公开(公告)号：US20130187263A1

公开(公告)日：2013-07-25

申请号：US13738082

申请日：2013-01-10

Applicant: Xintec Inc.

Inventor： Po-Shen Lin ,  Chuan-Jin Shiu ,  Bing-Siang Chen ,  Chen-Han Chiang ,  Chien-Hui Chen ,  Hsi-Chien Lin ,  Yen-Shih Ho

IPC: H01L21/78 ,  H01L23/12

CPC classification number: H01L21/78 ,  B81C1/00888 ,  H01L21/561 ,  H01L23/12 ,  H01L23/3114 ,  H01L23/562 ,  H01L24/94 ,  H01L25/0657 ,  H01L25/50 ,  H01L2225/06513 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2924/1461 ,  H01L2924/16235 ,  H01L2924/00

Abstract: A method of fabricating a semiconductor stacked package is provided. A singulation process is performed on a wafer and a substrate, on which the wafer is stacked. A portion of the wafer on a cutting region is removed, to form a stress concentrated region on an edge of a chip of the wafer. The wafer and the substrate are then cut, and a stress is forced to be concentrated on the edge of the chip of the wafer. As a result, the edge of the chip is warpaged. Therefore, the stress is prevented from extending to the inside of the chip. A semiconductor stacked package is also provided.

Abstract translation: 提供一种制造半导体堆叠封装的方法。 在晶片和基板上进行单晶化处理，晶片和晶片被堆叠在其上。 去除切割区域上的晶片的一部分，以在晶片的芯片的边缘上形成应力集中区域。 然后切割晶片和基板，并且迫使应力集中在晶片的芯片的边缘上。 结果，芯片的边缘变形。 因此，防止了应力延伸到芯片的内部。 还提供半导体堆叠封装。

公开(公告)号：US20130168784A1

公开(公告)日：2013-07-04

申请号：US13714218

申请日：2012-12-13

Applicant: Xintec Inc.

Inventor： Hung-Jen Lee ,  Shu-Ming Chang ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81C1/0023 ,  B81C1/00301

Abstract: A semiconductor package includes: a chip having a first portion and a second portion disposed on the first portion, wherein the second portion has at least a through hole therein for exposing a portion of the first portion, and the first portion and/or the second portion has a MEMS; and an etch stop layer formed between the first portion and the second portion and partially exposed through the through hole of the second portion. The invention allows an electronic element to be received in the through hole so as for the semiconductor package to have integrated functions of the MEMS and the electronic element. Therefore, the need to dispose the electronic element on a circuit board as in the prior art can be eliminated, thereby saving space on the circuit board.

Abstract translation: 半导体封装包括：具有第一部分和设置在第一部分上的第二部分的芯片，其中第二部分至少在其中具有用于暴露第一部分的一部分的通孔，以及第一部分和/或第二部分 部分具有MEMS; 以及形成在所述第一部分和所述第二部分之间并且部分地暴露于所述第二部分的通孔的蚀刻停止层。 本发明允许电子元件被容纳在通孔中，以便半导体封装具有MEMS和电子元件的集成功能。 因此，可以消除如现有技术那样将电子元件配置在电路板上，从而节省了电路板上的空间。