公开(公告)号：US20100020315A1

公开(公告)日：2010-01-28

申请号：US12574185

申请日：2009-10-06

申请人： Takahiro Togashi ,  Shigeru Matsui

发明人： Takahiro Togashi ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676

摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

摘要翻译： 一种方法和设备，其包括用于存储所示斑点内的照明分布的示出点照度分布数据表，并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径 关于颗粒或缺陷以及所示的点光照度分布数据表。 因此，即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下，检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算 被检查可以提高准确度。

公开(公告)号：US07619729B2

公开(公告)日：2009-11-17

申请号：US12266079

申请日：2008-11-06

申请人： Takahiro Togashi ,  Shigeru Matsui

发明人： Takahiro Togashi ,  Shigeru Matsui

IPC分类号： G01N21/00 ,  G03B242/02 ,  H01J37/304

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676

摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

摘要翻译： 一种方法和设备，其包括用于存储所示斑点内的照明分布的示出点照度分布数据表，并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径 关于颗粒或缺陷以及所示的点光照度分布数据表。 因此，即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下，检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算 被检查可以提高准确度。

公开(公告)号：US20080266547A1

公开(公告)日：2008-10-30

申请号：US11739210

申请日：2007-04-24

申请人： Bryan Clark ,  Andrei Brunfeld ,  Gregory Toker

发明人： Bryan Clark ,  Andrei Brunfeld ,  Gregory Toker

IPC分类号： G01N21/00

CPC分类号： G01N21/4738 ,  G01N21/8806 ,  G01N2021/8867 ,  G01N2021/8874

摘要： A scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts provides improved artifact detection and increased scanning speed in interferometric measurement systems. A scatterometer and interferometer are combined in a single measurement head and may have overlapping, concentric or separate measurement spots. Interferometric sampling of a surface under measurement may be initiated in response to detection of a surface artifact by the scatterometer, so that continuous scanning of the surface under measurement can be performed until further information about the size and/or height of the artifact is needed.

摘要翻译： 用于检测和区分表面伪影特征的散射仪干涉仪和方法在干涉测量系统中提供改进的伪像检测和增加的扫描速度。 散射仪和干涉仪组合在单个测量头中，并且可以具有重叠的，同心的或分开的测量点。 可以响应于通过散射仪的表面伪影的检测而启动测量下的表面的干涉采样，从而可以执行测量下的表面的连续扫描，直到需要有关伪像大小和/或高度的更多信息。

公开(公告)号：US20070070335A1

公开(公告)日：2007-03-29

申请号：US11463261

申请日：2006-08-08

申请人： Tsvi Goren

发明人： Tsvi Goren

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N21/8851 ,  G01N2021/8822 ,  G01N2021/8854 ,  G01N2021/8874

摘要： A method for defect detection includes: (i) scanning at least one wafer by a monitoring system and providing defect size information for each defect that belongs to a group of defects; (ii) scanning the at least one wafer by a wafer inspection system that includes multiple detectors and providing a set of defect detection signals for each defect of the group, wherein the wafer inspection system is characterized by lower resolution than the monitoring system; (iii) classifying the defects to defect classes; (iv) determining multiple relationships between defect types, defect sizes and sets of detection signals; (v) scanning a second wafer by the wafer inspection tool; and (vi) generating, for multiple defects, second wafer defect size information in response to the determined relationships and in response to multiple sets of detection signals generated during the scanning of the second wafer.

摘要翻译： 一种用于缺陷检测的方法包括：（i）通过监控系统扫描至少一个晶片，并为属于一组缺陷的每个缺陷提供缺陷尺寸信息; （ii）通过包括多个检测器的晶片检查系统扫描所述至少一个晶片，并为所述组的每个缺陷提供一组缺陷检测信号，其中所述晶片检查系统的特征在于比所述监测系统更低的分辨率; （iii）将缺陷分类为缺陷类; （iv）确定缺陷类型，缺陷尺寸和检测信号组之间的多个关系; （v）通过晶片检查工具扫描第二晶片; 以及（vi）响应于所确定的关系并且响应于在第二晶片的扫描期间产生的多组检测信号，为多个缺陷产生第二晶片缺陷尺寸信息。

公开(公告)号：US07158663B2

公开(公告)日：2007-01-02

申请号：US10420286

申请日：2003-04-22

申请人： Tong Fang ,  Ming Fang

发明人： Tong Fang ,  Ming Fang

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/951 ,  G01N21/95684 ,  G01N2021/8874 ,  G01N2021/8877 ,  G01N2021/8887 ,  G01N2021/95661 ,  G06T7/0006 ,  G06T2207/30148 ,  Y10T29/49131

摘要： A method for obtaining confidence measure of a ball grid array (BGA) model having a plurality of balls in semiconductor surface mounted devices is provided. The method comprises the steps of extracting BGA images from a real surface mounted device, generating a BGA ball model and a BGA body model, generating a first confidence measure of the BGA ball model wherein the first confidence measure includes a first standard deviation of the BGA ball model and a first local image contrast of each BGA ball, and generating a second confidence measure of the BGA body model wherein the second confidence measure includes a second standard deviation of the BGA body model and a second local image contrast of the BGA body.

摘要翻译： 提供了一种用于获得半导体表面安装器件中具有多个球的球栅阵列（BGA）模型的置信度测量的方法。 该方法包括以下步骤：从真实表面安装的装置提取BGA图像，产生BGA球模型和BGA体模型，产生BGA球模型的第一置信度，其中第一置信度测量包括BGA的第一标准偏差 球模型和每个BGA球的第一局部图像对比度，并且生成BGA体模型的第二置信度测量，其中第二置信度测量包括BGA体模型的第二标准偏差和BGA体的第二局部图像对比度。

公开(公告)号：US20050219519A1

公开(公告)日：2005-10-06

申请号：US10813149

申请日：2004-03-30

申请人： Kevin Harding ,  Joseph Ross

发明人： Kevin Harding ,  Joseph Ross

IPC分类号： G01N21/88 ,  G01N21/95 ,  G06T7/00

CPC分类号： G01N21/8806 ,  G01N21/9515 ,  G01N2021/8867 ,  G01N2021/8874

摘要： A multi-resolution inspection system and method of operation. The system may comprise a first scanning system having a first resolution, wherein the first scanning system is operable to perform a first resolution scan of a surface area of an object to identify a location of a surface abnormality in the object. The system may also comprise a second scanning system having a second resolution, the second resolution being smaller than the first resolution. The second scanning system is operable to receive the location of the surface abnormality from the first scanning system and to automatically perform a second resolution scan of a defined region of the object around the location of the surface abnormality.

摘要翻译： 多分辨率检测系统及操作方法。 该系统可以包括具有第一分辨率的第一扫描系统，其中第一扫描系统可操作以对对象的表面区域执行第一分辨率扫描，以识别对象中的表面异常的位置。 系统还可以包括具有第二分辨率的第二扫描系统，第二分辨率小于第一分辨率。 第二扫描系统可操作以从第一扫描系统接收表面异常的位置，并且自动执行围绕表面异常位置的物体的限定区域的第二分辨率扫描。

公开(公告)号：US20240353347A1

公开(公告)日：2024-10-24

申请号：US18685721

申请日：2022-07-07

申请人： Hitachi Astemo, Ltd.

发明人： Shinichi INOUE ,  Takateru SEKI ,  Takamasa IMAIZUMI ,  Hiroyuki HAYASHI

IPC分类号： G01N21/88

CPC分类号： G01N21/8851 ,  G01N2021/8861 ,  G01N2021/887 ,  G01N2021/8874

摘要： A visual inspection apparatus detects a defect candidate for each of captured images of a crown surface of a piston that are captured at a plurality of posture angles different from one another, locates a three-dimensional position of the defect candidate based on a two-dimensional position of the defect candidate detected from at least one captured image among the captured images captured at the plurality of posture angles, applies a perspective projection transformation on the three-dimensional position of the defect candidate to acquire a two-dimensional position of the defect candidate for each of the captured images captured at the plurality of posture angles, determines a feature amount regarding the defect candidate based on the two-dimensional position of the defect candidate for each of the captured images captured at the plurality of posture angles, and inspects the crown surface of the piston using the feature amount regarding the defect candidate.

公开(公告)号：US20240175823A1

公开(公告)日：2024-05-30

申请号：US18279828

申请日：2022-03-25

申请人： KEIWA Incorporated

发明人： Satoru Tani ,  Takahiro Tsuji ,  Yuki Matsuno ,  Kosuke Yasuno ,  Satoshi Shiba ,  Yu Kariya

IPC分类号： G01N21/88 ,  G01N21/956 ,  E01D22/00

CPC分类号： G01N21/8851 ,  G01N21/956 ,  E01D22/00 ,  G01N2021/8874 ,  G01N2201/0216

摘要： Provided is a method for inspecting surface deformation of a structure which enables easy measurement of the amount of deformation of the surface of a structure protection sheet attached to the surface of a structure such as concrete. The method for inspecting surface deformation of a structure includes: identifying a structure protection sheet attached to a surface of a structure using an individual identification means; digitally photographing a surface of a resin layer on an outermost surface of the structure protection sheet using a digital photography means; measuring a dimension of the surface of the resin layer based on image data obtained in the digital photography using a dimension measuring means; and calculating an amount of deformation of the surface of the resin layer based on data of the measured dimension using a calculation means.

公开(公告)号：US20240060904A1

公开(公告)日：2024-02-22

申请号：US18344484

申请日：2023-06-29

申请人： Samsung Display Co., LTD.

发明人： Jeong Moon LEE ,  Dae Hong KIM

IPC分类号： G01N21/88 ,  G01N21/95

CPC分类号： G01N21/8851 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8874 ,  G01N2021/8809 ,  G01N2021/8887

摘要： A defect inspection device according to one or more embodiments includes an inspection device for detecting a defect by line-scanning an object, and for generating review image data for the defect, a height measurer for acquiring a reference height of the defect and a height of the defect, and for generating height data of the defect, and a defect classifier for classifying the defect based on the review image data and the height data.

公开(公告)号：US20230228689A1

公开(公告)日：2023-07-20

申请号：US18061215

申请日：2022-12-02

申请人： UNIVERSITY OF PITTSBURGH-OF THE COMMONWEALTH SYSTEM OF HIGHER EDUCATION

发明人： SARAH L. HEMLER ,  KURT E. BESCHORNER

IPC分类号： G01N21/88 ,  G02B6/42 ,  H04N23/56 ,  G06T7/00 ,  G06T7/62

CPC分类号： G01N21/8851 ,  G02B6/42 ,  G06T7/0002 ,  G06T7/62 ,  H04N23/56 ,  G01N2021/8874

摘要： A system for monitoring the tread of a shoe includes a frame member, a waveguide structured to support the shoe when an outer sole of shoe is in contact with a surface of the waveguide, a light source structured to provide light within an edge of the waveguide such that the light will be internally reflected within the waveguide, and an imaging device structured and configured to generate an image of the outer sole of the shoe when the outer sole of shoe is in contact with the waveguide and the light is being provided within the waveguide. The system also includes a controller structured and configured to: (i) receive image data based on the image of the outer sole; (ii) determine from the image data a largest worn region size for the shoe; and (iii) determine a slip risk for the shoe based on the largest worn region size.