摘要:
A general purpose engine is provided with an engine main body, a rotary shaft, and an axial gap type motor/generator. The rotary shaft is rotated by a driving force of the engine main body. The rotary shaft includes a first shaft part disposed on one side portion of the engine main body and a second shaft part disposed on another side portion of the engine main body. The axial gap type motor/generator is attached integrally to the second shaft part. The axial gap type motor/generator is provided with a power generating rotor that rotates integrally with said rotary shaft, and a stator that is attached to the engine main body. The stator is disposed on a side closer to the engine main body than the power generating rotor and at a remove from the power generating rotor.
摘要:
A thin film made of a material containing a metal and silicon is formed on a light-transmissive substrate. Then, a treatment is performed to modify a main surface of the thin film in advance so that when exposure light having a wavelength of 200 nm or less is accumulatively irradiated on a thin film pattern of a photomask to be produced by patterning the thin film, the transfer characteristic of the thin film pattern does not change more than a predetermined degree. This treatment is performed by carrying out, for example, a heat treatment in an atmosphere containing oxygen at 450° C. to 900° C.
摘要:
A communication terminal (10) including a first communication unit (11) and a second communication unit (12) with a shorter communication distance than the first communication unit (11) includes a presence status detection unit (13) that detects that a distance from a personal computer (50) has changed from a state possible to communicate to a state not possible to communicate for the second communication unit (12), and a communication status control unit (14) that causes a standby interval in intermittent reception performed by the first communication unit (11) to become shorter when a change of the second communication unit (12) from the state possible to communicate to the state not possible to communicate is detected by the presence status detection unit (13). This enables more detailed and accurate tracking of the connection status of the first communication unit (11), which can advance the timing to bring the first communication unit (11) to transition to a disconnection state or a standby state, allowing reduction of power consumption in the first communication unit (11).
摘要:
The present invention achieves reductions in the weight and size of a general purpose engine provided for a power generation application. An optional external apparatus can be attached to one shaft part of a rotary shaft, and an axial gap type motor/generator constituted by a power generating rotor (inner rotor) and a stator is attached integrally to another shaft part of the rotary shaft.
摘要:
A photomask blank for use in the manufacture of a photomask adapted to be applied with exposure light having a wavelength of 200 nm or less has a thin film on a transparent substrate. The thin film is made of a material containing a transition metal, silicon, and carbon and comprising silicon carbide and/or a transition metal carbide.
摘要:
An electronic component 100 which includes: a dielectric body (a ceramic substrate) 110 containing a dielectric ceramic composition containing Al2TeO5 as a main component; and terminals 120 each provided on a pair of opposed side surfaces of the dielectric body 110 is provided.
摘要:
Disclosed is a phase shift mask blank (11) that can prevent the occurrence of a loading effect. The phase shift mask blank (11) includes a phase shift film (5) containing silicon, a light-shielding film (2) made of a material resistant to etching of the phase shift film (5), and an etching mask film (3) made of an inorganic material resistant to etching of the light-shielding film (2), which are formed in this order on a substrate (1) transparent to exposure light. Assuming that the thickness of the phase shift film (5) is t1, the etching rate of the phase shift film (5) by dry etching with an etchant using the etching mask film (3) and the light-shielding film (2) as a mask is v1, the thickness of the etching mask film (3) is t2, and the etching rate of the etching mask film (3) by dry etching with the above etchant is v2, (t1/v1)≦(t2/v2) is satisfied.
摘要:
In a method of manufacturing a mask blank adapted to be formed with a resist pattern by electron beam writing and having a light-shielding film and an etching mask film of an inorganic-based material resistant to etching of the light-shielding film which are formed in this order on a transparent substrate, when forming the etching mask film, shielding is performed using a shielding plate so as to prevent the etching mask film from being formed at least at a side surface of the substrate.
摘要:
In a method of manufacturing a mask blank adapted to be formed with a resist pattern by electron beam writing and having a light-shielding film and an etching mask film of an inorganic-based material resistant to etching of the light-shielding film which are formed in this order on a transparent substrate, when forming the etching mask film, shielding is performed using a shielding plate so as to prevent the etching mask film from being formed at least at a side surface of the substrate.
摘要:
In a method of manufacturing a mask blank adapted to be formed with a resist pattern by electron beam writing and having a light-shielding film and an etching mask film of an inorganic-based material resistant to etching of the light-shielding film which are formed in this order on a transparent substrate, when forming the etching mask film, shielding is performed using a shielding plate so as to prevent the etching mask film from being formed at least at a side surface of the substrate.