摘要:
A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要:
The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1). In the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
摘要翻译:本发明涉及例如由以下通式(1)表示的含氟环状化合物。 在通式(1)中,R 1a是C 1 -C 25环烷基,环烯基或环炔基; R 2和R 3各自独立地为氢原子,卤素原子或C 1 -C 25直链,支链或环状烷基; R 1a,R 2和R 3可以含有氟原子,氧原子,硫原子,氮原子或含有碳 - 碳双键的原子团。
摘要:
A protective casing structure of an electronic apparatus capable of keeping the apparatus compact and light is provided. A display-side block includes a display module and a display casing. The display casing is provided with frame edges at a periphery thereof, with projections formed on the frame edges. Grooves engaging with the projections are formed in a system casing. When the display-side block is closed, the projections engage with the grooves to increase rigidity against pressing from the outside in the closed state. The casing structure thereby increases the protective capability of the display module while keeping the apparatus compact and light.
摘要:
There is provided a novel polyester compound having in its main polymer chain an aliphatic cyclic structure with carboxylic acids or carboxylic acid ester groups as represented by the chemical formula (1), a resist material containing the polyester compound and a patterning method using the resist material.
摘要:
The invention relates to a fluorine-containing allyl ether compound represented by the formula 1, wherein R represents an organic group containing at least one fluorine atom and an alicyclic structure. The invention further relates to a fluorine-containing copolymer containing a first unit derived from the fluorine-containing allyl ether represented by the formula 1; and a second unit derived from a vinyl monomer.
摘要:
A resist protective coating material is provided comprising an α-trifluoromethylacrylic acid/norbornene copolymer having cyclic perfluoroalkyl groups as pendant. In a pattern-forming process, the material forms on a resist film a protective coating which is water-insoluble, dissolvable in alkaline developer and immiscible with the resist film, allowing for effective implementation of immersion lithography.
摘要:
The invention relates to a fluorine-containing allyl ether compound represented by the formula 1, wherein R represents an organic group containing at least one fluorine atom and an alicyclic structure. The invention further relates to a fluorine-containing copolymer containing a first unit derived from the fluorine-containing allyl ether represented by the formula 1; and a second unit derived from a vinyl monomer.
摘要:
The present invention relates to a polymerizable monomer represented by the general formula (1), wherein R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group; R2 is a straight-chain or branched alkyl group, a cyclic alkyl group, an aromatic group, or a substituent having at least two of these groups, the R2 being optionally partially fluorinated; R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, the R3 optionally containing a bond of an oxygen atom or carbonyl group; and n is an integer of 1–2.
摘要翻译:本发明涉及由通式(1)表示的可聚合单体,其中R 1是氢原子,卤素原子,烃基或含氟烷基; R 2是直链或支链烷基,环状烷基,芳族基团或具有这些基团中的至少两个的取代基,R 2是 任选部分氟化; R 3是氢原子,任选支链的烃基,含氟烷基或具有芳族或脂环结构的环状基团,R 3, 任选地含有氧原子或羰基的键; n为1-2的整数。
摘要:
The present invention relates to a fluorine-containing copolymer. This fluorine-containing copolymer includes (a) a first unit derived from α-trifluoromethyl acrylic ester represented by the following general formula (1); and (b) a second unit derived from a vinyl monomer, where R1 is an organic group containing at least one fluorine atom.