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公开(公告)号：US20090066955A1
公开(公告)日：2009-03-12
申请号：US12229087
申请日：2008-08-20
申请人： Hans-Artur Boesser , Michael Heiden , Klaus Rinn , Frank Laske
发明人： Hans-Artur Boesser , Michael Heiden , Klaus Rinn , Frank Laske
IPC分类号： G01B11/00
CPC分类号： G01B11/03 , G01M11/0257 , G03F1/84
摘要： A coordinate measuring machine (1) including a plane (25a) in which there is arranged a movable measurement table (20) moving the mask (2) correspondingly in the plane (25a), at least one objective (9) and a detector (11), an incident light source (14) arranged to provide incident light and/or a transmitted light source (6) arranged to provide transmitted light, wherein the mask (2) has at least a first area (41) and a second area (42), wherein the first area (41) and the second area (42) comprise different materials differing in their transmission or reflection properties.
摘要翻译： 一种坐标测量机（1），包括平面（25a），其中布置有在平面（25a）中相应地移动掩模（2）的可移动测量台（20），至少一个物镜（9）和检测器 布置成提供入射光的入射光源（14）和/或布置成提供透射光的透射光源（6），其中所述掩模（2）至少具有第一区域（41）和第二区域 （42），其中所述第一区域（41）和所述第二区域（42）包括其透射或反射特性不同的不同材料。
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72.发明申请公开(公告)号：US20090052766A1
公开(公告)日：2009-02-26
申请号：US12228582
申请日：2008-08-14
申请人： Detlef Michelsson
发明人： Detlef Michelsson
IPC分类号： G06K9/00
CPC分类号： G01N21/9501
摘要： The present invention relates to a method for optically inspecting and visualizing optical measuring values from at least one image of a disk-like object, including the steps of recording said at least one image of said at least one disk-like object, wherein a plurality of optical measuring values are produced from said at least one recorded image; generating a resulting image, wherein an area of the surface of said disk-like object having optical measuring values within a predetermined interval, is associated with a colour or brightness value selected from a predetermined range; and varying at least one imaging parameter as a function of the detected and evaluated optical measuring values and/or as a function of a visual inspection of the resulting image by an operator.
摘要翻译： 本发明涉及一种用于从盘状物体的至少一个图像光学检查和可视化光学测量值的方法，包括记录所述至少一个盘状物体的至少一个图像的步骤，其中多个 从所述至少一个记录图像产生光学测量值; 生成所得到的图像，其中在预定间隔内具有光学测量值的所述盘状物体的表面的区域与从预定范围中选择的颜色或亮度值相关联; 以及根据检测和评估的光学测量值和/或作为操作者对所得到的图像的目视检查的函数来改变至少一个成像参数。
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73.发明申请公开(公告)号：US20090024351A1
公开(公告)日：2009-01-22
申请号：US12147703
申请日：2008-06-27
申请人： Wolfgang Fricke , Linda Gundal
发明人： Wolfgang Fricke , Linda Gundal
IPC分类号： G01B11/03
CPC分类号： G01B21/045
摘要： A method for allocating correction values of the degree of bending of a substrate (2) relative to a coordinate system (40) of a coordinate measuring machine (1) is disclosed. The positions of the at least two reference marks (32) on the substrate holder (27) are automatically determined relative to the coordinate system (40) of the coordinate measuring machine (1) for each substrate (2) currently placed in the substrate holder (27) in the coordinate measuring machine (1).
摘要翻译： 公开了一种用于分配基板（2）相对于坐标测量机（1）的坐标系（40）的弯曲程度的校正值的方法。 基板保持器（27）上的至少两个参考标记（32）的位置相对于当前放置在基板保持器中的每个基板（2）的坐标测量机（1）的坐标系（40）自动确定 （27）在坐标测量机（1）中。
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74.发明授权公开(公告)号：US07477370B2
公开(公告)日：2009-01-13
申请号：US11390855
申请日：2006-03-28
CPC分类号： G01N21/9503 , G01N21/8803 , G01N2021/8427 , G01N2021/8822 , G03F7/168
摘要： A method of detecting incomplete edge bead removal from a disk-like object is disclosed. First a peripheral area of a disk-like reference object is imaged. Marks are then defined in the peripheral area of the reference object. Finally, images of peripheral areas of a plurality of disk-like objects of the same batch are recorded. The inspection of the disk-like objects is limited to the locations of the marks defined on the reference object.
摘要翻译： 公开了一种从圆盘状物体中检测出不完整的边缘珠去除的方法。 首先，对盘状参考对象的周边区域进行成像。 然后，标记在参考对象的外围区域中定义。 最后，记录同一批次的多个盘状物体的外围区域的图像。 对盘状物体的检查限于在参照物上定义的标记的位置。
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公开(公告)号：US20080259327A1
公开(公告)日：2008-10-23
申请号：US11569172
申请日：2005-07-05
IPC分类号： G01N21/956 , G02B21/26
CPC分类号： G03F7/70341 , G02B21/33
摘要： A device 1 is disclosed for inspecting, measuring defined structures, simulating structures and structural defects, repair of and to structures, and post-inspecting defined object sites on a microscopic component 2 with an immersion objective 8a. The device 1 comprises a stage that is movable in the x-coordinate direction and in the y-coordinate direction and a holder 42 for the microscopic component 2, whereby the holder 42 is placed on the stage 4 with the microscopic component 2 in it. The holder 42 has a reservoir 51a with immersion or cleaning fluid, respectively. The stage 4 is movable such that the immersion objective 8a is located directly above the reservoir 51a and may dip into the fluid with its front-most lens.
摘要翻译： 公开了一种用于通过浸没物镜8a检查，测量限定结构，模拟结构和结构缺陷，修复和结构以及在微观组件2上对定义的物体位置进行后检查的装置1。 装置1包括在x坐标方向和y坐标方向上可移动的台架和用于微型部件2的保持器42，由此保持器42放置在台架4上，其中具有微观部件2。 保持器42具有分别具有浸没或清洁流体的储存器51a。 舞台4是可移动的，使得浸没物体8a位于储存器51a的正上方，并且可以用其最前面的透镜浸入流体中。
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76.发明申请Method of optically inspecting and visualizing optical measuring values obtained from disk-like objects 审中-公开光学检查和可视化从盘状物体获得的光学测量值的方法公开(公告)号：US20080062415A1
公开(公告)日：2008-03-13
申请号：US11784947
申请日：2007-04-10
申请人： Detlef Michelsson
发明人： Detlef Michelsson
IPC分类号： G06F19/00
CPC分类号： G01N21/9501 , G01N21/95607
摘要： A method of visualizing measuring values from recorded images of disk-like objects is disclosed. First an image is recorded of at least one disk-like object, and a great number of measuring values is generated. Each measuring value is associated with a color value. Finally a resulting image is generated wherein an area which has resulted in a measuring value on the disk-like substrate is associated with a color value selected from a predetermined palette.
摘要翻译： 公开了一种从盘状物体的记录图像中可视化测量值的方法。 首先，记录至少一个盘状对象的图像，并且生成大量的测量值。 每个测量值都与一个颜色值相关联。 最后，产生所得到的图像，其中导致盘状基底上的测量值的区域与从预定调色板中选择的颜色值相关联。
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公开(公告)号：US07224446B2
公开(公告)日：2007-05-29
申请号：US10880122
申请日：2004-06-30
申请人： Albert Kreh , Henning Backhauss
发明人： Albert Kreh , Henning Backhauss
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： The invention concerns an apparatus for inspection of a wafer, encompassing at least one illumination device in order to radiate an illuminating light beam onto a surface of the wafer, and an image capture device in order to capture an image of an illuminated region on the surface of the wafer in a plurality of spectral regions, a color modification device being provided in order to modify the color spectrum of the illuminating light beam or of the reflected light beam. The wafer inspection apparatus is characterized in that the color modification device is designed in such a way that the color spectrum of the illuminating light beam, or that of the image that is acquired of the surface of the wafer, is adaptable to the spectral sensitivity of the image capture device.
摘要翻译： 本发明涉及一种用于检查晶片的装置，其包围至少一个照明装置以将照射光束辐射到晶片的表面上，以及图像捕获装置，以便捕获表面上的照明区域的图像 的多个光谱区域中的晶片，提供了颜色修改装置，以便改变照明光束或反射光束的色谱。 所述晶片检查装置的特征在于，所述变色装置的设计使得所述照明光束的色谱或所述晶片表面的图像的色谱适应于所述晶片的光谱灵敏度 图像捕获设备。
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公开(公告)号：US20070103667A1
公开(公告)日：2007-05-10
申请号：US11554338
申请日：2006-10-30
申请人： Michael Ferber , Klaus Rinn
发明人： Michael Ferber , Klaus Rinn
IPC分类号： G03B27/58
CPC分类号： G03F7/70716 , G03F7/70625
摘要： The invention relates to a substrate support apparatus (41) for use in a position measuring device (1) for determining the position of a substrate (30, 45) supported by the substrate support apparatus (41) by means of a laser interferometer system (29), wherein the substrate support apparatus (41) comprises a traversable stage construction (26, 42), and a stage mirror (9, 43) fixedly associated with the stage construction for reflecting a laser beam of the laser interferometer system, wherein it is suggested that the measurement-critical components, associated in a spatially fixed way, of the substrate support apparatus (41) in the combination of elements ranging from the stage mirror (9, 43) to the substrate (30, 45) are of material structures having moduli of elasticity which differ from that of the substrate (30, 45) by not more than 15%. As a result, the negative effects of air pressure fluctuations on the laser-interferometric position measurement can be greatly reduced.
摘要翻译： 本发明涉及一种用于位置测量装置（1）的基板支撑装置（41），用于通过激光干涉仪系统来确定由基板支撑装置（41）支撑的基板（30,45）的位置（ 其特征在于，所述基板支撑装置（41）包括可移动平台结构（26,42）和与所述载物台结构固定地相关联的反射激光干涉仪系统的激光束的平台反射镜（9,43），其中 建议在从台式反射镜（9,43）到基板（30,45）的范围内组合的基板支撑装置（41）以空间固定的方式相关联的测量关键部件是材料 具有不同于基板（30,45）的弹性模量不超过15％的结构的结构。 结果，可以大大降低空气压力波动对激光干涉测量位置测量的负面影响。
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公开(公告)号：US20070077136A1
公开(公告)日：2007-04-05
申请号：US11400920
申请日：2006-04-10
申请人： Rene Schenck
发明人： Rene Schenck
CPC分类号： H01L21/67775
摘要： An apparatus for handling disk-like objects is disclosed, wherein the apparatus consists of at least one load port, one transfer unit, and one system unit. Between the transfer unit and the system unit an internal separating wall is formed. Further, an external separating wall is provided, which is constructed in such a way that it positions the transfer unit in a first partial room and the system unit in a second partial room.
摘要翻译： 公开了一种用于处理盘状物体的装置，其中该装置由至少一个装载端口，一个传送单元和一个系统单元组成。 在转印单元和系统单元之间形成内部隔离壁。 此外，设置有外部隔离壁，其以这样的方式构造，使得其将传送单元定位在第一部分房间中，并且将系统单元定位在第二部分房间中。
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80.发明申请公开(公告)号：US20070076194A1
公开(公告)日：2007-04-05
申请号：US11390855
申请日：2006-03-28
IPC分类号： G01N21/00
CPC分类号： G01N21/9503 , G01N21/8803 , G01N2021/8427 , G01N2021/8822 , G03F7/168
摘要： A method of detecting incomplete edge bead removal from a disk-like object is disclosed. First a peripheral area of a disk-like reference object is imaged. Marks are then defined in the peripheral area of the reference object. Finally, images of peripheral areas of a plurality of disk-like objects of the same batch are recorded. The inspection of the disk-like objects is limited to the locations of the marks defined on the reference object.
摘要翻译： 公开了一种从圆盘状物体中检测出不完整的边缘珠去除的方法。 首先，对盘状参考对象的周边区域进行成像。 然后，标记在参考对象的外围区域中定义。 最后，记录同一批次的多个盘状物体的外围区域的图像。 对盘状物体的检查限于在参照物上定义的标记的位置。
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