US09081620

申请日：1998-05-20

申请人： Hitoshi Otani ,  Nobuo Kochi

发明人： Hitoshi Otani ,  Nobuo Kochi

IPC分类号： G06K900

CPC分类号： G01C21/005 ,  G06T7/593 ,  G06T2207/10012 ,  H04N13/239 ,  H04N2013/0081

摘要： A preferred shape measuring apparatus comprises a characteristic pattern extracting portion, in accordance with a pair of first images of a subject for measurement having characteristic patterns serving as references provided thereon in different angles and a pair of second images of the subject for measurement having no characteristic patterns serving as references provided thereon in the same angles as with the fist images, for calculating the difference between the first image and the second image taken in each direction thereby obtaining the characteristic patterns, positional relationship calculating portion for obtaining a positional relationship between the pair of the first images or the pair of the second images on the basis of the difference images obtained in the characteristic pattern extracting portion, a stereo model forming portion, in accordance with the positional relationship obtained in the positional relationship calculating portion, for mutually relating the fist images or the second images so that a stereo model capable of being stereoscopically viewed is formed, and a shape measuring portion for obtaining the shape of the subject in accordance with the stereo model formed in the stereo model forming portion.