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    Microelectromechanical system pressure sensor and method for making and using
    71.
    发明授权
    Microelectromechanical system pressure sensor and method for making and using 失效
    微机电系统压力传感器及其制作与使用方法

    公开(公告)号：US07560788B2

    公开(公告)日：2009-07-14

    申请号：US10945399

    申请日：2004-09-20

    Applicant: Jeffrey Fortin ,  Guanghua (George) Wu ,  Kanakasabapathi Subramanian

    Inventor： Jeffrey Fortin ,  Guanghua (George) Wu ,  Kanakasabapathi Subramanian

    IPC: H01L29/78

    CPC classification number: G01L9/0073 ,  G01L1/148

    Abstract: According to some embodiments, a conducting layer is formed on a first wafer. An insulating layer is formed on a second wafer. The insulating layer includes a cavity and a conducting area may be formed in the second wafer proximate to the cavity. The side of the conducting layer opposite the first wafer is bonded to the side of the insulating layer opposite the second wafer. At least some of the first wafer is then removed, without removing at least some of the conducting layer, to form a conducting diaphragm that is substantially parallel to the second wafer. In this way, an amount of capacitance between the diaphragm and the conducting area may be measured to determine an amount of pressure being applied to the diaphragm.

    Abstract translation: 根据一些实施例，在第一晶片上形成导电层。 在第二晶片上形成绝缘层。 绝缘层包括空腔，并且导电区域可以形成在靠近空腔的第二晶片中。 与第一晶片相对的导电层的一侧被结合到与第二晶片相对的绝缘层的一侧。 然后去除至少一些第一晶片，而不去除至少一些导电层，以形成基本上平行于第二晶片的导电隔膜。 以这种方式，可以测量隔膜和导电区域之间的电容量，以确定施加到隔膜的压力的量。

    METHOD AND DEVICE FOR PREVENTING DAMAGE TO A SEMICONDUCTOR SWITCH CIRCUIT DURING A FAILURE
    72.
    发明申请
    METHOD AND DEVICE FOR PREVENTING DAMAGE TO A SEMICONDUCTOR SWITCH CIRCUIT DURING A FAILURE 审中-公开
    用于在故障期间防止对半导体开关电路的损坏的方法和装置

    公开(公告)号：US20090161277A1

    公开(公告)日：2009-06-25

    申请号：US11962830

    申请日：2007-12-21

    Applicant: Robert Roesner ,  Kanakasabapathi Subramanian

    Inventor： Robert Roesner ,  Kanakasabapathi Subramanian

    IPC: H02H3/00

    CPC classification number: H02H7/1227 ,  H01H1/0036 ,  H01H9/548 ,  H01H2071/008 ,  H01L2224/48139 ,  H01L2224/4846 ,  H01L2924/13055 ,  H01L2924/00

    Abstract: A device includes at least one semiconductor switching circuit connected to a power source and a load and at least one breaker switch integrated with the at least one semiconductor switching circuit. The breaker circuit may be connected in series with the at least one semiconductor switching circuit and the at least one breaker switch is configured to create an open circuit in less than about twenty microseconds of receipt of a predetermined threshold of semiconductor switch current to thereby prevent damage to the at least one semiconductor switching circuit or housing. A method of preventing damage to a semiconductor switching circuit or device is also presented.

    Abstract translation: 一种器件包括连接到电源和负载的至少一个半导体开关电路和与所述至少一个半导体开关电路集成的至少一个断路器开关。 断路器电路可以与所述至少一个半导体开关电路串联连接，并且所述至少一个断路器开关被配置为在接收半导体开关电流的预定阈值的小于约二十微秒内产生开路，从而防止损坏 至少一个半导体开关电路或外壳。 还提出了防止对半导体开关电路或器件的损坏的方法。

    PROGRAMMABLE LOGIC CONTROLLER HAVING MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCHING
    74.
    发明申请
    PROGRAMMABLE LOGIC CONTROLLER HAVING MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCHING 有权
    具有微机电系统开关的可编程逻辑控制器

    公开(公告)号：US20090125124A1

    公开(公告)日：2009-05-14

    申请号：US11939729

    申请日：2007-11-14

    Applicant: William James Premerlani ,  Kanakasabapathi Subramanian ,  Brent Charles Kumfer ,  Cecil Rivers, JR.

    Inventor： William James Premerlani ,  Kanakasabapathi Subramanian ,  Brent Charles Kumfer ,  Cecil Rivers, JR.

    IPC: G05B11/01

    CPC classification number: G05B19/054 ,  H01H9/542 ,  H01H59/0009

    Abstract: A programmable logic controller is disclosed. The programmable logic controller includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch disposed in the current path. The programmable logic controller further includes a hybrid arcless limiting technology (HALT) circuit connected in parallel with the at least one MEMS switch facilitating the opening of the at least one MEMS switch. The programmable logic controller also may include a MEMS switch and a voltage sensor for measuring the voltage across the MEMS switch. The MEMS switches are arranged to transmit or receive logic signals.

    Abstract translation: 公开了一种可编程逻辑控制器。 可编程逻辑控制器包括与电流路径整体布置的控制电路和设置在电流路径中的至少一个微机电系统（MEMS）开关。 可编程逻辑控制器还包括与至少一个MEMS开关并联连接的混合无弧限制技术（HALT）电路，促进至少一个MEMS开关的打开。 可编程逻辑控制器还可以包括用于测量MEMS开关两端的电压的MEMS开关和电压传感器。 MEMS开关被布置为发送或接收逻辑信号。

    MICROELECTROMECHANICAL SYSTEM PRESSURE SENSOR AND METHOD FOR MAKING AND USING
    77.
    发明申请
    MICROELECTROMECHANICAL SYSTEM PRESSURE SENSOR AND METHOD FOR MAKING AND USING 审中-公开

    公开(公告)号：US20070138584A1

    公开(公告)日：2007-06-21

    申请号：US11677624

    申请日：2007-02-22

    Applicant: Jeffrey Fortin ,  George Wu ,  Kanakasabapathi Subramanian

    Inventor： Jeffrey Fortin ,  George Wu ,  Kanakasabapathi Subramanian

    IPC: H01L29/84 ,  H01L21/00

    CPC classification number: G01L9/0073 ,  G01L1/148

    Abstract: According to some embodiments, a conducting layer is formed on a first wafer. An insulating layer is formed on a second wafer. The insulating layer includes a cavity and a conducting area may be formed in the second wafer proximate to the cavity. The side of the conducting layer opposite the first wafer is bonded to the side of the insulating layer opposite the second wafer. At least some of the first wafer is then removed, without removing at least some of the conducting layer, to form a conducting diaphragm that is substantially parallel to the second wafer. In this way, an amount of capacitance between the diaphragm and the conducting area may be measured to determine an amount of pressure being applied to the diaphragm.

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