公开(公告)号：US20050219523A1

公开(公告)日：2005-10-06

申请号：US11060499

申请日：2005-02-18

Applicant: Chieko Onuma ,  Mitsuji Ikeda ,  Noriko Ilzumi ,  Jun Maeda ,  Takashi Matsuyama

Inventor： Chieko Onuma ,  Mitsuji Ikeda ,  Noriko Ilzumi ,  Jun Maeda ,  Takashi Matsuyama

IPC: G01B11/00 ,  G01N21/88 ,  G01N21/90

CPC classification number: G01N21/9027 ,  G01N21/8806

Abstract: A foreign matter detecting system which can acquire a clear image and detect a foreign matter with high accuracy based on the acquired image regardless of whether a subject is located far or near from an image capturing device in spite of a depth variation or a level difference. An image capturing unit having an externally controllable focus position is disposed above or below a liquid surface, and a ray of light from an LED is illuminated toward the liquid surface from above or the side at least at a focus position of the image capturing unit so that a foreign matter on the liquid surface causes mirror reflection. The focus position of the image capturing unit is changed over the range from the top of a container containing a liquid to the bottom thereof. At each focus position, an input image from the image capturing unit is taken into an image input unit of an image processing section. An image selecting unit of the image processing section selects an image focused on the liquid surface or a clearest image of the liquid surface from among the input images. An image detecting unit of the image processing section checks the presence and position of the mirror reflection, thereby detecting the foreign matter.

Abstract translation: 不管深度变化还是水平差，即使拍摄对象远离摄影装置，无论拍摄对象是远距离还是远离拍摄装置，均可以基于获取的图像，以高精度获取清晰图像并检测异物的异物检测系统。 具有外部可控焦点位置的图像捕获单元设置在液面的上方或下方，并且来自LED的光线至少在图像捕获单元的焦点位置从上方或侧面向液体表面照射， 液面上的异物引起镜面反射。 图像拍摄单元的聚焦位置在从包含液体的容器的顶部到其底部的范围内改变。 在每个焦点位置，将来自图像捕获单元的输入图像带入图像处理部分的图像输入单元。 图像处理部分的图像选择单元从输入图像中选择聚焦在液面上的图像或液面的最清晰图像。 图像处理部的图像检测单元检查镜面反射的存在和位置，从而检测异物。

公开(公告)号：US06756590B2

公开(公告)日：2004-06-29

申请号：US10421140

申请日：2003-04-23

Applicant: Masato Kazui ,  Mitsuji Ikeda ,  Atsushi Takane

Inventor： Masato Kazui ,  Mitsuji Ikeda ,  Atsushi Takane

IPC: G01N23203

CPC classification number: G01B15/08 ,  G01N23/2251 ,  H01J2237/2817

Abstract: An electron beam applied from an electron gun 1 and reflected off a surface of a specimen 7 placed on a stage 2 that is tilted at a tilt angle &phgr;=0 is detected, and a signal intensity thereof is measured by an electron detector 3. Based upon the measurement, an image processing unit 6 calculates a slope angle &thgr; of the surface of the specimen, and determines candidates for cross-sectional shape of the specimen. Signal intensity of the electromagnetic wave that would be reflected from a surface having a cross-sectional shape of each of the candidates if the tilt angle &phgr; were changed into &phgr;=&phgr;0 are estimated, and compared with a signal intensity actually measured by the electron detector 3 with the tilt angle 100 being changed into &phgr;=&phgr;0. Consequently, cross sectional shape and three-dimensional shape can be determined based upon a result of comparison, without utilizing a matching process of feature points.

Abstract translation: 检测从电子枪1施加并从放置在倾斜角度为phi = 0的台2上的试样7的表面反射的电子束，并且通过电子检测器3测量其信号强度。基于 在测量时，图像处理单元6计算样本表面的倾斜角θ，并确定样本的横截面形状的候选。 如果将倾斜角度phi改变为phi = phi0，则从具有每个候选的横截面形状的表面反射的电磁波的信号强度被估计，并且与由电子检测器实际测量的信号强度进行比较 3，其中倾斜角100被改变成phi = phi0。 因此，可以基于比较的结果来确定截面形状和三维形状，而不利用特征点的匹配处理。

公开(公告)号：US06653633B2

公开(公告)日：2003-11-25

申请号：US10356498

申请日：2003-02-03

Applicant: Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J3726

CPC classification number: G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于根据所述带电粒子束聚焦的信号来构成表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

公开(公告)号：US06538249B1

公开(公告)日：2003-03-25

申请号：US09612302

申请日：2000-07-07

Applicant: Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J3726

CPC classification number: G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于根据所述带电粒子束聚焦的信号来组合表面部分的二维图像的装置，所述信号是从带电粒子检测器输出的信号。

公开(公告)号：US5029969A

公开(公告)日：1991-07-09

申请号：US421410

申请日：1989-10-16

Applicant: Shoji Seike ,  Toshiyuki Mima ,  Masayuki Nozaki ,  Naoki Tani ,  Mitsuji Ikeda

Inventor： Shoji Seike ,  Toshiyuki Mima ,  Masayuki Nozaki ,  Naoki Tani ,  Mitsuji Ikeda

IPC: G02B6/44 ,  H01B17/00

CPC classification number: G02B6/4463 ,  G02B6/442 ,  H01B17/005

Abstract: An optical fiber composite insulator comprises a hollow insulator body having an axial through-hole and at least one optical fiber extended through the through-hole and hermetically sealed to the inner surface of the through-hole by a sealing material. A relationship between a condition of the inner surface of the through-hole and the sealing material, a relationship between the inner diameters of the through-hole and the outer diameter of the hollow insulator body or a coating material on the optical fiber are selected to provide high insulating property, mechanical strength and airtight property of the optical fiber composite insulator.