摘要:
Offset in the ejection direction of target material droplets is corrected in order to stabilize EUV output in an EUV light source device. An extreme ultraviolet light source device includes a droplet generation device 110 that outputs target material droplets 101 towards a predetermined plasma emission point 103; a charging device 130 that charges the target material droplets 101; a trajectory correction device 140 that generates a force field in the trajectory to correct the travel direction of the charged target material droplets 101a so that the charged target material droplets 101a travel towards the plasma emission point 103; and a laser light source 150 that irradiates, at the plasma emission point 103, a laser beam onto the charged target material to generate plasma thereby.
摘要:
A television includes a transmitting and receiving unit that transmits and receives video data to/from an external apparatus connected to the television, a connection terminal, which is connected to the transmitting and receiving unit, and located on a side of the television, and a control unit configured to inhibit the transmitting and receiving unit from outputting video data from the connection terminal unless an instruction removing the inhibit is received.
摘要:
An in-vehicle terminal (101) is provided, which has a function ensuring that computer resource secured by a virtual machine (1a1) or a virtual machine (1b1) is controlled within a limit value of the computer resource that is allocated to the corresponding virtual machine, or a function which is capable of executing multiple virtual machines appropriately.When the virtual machine (1a1) or the virtual machine (1b1) requests securing the computer resource, the in-vehicle terminal (101) requests the OS (143) to secure computer resource in response to the request, if the requested resource is lower than the limit value of the computer resource that is allocated to the corresponding virtual machine. Furthermore, the in-vehicle terminal (101) checks at predetermined intervals the continuously selected count of the virtual machine previously selected, and if the continuously selected count is equal to the limit value, or the virtual machine is in standby state, a different virtual machine is selected and the OS (143) is instructed to execute the selected virtual machine.
摘要:
A stator for a two rotor single stator type electric motor is described. The electric motor has inner and outer rotors that are rotated independently within and around a stator upon application of current to the stator. The stator comprises a stator core including a plurality of stator teeth that are circumferentially arranged around a common axis. Each stator tooth includes a plurality of flat magnetic steel plates that are aligned along the common axis while intimately and closely contacting to one another. The stator further comprises at least one connecting ring plate that is coaxially installed in the stator core in such a manner that the ring plate is intimately put between adjacent two of the flat magnetic steel plates of each stator tooth. The ring plate is of an endless annular member.
摘要:
An EUV (extreme ultra violet) light source device in which a degree of vacuum or cleanness in a plasma generation chamber is improved while the construction is simplified. The device includes: a first chamber; a second chamber connected to the first chamber through an opening portion; a target supplier that supplies a target material into the first chamber; a droplet generating unit that generates droplets of the target material of molten metal repetitively dropping based on the target material supplied by the target supplier; a blocking unit that prevents the droplets of the target material generated by the droplet generating unit from passing through the opening portion; control unit that controls the blocking unit to operate at predetermined timing; a laser light source; and an optical system that leads a laser beam to the droplets of the target material introduced into the second chamber.
摘要:
An LPP EUV light source device for forming a uniform droplet target regardless of a frequency of a drive signal applied to a vibrator. The LPP EUV light source device includes: a chamber in which the extreme ultra violet light is generated; an injection nozzle that injects a target material into the chamber; a vibrator that has two terminals and vibrates to provide vibration to the injection nozzle when a drive signal is applied between the two terminals via a cable; a voltage generator that generates the drive signal; a controller that monitors a voltage between the two terminals of the vibrator and feedback controls the voltage generator such that an amplitude of the monitored voltage falls within a predetermined range; and a laser source that generates a laser beam to be irradiated to the target material injected from the injection nozzle.
摘要:
A rotor body according to the present invention comprises an annular laminated core of electromagnetic steel sheets defining therein a plurality of apertures in which permanent magnets are to be fixed, respectively, and a cylindrical core support to support the core, wherein the laminated core and the core support are joined to each other by brazing.
摘要:
In a coaxial multiplex position detecting apparatus for a rotating machine, a stator includes stator pieces, each stator piece individually being split in a circumferential direction of the stator, an exciting current winding, and a detection winding, the exciting current winding and the detection winding being wound on the respective stator pieces, and a plurality of rotors are disposed on outside and inside positions of the stator in a radial direction of the stator, the respective rotors having convex and recess portions in accordance with the number of poles that the respective rotors have and having different numbers of poles according to the inside and outside positions of the rotors from each other, revolution positions of the respective rotors being determined according to an output signal of the detection winding of the stator.
摘要:
Optical information recording and reproducing medium 10 has two recording layers of first and second recording layers 12 and 14, from a laser beam incident surface side. In each control area 21, recording layer management information containing at least information indicating recording states of a plurality of areas into which the inside of data recording area 22 of each recording layer is divided is recorded. When recording or reproducing is performed on the second recording layer 14, the recording layer management information is checked, and a laser beam output is changed based on a recording state of an area corresponding to the first recording layer 12.
摘要:
In an information recording medium recording method, recording is interrupted, in recording on an information recording medium, when a predetermined interruption condition is met. A signal recorded in a recorded area is played back and a recording signal playback waveform signal is obtained. Error information indicating an error between a reference waveform signal derived by partial response equalization of a data string and the recording signal playback waveform signal is obtained. A recording condition is corrected on the basis of the error information. A recording/playback apparatus and information recording medium are also disclosed.