公开(公告)号：US07031121B2

公开(公告)日：2006-04-18

申请号：US10631642

申请日：2003-07-30

申请人： Gautam Khera ,  Quang Le ,  Son Van Nguyen ,  Aron Pentek ,  Mason Lamar Williams, III

发明人： Gautam Khera ,  Quang Le ,  Son Van Nguyen ,  Aron Pentek ,  Mason Lamar Williams, III

IPC分类号： G11B5/127 ,  G11B5/11

CPC分类号： G11B5/127 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3153 ,  G11B5/3176 ,  G11B5/33

摘要： A perpendicular recording write head has ferromagnetic first and second pole pieces which are connected at a back gap and an insulation stack with a write coil layer embedded therein is located between the first and second pole pieces and between a head surface of the write head and the back gap. The second pole piece has a pole tip which is located at the head surface and a recessed ferromagnetic write shield layer. A nonmagnetic isolation layer is located between the second pole piece and the write shield layer and at least one ferromagnetic stud is magnetically connected between the first pole piece layer and the write shield layer and is located between the head surface and the insulation stack.

摘要翻译： 垂直记录写头具有在后隙连接的铁磁第一和第二极片，并且其中嵌有写入线圈层的绝缘堆叠位于第一和第二极靴之间以及写头的头表面和 背隙。 第二极片具有位于头表面的极尖和凹陷的铁磁写屏蔽层。 非磁性隔离层位于第二极靴和写入屏蔽层之间，并且至少一个铁磁螺柱磁性地连接在第一极靴层和写入屏蔽层之间，并位于头部表面和绝缘堆叠之间。

公开(公告)号：US07009812B2

公开(公告)日：2006-03-07

申请号：US10675046

申请日：2003-09-29

申请人： Yimin Hsu ,  Quang Le ,  Hin Pong Edward Lee ,  James Lamar Nix ,  Aron Pentek ,  Kurt Rubin ,  Neil Smith ,  Nian Xiang Sun ,  Walter Eugene Weresin ,  Mason Lamar Williams

发明人： Yimin Hsu ,  Quang Le ,  Hin Pong Edward Lee ,  James Lamar Nix ,  Aron Pentek ,  Kurt Rubin ,  Neil Smith ,  Nian Xiang Sun ,  Walter Eugene Weresin ,  Mason Lamar Williams

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/6005

摘要： The invention is a magnetic transducer with separated read and write heads for perpendicular recording. The write head has a trailing shield that extends from the return pole piece toward the main pole piece to form the write gap at the air-bearing surface. One embodiment of the trailing shield is a two part structure with a pedestal and a much smaller tip that confronts the main pole piece at the gap. In one embodiment a sink of non-magnetic, electrically conductive material is disposed in the separation gap between the read head and the flux bearing pole piece. The sink is preferably made of copper and does not extend to the ABS.

摘要翻译： 本发明是具有分离的用于垂直记录的读写头的磁性换能器。 写头具有从返回极片向主极片延伸的尾部屏蔽件，以在空气轴承表面形成写入间隙。 后挡板的一个实施例是具有基座的两部分结构和在间隙处面对主极片的更小的尖端。 在一个实施例中，非磁性导电材料的汇流槽设置在读取头和磁通轴承极片之间的分隔间隙中。 水槽优选由铜制成并且不延伸到ABS。

公开(公告)号：US20050024766A1

公开(公告)日：2005-02-03

申请号：US10631642

申请日：2003-07-30

申请人： Gautam Khera ,  Quang Le ,  Son Nguyen ,  Aron Pentek ,  Mason Williams

发明人： Gautam Khera ,  Quang Le ,  Son Nguyen ,  Aron Pentek ,  Mason Williams

IPC分类号： G11B5/127 ,  G11B5/31 ,  G11B5/33

CPC分类号： G11B5/127 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3153 ,  G11B5/3176 ,  G11B5/33

摘要： A perpendicular recording write head has ferromagnetic first and second pole pieces which are connected at a back gap and an insulation stack with a write coil layer embedded therein is located between the first and second pole pieces and between a head surface of the write head and the back gap. The second pole piece has a pole tip which is located at the head surface and a recessed ferromagnetic write shield layer. A nonmagnetic isolation layer is located between the second pole piece and the write shield layer and at least one ferromagnetic stud is magnetically connected between the first pole piece layer and the write shield layer and is located between the head surface and the insulation stack.

摘要翻译： 垂直记录写头具有在后隙连接的铁磁第一和第二极片，并且其中嵌有写入线圈层的绝缘堆叠位于第一和第二极靴之间以及写头的头表面和 背隙。 第二极片具有位于头表面的极尖和凹陷的铁磁写屏蔽层。 非磁性隔离层位于第二极靴和写入屏蔽层之间，并且至少一个铁磁螺柱磁性地连接在第一极靴层和写入屏蔽层之间，并位于头部表面和绝缘堆叠之间。

公开(公告)号：US08568601B2

公开(公告)日：2013-10-29

申请号：US11947616

申请日：2007-11-29

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22 ,  H01L21/00

CPC分类号： G03B31/00

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole using a mask that includes a hard mask layer deposited over the write pole laminate material, and a thick, physically robust image transfer layer. The image transfer layer can be a material such as AlTiO that can be patterned by a reactive ion etching process, but which also resists deformation during processing. This process allows a write pole and wrap-around trailing shield to be constructed at very narrow track widths without the mask deformation and fencing problems experienced by prior art methods.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括使用掩模形成写入极，该掩模包括沉积在写磁极层压材料上的硬掩模层，以及厚的，物理上坚固的图像转印层。 图像转印层可以是诸如AlTiO的材料，其可以通过反应离子蚀刻工艺进行图案化，但也可以在加工过程中抵抗变形。 该过程允许在非常窄的轨道宽度上构造写极点和缠绕后挡板，而不会由现有技术方法遇到的掩模变形和围栏问题。

公开(公告)号：US08347489B2

公开(公告)日：2013-01-08

申请号：US12874116

申请日：2010-09-01

申请人： Liubo Hong ,  Aron Pentek ,  Yi Zheng ,  Honglin Zhu

发明人： Liubo Hong ,  Aron Pentek ,  Yi Zheng ,  Honglin Zhu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.

摘要翻译： 一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法，以及独立的后侧和侧面磁屏蔽。 该方法允许写极通过干法进行构建，其中写极材料通过诸如溅射沉积或电镀的工艺沉积，并且写极形状通过掩模和离子铣削定义。 写极具有阶梯特征，其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔，或者可以是磁性材料，其增加写极的位置处的有效厚度 从ABS略微凹进。 可以在该阶梯特征上进一步构建凸块结构，以增强磁场梯度以及减少后屏蔽饱和度。

公开(公告)号：US08323727B2

公开(公告)日：2012-12-04

申请号：US12641138

申请日：2009-12-17

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： C23C14/32

CPC分类号： C25D7/001 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/115

摘要： A method for manufacturing a magnetic write head that has a trailing magnetic shield with a tapered write pole trailing edge, a non-magnetic step layer and a Ru bump and an alumina bump formed at the front of the non-magnetic step layer. The process forms a Ru/alumina side wall at the sides of the write pole, such that the Ru side wall is closest to the write pole. The Ru is removed more readily than the alumina during the ion milling that is performed to taper the write pole. This causes the Ru portion of the side wall to taper away from the write pole rather than forming an abrupt step. This tapering prevents dishing of the trailing edge of the write pole for improved write head performance.

摘要翻译： 一种用于制造具有形成在非磁性阶梯层前面的锥形写磁头后缘的后磁屏蔽，非磁性阶梯层和Ru凸块以及氧化铝凸块的磁写头的方法。 该工艺在写入极的两侧形成Ru /氧化铝侧壁，使得Ru侧壁最靠近写入极。 在离子铣削期间，Ru比氧化铝更容易地被除去，以使得写柱变钝。 这使得侧壁的Ru部分远离写入磁极而变浅，而不是形成突然的步骤。 这种渐缩防止了写磁极的后缘的凹陷以改善写头性能。

公开(公告)号：US08252190B2

公开(公告)日：2012-08-28

申请号：US12343720

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22 ,  G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered trailing edge step. The resulting tapered trailing edge step maximizes write field at very small bit sizes by preventing the magnetic saturation of the write pole at the pole tip. The method includes depositing a magnetic write pole material and then depositing a magnetic material over the magnetic write pole material. A RIE mask and hard mask are deposited over the magnetic bump material. A resist mask is formed over the RIE mask and hard mask, and a reactive ion etching is performed to transfer the pattern of the resist mask onto the underlying hard mask. Then an ion milling is performed to form a the magnetic step layer with a tapered edge that defines a tapered trailing edge step structure of the write pole.

摘要翻译： 一种用于制造具有具有锥形后缘台阶的写极的磁写头的方法。 所产生的锥形后沿步骤通过防止磁极尖端的写极的磁饱和而使非常小的位尺寸的写入场最大化。 该方法包括沉积磁性写入磁极材料，然后在磁性写入磁极材料上沉积磁性材料。 RIE掩模和硬掩模沉积在磁性凸块材料上。 在RIE掩模和硬掩模上形成抗蚀剂掩模，并且执行反应离子蚀刻以将抗蚀剂掩模的图案转移到下面的硬掩模上。 然后执行离子铣削以形成具有锥形边缘的磁性阶梯层，其限定了写入极的锥形后缘阶梯结构。

公开(公告)号：US08085497B2

公开(公告)日：2011-12-27

申请号：US12341834

申请日：2008-12-22

申请人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A system according to one embodiment includes a magnetic pole; a bump structure above the pole, the bump structure having a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the pole, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the pole, wherein the second angle is greater than the first angle; and a shield above the bump structure. A method according to one embodiment includes forming a bump layer above a magnetic pole; removing a portion of the bump layer for forming a step therein; and milling the bump layer for defining thereon a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the bump layer, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the bump layer, wherein the second angle is greater than the first angle.

摘要翻译： 根据一个实施例的系统包括磁极; 所述凸起结构具有从所述极的沉积平面以1°至89°之间的第一角度定向的第一表面，并且所述第一表面以与所述极的沉积的平面成1°至89°之间的第二角度定向 所述极的沉积平面，其中所述第二角度大于所述第一角度; 和凸块结构之上的屏蔽。 根据一个实施例的方法包括在磁极上形成凸起层; 去除所述凸起层的一部分以在其中形成台阶; 并且研磨所述凸起层，以在其上限定从凸起层的沉积平面以1°至89°之间的第一角度定向的第一表面，以及从该平面以1°至89°之间的第二角度定向的第二表面 所述凸起层的沉积，其中所述第二角度大于所述第一角度。

公开(公告)号：US07978430B2

公开(公告)日：2011-07-12

申请号：US11852166

申请日：2007-09-07

申请人： Quang Le ,  James L. Nix ,  Aron Pentek ,  Walter E. Weresin ,  Mason L. Williams

发明人： Quang Le ,  James L. Nix ,  Aron Pentek ,  Walter E. Weresin ,  Mason L. Williams

IPC分类号： G11B5/127 ,  G11B5/147

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording. A reverse air bearing surface head for perpendicular recording is provided with an inversed bevel shape to handle skew when recording data on a magnetic recording medium.

摘要翻译： 一种用于提供具有用于垂直记录的后挡板设计的反向空气轴承表面头的方法和装置。 用于垂直记录的反向空气轴承表面头设置有反转的斜面形状，以在磁记录介质上记录数据时处理偏斜。

公开(公告)号：US20110096434A1

公开(公告)日：2011-04-28

申请号：US12975157

申请日：2010-12-21

申请人： Wen-Chien D. Hsiao ,  Aron Pentek ,  Thomas J.A. Roucoux

发明人： Wen-Chien D. Hsiao ,  Aron Pentek ,  Thomas J.A. Roucoux

IPC分类号： G11B21/02 ,  G11B5/10

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A method according to one embodiment includes etching an underlayer positioned under a main pole for reducing a thickness thereof and creating an undercut under the main pole; adding a gap material along sides of the main pole and in the undercut; and forming a shield along at least a portion of the gap material. A magnetic head according to one embodiment includes a main pole; an underlayer positioned under the main pole and spaced therefrom, thereby defining an undercut therebetween; a first layer of gap material extending along sides of the main pole and in the undercut; a second layer of gap material extending continuously along the underlayer under the main pole; and a shield encircling the main pole, wherein the shield extends between the first and second layers of gap material in the undercut. Additional systems and methods are also presented.

摘要翻译： 根据一个实施例的方法包括蚀刻位于主极下方的底层以减小其厚度并在主极下方产生底切; 在主杆的侧面和底切处添加间隙材料; 以及沿所述间隙材料的至少一部分形成屏蔽。 根据一个实施例的磁头包括主极; 位于主极下方并与其间隔开的底层，从而在其间限定底切; 第一层间隙材料沿主极和底切部分的侧面延伸; 沿着主极下方的底层连续延伸的第二层间隙材料; 以及围绕所述主极的屏蔽件，其中所述屏蔽件在所述底切部中在所述第一和第二间隙材料层之间延伸。 还介绍了其他系统和方法。