公开(公告)号：US20080073604A1

公开(公告)日：2008-03-27

申请号：US11851006

申请日：2007-09-06

申请人： Nobuhito Suehira ,  Junichi Seki ,  Hideki Ina ,  Koichi Sentoku

发明人： Nobuhito Suehira ,  Junichi Seki ,  Hideki Ina ,  Koichi Sentoku

IPC分类号： G06K9/00

CPC分类号： G03F9/7088 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/7003 ,  G03F9/7042 ,  G06K9/325

摘要： An imprint apparatus, comprising a first holder for holding a mold having an imprint pattern; a second holder for holding a workpiece to which the imprint pattern is transferred; a first illumination system for irradiating a mark for determining a position of the mold and a mark for determining a position of the workpiece with light; a first and second optical systems for imaging the marks for the mold and workpiece at a first and second observation points respectively; an imaging optical system; a first and second image pick-up devices for observing the marks for the mold and workpiece respectively; and at least one of a first drive mechanism for moving the first image pick-up device while following movement of the first observation point and a second drive mechanism for moving the second image pick-up device while following movement of the second observation point.

摘要翻译： 一种压印装置，包括用于保持具有印记图案的模具的第一保持器; 用于保持印刷图案被转印到的工件的第二保持器; 用于照射用于确定模具的位置的标记的第一照明系统和用于用光确定工件的位置的标记; 第一和第二光学系统，用于分别在第一和第二观察点成像用于模具和工件的标记; 成像光学系统; 分别用于观察模具和工件的标记的第一和第二图像拾取装置; 以及用于在跟随第一观察点的移动的同时移动第一图像拾取装置的第一驱动机构和用于在第二观察点的移动之前移动第二图像拾取装置的第二驱动机构中的至少一个。

公开(公告)号：US20080042320A1

公开(公告)日：2008-02-21

申请号：US11876058

申请日：2007-10-22

申请人： Junichi SEKI ,  Masao MAJIMA ,  Nobuhito SUEHIRA

发明人： Junichi SEKI ,  Masao MAJIMA ,  Nobuhito SUEHIRA

IPC分类号： B29C59/02

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint apparatus includes a first holding portion 1000 for holding a mold; a second holding portion 1040 for holding a member to be processed; and a support portion 1050 for partially supporting the member to be processed at a position opposite to the mold held by said first holding portion. The mold and the support portion determines a pressurizing axis for pressurizing the member to be processed. The support portion and the second holding portion are movable relative to each other, independently of said first holding portion, in a direction parallel to the pressurizing axis so that said support portion is moved apart from the member to be processed.

摘要翻译： 压印装置包括用于保持模具的第一保持部分1000; 用于保持待处理部件的第二保持部1040; 以及用于在与由所述第一保持部保持的模具相对的位置处部分地支撑待加工构件的支撑部分1050。 模具和支撑部分确定用于对待处理的构件加压的加压轴线。 支撑部分和第二保持部分可以在平行于加压轴线的方向上相对于所述第一保持部分彼此相对移动，使得所述支撑部分与被处理部件分离。

公开(公告)号：US20070242272A1

公开(公告)日：2007-10-18

申请号：US11736696

申请日：2007-04-18

申请人： Nobuhito Suehira ,  Junichi Seki ,  Hideki Ina ,  Koichi Sentoku

发明人： Nobuhito Suehira ,  Junichi Seki ,  Hideki Ina ,  Koichi Sentoku

IPC分类号： G01B11/00

CPC分类号： G03F7/0002 ,  B41M3/00 ,  B41M2205/26 ,  B82Y10/00 ,  B82Y40/00 ,  G03F9/00 ,  G03F9/7015 ,  G03F9/7042 ,  G03F9/7088

摘要： A pattern transfer method for transferring an imprinting pattern formed on a mold provided with an alignment mark onto a substrate provided with an alignment mark or a resin material interposed between the substrate and the mold includes a first step for obtaining a first image by disposing the alignment mark provided to the mold and an alignment mark provided to a reference substrate at a first object position and observing the alignment marks through a first image pickup portion, a second step for obtaining a second image by disposing the alignment mark provided to the reference substrate at a second object position spaced apart from the first object position and observing the alignment mark through a second image pickup portion, and a third step for obtaining information about a difference in image position between the alignment marks by using the first and second images.

摘要翻译： 用于将形成在具有对准标记的模具上形成的压印图案转印到设置有在基板和模具之间的对准标记或树脂材料的基板上的图案转印方法包括：第一步骤，通过设置对准来获得第一图像 提供给模具的标记和在第一物体位置处提供给参考基板的对准标记，并且通过第一图像拾取部分观察对准标记;第二步骤，通过将设置在参考基板上的对准标记设置在第二图像 与第一对象位置间隔开的第二对象位置，并通过第二图像拾取部分观察对准标记;以及第三步骤，通过使用第一和第二图像来获得关于对准标记之间的图像位置差异的信息。

公开(公告)号：US20070187594A1

公开(公告)日：2007-08-16

申请号：US11627845

申请日：2007-01-26

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01Q70/04 ,  G01Q10/04

摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描阶段还包括用于存储扫描台的特征信息的存储器，并且可拆卸地或可替换地安装到装置的主组件。

公开(公告)号：US20070187593A1

公开(公告)日：2007-08-16

申请号：US11627842

申请日：2007-01-26

申请人： Susumu Yasuda ,  Junichi Seki ,  Takao Kusaka ,  Nobuki Yoshimatsu

发明人： Susumu Yasuda ,  Junichi Seki ,  Takao Kusaka ,  Nobuki Yoshimatsu

IPC分类号： G01N23/00

CPC分类号： G01Q70/04

摘要： A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

摘要翻译： 一种扫描探针装置，用于获取样本的信息，在样本中记录信息，或者在样本与装置之间相对移动来处理样本，该装置由探针构成; 以及扫描台，其包括用于移动用于保持样品的样品保持台的驱动元件和可移除在样品保持台移动期间产生的惯性力的方向的可移动部分。 扫描台还包括用于驱动扫描台的驱动电路，并且可拆卸地或可更换地安装到装置的主组件上。

公开(公告)号：US20070159098A1

公开(公告)日：2007-07-12

申请号：US11646561

申请日：2006-12-28

申请人： Junichi Seki

发明人： Junichi Seki

IPC分类号： H05B33/04

CPC分类号： H05B33/04 ,  H01L51/5246 ,  H01L2251/5315

摘要： The object of the present invention is to provide an EL panel that fully attains the intrinsic light-emitting property and that sustains stable light-emitting property. The EL panel 10 in a preferred embodiment of the present invention has a substrate 2, an EL element 4, a passivation film 5 formed on an upper surface of the EL element 4, a protective layer 6 covering the EL element 4, and a seal plate 8, in this order. The protective layer 6 contains an optical cation-curing type resin and an acid-trapping agent.

摘要翻译： 本发明的目的是提供一种EL面板，其完全达到本发明的发光特性并且具有稳定的发光性能。 在本发明的优选实施例中的EL面板10具有基板2，EL元件4，形成在EL元件4的上表面上的钝化膜5，覆盖EL元件4的保护层6和密封件 板8，按顺序。 保护层6含有光阳离子固化型树脂和酸捕获剂。

公开(公告)号：US20070035056A1

公开(公告)日：2007-02-15

申请号：US11462187

申请日：2006-08-03

申请人： Nobuhito Suehira ,  Junichi Seki ,  Masao Majima

发明人： Nobuhito Suehira ,  Junichi Seki ,  Masao Majima

IPC分类号： B29C35/08

CPC分类号： B29C35/0288 ,  B29C35/0888 ,  B29C59/02 ,  B29C2035/0827 ,  B29C2059/023 ,  Y10S977/887

摘要： An imprint apparatus for imprinting a pattern formed on a mold in a resin material formed on a substrate with accuracy is constituted by a light source for irradiating the resin material with light for curing the resin material; a measuring device for measuring a physical value which reflects a state of the resin material resulting from the irradiation of light from the light source; and a controller for controlling a spatial positional relationship between the mold and the substrate or an amount of light from the light source on the basis of information obtained from the measuring device.

摘要翻译： 用于在形成在基板上的树脂材料中的模具上形成的图案的压印精度的压印装置由用于照射树脂材料的光用于固化树脂材料的光源构成; 测量装置，用于测量反映由所述光源照射光产生的树脂材料的状态的物理值; 以及控制器，其基于从测量装置获得的信息来控制模具和基板之间的空间位置关系或来自光源的光量。

公开(公告)号：US20060140568A1

公开(公告)日：2006-06-29

申请号：US10524831

申请日：2003-09-29

申请人： Junichi Seki ,  Takeaki Itsuji

发明人： Junichi Seki ,  Takeaki Itsuji

IPC分类号： G02B6/10

CPC分类号： B82Y20/00 ,  G02B6/1225

摘要： An optical element is formed by using a plurality of pillar-shaped members arranged periodically and a pair of support members arranged perpendicularly relative to the direction of arrangement of the pillar-shaped members so as to sandwich the pillar-shaped members. The optical element showing a periodic structure of periodic distribution of refractive index. An optical characteristic of the optical element is modulated by applying force to the optical element in a direction perpendicular to the direction of arrangement of the pillar-shaped members and changing the diameter of the pillar-shaped members.

摘要翻译： 通过使用周期性地布置的多个柱状构件和相对于柱状构件的排列方向垂直布置的一对支撑构件来形成光学元件，以夹住柱状构件。 该光学元件显示折射率周期性分布的周期性结构。 光学元件的光学特性通过在垂直于柱状构件的布置方向的方向上对光学元件施加力并改变柱状构件的直径来调制。

公开(公告)号：US06195313B1

公开(公告)日：2001-02-27

申请号：US09140404

申请日：1998-08-26

申请人： Junichi Seki ,  Shunichi Shido ,  Susumu Yasuda

发明人： Junichi Seki ,  Shunichi Shido ,  Susumu Yasuda

IPC分类号： G11B700

CPC分类号： G11B9/1454 ,  Y10S977/849 ,  Y10S977/874 ,  Y10S977/932 ,  Y10S977/947

摘要： A tracking mechanism for an apparatus which records and/or reproduces data on and/or from a medium through a relative scan of the medium with probes, the medium being formed with a plurality of tracking bit trains disposed in parallel at a predetermined distance between trains, the tracking mechanism having: a plurality of probes disposed at a predetermined distance between probes; and a tracking controller for performing a tracking control in accordance with outputs from the plurality of probes, the outputs being obtained when the plurality of tracking bit trains are scanned with the plurality of probes. A tracking method for such an apparatus includes the steps of: scanning the plurality of tracking bit trains with a plurality of probes disposed at a predetermined distance between probes; and performing a tracking control in accordance with outputs from the plurality of probes, the outputs being obtained when the plurality of tracking bit trains are scanned with the plurality of probes.

摘要翻译： 一种用于通过介质与探针的相对扫描在介质上和/或从介质上记录和/或再现数据的装置的跟踪机构，所述介质形成有多个跟踪位列，所述多个跟踪位列在火车之间以预定距离平行设置 所述跟踪机构具有：以探针之间的预定距离设置的多个探针; 以及跟踪控制器，用于根据来自所述多个探测器的输出执行跟踪控制，当所述多个跟踪比特序列被所述多个探测器扫描时获得的输出。 这种装置的跟踪方法包括以下步骤：用设置在探针之间预定距离处的多个探针扫描多个跟踪位列; 并且根据来自所述多个探测器的输出执行跟踪控制，当所述多个跟踪比特序列被所述多个探测器扫描时获得的输出。

公开(公告)号：US08361336B2

公开(公告)日：2013-01-29

申请号：US12282454

申请日：2008-08-01

申请人： Shingo Okushima ,  Junichi Seki ,  Haruhito Ono ,  Nao Nakatsuji ,  Atsunori Terasaki

发明人： Shingo Okushima ,  Junichi Seki ,  Haruhito Ono ,  Nao Nakatsuji ,  Atsunori Terasaki

IPC分类号： B44C1/22

CPC分类号： G03F7/0002 ,  B29C33/424 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint method for imprinting a pattern of a mold onto a resin material on a substrate. The imprint method includes a step of forming a processed area in which an imprint pattern corresponding to the pattern of the mold is formed, and an outside area formed of a periphery of the processed area, by bringing the mold into contact with the resin material formed on the substrate, so that a portion of the resin material is extruded from the processed area into the outside area, a step of forming a protection layer for protecting the processed area, and a step of removing a layer of the resin material in the outside area, while the imprint pattern formed on a layer of the resin material in the processed area, is protected by the protection layer, so as not to be removed.

摘要翻译： 用于将模具图案压印在基板上的树脂材料上的压印方法。 压印方法包括通过使模具与形成的树脂材料接触来形成其中形成与模具的图案相对应的压印图案的处理区域和由处理区域的周边形成的外部区域的步骤 在基板上，使得一部分树脂材料从处理区域挤出到外部区域中，形成用于保护加工区域的保护层的步骤，以及在外部去除树脂材料层的步骤 区域，而在处理区域中形成在树脂材料层上的印模图案被保护层保护，以便不被去除。