公开(公告)号：US08028399B2

公开(公告)日：2011-10-04

申请号：US11957481

申请日：2007-12-16

申请人： Amanda Baer ,  Jeffrey S. Lille ,  Aron Pentek

发明人： Amanda Baer ,  Jeffrey S. Lille ,  Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.

摘要翻译： 描述制造磁性写入极的写入元件和方法。 对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。 垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。 然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。 极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。 然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

公开(公告)号：US20100296193A1

公开(公告)日：2010-11-25

申请号：US12849796

申请日：2010-08-03

申请人： John I. Kim ,  Aron Pentek

发明人： John I. Kim ,  Aron Pentek

IPC分类号： G11B5/10

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch, with the gap being formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap. A reactive ion beam etching (RIBE) process removes the filler material at the side edges of the write pole and thus widens the opening at the side edges. The nonmagnetic metal film protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.

摘要翻译： 垂直磁记录写头具有写极，梯形后屏蔽切口和写极与凹口之间的间隙，间隙由非磁性掩模膜形成，例如氧化铝，非磁性金属保护膜和 非磁隙层。 写极具有后缘，其具有基本上限定轨道宽度的宽度，并且面向凹口的前边缘，但是与间隙隔开。 写极具有非磁性填充材料，例如氧化铝，除了在其后缘处与间隙接触的位置之外围绕它。 反应离子束蚀刻（RIBE）工艺去除了写极的侧边缘处的填充材料，从而加宽了侧边缘处的开口。 非磁性金属膜在开口扩大期间保护下面的掩模膜和写极。 间隙层和后屏蔽切口沉积在写极上方的加宽开口中，因此凹口的侧面发散以引起大致梯形的形状。

公开(公告)号：US07788797B2

公开(公告)日：2010-09-07

申请号：US11735894

申请日：2007-04-16

申请人： John I. Kim ,  Aron Pentek

发明人： John I. Kim ,  Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for making a perpendicular magnetic recording write head that has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch uses a reactive ion beam etching (RIBE) process in CHF3 that removes filler material at the side edges of the write pole and thus widens the opening at the side edges. The gap is formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The nonmagnetic metal film is substantially less reactive to CHF3 than the filler material and protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.

摘要翻译： 用于制造具有写入极，梯形尾部屏蔽切口以及写入极和凹口之间的间隙的垂直磁记录写头的方法使用在CHF 3中的反应离子束蚀刻（RIBE）工艺，该方法除去填充材料 写极的侧边缘，从而使侧边缘处的开口变宽。 间隙由非磁性掩模膜形成，例如氧化铝，非磁性金属保护膜和非磁性间隙层。 非磁性金属膜与填充材料基本上比CHF3反应性低，并且在开口加宽期间保护下面的掩模膜和写极。 间隙层和后屏蔽切口沉积在写极上方的加宽开口中，因此凹口的侧面发散以引起大致梯形的形状。

公开(公告)号：US07770281B2

公开(公告)日：2010-08-10

申请号：US11746856

申请日：2007-05-10

申请人： Aron Pentek

发明人： Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of forming a perpendicular magnetic recording write head having a trailing shield (TS) with a precisely defined throat height (TH) on an air-bearing slider includes depositing an electrical lapping guide (ELG) layer on the substrate adjacent to and spaced from the write pole (WP) layer. A nonmagnetic TS pad layer is deposited on both the gap layer and the ELG layer, with the TS pad layer patterned to have a front edge extending across the both the ELG layer and the gap layer and recessed from the line where the substrate will be later cut to form the slider. An ELG protection layer is patterned on the ELG layer, the TS pad layer material is removed from the ELG layer in the region recessed from the TS pad layer front edge, and the ELG layer is removed in regions not covered by the ELG protection layer. The ELG protection layer is then removed, leaving the ELG layer having a back edge collinear with the TS pad layer front edge so that the TS TH is precisely defined during subsequent lapping of the slider.

摘要翻译： 一种形成具有在空气轴承滑块上具有精确定义的喉部高度（TH）的后挡板（TS）的垂直磁记录写头的方法包括：在邻近和间隔开的衬底上沉积电研磨导向器（ELG）层 写极（WP）层。 非磁性TS焊盘层沉积在间隙层和ELG层上，其中TS焊盘层被图案化成具有延伸穿过ELG层和间隙层的前边缘，并且衬底将在之后的线凹进 剪切形成滑块。 在ELG层上图案化ELG保护层，在从TS焊盘层前沿凹陷的区域中，从ELG层去除TS焊盘层材料，并且在未被ELG保护层覆盖的区域中去除ELG层。 然后去除ELG保护层，留下具有与TS垫层前边缘共线的后边缘的ELG层，使得在随后的滑块研磨期间精确地限定TS TH。

公开(公告)号：US07675709B2

公开(公告)日：2010-03-09

申请号：US11525789

申请日：2006-09-21

申请人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

发明人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

IPC分类号： G11B5/31 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

摘要翻译： 磁写头结构，使写入场强度最大化，同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量，同时也避免杂散场。 磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于 磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

公开(公告)号：US07563381B2

公开(公告)日：2009-07-21

申请号：US10836867

申请日：2004-04-30

申请人： Amanda Baer ,  Quang Le ,  Kim Lee ,  Aron Pentek ,  Douglas J. Werner ,  Sue S. Zhang

发明人： Amanda Baer ,  Quang Le ,  Kim Lee ,  Aron Pentek ,  Douglas J. Werner ,  Sue S. Zhang

IPC分类号： G11B5/187

CPC分类号： G11B5/1871 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043

摘要： A method for constructing a tapered write pole, the method including the use of a bilayer hard mask.

摘要翻译： 一种用于构造锥形写入极的方法，该方法包括使用双层硬掩模。

公开(公告)号：US20080276448A1

公开(公告)日：2008-11-13

申请号：US11746856

申请日：2007-05-10

申请人： Aron Pentek

发明人： Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of forming a perpendicular magnetic recording write head having a trailing shield (TS) with a precisely defined throat height (TH) on an air-bearing slider includes depositing an electrical lapping guide (ELG) layer on the substrate adjacent to and spaced from the write pole (WP) layer. A nonmagnetic TS pad layer is deposited on both the gap layer and the ELG layer, with the TS pad layer patterned to have a front edge extending across the both the ELG layer and the gap layer and recessed from the line where the substrate will be later cut to form the slider. An ELG protection layer is patterned on the ELG layer, the TS pad layer material is removed from the ELG layer in the region recessed from the TS pad layer front edge, and the ELG layer is removed in regions not covered by the ELG protection layer. The ELG protection layer is then removed, leaving the ELG layer having a back edge collinear with the TS pad layer front edge so that the TS TH is precisely defined during subsequent lapping of the slider.

摘要翻译： 一种形成具有在空气轴承滑块上具有精确定义的喉部高度（TH）的后挡板（TS）的垂直磁记录写头的方法包括：在邻近和间隔开的衬底上沉积电研磨导向器（ELG）层 写极（WP）层。 非磁性TS焊盘层沉积在间隙层和ELG层上，其中TS焊盘层被图案化成具有延伸穿过ELG层和间隙层的前边缘，并且衬底将在之后的线凹进 剪切形成滑块。 在ELG层上图案化ELG保护层，在从TS焊盘层前沿凹陷的区域中，从ELG层去除TS焊盘层材料，并且在未被ELG保护层覆盖的区域中去除ELG层。 然后去除ELG保护层，留下具有与TS垫层前边缘共线的后边缘的ELG层，使得在随后的滑块研磨期间精确地限定TS TH。

公开(公告)号：US20080002292A1

公开(公告)日：2008-01-03

申请号：US11852166

申请日：2007-09-07

申请人： Quang Le ,  James Nix ,  Aron Pentek ,  Walter Weresin ,  Mason Williams

发明人： Quang Le ,  James Nix ,  Aron Pentek ,  Walter Weresin ,  Mason Williams

IPC分类号： G11B5/127 ,  G11B5/187

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording. A reverse air bearing surface head for perpendicular recording is provided with an inversed bevel shape to handle skew when recording data on a magnetic recording medium.

摘要翻译： 一种用于提供具有用于垂直记录的后挡板设计的反向空气轴承表面头的方法和装置。 用于垂直记录的反向空气轴承表面头设置有反转的斜面形状，以在磁记录介质上记录数据时处理偏斜。

公开(公告)号：US07296338B2

公开(公告)日：2007-11-20

申请号：US10903983

申请日：2004-07-30

申请人： Quang Le ,  James L. Nix ,  Aron Pentek ,  Walter E. Weresin ,  Mason L. Williams, III

发明人： Quang Le ,  James L. Nix ,  Aron Pentek ,  Walter E. Weresin ,  Mason L. Williams, III

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording. A reverse air bearing surface head for perpendicular recording is provided with an inversed bevel shape to handle skew when recording data on a magnetic recording medium.

摘要翻译： 一种用于提供具有用于垂直记录的后挡板设计的反向空气轴承表面头的方法和装置。 用于垂直记录的反向空气轴承表面头设置有反转的斜面形状，以在磁记录介质上记录数据时处理偏斜。

公开(公告)号：US20070146931A1

公开(公告)日：2007-06-28

申请号：US11317917

申请日：2005-12-22

申请人： Amanda Baer ,  Daniel Bedell ,  Quang Le ,  Aron Pentek

发明人： Amanda Baer ,  Daniel Bedell ,  Quang Le ,  Aron Pentek

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3163

摘要： A magnetic head for use in a perpendicular recording system having a novel shield structure that provides exceptional magnetic shielding from extraneous magnetic fields such as from a write coil, shaping layer or return pole of the write head. The shield structure is constructed to have a bottom or leading surface that is generally coplanar with the bottom or leading surface of the shaping layer, but all or a portion of the shield structure is not as thick as the shaping layer so as to have a top surface that does not extend to the same elevation (in a trailing direction) as that of the shaping layer. Making the shields extend to a lower level than the shaping layer improves magnetic performance by reducing flux leakage from the write pole, and also provides manufacturing advantages, such as during the manufacturing of the write pole. These manufacturing advantages include the advantage of having the shields covered with a protective layer of, for example, alumina during the ion milling of the write pole.

摘要翻译： 一种用于垂直记录系统的磁头，其具有新的屏蔽结构，其提供例如来自写入磁头的写入线圈，成形层或返回磁极的外部磁场的卓越的磁屏蔽。 屏蔽结构被构造成具有与成形层的底部或前表面大致共面的底部或前表面，但是屏蔽结构的全部或一部分不像成形层那样厚，以便具有顶部 表面不延伸到与成形层相同的高度（在拖尾方向上）。 使屏蔽层延伸到比成形层更低的水平，通过减小来自写入极的磁通泄漏来提高磁性能，并且还提供制造优点，例如在写入磁极的制造期间。 这些制造优点包括在写入极的离子铣削期间使屏蔽覆盖有例如氧化铝的保护层的优点。