VERTICALLY CURVED WAVEGUIDE
    73.
    发明申请
    VERTICALLY CURVED WAVEGUIDE 有权
    垂直弯曲波形

    公开(公告)号:US20140321802A1

    公开(公告)日:2014-10-30

    申请号:US13872396

    申请日:2013-04-29

    CPC classification number: G02B6/122 G02B6/13 G02B6/136 G02B6/4214

    Abstract: An optical waveguide structure may include an optical waveguide structure located within a semiconductor structure and an optical coupler. The optical coupler may include a metallic structure located within an electrical interconnection region of the semiconductor structure, whereby the metallic structure extends downward in a substantially curved shape from a top surface of the electrical interconnection region and couples to the optical waveguide structure. The optical coupler may further include an optical signal guiding region bounded within the metallic structure, whereby the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure.

    Abstract translation: 光波导结构可以包括位于半导体结构内的光波导结构和光耦合器。 光耦合器可以包括位于半导体结构的电互连区域内的金属结构,由此金属结构从电互连区域的顶表面以基本弯曲的形状向下延伸并且耦合到光波导结构。 光耦合器还可以包括在金属结构内限定的光信号引导区域,由此光耦合器从顶表面接收光信号并将光信号耦合到光波导结构,使得光信号传播在 顶表面并且在光波导结构处基本上水平。

    Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure
    74.
    发明授权
    Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure 有权
    配置为减少谐波的绝缘体上硅(SOI)结构和形成结构的方法

    公开(公告)号:US08564067B2

    公开(公告)日:2013-10-22

    申请号:US13772402

    申请日:2013-02-21

    Abstract: Disclosed is semiconductor structure with an insulator layer on a semiconductor substrate and a device layer is on the insulator layer. The substrate is doped with a relatively low dose of a dopant having a given conductivity type such that it has a relatively high resistivity. Additionally, a portion of the semiconductor substrate immediately adjacent to the insulator layer can be doped with a slightly higher dose of the same dopant, a different dopant having the same conductivity type or a combination thereof. Optionally, micro-cavities are created within this same portion so as to balance out any increase in conductivity due to increased doping with a corresponding increase in resistivity. Increasing the dopant concentration at the semiconductor substrate-insulator layer interface raises the threshold voltage (Vt) of any resulting parasitic capacitors and, thereby reduces harmonic behavior. Also disclosed herein are embodiments of a method for forming such a semiconductor structure.

    Abstract translation: 公开了在半导体衬底上具有绝缘体层并且器件层位于绝缘体层上的半导体结构。 衬底掺杂有相对低剂量的具有给定导电类型的掺杂剂,使得其具有相对高的电阻率。 此外,与绝缘体层紧密相邻的半导体衬底的一部分可掺杂略高的相同掺杂剂剂量,具有相同导电类型的不同掺杂剂或其组合。 可选地,在该相同部分内形成微腔,以便平衡由于掺杂增加导致的电导率的增加,同时具有相应的电阻率增加。 增加半导体衬底 - 绝缘体层界面处的掺杂剂浓度会提高任何结果的寄生电容器的阈值电压(Vt),从而降低谐波行为。 本文还公开了用于形成这种半导体结构的方法的实施例。

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