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公开(公告)号：US07402626B2
公开(公告)日：2008-07-22
申请号：US10980769
申请日：2004-11-04
IPC分类号： C08K3/00
CPC分类号： C09J133/14
摘要： The present invention relates to a top coat composition, which is characterized in that it is applied to a photoresist top surface by using a polymer containing at least one structure represented by the formula [1], [2] or [3]. It is possible to produce a top coat composition solution by dissolving this top coat composition in an organic solvent. These top coat composition and top coat composition solution can be used in immersion lithography.
摘要翻译： 本发明涉及一种面漆组合物，其特征在于通过使用含有至少一种由式[1]，[2]或[3]表示的结构的聚合物将其施加到光致抗蚀剂顶表面。 可以通过将该面漆组合物溶解在有机溶剂中来制造面漆组合物溶液。 这些面漆组合物和面漆组合物溶液可用于浸渍光刻。
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2.发明授权Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions 有权含氟化合物及其聚合物可用于抗反射膜材料和抗蚀剂组合物公开(公告)号：US07125943B2
公开(公告)日：2006-10-24
申请号：US10634997
申请日：2003-08-06
IPC分类号： C08F112/08
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1–25 or (b) an aromatic hydrocarbon group, each of the hydrogen group and the aromatic hydrocarbon group independently optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1–5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is present in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译： 由式1表示的含氟化合物，其中R 1是甲基或三氟甲基，R 2和R 3， 独立地为氢原子或含有（a）具有直链，支链或环状的碳原子数为1-25的烃基或（b）芳族烃基的基团，每个氢基和 芳族烃基独立地任选地含有氟原子，氧原子和羰基键中的至少一个，l为0〜2的整数，m和n分别为1-5的整数，以满足表达式 的m + n <= 6，当R 1，R 2和R 3中的至少一个存在多个时， R 1，R 2和R 3中的至少一个可以彼此相同或不同。
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3.发明申请Fluorine-Containing Compounds and their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions 有权含氟化合物及其聚合物可用于防反射膜材料和抗蚀剂组合物公开(公告)号：US20110196121A1
公开(公告)日：2011-08-11
申请号：US13094281
申请日：2011-04-26
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译： 由式1表示的含氟化合物，其中R 1为甲基或三氟甲基，R 2和R 3各自独立地为氢原子或含有（a）具有直链，支链或环的烃基的基团 形成并具有1-25的碳原子数或（b）芳族烃基，所述基团任选地含有氟原子，氧原子和羰基键中的至少一个，l是0-2的整数， m和n各自独立地为1-5的整数，以满足m + n＆nlE; 6的表达式，并且当R 1，R 2和R 3中的至少一个为多个时，R 1，R 2和 R3可以彼此相同或不同。
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4.发明申请Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern 有权含氟环状化合物，含氟聚合物化合物，使用其的抗蚀材料和形成图案的方法公开(公告)号：US20100204422A1
公开(公告)日：2010-08-12
申请号：US12765305
申请日：2010-04-22
IPC分类号： C08F214/18 , C07C49/573 , C07C33/44 , C07C69/54
CPC分类号： C07C33/44 , C07C31/44 , C07C49/337 , C07C49/573 , C07C69/653 , C07C2602/42 , C08F14/18 , C08F2/00
摘要： The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1). In the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
摘要翻译： 本发明涉及例如由以下通式（1）表示的含氟环状化合物。 在通式（1）中，R 1a是C 1 -C 25环烷基，环烯基或环炔基; R 2和R 3各自独立地为氢原子，卤素原子或C 1 -C 25直链，支链或环状烷基; R 1a，R 2和R 3可以含有氟原子，氧原子，硫原子，氮原子或含有碳 - 碳双键的原子团。
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5.发明申请Fluorinated Cyclic Compound, Polymerizable Fluoromonomer, Fluoropolymer, Resist Material Comprising the Same, and Method of Forming Pattern with the Same 有权氟化环化合物，可聚合的含氟单体，含氟聚合物，包含它们的抗蚀材料以及与其形成图案的方法公开(公告)号：US20080194764A1
公开(公告)日：2008-08-14
申请号：US11941433
申请日：2007-11-16
申请人： Haruhiko KOMORIYA , Shinichi SUMIDA , Katsunori KAWAMURA , Satoru KOBAYASHI , Satoru MIYAZAWA , Kazuhiko MAEDA
发明人： Haruhiko KOMORIYA , Shinichi SUMIDA , Katsunori KAWAMURA , Satoru KOBAYASHI , Satoru MIYAZAWA , Kazuhiko MAEDA
IPC分类号： C08F214/18 , C07D313/06 , C08F220/22
CPC分类号： G03F7/0397 , C07D307/93 , G03F7/0046 , G03F7/0392
摘要： The present invention relates to a novel fluorine-containing cyclic compound that is derived from a norbornadiene and hexafluoroacetone and has an oxacyclopentane structure. This compound may be represented by the following formula (1) or (2). Furthermore, the present invention relates to a fluorine-containing polymer compound prepared by a polymerization or copolymerization using this fluorine-containing cyclic compound or its derivative. By using such fluorine-containing polymer compound, it is possible to provide a superior resist material and a fine pattern forming process using the same.
摘要翻译： 本发明涉及一种衍生自降冰片二烯和六氟丙酮并具有氧环戊烷结构的新型含氟环状化合物。 该化合物可以由下式（1）或（2）表示。 此外，本发明涉及通过使用该含氟环状化合物或其衍生物的聚合或共聚制备的含氟聚合物。 通过使用这样的含氟聚合物化合物，可以提供优异的抗蚀剂材料和使用其的精细图案形成方法。
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6.发明申请Lactone compounds, lactone-containing monomers, their polymers, resist compositions using same, and processes for forming patterns using same 有权内酯化合物，含内酯单体，其聚合物，使用其的抗蚀剂组合物，以及使用其形成图案的方法公开(公告)号：US20060057489A1
公开(公告)日：2006-03-16
申请号：US11024442
申请日：2004-12-30
IPC分类号： G03C1/76
CPC分类号： G03F7/0397 , C07D311/00 , G03F7/0046 , Y10S430/111
摘要： The present invention relates to novel first to fourth lactone compounds. The first lactone compound is represented by the formula (1), in the formula, X represents CH2, CH2CH2, O, S or NR1, and R1 represents hydrogen atom, a straight-chain, branched or cyclic alkyl group of a carbon number of 1-10. Hydrogen(s) of the alkyl group may partially or entirely be replaced with fluorine atom(s). Furthermore, a part of the alkyl group may contain an atomic group containing oxygen atom, sulfur atom, nitrogen atom, carbon-carbon double bond, carbonyl group, hydroxy group or carboxyl group.
摘要翻译： 本发明涉及新的第一至第四内酯化合物。 第一内酯化合物由式（1）表示，
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公开(公告)号：US08592508B2
公开(公告)日：2013-11-26
申请号：US13139641
申请日：2009-12-11
申请人： Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
发明人： Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
IPC分类号： C09D133/16
CPC分类号： G03F7/11 , C08F220/24 , C08F220/28 , G03F7/0046 , G03F7/2041
摘要： Disclosed is a top coat composition for photoresist, which is characterized by containing a fluorinated polymer having a repeating unit represented by general formula (5). In the formula, R1 represents a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group; n represents 0 or 1; m represents an integer of 1 to (3+n); and R2 or R3 represents a hydrogen atom or a protecting group. The top coat composition has a proper degree of solubility in a developing solution.
摘要翻译： 公开了光致抗蚀剂的面漆组合物，其特征在于含有具有由通式（5）表示的重复单元的含氟聚合物。 在该式中，R 1表示氢原子，甲基，氟原子或三氟甲基; n表示0或1; m表示1〜（3 + n）的整数。 R 2或R 3表示氢原子或保护基。 面漆组合物在显影液中具有适度的溶解度。
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8.发明授权Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern 有权含氟环状化合物，含氟聚合物化合物，使用其的抗蚀剂材料和形成图案的方法公开(公告)号：US08115036B2
公开(公告)日：2012-02-14
申请号：US12765305
申请日：2010-04-22
IPC分类号： G03F7/004 , C08F232/04 , C07C33/40 , C07C33/42
CPC分类号： C07C33/44 , C07C31/44 , C07C49/337 , C07C49/573 , C07C69/653 , C07C2602/42 , C08F14/18 , C08F2/00
摘要： The present invention relates to a fluorine-containing cyclic compound of formula (5): wherein R2-R4 and R9-R15 are independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, or nitrogen atom. R10 and R11, R12 and R13, or R14 and R15 may be bonded together to form a ring. In such a case, it is a C1-C25 alkylene group that may contain a hetero atom such as oxygen, sulfur and nitrogen, “a” is 0 or 1, “b” is an integer of 0-2 and “c” is an integer of 0-2.
摘要翻译： 本发明涉及式（5）的含氟环状化合物：其中R2-R4和R9-R15独立地为氢原子，卤素原子或C1-C25直链，支链或环状烷基， 并且可以含有氟原子，氧原子，硫原子或氮原子。 R 10和R 11，R 12和R 13或R 14和R 15可以键合在一起形成环。 在这种情况下，可以含有氧，硫，氮等杂原子的C1-C25亚烷基，“a”为0或1，“b”为0-2的整数，“c”为 0-2的整数。
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公开(公告)号：US20110245395A1
公开(公告)日：2011-10-06
申请号：US13139641
申请日：2009-12-11
申请人： Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
发明人： Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
IPC分类号： C09D133/16 , C08K5/05
CPC分类号： G03F7/11 , C08F220/24 , C08F220/28 , G03F7/0046 , G03F7/2041
摘要： Disclosed is a top coat composition for photoresist, which is characterized by containing a fluorinated polymer having a repeating unit represented by general formula (5). In the formula, R1 represents a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group; n represents 0 or 1; m represents an integer of 1 to (3+n); and R2 or R3 represents a hydrogen atom or a protecting group. The top coat composition has a proper degree of solubility in a developing solution.
摘要翻译： 公开了光致抗蚀剂的面漆组合物，其特征在于含有具有由通式（5）表示的重复单元的含氟聚合物。 在该式中，R 1表示氢原子，甲基，氟原子或三氟甲基; n表示0或1; m表示1〜（3 + n）的整数。 R 2或R 3表示氢原子或保护基。 面漆组合物在显影液中具有适度的溶解度。
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10.发明授权Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions 有权含氟化合物及其聚合物可用于抗反射膜材料和抗蚀剂组合物公开(公告)号：US07947422B2
公开(公告)日：2011-05-24
申请号：US11492057
申请日：2006-07-25
IPC分类号： G03F7/004
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： The invention relates to a fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译： 本发明涉及式1所示的含氟化合物，其中R 1为甲基或三氟甲基，R 2和R 3各自独立地为氢原子或含有（a）具有直链的烃基的基团 ，支链或环状，并且具有1-25的碳原子数或（b）芳族烃基，该基团任选地含有氟原子，氧原子和羰基键中的至少一个，l是从 0至2，m和n各自独立地为1-5的整数，以满足m + n＆nlE; 6的表达式，并且当R 1，R 2和R 3中的至少一个为多个时，至少一个 R1，R2和R3可以相同或不同。
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