Method and apparatus for simultaneously measuring displacement and angular variations
    72.
    发明授权
    Method and apparatus for simultaneously measuring displacement and angular variations 失效
    同时测量位移和角度变化的方法和装置

    公开(公告)号:US07268886B2

    公开(公告)日:2007-09-11

    申请号:US10874352

    申请日:2004-06-24

    IPC分类号: G01B9/02

    摘要: Disclosed herein is a method and apparatus for simultaneously measuring a displacement and angular variations. The method and apparatus of the present invention allows light radiated from a single light source to be placed along a light axis so as to simultaneously measure a distance (displacement) and angular variations that are different physical quantities, so that the displacement and angular variations of the measuring device of a precision measuring apparatus or machining device of a machine tool moved by a stage can be simultaneously measured without an Abbe error.

    摘要翻译: 这里公开了用于同时测量位移和角度变化的方法和装置。 本发明的方法和装置允许从单个光源辐射的光沿着光轴放置,以便同时测量不同物理量的距离(位移)和角度变化,使得位移和角度变化 可以在没有阿贝误差的情况下同时测量由载物台移动的机床的精密测量装置或加工装置的测量装置。