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71.发明申请MICRO-ELECTRO-MECHANICAL DEVICE WITH COMPENSATION OF ERRORS DUE TO DISTURBANCE FORCES, SUCH AS QUADRATURE COMPONENTS 有权微机电装置补偿由于干扰力等因素造成的错误，如作为平衡部件公开(公告)号：US20150377624A1
公开(公告)日：2015-12-31
申请号：US14750840
申请日：2015-06-25
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712 , B81B3/0018 , B81B3/0086 , B81B2201/025 , B81B2203/0163 , G01C19/5733 , G01C19/5747
摘要： MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
摘要翻译： MEMS器件具有通过第一弹性元件弹性地携带悬挂质量的支撑区域。 调谐动态吸收器弹性耦合到悬挂质量并且被配置为在动态吸收体的固有振荡频率下抑制作用在悬浮质量上的正交力。 调谐动态吸收器由通过第二弹性元件联接到悬挂质量的阻尼物质形成。 在一个实施例中，悬挂质量和阻尼质量形成在相同的结构层中，例如半导体材料，并且阻尼块被悬挂质量包围。
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72.发明申请DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER WITH IMPROVED ROBUSTNESS TO DEFORMATION 审中-公开具有改进的稳定性的MEMS声学传感器的检测结构公开(公告)号：US20140353780A1
公开(公告)日：2014-12-04
申请号：US14288106
申请日：2014-05-27
CPC分类号： B81B3/0051 , B81B3/0021 , B81B2201/0257 , B81C1/00158 , H04R19/005
摘要： A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate of semiconductor material; a rigid electrode, at least in part of conductive material, coupled to the substrate; a membrane, at least in part of conductive material, facing the rigid electrode and coupled to the substrate, which undergoes deformation in the presence of incident acoustic pressure waves and is arranged between the substrate and the rigid electrode and has a first surface and a second surface, in fluid communication, respectively, with a first chamber and a second chamber, the first chamber being delimited at least in part by a first wall portion and by a second wall portion formed by the substrate, and the second chamber being delimited at least in part by the rigid electrode; and a stopper element, connected between the first and second wall portions for limiting the deformations of the membrane. At least one electrode-anchorage element couples the rigid electrode to the stopper element.
摘要翻译： 用于MEMS电容式声学换能器的微机械结构具有：半导体材料的衬底; 耦合到所述衬底的至少部分导电材料的刚性电极; 至少部分导电材料的膜面向刚性电极并且耦合到衬底，所述衬底在存在入射声压波的情况下经历变形，并且布置在衬底和刚性电极之间并且具有第一表面和第二表面 分别与第一室和第二室分别流体连通的表面，第一室至少部分地由第一壁部分和由衬底形成的第二壁部分限定，并且第二室至少界定 部分由刚性电极; 以及连接在第一和第二壁部分之间以限制膜的变形的止动元件。 至少一个电极固定元件将刚性电极连接到止动元件。
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