公开(公告)号：US07690243B2

公开(公告)日：2010-04-06

申请号：US11803703

申请日：2007-05-15

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B13/08

CPC分类号： G01B7/105

摘要： The invention relates to a method and an apparatus for measurement of the thickness of thin layers by means of a measurement probe (11) which has a housing (14) which holds at least one sensor element (17) whose longitudinal axis lies in particular on a longitudinal axis (16) of the housing (14), in which at least during the measurement process, a gaseous medium is supplied to a supply opening (21) of the measurement probe (11) on a measurement surface (28), and is supplied via at least one connection channel (24), which is connected to the supply opening (21), to one or more outlet openings (26) which are provided on an end face (29), pointing towards the measurement surface (28), of the measurement probe (11), and in which at least one mass flow, which flows out of one or more outlet openings (26), of the gaseous medium is directed at the measurement surface (28), and in which the measurement probe (11) is held in a non-contacting manner with respect to the measurement surface (28) during the measurement process.

摘要翻译： 本发明涉及一种用于通过测量探头（11）测量薄层厚度的方法和装置，所述测量探针具有容纳至少一个传感器元件（17）的壳体，所述传感器元件（17）的纵轴特别位于 至少在测量过程期间，将气体介质供应到测量表面（28）上的测量探针（11）的供应开口（21）的壳体（14）的纵向轴线（16），以及 通过连接到供应开口（21）的至少一个连接通道（24）供应到设置在端面（29）上的一个或多个出口开口（26），所述端面指向测量表面（28） ），并且其中从所述气体介质的一个或多个出口（26）流出的至少一个质量流指向所述测量表面（28），其中所述测量表面 测量探针（11）相对于测量表面（28）以非接触的方式被保持 在测量过程中。

公开(公告)号：US07610690B2

公开(公告)日：2009-11-03

申请号：US11490382

申请日：2006-07-20

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B5/02

CPC分类号： G01B7/105 ,  G01B5/0004

摘要： A measurement stand for holding a measuring device (26), in particular a measuring arrangement (26) for measuring the thickness of thin layers, said measurement stand comprising a housing (18) in which a cam follower (23) is guided such that it can be moved up and down and the measuring device (26) is arranged at that end of said housing (18) that faces the measuring object (14), wherein a drive unit (29) with an electric drive (28) drives the lifting movement of the cam follower (23), wherein said drive unit (29) initiates in the down movement at least one first movement phase with a rapid motion and at least one further movement phase of the cam follower (23) with a creep motion until the measuring device (26) touches down on the measuring object (14).

摘要翻译： 用于保持测量装置（26）的测量台，特别是用于测量薄层厚度的测量装置（26），所述测量支架包括壳体（18），凸轮从动件（23）被引导到所述壳体 可以上下移动，并且测量装置（26）布置在所述壳体（18）的面向测量对象（14）的端部处，其中具有电驱动器（28）的驱动单元（29）驱动提升 凸轮从动件（23）的运动，其中所述驱动单元（29）以向下运动启动具有快速运动的至少一个第一运动相位和凸轮从动件（23）的至少一个进一步运动相位，其具有蠕变运动，直到 测量装置（26）在测量对象（14）上接触。

公开(公告)号：US07472491B2

公开(公告)日：2009-01-06

申请号：US11599627

申请日：2006-11-14

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/28

CPC分类号： G01B7/105

摘要： The invention relates to a Measuring probe for a device for the measurement of the thickness of thin layers, with a housing (14) comprising at least one sensor element (17), which is accepted along a longitudinal axis (16) of the housing (14) at least slightly movable to the housing (14) and with a contact spherical cap (21) assigned to the at least one sensor element (17) for setting the measuring probe (11) onto a surface of a measuring object, wereby in that the at least one sensor element (17) is accepted by a holding element (18)—along the longitudinal axis (16) of the housing (14)—which is designed spring-loaded resiliently and which is fastened on the housing (14).

摘要翻译： 本发明涉及一种用于测量薄层厚度的装置的测量探针，其中壳体（14）包括至少一个传感器元件（17），沿着壳体的纵向轴线（16）接受 14），至少可移动到壳体（14）并且具有分配给至少一个传感器元件（17）的接触式球形盖（21），用于将测量探针（11）设置在测量对象的表面上， 所述至少一个传感器元件（17）被所述壳体（14）的纵向轴线（16）接受，所述保持元件（18）被弹性地设计为弹簧加载并且被紧固在所述壳体（14）上 ）。

公开(公告)号：US6118844A

公开(公告)日：2000-09-12

申请号：US149020

申请日：1998-09-08

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B15/02 ,  G01N23/223

CPC分类号： G01B15/02 ,  G01N23/223 ,  G01N2223/076

摘要： In a method for the determination of the measuring uncertainty for a device for X-ray fluorescence slice thickness measurements during measurement of a layer of a sample under investigation, a spectrum S(K) simulating an actual fluorescent radiation spectrum is generated for the channels K of a spectrum and for a given thickness d of the layer and, in each channel K, a random number generator is used to repetitively accumulate a random value to construct a total number N(K) of events registered in the K-th channel in measurement time t and the standard deviation .sigma.(d) is determined from the spectrum of slice thicknesses d extracted by means of the repetitive random values as measure of the measurement uncertainty.

摘要翻译： 在测量被测试样品层的X射线荧光层厚度测量的装置的测量不确定度的方法中，为通道K生成模拟实际荧光辐射谱的光谱S（K） 对于层的给定厚度d，并且在每个信道K中使用随机数发生器来重复地累积随机值以构成在第K个信道中登记的事件的总数N（K） 测量时间t和标准差σ（d）是根据重复随机值提取的切片厚度d的频谱，作为测量不确定度的度量来确定的。

公开(公告)号：US5309495A

公开(公告)日：1994-05-03

申请号：US853492

申请日：1992-03-18

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B15/02

CPC分类号： G01B15/02

摘要： In x-ray fluorescence systems, the screening prevents the bringing of the measurement spot into the correct position in relation to the x-ray beam using the naked eye. The use of a television camera with a screen as well as illuminating devices makes the measuring system expensive and complicates the use of the system. According to the invention, this is avoided in that use is made of an illuminated device, which operates using an optical system and which reproduces, by convergent light beams at their intersection, the correct height position, lateral position and forward/rearward position of the measurement object when the tray carrying the measurement object has been moved to a forward position away from the x-ray beam.

摘要翻译： 在x射线荧光系统中，筛选可以防止使用肉眼将测量点相对于x射线束带入正确的位置。 使用具有屏幕的电视摄像机以及照明装置使得测量系统昂贵并使系统的使用复杂化。 根据本发明，避免了使用照明装置，其使用光学系统进行操作，并且通过会聚光束在其交点处再现正确的高度位置，横向位置和前后位置 当携带测量对象的托盘已经移动到远离X射线束的前进位置时的测量对象。

公开(公告)号：US5191286A

公开(公告)日：1993-03-02

申请号：US720885

申请日：1991-06-25

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/06 ,  G01R33/12

CPC分类号： G01B7/105

摘要： Non-destructive methods of measurement for determining the thickness of thin layers, using the magneto-inductive method or the eddy-current method yield measured values which depend not only on the actual layer thickness present, but also on the shape of the measured object. It is the object of the invention to specify in a simple way, and without it being necessary for an operator to change his way of thinking, a device and a method in accordance with which the layer thickness indicated is virtually independent of the shape of the measured object. With regard to the device, this is achieved according to the invention when the probe has at least two different coil devices and, with regard to the method, when a corrected layer thickness is calculated from the different measured values of the two coil devices.

摘要翻译： 使用磁感​​应法或涡流法测定薄层厚度的非破坏性测量方法产生的测量值不仅取决于存在的实际层厚度，还取决于被测物体的形状。 本发明的目的是以简单的方式指定，并且不需要操作者改变他的思维方式，一种装置和方法，根据该方法，所指示的层厚度实际上与 测量对象。 关于装置，当探头具有至少两个不同的线圈装置时，根据本发明实现这一点，并且关于该方法，当根据两个线圈装置的不同测量值计算校正层厚度时。

公开(公告)号：US5053703A

公开(公告)日：1991-10-01

申请号：US313603

申请日：1989-02-21

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/06 ,  G01R33/12

CPC分类号： G01B7/105

摘要： In known probes for measuring thin layers, a convex end face presses indentations into the thin layer material being measured, which can falsify the measurement result. The indentation come from the energy destroyed during application, which originates partly from the mass of the probe body and cable. In order to reduce the mass of a probe body upon impact of the probe against a thin material layer being measured as far as possible to zero, a half-pot core together with a coil is made independent and connected compliantly, but returnably, by springs to a probe body. The influence of a probe cable is eliminated by providing in the probe body an active circuit that emits at its output a coded signal that is a function of the layer thickness.

摘要翻译： 在用于测量薄层的已知探针中，凸起的端面将压痕压入被测量的薄层材料中，这可能会使测量结果变差。 压痕来自施加期间所消耗的能量，部分源于探头主体和电缆的质量。 为了减小探针在被测量的薄材料层的冲击时尽可能地为零的探针体的质量，半圆柱芯与线圈一起被独立地并且被柔性地连接，但是通过弹簧 到探头体。 通过在探针主体中提供有源电路来消除探针电缆的影响，该有源电路在其输出端发射作为层厚度的函数的编码信号。

公开(公告)号：US4956074A

公开(公告)日：1990-09-11

申请号：US390238

申请日：1989-08-04

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/06 ,  G01N27/42

CPC分类号： G01N27/423 ,  G01B7/06

摘要： Measuring instruments for coulometrically measuring the thickness of metallic coatings pump the electrolyte from the first chamber 11 into the second chamber 12 and vice versa during the measurement. As a result, fresh electrolyte constantly reaches the measuring spot below the outlet orifice 7 and the troublesome formation of gas bubbles at this measuring spot is completely or substantially reduced. If the probe 3 is, however, inadvertently lifted off the coating 2, the pumped electrolyte spurts at high speed out of the outlet orifice 7. As a result, personnel and also material may suffer damage. The disposal presents difficulties. As a solution, provision is made for the entire system to employ underpressure and the maximum pressure occurring in chamber 11 or 12 is less than the external pressure. If the probe 3 is now inadvertently lifted during the measurement process, the electrolyte is sucked back into the first chamber 11 and/or the second chamber 12 and nothing is contaminated.

摘要翻译： 用于库仑测量金属涂层厚度的测量仪器将电解质从第一室11泵入第二室12，反之亦然。 结果，新鲜的电解液不断地到达出口孔7下方的测量点，并且在该测量点处的气泡的麻烦的形成被完全或大大减少。 然而，如果探头3无意中从涂层2上提起，则泵送的电解液高速喷出出口孔7。结果，人员和材料可能遭受损坏。 处置提出了困难。 作为解决方案，为整个系统提供使用负压，并且在室11或12中发生的最大压力小于外部压力。 如果探头3在测量过程中现在无意中被提起，则电解液被吸回到第一腔室11和/或第二腔室12中，并且没有污染。

公开(公告)号：US4691559A

公开(公告)日：1987-09-08

申请号：US699430

申请日：1985-02-07

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01N3/00 ,  G01N3/06 ,  G01N3/42 ,  G01N3/48

CPC分类号： G01N3/42 ,  G01N2203/0098 ,  G01N2203/021 ,  G01N2203/0641

摘要： A guidance arm guides a penetrating body into solid materials. An electromotive drive connected to the guidance arm urges the penetrating body with a specific, but variable force onto the surface of the material. A suspended distance-measuring device has a probe rigidly connected to a backlash-free follower and a metallic substrate with an inert coating connected to the guidance arm. The follower is finely adjusted in the direction of motion of the penetrating body, and is switched off when the penetrating body has been set down onto the material and the distance-measuring device measures a prespecified distance. A voltage output representing the depth of penetration is fed from the distance-measuring device to an electrical evaluation circuit.

摘要翻译： 引导臂将穿透体引导到固体材料中。 连接到引导臂的电动驱动器以特定但可变的力促使穿透体在材料的表面上。 悬挂测距装置具有刚性地连接到无间隙跟随器的探针和具有连接到引导臂的惰性涂层的金属基底。 跟随者在穿透体的运动方向上被精细调节，并且当穿透体已经被放置在材料上并且距离测量装置测量预定的距离时被关闭。 表示穿透深度的电压输出从距离测量装置馈送到电气评估电路。

公开(公告)号：US4660633A

公开(公告)日：1987-04-28

申请号：US735573

申请日：1985-05-20

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： B21D13/02 ,  F28F3/08 ,  F28F3/10

CPC分类号： F28F3/04 ,  B21D13/02 ,  F28F3/083 ,  F28F3/10

摘要： A plate heat exchanger where a number of heat exchange plates of two different types are clamped between two massive pressure plates. The heat exchanger plates are provided with a first flow zone surrounded by an edge seal having first passage openings for a first fluid medium. The heat exchanger plates are further provided with a second flow zone having second passage openings surrounded by an annular seal for a second fluid medium outside of the first flow zone. The annular seal is embedded in a first reinforcing seam having a bottom wall and upwardly and outwardly tapering side walls. The heat exchanger plates further include a bottom plate adjoining the annular seal and which is provided with a second reinforcing seam disposed parallel and below the first reinforcing seam and which broadens in an upward direction. The second reinforcing seam is provided with a plurality of supporting bulges extending into and narrowing the second reinforcing seam. The supporting bulges are in contact with the bottom wall of the first reinforcing seam. The first flow zone is in part defined by the bottom plate and the bottom wall of the first reinforcing seam. The first fluid medium flows under the annular seal and simultaneously between the supporting bulges. A second seal spaced from the annular seal having the same characteristics as the annular seal is preferably provided.

摘要翻译： 一种板式换热器，其中两个不同类型的热交换板被夹在两块压块之间。 热交换器板设置有由具有用于第一流体介质的第一通道开口的边缘密封件包围的第一流动区域。 热交换器板还设置有第二流动区域，该第二流动区域具有由用于在第一流动区域外部的第二流体介质的环形密封件包围的第二通道开口。 环形密封件嵌入在具有底壁和向上和向外逐渐变细的侧壁的第一加强缝中。 热交换器板还包括邻接环形密封件的底板，并且设置有平行于第一加强接缝并且在向下方向上变宽的第二加强缝。 第二加强缝设置有延伸到第二加强缝中并使其变窄的多个支撑凸起。 支撑凸起与第一加强缝的底壁接触。 第一流动区域部分地由第一加强缝的底板和底壁限定。 第一流体介质在环形密封件之下流动并同时在支撑凸起之间流动。 优选地提供与环形密封件间隔开的与环形密封件具有相同特性的第二密封件。