摘要:
There are provided a photosensitive composition used in one-shot exposure of exposing it via a photomask to light from a UV lamp or in direct writing with light from a UV lamp or laser light to form a patterned latent image to be developed with an alkaline aqueous solution, wherein a difference between maximum absorbance and minimum absorbance, in a wavelength range of 355 to 405 nm, of a dry coating thereof before light exposure is within 0.3 per 25 μm film thickness of the dry coating, and a dry film obtained by applying the photosensitive composition onto a carrier film and then drying it.
摘要:
In the method for forming a silicon-based thin film by the plasma CVD method using high-frequency excitation, a polycrystalline silicon-based thin film having high degree of crystallization is formed relatively at a low temperature, economically, and productively.The polycrystalline silicon-based thin film is formed in such a state that the pressure of gas during formation of the film is selected and determined from the range of 0.0095 Pa to 64 Pa; the ratio (Md/Ms) of a supply flow rate Md of a diluting gas to a supply flow rate Ms of a film-forming material gas introduced into a deposition chamber is selected and determined from the range of 0 to 1200; the high-frequency power density is selected and determined from the range of 0.0024 W/cm3 to 11 W/cm3; the plasma potentials during formation of the film is maintained to 25 V or lower, and the electron density in the plasma is maintained to 1×1010 electrons/cm3 or higher; and the combination of those pressures and the like is such a combination that attains the ratio (Ic/Ia=degree of crystallization) of Ic derived from the crystallized silicon component to Ia derived from the amorphous silicon component in the evaluation of the crystallizability of silicon in the film by the laser Raman scattering spectroscopy is 8 or higher.
摘要翻译:在通过使用高频激发的等离子体CVD法形成硅基薄膜的方法中,经济地且高效地相对地在低温下形成具有高结晶度的多晶硅基薄膜。 形成多晶硅系薄膜的状态是,从0.0095Pa〜64Pa的范围选择并确定膜形成时的气体压力; 稀释气体的供给流量Md与导入淀积室的成膜材料气体的供给流量Ms的比(Md / Ms)从0〜1200的范围选择并确定; 从0.0024W / cm 3至11W / cm 3的范围选择和确定高频功率密度; 膜形成期间的等离子体电位维持在25V以下,等离子体中的电子密度维持在1×10 10电子/ cm 3以上。 并且这些压力等的组合是这样的组合,其在评估硅的结晶性中达到了从结晶硅组分衍生的Ia与来自非晶硅组分的Ia的比(Ic / Ia =结晶度) 在电影中由激光拉曼散射光谱法测定8或更高。
摘要:
A contact detection apparatus that allows faster detection and a pinch prevention apparatus equipped with such a detection apparatus are provided.The contact detection apparatus includes a first electrode (430) made of a flexible conductive material and extending throughout a contact detection range, a second electrode (440) apart from the first electrode and extending on the back side of the first electrode, and detection means for detecting contact of an object with the first electrode based on the capacitance of the first electrode. The first electrode is made of a conductive resin containing an embedded conductor.
摘要:
A NOx sensor includes a sensor element equipped with first and second pumping cells to define first and second measurement chambers. The first pumping cell exerts an oxygen pumping action against the first measurement chamber to adjust the oxygen concentration in the gas under measurement within the first measurement chamber to a given level. The second pumping cell exerts an oxygen pumping action against the second measurement chamber to produce a pumping cell current according to the NOx concentration in the gas under measurement. When the moisture content of the gas under measurement changes from 2 vol % to 8 vol %, the NOx sensor allows a variation of NOx concentration detection value based on the pumping cell current in such a manner that the NOx concentration detection value reaches a transient peak value of 20 ppm or smaller and converges to ±5 ppm of a reference value within 5 seconds.
摘要:
An object of the present invention is to provide a silver paste composition suitable for use in laser direct imaging devices employing a light source emitting a laser having a maximum wavelength of 350 to 420 nm, useful in forming a high-definition conductive pattern efficiently, and superior in storage stability, a conductive pattern formed by using the composition, a plasma display having the pattern, and a method of forming the conductive pattern by using the composition. An alkali development-type silver paste composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a glass frit, (C) a silver powder, (D) a compound having at least one radically polymerizable unsaturated group in its molecule, and (E-1) an oxime-based photopolymerization initiator represented by the following general formula (I).
摘要:
A sensing circuit for a vibration type of angular rate sensor comprises a vibrator, driving unit, follow-up signal forming unit, normal voltage-range setting unit, and determining unit. The driving unit drives the vibrator to vibrate at a predetermined amplitude by using, as a feedback signal, an error voltage signal in which an amplitude of vibration of the vibrator is reflected. The follow-up signal forming unit forms, by using the error voltage signal, a follow-up signal following up the error voltage signal at changes which are gentler than changes in the error signal. The normal voltage-range setting unit sets a range of a normal voltage for the error voltage signal by using the follow-up signal. The determining unit determines whether or not the sensor circuit is in a malfunctioning condition, by using an estimation as to whether or not the error voltage signal is within the range of the normal voltage.
摘要:
An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.
摘要:
A challenge of the present invention is to develop a method for repeatedly forming a reverse transferred pattern in a simple and efficient manner onto the surfaces of Zr based, Ti based, Cu based, Ni based and Fe based metallic glass that have supercooled liquid temperatures of not lower than 400° C. and are also required to be molded at not lower than 400° C. (a) An image pattern is converted into bitmap data being mirror reversed with respect to a real image, (b) high energy density light 15 is repeatedly flashed, and the surface of a mold 20 is scanned while one of dot holes 24 is formed by one-time irradiation, to form an image pattern as dots assembled pattern 21 onto the surface of the mold 20 in accordance with the bitmap data, and (c) the dots assembled pattern 21 is reverse-transfer molded onto a metallic glass 1 within a supercooled liquid temperature range Tg-Tx by means of the mold 20 which is for dots assembled pattern formation.
摘要:
To provide an image display device including a lower electrode, an upper electrode, and an electron acceleration layer composed of an insulator or a semiconductor provided therebetween, and further including a thin film electron source array that emits electrons from the upper electrode, and a phosphor surface, wherein degradation of an electron emission characteristic caused by an increase of a work function due to an adhesive material to the above-described upper electrode is suppressed.An amount of S content adhering to the upper electrode is set equal to or less than 20 mol % of a total amount of elements used as the upper electrode in terms of elements by using an element belonging to Group VIII or Group Ib or a laminated film or alloy film thereof as a component of the upper electrode of the thin film electron source.
摘要:
An object of the present invention is to provide a silver paste composition suitable for use in laser direct imaging devices employing a light source emitting a laser having a maximum wavelength of 350 to 420 nm, useful in forming a high-definition conductive pattern efficiently, and superior in storage stability, a conductive pattern formed by using the composition, a plasma display having the pattern, and a method of forming the conductive pattern by using the composition. An alkali development-type silver paste composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a glass frit, (C) a silver powder, (D) a compound having at least one radically polymerizable unsaturated group in its molecule, and (E-1) an oxime-based photopolymerization initiator represented by the following general formula (I).